JP2002264067A5 - - Google Patents
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- Publication number
- JP2002264067A5 JP2002264067A5 JP2001062413A JP2001062413A JP2002264067A5 JP 2002264067 A5 JP2002264067 A5 JP 2002264067A5 JP 2001062413 A JP2001062413 A JP 2001062413A JP 2001062413 A JP2001062413 A JP 2001062413A JP 2002264067 A5 JP2002264067 A5 JP 2002264067A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001062413A JP4029578B2 (ja) | 2001-03-06 | 2001-03-06 | ロボット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001062413A JP4029578B2 (ja) | 2001-03-06 | 2001-03-06 | ロボット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002264067A JP2002264067A (ja) | 2002-09-18 |
| JP2002264067A5 true JP2002264067A5 (enExample) | 2005-11-04 |
| JP4029578B2 JP4029578B2 (ja) | 2008-01-09 |
Family
ID=18921555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001062413A Expired - Fee Related JP4029578B2 (ja) | 2001-03-06 | 2001-03-06 | ロボット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4029578B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5178432B2 (ja) * | 2008-09-26 | 2013-04-10 | 日本電産サンキョー株式会社 | 産業用ロボット |
| JP2011031372A (ja) * | 2009-08-06 | 2011-02-17 | Yaskawa Electric Corp | 産業用ロボット |
| CN103770126B (zh) * | 2012-10-17 | 2016-04-20 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种调节装置及等离子体加工设备 |
| WO2015020089A1 (ja) * | 2013-08-09 | 2015-02-12 | 日本電産サンキョー株式会社 | 水平多関節ロボットおよび水平多関節ロボットの製造方法 |
| JP6607661B2 (ja) | 2013-08-09 | 2019-11-20 | 日本電産サンキョー株式会社 | 水平多関節ロボット |
| US10780586B2 (en) | 2013-08-09 | 2020-09-22 | Nidec Sankyo Corporation | Horizontal articulated robot with bevel gears |
| JP2015100863A (ja) * | 2013-11-22 | 2015-06-04 | キヤノン株式会社 | ロボットの教示方法 |
| KR102319645B1 (ko) | 2019-11-22 | 2021-11-01 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
| JP7565191B2 (ja) * | 2020-11-09 | 2024-10-10 | ニデックインスツルメンツ株式会社 | 産業用ロボット |
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2001
- 2001-03-06 JP JP2001062413A patent/JP4029578B2/ja not_active Expired - Fee Related