JP3996216B2 - 改良されたキャピラリおよび細かいピッチのボールボンディング法 - Google Patents

改良されたキャピラリおよび細かいピッチのボールボンディング法 Download PDF

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Publication number
JP3996216B2
JP3996216B2 JP14066995A JP14066995A JP3996216B2 JP 3996216 B2 JP3996216 B2 JP 3996216B2 JP 14066995 A JP14066995 A JP 14066995A JP 14066995 A JP14066995 A JP 14066995A JP 3996216 B2 JP3996216 B2 JP 3996216B2
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JP
Japan
Prior art keywords
capillary
bore
pairs
bond
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14066995A
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English (en)
Japanese (ja)
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JPH07335688A (ja
Inventor
アール テスト ハワード
アール ヴィンソン マイケル
エイチ クックハーン アルバート
Original Assignee
テキサス インスツルメンツ インコーポレイテツド
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Publication of JPH07335688A publication Critical patent/JPH07335688A/ja
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Publication of JP3996216B2 publication Critical patent/JP3996216B2/ja
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Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B23K20/007—Ball bonding
    • H10W42/00—
    • H10W72/01551—
    • H10W72/07141—
    • H10W72/07173—
    • H10W72/07511—
    • H10W72/07521—
    • H10W72/07533—
    • H10W72/536—
    • H10W72/5363—
    • H10W72/5449—
    • H10W72/5522—
    • H10W72/932—

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Wire Bonding (AREA)
  • Packages (AREA)
JP14066995A 1994-06-08 1995-06-07 改良されたキャピラリおよび細かいピッチのボールボンディング法 Expired - Fee Related JP3996216B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/255,582 US5544804A (en) 1994-06-08 1994-06-08 Capillary designs and process for fine pitch ball bonding
US08/255582 1994-06-08

Publications (2)

Publication Number Publication Date
JPH07335688A JPH07335688A (ja) 1995-12-22
JP3996216B2 true JP3996216B2 (ja) 2007-10-24

Family

ID=22968961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14066995A Expired - Fee Related JP3996216B2 (ja) 1994-06-08 1995-06-07 改良されたキャピラリおよび細かいピッチのボールボンディング法

Country Status (6)

Country Link
US (1) US5544804A (enExample)
EP (1) EP0686454A1 (enExample)
JP (1) JP3996216B2 (enExample)
KR (1) KR960002769A (enExample)
MY (1) MY112624A (enExample)
TW (1) TW322594B (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5979743A (en) * 1994-06-08 1999-11-09 Texas Instruments Incorporated Method for making an IC device using a single-headed bonder
US5944249A (en) * 1996-12-12 1999-08-31 Texas Instruments Incorporated Wire bonding capillary with bracing component
US5954260A (en) * 1996-12-17 1999-09-21 Texas Instruments Incorporated Fine pitch bonding technique
US6112972A (en) * 1996-12-19 2000-09-05 Texas Instruments Incorporated Wire bonding with capillary realignment
US6006977A (en) * 1996-12-19 1999-12-28 Texas Instruments Incorporated Wire bonding capillary alignment display system
US5927587A (en) * 1996-12-19 1999-07-27 Texas Instruments Incorporated Capillary holder for wire bonding capillary
US5996877A (en) * 1996-12-19 1999-12-07 Texas Instruments Incorporated Stepwise autorotation of wire bonding capillary
US6065667A (en) * 1997-01-15 2000-05-23 National Semiconductor Corporation Method and apparatus for fine pitch wire bonding
US5938105A (en) * 1997-01-15 1999-08-17 National Semiconductor Corporation Encapsulated ball bonding apparatus and method
US6180891B1 (en) * 1997-02-26 2001-01-30 International Business Machines Corporation Control of size and heat affected zone for fine pitch wire bonding
JP3413340B2 (ja) * 1997-03-17 2003-06-03 株式会社新川 ワイヤボンディング方法
US6089443A (en) * 1998-10-26 2000-07-18 Texas Instruments Incorporated Balancing of x and y axis bonding by 45 degree capillary positioning
US6112973A (en) * 1997-10-31 2000-09-05 Texas Instruments Incorporated Angled transducer-dual head bonder for optimum ultrasonic power application and flexibility for tight pitch leadframe
US5934543A (en) * 1997-12-16 1999-08-10 Texas Instuments Incorporated Wire bonding capillary having alignment features
US6155474A (en) * 1997-12-16 2000-12-05 Texas Instruments Incorporated Fine pitch bonding technique
US6065663A (en) * 1997-12-18 2000-05-23 Texas Instruments Incorporated Alignment apparatus for wire bonding capillary
US6158647A (en) * 1998-09-29 2000-12-12 Micron Technology, Inc. Concave face wire bond capillary
US7389905B2 (en) 1999-02-25 2008-06-24 Reiber Steven F Flip chip bonding tool tip
US20080197172A1 (en) * 1999-02-25 2008-08-21 Reiber Steven F Bonding Tool
US7124927B2 (en) * 1999-02-25 2006-10-24 Reiber Steven F Flip chip bonding tool and ball placement capillary
US7032802B2 (en) * 1999-02-25 2006-04-25 Reiber Steven F Bonding tool with resistance
US6354479B1 (en) * 1999-02-25 2002-03-12 Sjm Technologies Dissipative ceramic bonding tip
US20070131661A1 (en) * 1999-02-25 2007-06-14 Reiber Steven F Solder ball placement system
US20060261132A1 (en) * 1999-02-25 2006-11-23 Reiber Steven F Low range bonding tool
US6651864B2 (en) 1999-02-25 2003-11-25 Steven Frederick Reiber Dissipative ceramic bonding tool tip
US20060071050A1 (en) * 1999-02-25 2006-04-06 Reiber Steven F Multi-head tab bonding tool
US6563226B2 (en) 2001-05-23 2003-05-13 Motorola, Inc. Bonding pad
US7777321B2 (en) * 2002-04-22 2010-08-17 Gann Keith D Stacked microelectronic layer and module with three-axis channel T-connects
US6806559B2 (en) * 2002-04-22 2004-10-19 Irvine Sensors Corporation Method and apparatus for connecting vertically stacked integrated circuit chips
US7407080B2 (en) * 2004-04-02 2008-08-05 Chippac, Inc. Wire bond capillary tip
US20070085085A1 (en) * 2005-08-08 2007-04-19 Reiber Steven F Dissipative pick and place tools for light wire and LED displays
US8008183B2 (en) 2007-10-04 2011-08-30 Texas Instruments Incorporated Dual capillary IC wirebonding
US8242613B2 (en) 2010-09-01 2012-08-14 Freescale Semiconductor, Inc. Bond pad for semiconductor die

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54128271A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Capillary of wire bonder
JPS63239959A (ja) * 1987-03-27 1988-10-05 Toshiba Corp ワイヤボンデイング用キヤピラリ
US4786860A (en) * 1987-04-08 1988-11-22 Hughes Aircraft Company Missing wire detector
JPH01282825A (ja) * 1988-05-09 1989-11-14 Nec Corp ワイヤボンディング用キャピラリ
JPH0428241A (ja) * 1990-05-23 1992-01-30 Seiko Epson Corp 半導体装置の製造方法
US5172851A (en) * 1990-09-20 1992-12-22 Matsushita Electronics Corporation Method of forming a bump electrode and manufacturing a resin-encapsulated semiconductor device
US5485949A (en) * 1993-04-30 1996-01-23 Matsushita Electric Industrial Co., Ltd. Capillary for a wire bonding apparatus and a method for forming an electric connection bump using the capillary

Also Published As

Publication number Publication date
JPH07335688A (ja) 1995-12-22
TW322594B (enExample) 1997-12-11
US5544804A (en) 1996-08-13
KR960002769A (ko) 1996-01-26
MY112624A (en) 2001-07-31
EP0686454A1 (en) 1995-12-13

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