JP4029578B2 - ロボット - Google Patents

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Publication number
JP4029578B2
JP4029578B2 JP2001062413A JP2001062413A JP4029578B2 JP 4029578 B2 JP4029578 B2 JP 4029578B2 JP 2001062413 A JP2001062413 A JP 2001062413A JP 2001062413 A JP2001062413 A JP 2001062413A JP 4029578 B2 JP4029578 B2 JP 4029578B2
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JP
Japan
Prior art keywords
arm
robot
vertical
pin
pin hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001062413A
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English (en)
Japanese (ja)
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JP2002264067A5 (enExample
JP2002264067A (ja
Inventor
修一 藤内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2001062413A priority Critical patent/JP4029578B2/ja
Publication of JP2002264067A publication Critical patent/JP2002264067A/ja
Publication of JP2002264067A5 publication Critical patent/JP2002264067A5/ja
Application granted granted Critical
Publication of JP4029578B2 publication Critical patent/JP4029578B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2001062413A 2001-03-06 2001-03-06 ロボット Expired - Fee Related JP4029578B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001062413A JP4029578B2 (ja) 2001-03-06 2001-03-06 ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001062413A JP4029578B2 (ja) 2001-03-06 2001-03-06 ロボット

Publications (3)

Publication Number Publication Date
JP2002264067A JP2002264067A (ja) 2002-09-18
JP2002264067A5 JP2002264067A5 (enExample) 2005-11-04
JP4029578B2 true JP4029578B2 (ja) 2008-01-09

Family

ID=18921555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001062413A Expired - Fee Related JP4029578B2 (ja) 2001-03-06 2001-03-06 ロボット

Country Status (1)

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JP (1) JP4029578B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210063511A (ko) 2019-11-22 2021-06-02 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5178432B2 (ja) * 2008-09-26 2013-04-10 日本電産サンキョー株式会社 産業用ロボット
JP2011031372A (ja) * 2009-08-06 2011-02-17 Yaskawa Electric Corp 産業用ロボット
CN103770126B (zh) * 2012-10-17 2016-04-20 北京北方微电子基地设备工艺研究中心有限责任公司 一种调节装置及等离子体加工设备
WO2015020089A1 (ja) * 2013-08-09 2015-02-12 日本電産サンキョー株式会社 水平多関節ロボットおよび水平多関節ロボットの製造方法
JP6607661B2 (ja) 2013-08-09 2019-11-20 日本電産サンキョー株式会社 水平多関節ロボット
US10780586B2 (en) 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
JP2015100863A (ja) * 2013-11-22 2015-06-04 キヤノン株式会社 ロボットの教示方法
JP7565191B2 (ja) * 2020-11-09 2024-10-10 ニデックインスツルメンツ株式会社 産業用ロボット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210063511A (ko) 2019-11-22 2021-06-02 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Also Published As

Publication number Publication date
JP2002264067A (ja) 2002-09-18

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