JP4046538B2 - 制御方法 - Google Patents

制御方法 Download PDF

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Publication number
JP4046538B2
JP4046538B2 JP2002111055A JP2002111055A JP4046538B2 JP 4046538 B2 JP4046538 B2 JP 4046538B2 JP 2002111055 A JP2002111055 A JP 2002111055A JP 2002111055 A JP2002111055 A JP 2002111055A JP 4046538 B2 JP4046538 B2 JP 4046538B2
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JP
Japan
Prior art keywords
pressure
control
flow rate
gas flow
valve opening
Prior art date
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Expired - Fee Related
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JP2002111055A
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English (en)
Japanese (ja)
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JP2003005802A (ja
JP2003005802A5 (enExample
Inventor
河西　　繁
修司 近藤
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of JP2003005802A5 publication Critical patent/JP2003005802A5/ja
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Publication of JP4046538B2 publication Critical patent/JP4046538B2/ja
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JP2002111055A 2001-04-17 2002-04-12 制御方法 Expired - Fee Related JP4046538B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002111055A JP4046538B2 (ja) 2001-04-17 2002-04-12 制御方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-118680 2001-04-17
JP2001118680 2001-04-17
JP2002111055A JP4046538B2 (ja) 2001-04-17 2002-04-12 制御方法

Publications (3)

Publication Number Publication Date
JP2003005802A JP2003005802A (ja) 2003-01-08
JP2003005802A5 JP2003005802A5 (enExample) 2005-06-30
JP4046538B2 true JP4046538B2 (ja) 2008-02-13

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JP2002111055A Expired - Fee Related JP4046538B2 (ja) 2001-04-17 2002-04-12 制御方法

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JP (1) JP4046538B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007190594A (ja) * 2006-01-20 2007-08-02 Nippon Avionics Co Ltd 溶接機およびその制御方法
JP4553266B2 (ja) * 2007-04-13 2010-09-29 東京エレクトロン株式会社 熱処理装置、制御定数の自動調整方法及び記憶媒体
JP2011044446A (ja) * 2009-08-19 2011-03-03 Tokyo Electron Ltd 圧力制御機器、圧力制御方法および基板処理装置
JP5632626B2 (ja) * 2010-03-04 2014-11-26 東京エレクトロン株式会社 自動整合装置及びプラズマ処理装置
CN104914717B (zh) * 2015-04-13 2018-12-14 珠海格力电器股份有限公司 基于人工智能算法的自动寻优控制方法
JP6368686B2 (ja) 2015-06-10 2018-08-01 東京エレクトロン株式会社 熱処理装置、熱処理装置の調整方法、及び、プログラム
JP6345320B1 (ja) 2017-07-07 2018-06-20 パーカー熱処理工業株式会社 表面硬化処理装置及び表面硬化処理方法
JP7014123B2 (ja) * 2018-10-05 2022-02-01 株式会社島津製作所 推定装置およびバルブ制御装置
CN117137175B (zh) * 2022-05-24 2025-07-22 贵州中烟工业有限责任公司 一种加料机出口含水率的控制方法和控制装置
CN115469535B (zh) * 2022-10-31 2025-05-09 杭州泰极豫才软件有限公司 一种克服阀门非线性的控制方法
CN116623158A (zh) * 2023-05-04 2023-08-22 广东福雪莱电气有限公司 一种等离子体化学气相沉积炉快速控压系统及快速控压方法
CN119717939B (zh) * 2024-12-17 2025-11-07 北京京仪自动化装备技术股份有限公司 一种温度控制的方法、装置、电子设备及存储介质

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JP2003005802A (ja) 2003-01-08

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