JP3966719B2 - 角速度測定装置 - Google Patents
角速度測定装置 Download PDFInfo
- Publication number
- JP3966719B2 JP3966719B2 JP2001365632A JP2001365632A JP3966719B2 JP 3966719 B2 JP3966719 B2 JP 3966719B2 JP 2001365632 A JP2001365632 A JP 2001365632A JP 2001365632 A JP2001365632 A JP 2001365632A JP 3966719 B2 JP3966719 B2 JP 3966719B2
- Authority
- JP
- Japan
- Prior art keywords
- detection
- vibration
- arm
- vibrator
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 73
- 238000005452 bending Methods 0.000 claims description 28
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 description 13
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000001788 irregular Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
Images
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- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001365632A JP3966719B2 (ja) | 2001-11-30 | 2001-11-30 | 角速度測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001365632A JP3966719B2 (ja) | 2001-11-30 | 2001-11-30 | 角速度測定装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007110545A Division JP4591787B2 (ja) | 2007-04-19 | 2007-04-19 | 振動子および角速度測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003166828A JP2003166828A (ja) | 2003-06-13 |
| JP2003166828A5 JP2003166828A5 (enExample) | 2005-07-21 |
| JP3966719B2 true JP3966719B2 (ja) | 2007-08-29 |
Family
ID=19175627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001365632A Expired - Lifetime JP3966719B2 (ja) | 2001-11-30 | 2001-11-30 | 角速度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3966719B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4075833B2 (ja) | 2003-06-04 | 2008-04-16 | セイコーエプソン株式会社 | 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ |
| JP2006105614A (ja) * | 2004-09-30 | 2006-04-20 | Seiko Epson Corp | 振動型ジャイロスコープ、及び振動型ジャイロスコープの製造方法 |
| JP2008175578A (ja) * | 2007-01-16 | 2008-07-31 | Nec Tokin Corp | 圧電振動ジャイロ用振動子 |
| JP5772286B2 (ja) | 2011-06-24 | 2015-09-02 | セイコーエプソン株式会社 | 屈曲振動片及び電子機器 |
| JP2016090252A (ja) * | 2014-10-30 | 2016-05-23 | セイコーエプソン株式会社 | ジャイロ素子、ジャイロ素子の製造方法、ジャイロセンサー、電子機器、および移動体 |
| JP2024032561A (ja) | 2022-08-29 | 2024-03-12 | セイコーエプソン株式会社 | 角速度検出素子および角速度センサー |
-
2001
- 2001-11-30 JP JP2001365632A patent/JP3966719B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003166828A (ja) | 2003-06-13 |
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