JP4046458B2 - 処理ユニットおよび処理システム - Google Patents

処理ユニットおよび処理システム Download PDF

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Publication number
JP4046458B2
JP4046458B2 JP2000153321A JP2000153321A JP4046458B2 JP 4046458 B2 JP4046458 B2 JP 4046458B2 JP 2000153321 A JP2000153321 A JP 2000153321A JP 2000153321 A JP2000153321 A JP 2000153321A JP 4046458 B2 JP4046458 B2 JP 4046458B2
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Japan
Prior art keywords
substrate
processing
processing unit
housing
unit
Prior art date
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Expired - Fee Related
Application number
JP2000153321A
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English (en)
Japanese (ja)
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JP2001332483A5 (cg-RX-API-DMAC7.html
JP2001332483A (ja
Inventor
真一郎 荒木
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2000153321A priority Critical patent/JP4046458B2/ja
Priority to TW090110294A priority patent/TW490721B/zh
Priority to KR1020010028397A priority patent/KR100807178B1/ko
Publication of JP2001332483A publication Critical patent/JP2001332483A/ja
Publication of JP2001332483A5 publication Critical patent/JP2001332483A5/ja
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Publication of JP4046458B2 publication Critical patent/JP4046458B2/ja
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  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2000153321A 2000-05-24 2000-05-24 処理ユニットおよび処理システム Expired - Fee Related JP4046458B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000153321A JP4046458B2 (ja) 2000-05-24 2000-05-24 処理ユニットおよび処理システム
TW090110294A TW490721B (en) 2000-05-24 2001-04-30 Substrate processing unit, substrate processing system, and substrate processing apparatus
KR1020010028397A KR100807178B1 (ko) 2000-05-24 2001-05-23 기판처리유니트, 기판처리시스템 및 기판처리장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000153321A JP4046458B2 (ja) 2000-05-24 2000-05-24 処理ユニットおよび処理システム

Publications (3)

Publication Number Publication Date
JP2001332483A JP2001332483A (ja) 2001-11-30
JP2001332483A5 JP2001332483A5 (cg-RX-API-DMAC7.html) 2005-09-22
JP4046458B2 true JP4046458B2 (ja) 2008-02-13

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ID=18658597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000153321A Expired - Fee Related JP4046458B2 (ja) 2000-05-24 2000-05-24 処理ユニットおよび処理システム

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JP (1) JP4046458B2 (cg-RX-API-DMAC7.html)

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Publication number Publication date
JP2001332483A (ja) 2001-11-30

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