JP3995038B2 - 蛍光体シート製造装置 - Google Patents

蛍光体シート製造装置 Download PDF

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Publication number
JP3995038B2
JP3995038B2 JP2001382846A JP2001382846A JP3995038B2 JP 3995038 B2 JP3995038 B2 JP 3995038B2 JP 2001382846 A JP2001382846 A JP 2001382846A JP 2001382846 A JP2001382846 A JP 2001382846A JP 3995038 B2 JP3995038 B2 JP 3995038B2
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Japan
Prior art keywords
crucible
film forming
forming material
phosphor sheet
evaporation
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Expired - Fee Related
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JP2001382846A
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English (en)
Japanese (ja)
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JP2003183815A5 (enExample
JP2003183815A (ja
Inventor
誠 柏谷
純司 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Priority to JP2001382846A priority Critical patent/JP3995038B2/ja
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Publication of JP2003183815A5 publication Critical patent/JP2003183815A5/ja
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  • Luminescent Compositions (AREA)
  • Physical Vapour Deposition (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
JP2001382846A 2001-12-17 2001-12-17 蛍光体シート製造装置 Expired - Fee Related JP3995038B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001382846A JP3995038B2 (ja) 2001-12-17 2001-12-17 蛍光体シート製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001382846A JP3995038B2 (ja) 2001-12-17 2001-12-17 蛍光体シート製造装置

Publications (3)

Publication Number Publication Date
JP2003183815A JP2003183815A (ja) 2003-07-03
JP2003183815A5 JP2003183815A5 (enExample) 2005-03-17
JP3995038B2 true JP3995038B2 (ja) 2007-10-24

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Family Applications (1)

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JP2001382846A Expired - Fee Related JP3995038B2 (ja) 2001-12-17 2001-12-17 蛍光体シート製造装置

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JP (1) JP3995038B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006089816A (ja) * 2004-09-24 2006-04-06 Konica Minolta Medical & Graphic Inc 蒸着装置及び放射線画像変換パネル
JP4912599B2 (ja) * 2005-02-18 2012-04-11 株式会社アルバック 成膜方法
JP2012046814A (ja) * 2010-08-30 2012-03-08 Kaneka Corp 蒸着装置

Also Published As

Publication number Publication date
JP2003183815A (ja) 2003-07-03

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