JP3952494B2 - TCP handler and TCP illumination method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a TCP handler and a TCP illumination method for sequentially connecting a plurality of TCP (tape carrier package) test pads connected in a tape shape to measurement pins.
[0002]
[Prior art]
As is well known, TCP is a tape in which a semiconductor chip is mounted on a film by using a TAB (tape automated bonding) technique, and a plurality of tapes are connected in the transport stage before actually being mounted on a printed circuit board. It has a form. Japanese Patent Laid-Open No. 7-86355 discloses a test pin on each TCP as a measurement pin of a semiconductor integrated circuit test apparatus (commonly referred to as an IC tester) while intermittently transporting such a TCP in the form of a tape (hereinafter referred to as a TCP tape). There is disclosed a TAB test apparatus for performing an operation test by making a contact connection with a TAB. This TAB tester is a TCP handler (also called a TAB handler) that makes a test pad on each TCP contact and connect to the measurement pin while intermittently transferring the TCP tape, and exchanges signals with the semiconductor chip via the measurement pin. It is composed of an IC tester body that tests the operation of the semiconductor chip by performing it.
[0003]
In the TAB test apparatus, a TCP (TAB) is photographed using an imaging camera, and the image data of the imaging camera is image-processed to detect the presence / absence of a semiconductor chip and the presence / absence of a mark hole with high accuracy. Based on this, the intermittent transfer of the TCP tape is controlled. In this TAB test apparatus, a light source box disposed opposite to the imaging camera with the TCP interposed therebetween is used as illumination when photographing the TCP using the imaging camera. This light source box has a light emitting surface of a size that illuminates the entire TCP without any bias. The imaging camera captures a TCP image by receiving transmitted light obtained by transmitting the illumination light emitted from the light source box through the TCP.
[0004]
[Problems to be solved by the invention]
By the way, in the method of acquiring the TCP image (TCP image) by receiving the transmitted light from the TCP as in the TAB test apparatus and detecting the presence or absence of the semiconductor chip or the mark hole, the contrast of the TCP image is low. In some cases, the presence or absence of a semiconductor chip or a mark hole cannot be detected reliably and accurately.
[0005]
The present invention has been made in view of the above-described problems, and an object of the present invention is to reliably and accurately detect a detection target by obtaining a high-contrast TCP image.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, in the present invention, as a first means related to a handler for TCP, a TCP integrated with a plurality of TCPs is sequentially intermittently fed, and each TCP test pad is measured by a semiconductor integrated circuit test apparatus. It is connected to the pin and receives the transmitted light from each TCP obtained by illuminating the TCP tape with illumination light, picks up a TCP image of each TCP, and transfers the TCP tape based on the TCP image In the TCP handler that controls the above, a means is provided that includes a light source that adjusts the illumination light according to the detection target so as to obtain a TCP image with good contrast for each detection target on the TCP.
[0007]
As the second means related to the TCP handler, in the first means, the light source employs means for switching the color of the illumination light in accordance with the detection target.
[0008]
Further, as a third means related to the TCP handler, in the second means, when the semiconductor chip on the TCP is to be detected, a means for setting the illumination light in red is adopted.
[0009]
As a fourth means related to the TCP handler, when the punched hole formed on the TCP is to be detected in the second or third means, a means is adopted in which the illumination light is blue.
[0010]
On the other hand, in the present invention, as a first means related to the TCP illumination method, a TCP image is obtained by receiving transmitted light obtained by irradiating the TCP with illumination light, and the TCP image is obtained based on the TCP image. An illumination method for detecting each detection object, which employs means for adjusting illumination light in accordance with the detection object so as to obtain a TCP image with good contrast.
[0011]
Further, as the second means related to the TCP illumination method, the means for adjusting the color of the illumination light in accordance with the detection target in the first means is adopted.
[0012]
As a third means related to the TCP illumination method, in the second means described above, when the semiconductor chip on the TCP is a detection target, the illumination light is red.
[0013]
As the fourth means related to the TCP illumination method, in the above second or third means, when a punch hole formed on the TCP is to be detected, a means for making the illumination light blue is adopted. .
[0014]
As the fifth means related to the TCP illumination method, the means for adjusting the intensity of the illumination light in accordance with the detection target in the first means is adopted.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of a TCP handler and a TCP illumination method according to the present invention will be described with reference to the drawings.
[0016]
FIG. 1 is a configuration diagram of a main part of a TCP handler according to the present embodiment. In this figure, X is a TCP tape, 1 is a supply reel, 2 is a receiving reel, 3A and 3B are sprockets, 4 is a pusher, 5A to 5C are CCD cameras, 6A is a halogen lamp, and 6B and 6C are two-color light source boxes. (Light source), 7 is a punch unit, 8 is an image processing unit, 9 is a control unit, and 10 is a monitor television.
[0017]
As shown in FIG. 2, the TCP tape X has a plurality of TCPx1 connected to each other and sprocket holes x2 formed in a row on both sides. Each TCP x1 is provided with a semiconductor chip x3 in the center and a plurality of test pads x4 connected to each connection pad on the semiconductor chip x3 through a lead pattern. Each TCPx1 is formed with a punch hole x5 according to the result of the operation test. This punch hole x5 is a hole for identifying a good product and a defective product for each TCPx1.
[0018]
The TCP tape X formed in this way uses a brown translucent resin as a base material, and a semiconductor chip x3 is mounted on the base material, and a lead pattern and a test pad x4 are pattern-formed. The semiconductor chip x3 and the punch hole x5 are detection objects in this embodiment.
[0019]
The supply reel 1 is obtained by wrapping the TCP tape X in multiple turns, and sequentially feeds the TCP tape X with the rotation of the sprockets 3A and 3B. The accommodation reel 2 winds up the TCP tape X sent out from the supply reel 1. The sprockets 3 </ b> A and 3 </ b> B are provided on both sides of the pusher 4 and are rotationally driven under the control of the control unit 9. Each of the sprockets 3A and 3B sequentially and intermittently feeds the TCP tape X to the accommodation reel 2 side by engaging the protrusion formed on the peripheral surface with the sprocket hole x2. The pusher 4 presses the TCP tape X in a stopped state to bring the test pad x4 of each TCPx1 into contact connection with a measurement pin (not shown) of the IC tester body.
[0020]
The CCD cameras 5B and 5C receive the transmitted light of the illumination light irradiated on the TCP tape X from the two-color light source boxes 6B and 6C, respectively, thereby acquiring images (TCP images) of the respective TCPx1 and sending them to the image processing unit 8. Output. As shown in the figure, the TCP handler includes three CCD cameras 5A to 5C. Among these CCD cameras 5A to 5C, the CCD camera 5A acquires a TCP image that is a reflection image of the illumination light of the halogen lamp 6A at the position of the pusher 4, and TCPx1 (to be exact, test pad x4) for the measurement pin. ) For positioning. On the other hand, the CCD cameras 5B and 5C are provided for detecting the presence or absence of the semiconductor chip x3 or the punch hole x5 on the TCP x1.
[0021]
The two-color light source boxes 6 </ b> B and 6 </ b> C are visible light sources having a two-color light emitting function, and emit light in red or blue based on control by the control unit 9. FIG. 3 is a perspective view showing an external configuration of each of the two-color light source boxes 6B and 6C. As shown in this figure, the two-color light source boxes 6B and 6C are provided with a light emitting surface 60 having substantially the same size as that of TCPx1 so as to illuminate TCPx1 with a uniform luminous intensity. The two-color light source boxes 6B and 6C are arranged to face the CCD cameras 5B and 5C with the TCP tape X interposed therebetween, and uniformly illuminate the entire area of TCPx1.
[0022]
The light emitting surface 60 is formed by arranging a large number of LEDs (light emitting diodes), more specifically, an LED that emits red light (red LED) and an LED that emits blue light (blue LED); Are alternately arranged so as to be adjacent to each other. The light emitting surface 60 emits red light with a uniform luminous intensity when only the red LED is driven, and emits blue light uniformly when only the blue LED is driven.
[0023]
The punch unit 7 operates based on the control of the control unit 9, and forms a punch hole x5 in the TCPx1 according to the result of the operation test of the TCPx1 by the IC tester body. The image processing unit 8 detects the presence / absence of the semiconductor chip x3 and the punch hole x5 by performing image processing on the TCP images input from the CCD cameras 5A to 5C, and outputs the detection result to the control unit 9. The control unit 9 controls the transfer operation of the TCP tape X based on the detection result of the image processing unit 8, that is, the operations of the sprockets 3A and 3B, the supply reel 1, the receiving reel 2, and the like.
[0024]
The CCD cameras 5A to 5C are connected to the monitor television 10 and switch TCP images by the CCD cameras 5A to 5C. A TCP image is confirmed on the monitor TV 10.
[0025]
Next, the operation of the TCP handler configured as described above will be described.
[0026]
In this TCP handler, the position of TCPx1 is detected by subjecting the TCP image acquired by the CCD camera 5A to image processing by the image processing unit 8. The control unit 9 controls the sprockets 3A, 3B and the like based on the position detection result, thereby positioning the TCPx1 so that the test pad x4 on the TCPx1 is accurately contacted and connected to the measurement pin of the IC tester body. .
[0027]
On the other hand, the CCD camera 5B is located on the upstream side of the CCD camera 5A in the transfer direction of the TCP tape X indicated by the arrow, and acquires a TCP image before the operation test. The image processing unit 8 detects the presence or absence of the semiconductor chip x3 by performing image processing on the TCP image of the CCD camera 5B. The control unit 9 controls the transfer of the TCP tape X based on the detection result of the semiconductor chip x3, so that only the TCPx1 on which the semiconductor chip x3 is mounted is stopped at the position of the pusher 4 and the operation test is performed. In this case, since the emission color of the two-color light source box 6B facing the CCD camera 5B is automatically set to “red” by the control unit 9, the presence or absence of the semiconductor chip x3 is accurately detected.
[0028]
Further, the CCD camera 5C is positioned downstream of the punch unit 7 in the transfer direction of the TCP tape X, and acquires a TCP image in which the punch hole x5 is formed by the punch unit 7. The image processing unit 8 detects the presence or absence of the punch hole x5 by performing image processing on the TCP image of the CCD camera 5C. The control unit 9 determines whether or not the punch hole x5 is reliably formed based on the operation test result based on the detection result of the punch hole x5. In this case, the emission color of the two-color light source box 6C facing the CCD camera 5C is automatically set to “blue” by the control unit 9, so that the presence / absence of the punch hole x5 is accurately detected.
[0029]
According to the present embodiment, the illumination light is automatically set to red light having high transmittance or blue light having low transmittance with respect to the brown base material of the TCP tape X, so that the semiconductor chip x3 and the punch hole x5 are made high. It can be detected accurately and reliably. However, the present invention is not limited to the detection of the semiconductor chip x3 and the punch hole x5, and can be applied to detect various detection targets on the TCP x1.
[0030]
Further, the present invention is intended to switch between the light having a high transmittance and the light having a low transmittance with respect to the base material of the TCP tape X, so that the color of the illumination light is limited to red and blue. It is not something. For example, it is conceivable that light having a high transmittance and light having a low transmittance may be other colors than red and blue due to a change in the base material.
[0031]
Further, in the detection of the semiconductor chip x3 and the punch hole x5 by the CCD cameras 5A to 5C, the detection area of the semiconductor chip x3 and the punch hole x5 is individually set after the operator confirms the monitor TV 10 and only the detection areas are detected. The semiconductor chip x3 and the punch hole x5 are detected by image processing or monitoring. In such a detection area setting operation, the operator designates the detection area while visually recognizing the TCP images of the CCD cameras 5A to 5C on the monitor. For example, when setting the detection area for the semiconductor chip x3, illumination light is set. By making the red color, the semiconductor chip x3 can be easily visually recognized. Further, when setting a detection region related to the punch hole x5, the punch hole x5 can be easily visually recognized by setting the illumination light blue.
The illumination light can be switched manually.
[0032]
〔extra content〕
In the above embodiment, the two-color light source boxes 6B and 6C having a two-color light emission function are used as the light source so that the color of the illumination light is switched between red / blue according to the detection target. In addition to changing the color of the illumination light, or instead of changing the color of the illumination light, by optimizing the intensity of the illumination light, a TCP image with good contrast is obtained for the semiconductor chip x3 and the punch hole x5 on the TCPx1. May be.
[0033]
For example, when the two-color light source boxes 6B and 6C in the above embodiment are used, the semiconductor chip in which the emission color of the two-color light source box 6B is set to “red” and the intensity of the red light is photographed by the CCD camera 5B. The intensity of the x3 TCP image is set to the highest contrast, the emission color of the two-color light source box 6C is set to “blue”, and the intensity of this blue light is set in the punch hole x5 taken by the CCD camera 5C. The TCP image is set to an intensity that provides the best contrast.
[0034]
On the other hand, when using the light sources 6B ′ and 6C ′ that emit single-color illumination light instead of the two-color light source boxes 6B and 6C, the semiconductor in which the CCD camera 5B captures the intensity of the illumination light of the light source 6B ′. The TCP image of the chip x3 is set to an intensity at which the contrast is the best, and the intensity of the illumination light of the light source 6C ′ is set to an intensity at which the TCP image of the punch hole x5 taken by the CCD camera 5C has the highest contrast.
[0035]
For example, the intensity adjustment of the illumination light is performed by sequentially switching the intensity of the illumination light emitted from the various light sources by the control unit 9 step by step, and the contrast of the TCP image at each intensity is detected by the image processing unit 8. This is realized by detecting the intensity of the illumination light in which this contrast is the best.
[0036]
【The invention's effect】
As described above, according to the present invention, the illumination light is adjusted according to the detection target so as to obtain a TCP image with good contrast for each detection target on the TCP. It can be detected reliably.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a main part of a handler for TCP according to an embodiment of the present invention.
FIG. 2 is a front view of a TCP tape according to an embodiment of the present invention.
FIG. 3 is a perspective view of a two-color light source box in an embodiment of the present invention.
[Explanation of symbols]
X …… TCP tape x1 …… TCP
x2 ... sprocket hole x3 ... semiconductor chip x4 ... test pad x5 ... punch hole 1 ... supply reel 2 ... receiving reels 3A, 3B ... sprocket 4 ... pushers 5A to 5C ... CCD camera 6A ... Halogen lamps 6B, 6C ... 2 color light source box (light source)
60 ... Light emitting surface 7 ... Punch unit 8 ... Image processing unit 9 ... Control unit 10 ... Monitor TV

Claims (5)

TCP (x 1) is more articulated, the measurement of a semiconductor integrated circuit testing device testing pads (x4) of the TCP tape (X) sequentially indexing and while the TCP (x1) for the translucent resin brown the base material be one that contacts connected to the pin, captures a TCP image of TCP tape each by receiving the transmitted light from each obtained by irradiating illumination light to (X) TCP (x1) TCP (x1), the semiconductor in TCP handler that detects the presence or absence of chips (x 3) and punch holes (x 5), controls the transfer of TCP tape (X),
By changing the intensity of illumination light so as to obtain a high-contrast TCP image of the semiconductor chip (x3) and punch hole (x5) on TCP (x1), the transmittance of the illumination light can be reduced with respect to the base material. A TCP handler comprising a light source (6B, 6C) to be switched .   2. The TCP handler according to claim 1, wherein the punch hole (x5) is a hole for identifying a good product and a defective product. TCP handler according to claim 1 or 2, characterized in that a setting device for switching the illumination light. A TCP image is obtained by receiving transmitted light obtained by irradiating the TCP tape (X) with a plurality of TCP (x 1 ) connected and illuminating illumination light on a TCP tape (X) having a brown translucent resin as a base material. Based on the semiconductor chip (x3) on the TCP (x1), the illumination method used for the handler for TCP when detecting the presence or absence of punch holes (x5),
A TCP illumination method, wherein the transmittance of illumination light is switched with respect to a base material by switching the intensity of illumination light so as to obtain a TCP image having good contrast.   6. The TCP illumination method according to claim 5, wherein the punch hole (x5) is a hole for identifying a good product and a defective product.

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