JP2003183815A5 - - Google Patents

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Publication number
JP2003183815A5
JP2003183815A5 JP2001382846A JP2001382846A JP2003183815A5 JP 2003183815 A5 JP2003183815 A5 JP 2003183815A5 JP 2001382846 A JP2001382846 A JP 2001382846A JP 2001382846 A JP2001382846 A JP 2001382846A JP 2003183815 A5 JP2003183815 A5 JP 2003183815A5
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JP
Japan
Prior art keywords
evaporation unit
evaporator
heating coil
same
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Prior art date
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Application number
JP2001382846A
Other languages
English (en)
Japanese (ja)
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JP2003183815A (ja
JP3995038B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001382846A priority Critical patent/JP3995038B2/ja
Priority claimed from JP2001382846A external-priority patent/JP3995038B2/ja
Publication of JP2003183815A publication Critical patent/JP2003183815A/ja
Publication of JP2003183815A5 publication Critical patent/JP2003183815A5/ja
Application granted granted Critical
Publication of JP3995038B2 publication Critical patent/JP3995038B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001382846A 2001-12-17 2001-12-17 蛍光体シート製造装置 Expired - Fee Related JP3995038B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001382846A JP3995038B2 (ja) 2001-12-17 2001-12-17 蛍光体シート製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001382846A JP3995038B2 (ja) 2001-12-17 2001-12-17 蛍光体シート製造装置

Publications (3)

Publication Number Publication Date
JP2003183815A JP2003183815A (ja) 2003-07-03
JP2003183815A5 true JP2003183815A5 (enExample) 2005-03-17
JP3995038B2 JP3995038B2 (ja) 2007-10-24

Family

ID=27593066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001382846A Expired - Fee Related JP3995038B2 (ja) 2001-12-17 2001-12-17 蛍光体シート製造装置

Country Status (1)

Country Link
JP (1) JP3995038B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006089816A (ja) * 2004-09-24 2006-04-06 Konica Minolta Medical & Graphic Inc 蒸着装置及び放射線画像変換パネル
JP4912599B2 (ja) * 2005-02-18 2012-04-11 株式会社アルバック 成膜方法
JP2012046814A (ja) * 2010-08-30 2012-03-08 Kaneka Corp 蒸着装置

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