JP3966267B2 - 基板のラビング方法及びラビング装置 - Google Patents
基板のラビング方法及びラビング装置 Download PDFInfo
- Publication number
- JP3966267B2 JP3966267B2 JP2003350798A JP2003350798A JP3966267B2 JP 3966267 B2 JP3966267 B2 JP 3966267B2 JP 2003350798 A JP2003350798 A JP 2003350798A JP 2003350798 A JP2003350798 A JP 2003350798A JP 3966267 B2 JP3966267 B2 JP 3966267B2
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- Prior art keywords
- rubbing
- substrate
- suction
- dust
- suction port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000000758 substrate Substances 0.000 title claims description 174
- 238000000034 method Methods 0.000 title claims description 39
- 239000000428 dust Substances 0.000 claims description 95
- 239000004973 liquid crystal related substance Substances 0.000 claims description 30
- 238000005507 spraying Methods 0.000 claims description 22
- 239000012530 fluid Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 description 72
- 239000004744 fabric Substances 0.000 description 42
- 239000000463 material Substances 0.000 description 39
- 230000000694 effects Effects 0.000 description 23
- 239000012811 non-conductive material Substances 0.000 description 10
- 239000003566 sealing material Substances 0.000 description 8
- 230000003749 cleanliness Effects 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 238000007664 blowing Methods 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000002964 rayon Substances 0.000 description 2
- 241001206158 Blepsias cirrhosus Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
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- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003350798A JP3966267B2 (ja) | 1997-01-08 | 2003-10-09 | 基板のラビング方法及びラビング装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP157797 | 1997-01-08 | ||
| JP2003350798A JP3966267B2 (ja) | 1997-01-08 | 2003-10-09 | 基板のラビング方法及びラビング装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP189498A Division JP3792384B2 (ja) | 1997-01-08 | 1998-01-07 | 基板のラビング方法、液晶電気光学素子の製造方法及び基板のラビング装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004046248A JP2004046248A (ja) | 2004-02-12 |
| JP2004046248A5 JP2004046248A5 (enExample) | 2005-07-07 |
| JP3966267B2 true JP3966267B2 (ja) | 2007-08-29 |
Family
ID=31716993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003350798A Expired - Fee Related JP3966267B2 (ja) | 1997-01-08 | 2003-10-09 | 基板のラビング方法及びラビング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3966267B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5322909B2 (ja) * | 2009-12-08 | 2013-10-23 | 富士フイルム株式会社 | ラビング処理方法、光学補償フィルムの製造方法 |
| KR101382723B1 (ko) * | 2012-06-15 | 2014-04-08 | 하이디스 테크놀로지 주식회사 | 액정표시장치의 배향막 러빙장치 |
-
2003
- 2003-10-09 JP JP2003350798A patent/JP3966267B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004046248A (ja) | 2004-02-12 |
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