JP4046538B2 - 制御方法 - Google Patents

制御方法 Download PDF

Info

Publication number
JP4046538B2
JP4046538B2 JP2002111055A JP2002111055A JP4046538B2 JP 4046538 B2 JP4046538 B2 JP 4046538B2 JP 2002111055 A JP2002111055 A JP 2002111055A JP 2002111055 A JP2002111055 A JP 2002111055A JP 4046538 B2 JP4046538 B2 JP 4046538B2
Authority
JP
Japan
Prior art keywords
pressure
control
flow rate
gas flow
valve opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002111055A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003005802A5 (https=
JP2003005802A (ja
Inventor
河西　　繁
修司 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2002111055A priority Critical patent/JP4046538B2/ja
Publication of JP2003005802A publication Critical patent/JP2003005802A/ja
Publication of JP2003005802A5 publication Critical patent/JP2003005802A5/ja
Application granted granted Critical
Publication of JP4046538B2 publication Critical patent/JP4046538B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Feedback Control In General (AREA)
JP2002111055A 2001-04-17 2002-04-12 制御方法 Expired - Fee Related JP4046538B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002111055A JP4046538B2 (ja) 2001-04-17 2002-04-12 制御方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001118680 2001-04-17
JP2001-118680 2001-04-17
JP2002111055A JP4046538B2 (ja) 2001-04-17 2002-04-12 制御方法

Publications (3)

Publication Number Publication Date
JP2003005802A JP2003005802A (ja) 2003-01-08
JP2003005802A5 JP2003005802A5 (https=) 2005-06-30
JP4046538B2 true JP4046538B2 (ja) 2008-02-13

Family

ID=26613722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002111055A Expired - Fee Related JP4046538B2 (ja) 2001-04-17 2002-04-12 制御方法

Country Status (1)

Country Link
JP (1) JP4046538B2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007190594A (ja) * 2006-01-20 2007-08-02 Nippon Avionics Co Ltd 溶接機およびその制御方法
JP4553266B2 (ja) * 2007-04-13 2010-09-29 東京エレクトロン株式会社 熱処理装置、制御定数の自動調整方法及び記憶媒体
JP2011044446A (ja) * 2009-08-19 2011-03-03 Tokyo Electron Ltd 圧力制御機器、圧力制御方法および基板処理装置
JP5632626B2 (ja) * 2010-03-04 2014-11-26 東京エレクトロン株式会社 自動整合装置及びプラズマ処理装置
CN104914717B (zh) * 2015-04-13 2018-12-14 珠海格力电器股份有限公司 基于人工智能算法的自动寻优控制方法
JP6368686B2 (ja) 2015-06-10 2018-08-01 東京エレクトロン株式会社 熱処理装置、熱処理装置の調整方法、及び、プログラム
JP6345320B1 (ja) 2017-07-07 2018-06-20 パーカー熱処理工業株式会社 表面硬化処理装置及び表面硬化処理方法
JP7014123B2 (ja) * 2018-10-05 2022-02-01 株式会社島津製作所 推定装置およびバルブ制御装置
CN117137175B (zh) * 2022-05-24 2025-07-22 贵州中烟工业有限责任公司 一种加料机出口含水率的控制方法和控制装置
CN115469535B (zh) * 2022-10-31 2025-05-09 杭州泰极豫才软件有限公司 一种克服阀门非线性的控制方法

Also Published As

Publication number Publication date
JP2003005802A (ja) 2003-01-08

Similar Documents

Publication Publication Date Title
CN101836173B (zh) 真空容器的压力控制方法及压力控制装置
JP5174032B2 (ja) 質量流量コントローラのコントローラ利得スケジューリング
JP4864280B2 (ja) 質量流量コントローラのシステムおよび方法
JP4046538B2 (ja) 制御方法
US7073392B2 (en) Methods and apparatus for pressure compensation in a mass flow controller
TWI492013B (zh) 對質流控制器具有改善效能的多模式控制迴路
CN113324605B (zh) 气体质量流量控制器和气体质量流量控制方法
KR20020039316A (ko) 디지털 유량 조절기용 시스템 및 방법
JPH1145122A (ja) 動的ガス流コントローラ
CN112272809A (zh) 流量控制方法以及流量控制装置
US20240183702A1 (en) Mass flow control device and zero point calibration method for the same
TWI908105B (zh) 流量控制方法和質量流量控制器
JP2001117603A (ja) 制御演算装置及び制御演算方法
JPH07210253A (ja) 流量制御弁のアクチュエータを制御するシステム
US20180120864A1 (en) Nonlinear control of mass flow controller devices using sliding mode
US20220165594A1 (en) Vacuum valve, method of controlling vacuum valve, and estimation device
TW202427088A (zh) 用於質量流量控制之方法及設備
JP2022187915A (ja) 温度補正情報算出装置、半導体製造装置、プログラム、温度補正情報算出方法
CN120386396A (zh) 一种腔室的压力控制方法及半导体工艺设备
CN114370521B (zh) 一种电比例溢流阀滞环补偿控制方法及其系统
JP3893115B2 (ja) マスフローコントローラ
WO2025038383A1 (en) Method and apparatus for automatic self calibration of mass flow controller
JP2002297244A (ja) 反応室の圧力制御方法および装置
WO2002086631A1 (en) Control method and control apparatus
JP3724289B2 (ja) バルブポジショナ

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041019

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041019

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060825

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061003

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061201

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070227

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070424

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070626

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070824

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20071106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20071120

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101130

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101130

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131130

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees