JP2001332483A5 - - Google Patents

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Publication number
JP2001332483A5
JP2001332483A5 JP2000153321A JP2000153321A JP2001332483A5 JP 2001332483 A5 JP2001332483 A5 JP 2001332483A5 JP 2000153321 A JP2000153321 A JP 2000153321A JP 2000153321 A JP2000153321 A JP 2000153321A JP 2001332483 A5 JP2001332483 A5 JP 2001332483A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000153321A
Other languages
Japanese (ja)
Other versions
JP2001332483A (ja
JP4046458B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000153321A priority Critical patent/JP4046458B2/ja
Priority claimed from JP2000153321A external-priority patent/JP4046458B2/ja
Priority to TW090110294A priority patent/TW490721B/zh
Priority to KR1020010028397A priority patent/KR100807178B1/ko
Publication of JP2001332483A publication Critical patent/JP2001332483A/ja
Publication of JP2001332483A5 publication Critical patent/JP2001332483A5/ja
Application granted granted Critical
Publication of JP4046458B2 publication Critical patent/JP4046458B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000153321A 2000-05-24 2000-05-24 処理ユニットおよび処理システム Expired - Fee Related JP4046458B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000153321A JP4046458B2 (ja) 2000-05-24 2000-05-24 処理ユニットおよび処理システム
TW090110294A TW490721B (en) 2000-05-24 2001-04-30 Substrate processing unit, substrate processing system, and substrate processing apparatus
KR1020010028397A KR100807178B1 (ko) 2000-05-24 2001-05-23 기판처리유니트, 기판처리시스템 및 기판처리장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000153321A JP4046458B2 (ja) 2000-05-24 2000-05-24 処理ユニットおよび処理システム

Publications (3)

Publication Number Publication Date
JP2001332483A JP2001332483A (ja) 2001-11-30
JP2001332483A5 true JP2001332483A5 (cg-RX-API-DMAC7.html) 2005-09-22
JP4046458B2 JP4046458B2 (ja) 2008-02-13

Family

ID=18658597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000153321A Expired - Fee Related JP4046458B2 (ja) 2000-05-24 2000-05-24 処理ユニットおよび処理システム

Country Status (1)

Country Link
JP (1) JP4046458B2 (cg-RX-API-DMAC7.html)

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