JP4000980B2 - 光スイッチング素子およびその製造方法 - Google Patents
光スイッチング素子およびその製造方法 Download PDFInfo
- Publication number
- JP4000980B2 JP4000980B2 JP2002298975A JP2002298975A JP4000980B2 JP 4000980 B2 JP4000980 B2 JP 4000980B2 JP 2002298975 A JP2002298975 A JP 2002298975A JP 2002298975 A JP2002298975 A JP 2002298975A JP 4000980 B2 JP4000980 B2 JP 4000980B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- optical switching
- interference
- light
- switching element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 77
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 31
- 238000000059 patterning Methods 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 146
- 239000010408 film Substances 0.000 description 38
- 238000002310 reflectometry Methods 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
- 229910052782 aluminium Inorganic materials 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 239000004332 silver Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 230000001427 coherent effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000005083 Zinc sulfide Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052984 zinc sulfide Inorganic materials 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910001257 Nb alloy Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- LUPQXSQTQUHAKA-UHFFFAOYSA-N [Nb].[Ag] Chemical compound [Nb].[Ag] LUPQXSQTQUHAKA-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium(II) oxide Chemical compound [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Images
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002298975A JP4000980B2 (ja) | 2002-10-11 | 2002-10-11 | 光スイッチング素子およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002298975A JP4000980B2 (ja) | 2002-10-11 | 2002-10-11 | 光スイッチング素子およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004133280A JP2004133280A (ja) | 2004-04-30 |
| JP2004133280A5 JP2004133280A5 (enExample) | 2005-10-20 |
| JP4000980B2 true JP4000980B2 (ja) | 2007-10-31 |
Family
ID=32288243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002298975A Expired - Fee Related JP4000980B2 (ja) | 2002-10-11 | 2002-10-11 | 光スイッチング素子およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4000980B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7962946B2 (en) | 1997-12-04 | 2011-06-14 | Axis Ab | Camera connectible to CCTV network |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6446895B2 (ja) | 2014-08-01 | 2019-01-09 | セイコーエプソン株式会社 | デジタル・マイクロミラー・デバイス、デジタル・マイクロミラー・デバイスの製造方法、及び電子機器 |
-
2002
- 2002-10-11 JP JP2002298975A patent/JP4000980B2/ja not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7962946B2 (en) | 1997-12-04 | 2011-06-14 | Axis Ab | Camera connectible to CCTV network |
| US7962945B2 (en) | 1997-12-04 | 2011-06-14 | Axis Ab | Method for sending image data from camera to cctv network |
| US8381255B2 (en) | 1997-12-04 | 2013-02-19 | Axis Ab | Device for sending image data from camera to CCTV network |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004133280A (ja) | 2004-04-30 |
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