JP3938540B2 - マイクロレンズアレイの成形型の研削方法およびその装置 - Google Patents

マイクロレンズアレイの成形型の研削方法およびその装置 Download PDF

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Publication number
JP3938540B2
JP3938540B2 JP2002317191A JP2002317191A JP3938540B2 JP 3938540 B2 JP3938540 B2 JP 3938540B2 JP 2002317191 A JP2002317191 A JP 2002317191A JP 2002317191 A JP2002317191 A JP 2002317191A JP 3938540 B2 JP3938540 B2 JP 3938540B2
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grinding
workpiece
grinding wheel
spindle
microlens array
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Japanese (ja)
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JP2004148454A5 (enExample
JP2004148454A (ja
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浩文 鈴木
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Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
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Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
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JP2002317191A 2002-10-31 2002-10-31 マイクロレンズアレイの成形型の研削方法およびその装置 Expired - Lifetime JP3938540B2 (ja)

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JP2002317191A JP3938540B2 (ja) 2002-10-31 2002-10-31 マイクロレンズアレイの成形型の研削方法およびその装置

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JP2002317191A JP3938540B2 (ja) 2002-10-31 2002-10-31 マイクロレンズアレイの成形型の研削方法およびその装置

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JP2004148454A JP2004148454A (ja) 2004-05-27
JP2004148454A5 JP2004148454A5 (enExample) 2005-06-02
JP3938540B2 true JP3938540B2 (ja) 2007-06-27

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007021692A (ja) * 2005-07-20 2007-02-01 Makino Milling Mach Co Ltd 切削加工方法及び装置
JP4712586B2 (ja) * 2006-03-27 2011-06-29 西部電機株式会社 Ｎｃ工作機械
JP5355206B2 (ja) * 2009-04-30 2013-11-27 パナソニック株式会社 加工装置および加工方法
JP5400518B2 (ja) * 2009-08-03 2014-01-29 旭栄研磨加工株式会社 硬脆材料の研削方法
JP2016016464A (ja) * 2014-07-04 2016-02-01 株式会社 東洋鐡工所 Ｎｃ加工装置
CN109807720B (zh) * 2019-03-27 2021-09-17 哈尔滨工业大学 一种微透镜阵列光学元件的范成式加工方法

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