JP3931930B2 - Method for forming partition wall of plasma display panel - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for forming a partition of a plasma display panel.
Plasma display panels (hereinafter referred to as PDPs) are attracting attention as display devices that replace CRTs, and are promising for large display applications such as high-definition televisions.
[0002]
In such a PDP, it is required to establish a mass production technique to cope with an increase in demand, and to increase manufacturing accuracy in order to improve image quality.
[0003]
[Prior art]
First, the structure of an AC type PDP capable of full color display will be described with reference to FIG. FIG. 5 is a perspective view showing a state in which a part of a surface discharge type PDP having a three-electrode structure is cut out.
[0004]
On the inner surface of the front glass substrate 21, a pair of linear display electrodes X and Y for generating a surface discharge along the substrate surface are arranged for each line L of the matrix display. The display electrodes X and Y each have a wide linear transparent electrode 23 made of an ITO (Indium Tin Oxide) thin film and a narrow linear bus electrode made of a metal thin film having a multilayer structure (Cr / Cu / Cr). 24.
[0005]
A dielectric layer 25 made of a PbO-based low-melting glass layer for AC driving is provided so as to cover the display electrodes X and Y with respect to the discharge space. A protective film 26 made of MgO (magnesium oxide) is deposited on the surface of the dielectric layer 25.
[0006]
On the other hand, on the inner surface of the rear glass substrate 22, address electrodes 27 are arranged at a constant pitch so as to be orthogonal to the display electrodes X and Y. The address electrode 27 is formed of a metal film having a multilayer structure (Cr / Cu / Cr) like the bus electrode 24 of the display electrode.
[0007]
A plurality of stripe-shaped partition walls 29 having a height of about 150 μm are provided between the address electrodes 27 on the dielectric layer 28 disposed so as to cover the entire top surface of the address electrode 27. ing. The main material of the partition walls 29 is also a low melting point glass.
[0008]
Such partition walls 29 divide the discharge space 30 in the line direction (pixel arrangement direction parallel to the display electrodes X and Y) for each unit light emitting region, and define a vertical discharge gap.
[0009]
Then, a striped R (red (red)) for full-color display is formed so as to cover the surface of the dielectric layer 28 and the side surface of the partition wall 29 including the upper portion of the address electrode 27 in the elongated groove formed between the partition walls. ), G (green), and B (blue) phosphors 31 of the three primary colors are provided.
[0010]
In the PDP configured as described above, a discharge gas such as Ne-Xe (mixed gas of Ne and Xe) that excites phosphor by irradiating ultraviolet rays at the time of discharge in the discharge space 30 at a pressure of about several hundred torr. It is enclosed.
[0011]
In the PDP having such a structure, the partition walls are formed by a sandblast method that can expect relatively good pattern accuracy.
6 and 7 are a cross-sectional view and a plan view for explaining a conventional partition wall forming method using the sandblast method.
[0012]
As shown in the cross-sectional view of FIG. 6, the address electrodes 27 and the dielectric layer 28 are sequentially formed on the rear glass substrate 22, and the barrier ribs are formed on the dielectric layer 28. First, a barrier rib material film 32 for forming barrier ribs is applied to the entire surface of the dielectric layer 28 by screen printing, and a strip-shaped opening extending in the direction perpendicular to the paper surface (corresponding to the elongated grooves between the barrier ribs). A mask 33 having the following is formed.
[0013]
This mask 33 is obtained by patterning a blast-resistant photosensitive film called a dry film by a photo process, and can form a pattern with good dimensional accuracy.
[0014]
After forming the mask 33 on the partition wall material film 32 as described above, cutting particles (hereinafter referred to as abrasive grains) are sprayed through the spray nozzle 34 over the entire surface of the partition wall material film 32 including the mask 33. Since the abrasive grains grind only the partition wall material film 32 which has no grinding ability with respect to the mask 33 and is harder than the mask exposed from the opening, as shown in FIG. A film corresponding to 29 is formed.
[0015]
In the drawing, the back glass substrate 22 is sandblasted while being conveyed rightward (in a direction orthogonal to the address electrodes) as indicated by an arrow, and a partition wall 29 is formed only in part. Thereafter, sandblasting is continued to complete grinding on the entire surface of the back glass substrate 22, and then the mask 33 is removed and baking is performed to vitrify the partition walls 29. (The mask can be burned out simultaneously with this firing)
FIG. 7 is a plan view illustrating the operation of the injection nozzle 34 and the rear glass substrate 22. 6 shows only one injection nozzle 34, FIG. 7 shows an example in which a plurality of (for example, three) injection nozzles 34a to 34c are used.
[0016]
The injection nozzles 34a to 34c are alternately arranged on two sides facing the extending direction of the partition wall of the rear glass substrate 22 so as to traverse the rear glass substrate 22 as indicated by the one-dot chain line arrows while spraying abrasive grains. Move back and forth. During this time, the rear glass substrate 22 is transported on the transport path 35 at a predetermined speed in the arrangement direction of the partition walls (arrow direction).
[0017]
Since the injection port of the injection nozzle 34 is circular and performs spot-like abrasive grain injection, by slowing down the conveying speed of the back glass substrate 22, the abrasive grains are injected multiple times to the same location, Sufficient grinding is possible.
[0018]
[Problems to be solved by the invention]
According to the above-described conventional partition wall forming method, since the sandblasting process is performed by reciprocating a nozzle having a narrow abrasive grain injection range with respect to the rear glass substrate 22, the partition wall material film 32 can be sufficiently ground. Since the conveyance speed of the back glass substrate 22 has to be reduced, the processing time required for forming the partition wall becomes extremely long and is not suitable for mass production.
[0019]
The spray nozzles 34 a to 34 c are linearly reciprocating across the back glass substrate 22 at right angles, whereas the back glass substrate 22 is transported at a predetermined speed. As a result, the band-shaped opening is ground with an inclination, and uniform grinding cannot be performed within the surface of the back glass substrate 22.
[0020]
For example, in FIG. 7, when the back glass substrate 22 is transported from the position of the dotted line to the position of the solid line (distance A) while the spray nozzles 34 a to 34 c cross the back glass substrate 22 once, the spray nozzle The grinding area | region by 34c becomes a range shown with an oblique line in the state after conveyance, and will produce a grinding nonuniformity. This becomes more prominent as the conveyance speed increases.
[0021]
As a result, a partition wall that defines a desired discharge space cannot be obtained, which causes lighting failures such as non-lighting and extra lighting.
An object of the present invention is to solve the above-mentioned problems and to provide a method capable of forming a partition wall with high processing speed and high accuracy.
[0022]
[Means for Solving the Problems]
In order to solve the above problems, a barrier rib forming method of the present invention is a method of forming a barrier rib of a plasma display panel having a barrier rib partitioning a discharge portion on a substrate, the barrier rib forming film and an opening corresponding to the discharge portion. A rectangular substrate on which a mask having a portion is stacked is transported at a predetermined speed in a direction along its long side, and a plurality of spray nozzles are orthogonal to the substrate transport direction along the long side of the substrate. The first and second moving mechanisms are attached to the moving mechanism and attached to a second moving mechanism that moves the entire first moving mechanism at the same speed as the substrate conveying speed in parallel with the substrate conveying direction. by driving is moved at a predetermined angle corresponding to the injection nozzle in the conveying speed before Symbol substrate across the substrate, spray from the injection nozzle in the moving abrasive grains in the partition wall forming film Put it, by cutting the partition wall forming film of the exposed portion in the opening of the mask is for forming the partition wall by the partition wall forming film remaining on the substrate.
The barrier rib forming method of the present invention is a method for forming a barrier rib of a plasma display panel having barrier ribs for partitioning a discharge portion on a substrate, the barrier rib forming film, and a mask having an opening corresponding to the discharge portion, And a plurality of spray nozzles arranged in a staggered manner with respect to two opposing long sides of the substrate on the long side of the substrate. And is attached to a first moving mechanism that is orthogonal to the substrate transport direction and attached to a second moving mechanism that moves the entire first moving mechanism at the same speed as the substrate transport speed in parallel with the substrate transport direction. Te, at a predetermined angle corresponding to the injection nozzle in the conveying speed before Symbol substrate is moved across the substrate by driving the first and second moving mechanisms simultaneously, injection in this movement Abrasive grains are sprayed onto the partition forming film from the spray nozzle to cut a portion of the partition forming film exposed in the opening of the mask, and a partition is formed by the partition forming film remaining on the substrate. is there.
[0023]
According to the above partition wall forming method, the rectangular substrate is transported at a predetermined speed in the direction along the long side, and the spray nozzle is at a predetermined angle corresponding to the transport speed of the substrate with respect to the transport direction of the substrate. The abrasive particles are sprayed onto the partition wall forming film from the moving spray nozzle, and the partition wall forming film exposed at the opening of the mask is cut in a direction perpendicular to the transport direction of the substrate , Since the partition wall is formed by the partition wall forming film remaining on the substrate, the same region of the substrate is always ground simultaneously with one side of the substrate and the same spray nozzle, so the processing speed required for grinding is high. At the same time, it is possible to prevent the occurrence of uneven grinding within the substrate surface.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a plan view for explaining a first embodiment of the present invention.
[0025]
The glass substrate 1 is the same as the rear substrate described with reference to FIG. 6 and has an address electrode extending in the vertical direction on the paper surface and a dielectric layer covering the entire surface of the substrate including the address electrode, although not shown. is doing. On the dielectric layer, a barrier rib material film for forming barrier ribs and a stripe mask corresponding to a blast-resistant barrier rib shape are laminated.
[0026]
In the present embodiment, an example will be described in which sandblasting is performed while the glass substrate 1 is transported from a position A indicated by a dotted line to a position B indicated by a solid line.
The glass substrate 1 having the above-described configuration is transported on the transport path 4 at a predetermined speed, and a plurality of (four in this embodiment) spray nozzles 2a to 2d are arranged alternately with the partition wall material film sandwiching the glass substrate 1. Sand blasting is performed by the abrasive grains sprayed from.
[0027]
The injection nozzles 2a to 2d arranged in a staggered manner have a rectangular shape and are arranged without a gap with respect to a pair of long sides of the glass substrate 1, and abrasive grains are simultaneously formed in the long side direction. It is set as the structure injected. Adjacent spray nozzles 2a and 2b, 2b and 2c, 2c and 2d pass near the center of the glass substrate 1, so it is necessary to arrange them so that there is a slight gap, but the abrasive grains spread with a glass substrate. 1, the abrasive grains collide simultaneously with the long side direction of the glass substrate 1.
[0028]
When the glass substrate 1 is located at the position of the dotted line, are arranged as shown in FIG. 1, the conveyance of the glass substrate 1, it performs a zigzag operation while spraying abrasive grains from the injection port 3. That is, the injection nozzles 2 a to 2 d operate so as to cross the glass substrate 1 at an angle corresponding to the conveyance speed of the glass substrate 1, and thus are orthogonal to the conveyance direction of the substrate 1 along the long side of the substrate 1. together moves in a direction (first direction), intended to move in the direction you parallel to the conveying direction of the substrate 1 (second direction), in the present embodiment, urchin move Remind as dashed-line arrow However, when the glass substrate 1 is conveyed to the position of the solid line, the injection nozzle 2a is moved to the position of the injection nozzle 2b, and the injection nozzle 2b is moved to the position of the injection nozzle 2c. The movement of the glass substrate 1 in the first direction, is operated by first moving mechanism mounted so as to be perpendicular to the conveying direction of the substrate 1 I along the longitudinal direction of the substrate 1. Further, the movement of the glass substrate 1 in the second direction is operated by a second moving mechanism in which the entire first moving mechanism is attached in parallel with the transport direction of the substrate 1.
[0029]
Here, the grinding area will be described by taking the injection nozzle 2d as an example. When the glass substrate 1 is at the position A of the dotted line, the injection nozzle 2d is located at the upper right end of the glass substrate 1, and is obliquely downward as indicated by the alternate long and short dash line arrow while spraying abrasive grains as the glass substrate 1 is conveyed. Go to. Angle across the glass substrate of the injection nozzle 2d at that time, for example, the size of the glass substrate 1 is vertically 1000 mm, horizontal 1500 mm, the conveying speed of 200 mm / min, the moving speed of the injection nozzle 2d is a 500 mm / min, a static coordinate system The movement angle of the injection nozzle 2d is set to about 23 ° to 24 ° [ arcsin (2/5) ], and the movement direction (polishing angle) of the injection nozzle 2d in the coordinate system on the glass substrate 1 to be conveyed is set. angle and ing perpendicular to the conveying direction of the glass substrate 1. Thus, when the glass substrate 1 reaches the position B of the solid line, the direction of movement of the glass substrate 1 at a predetermined conveyance speed (200 mm / min) and the movement of the injection nozzle 2d at a predetermined movement speed (500 mm / min). A region indicated by hatching is ground in a direction orthogonal to the conveyance direction of the glass substrate 1 based on the direction of synthesis with the direction (see FIG. 1) . Although not shown in the drawing, at this time, the injection nozzle 2d has moved to the lower right end of the glass substrate 1 at the position B of the solid line.
[0030]
As described above, the spray nozzles 2a to 2d are also moved in the transport direction in accordance with the transport speed of the glass substrate 1, and as a result, are linearly ground with the width of the spray nozzle. By repeating this operation a plurality of times, the same region can be sandblasted a plurality of times with the same injection nozzle that performs a zigzag operation.
[0031]
According to the present embodiment, the injection nozzles 2a to 2d are arranged without a gap with respect to the pair of long sides of the glass substrate 1, and the injection nozzles 2a to 2d are operated in a zigzag manner in accordance with the conveyance speed of the glass substrate 1. The same spray nozzle performs sandblasting for each of the four divided glass substrate 1 regions, and uniform grinding is possible regardless of the conveyance speed of the glass substrate 1.
[0032]
2A and 2B are diagrams for explaining a drive mechanism that enables zigzag operation of the injection nozzle. FIG. 2A is a cross-sectional view as viewed from the long side of the glass substrate, and FIG. 2B is a glass substrate. It is sectional drawing seen from the short side (arrow C direction).
[0033]
As shown to Fig.2 (a), the some injection nozzles 2a-2d are hold | maintained in the state hung on the rail 7 of the movable block 6, and with respect to the long side of the glass substrate 1 as FIG. And there is almost no gap.
[0034]
Rail 7 of the movable block 6 extends in the direction perpendicular to the paper surface, the sliding contact surface of the injection nozzle, movable in a (first moving mechanism) as indicated by an arrow shown in FIG. 2 (b) Yes. Further, the movable block 6 itself is also movable in the same direction as the conveyance direction of the glass substrate 1 (second movement mechanism) .
[0035]
Therefore, by moving the injection nozzles 2a to 2d along the rail 7 which is the first moving mechanism, and simultaneously transporting and moving the movable block 6 by the second moving mechanism , the injection nozzles 2a to 2d are moved. It is possible to perform a zigzag operation with a desired angle in a direction across the glass substrate 1.
[0036]
The injection nozzles 2a to 2d that perform such an operation are provided with a supply pipe 5 that communicates with the injection opening 3, and abrasive grains and high-pressure air are supplied to the supply pipe 5, whereby the abrasive is supplied from the injection opening 3. Grain is injected.
[0037]
FIG. 3 is a plan view for explaining the second embodiment of the present invention, and the same reference numerals are given to the same parts as those of the first embodiment.
In contrast to the first embodiment in which the sand blasting process is performed while the glass substrate 1 is conveyed at a predetermined speed, the present embodiment performs the sand blasting process with the glass substrate 1 stopped.
[0038]
That is, the glass substrate 1 conveyed on the conveyance path 4 is stopped by the processing unit, and the plurality of injection nozzles 2a to 2d are reciprocated in this stopped state. At this time, the injection nozzles 2a to 2d perform an operation of crossing the glass substrate 1 at a right angle without making an angle as in the first embodiment, and grinding is performed by continuing the processing for a predetermined time.
[0039]
In such a sandblasting process, the same injection nozzle can perform the sandblasting process for each area of the glass substrate 1 divided into four, as in the first embodiment. Therefore, uniform grinding is possible.
[0040]
In the present embodiment, control for intermittently transporting the glass substrate 1 is necessary, and the processing speed is slightly slower than in the first embodiment because the sandblasting process is performed in the stopped state. However, since no processing is performed at the time of conveyance, the conveyance speed to the processing unit can be increased. Moreover, since it is not necessary to move the injection nozzles 2a to 2d in the conveying direction of the glass substrate 1, the control is simple.
[0041]
The apparatus used in the second embodiment may be the same as that in the first embodiment having the drive mechanism shown in FIG.
In the first and second embodiments described above, the injection nozzles 2a to 2d are alternately arranged on a pair of long sides with the glass substrate 1 interposed therebetween, but it is also possible to arrange them continuously only on one long side. is there.
[0042]
FIG. 4 is a diagram for explaining the overall configuration of the sandblasting apparatus.
As shown in FIG. 4, the sandblasting apparatus is composed of a grinding tank 11, a separation tank 12, and a filtration tank 13, and the sandblasting process described above is performed in the grinding tank 11.
[0043]
A small tank 14 for storing abrasive grains 18 is provided in the grinding tank 11, and the abrasive grains 18 are supplied from the small tank 14 to the injection nozzle 2. High-pressure air is also sent to the injection nozzle 2, and the abrasive grains 18 are sprayed toward the glass substrate 1 by this pressure, and unnecessary portions of the partition wall material film are ground to form partition walls.
[0044]
By such a sandblasting process, powder (hereinafter referred to as grinding powder) 19 obtained by grinding the partition wall material film is generated and mixed with the used abrasive grains 18 and dropped. The grinding powder 19 and the abrasive grains 18 are introduced into the separation tank 12 through a connecting pipe.
[0045]
In the separation tank 12, the heavy abrasive grains 18 and the light grinding powder 19 are separated by the principle of centrifugal separation, the abrasive grains 18 go to the large tank 15 below, and the grinding powder 19 goes to the filtration tank 1 through the connecting pipe. Sent.
[0046]
In the filtration tank 13, clean air filtered by the filter 16 is sent to the outside, and the remaining grinding powder 19 is discharged from below the filtration tank 13, collected in the waste storage box 17, and discarded.
[0047]
On the other hand, the abrasive grains sent to the large tank are introduced into the small tank 14 in the grinding tank 11 through the connecting pipe and used again for the sandblasting process. In addition, since it is difficult to collect all the abrasive grains 18 and they are slightly reduced, new abrasive grains are periodically replenished to the large tank 15.
[0048]
In this invention, since it grinds simultaneously with respect to the long side direction of a glass substrate, many abrasive grains are used. Therefore, a sandblasting apparatus configured to collect and reuse used abrasive grains as shown in FIG. 4 is effective.
[0049]
【The invention's effect】
According to the method and apparatus for manufacturing a plasma display panel of the present invention, a rectangular substrate is transported at a predetermined speed in a direction along its long side, and the injection nozzle is in a direction orthogonal to the substrate transport direction and the substrate. Is moved at a predetermined angle according to the transport speed, spraying abrasive grains to the partition forming film from the moving spray nozzle , cutting the partition forming film of the portion exposed to the opening of the mask , Since the partition wall is formed by the partition wall forming film remaining on the substrate, the same region of the substrate is always ground simultaneously with the same injection nozzle in one side direction of the substrate, so that the processing speed required for grinding is high. At the same time, it is possible to prevent the occurrence of grinding unevenness in the substrate surface.
[0050]
Therefore, it is possible to improve the mass productivity in the partition forming process and to improve the image quality because a desired partition can be obtained.
[Brief description of the drawings]
FIG. 1 is a plan view for explaining a first embodiment of the present invention.
FIG. 2 is a view for explaining a drive mechanism of an injection nozzle according to the present invention.
FIG. 3 is a plan view for explaining a second embodiment of the present invention.
FIG. 4 is a diagram for explaining an overall configuration of a sandblasting apparatus.
FIG. 5 is a perspective view for explaining the structure of a plasma display panel.
FIG. 6 is a cross-sectional view for explaining a conventional partition wall forming method.
FIG. 7 is a plan view for explaining a conventional partition wall forming method.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Glass substrate 2, 2a-2d Injection nozzle 3 Injection port 4 Conveyance path 5 Supply pipe 6 Movable block 7 Rail 11 Grinding tank 12 Separation tank 13 Filtration tank

Claims (3)

A method of forming a barrier rib of a plasma display panel comprising a barrier rib partitioning a discharge part on a substrate,
While transporting at a predetermined speed in a direction along the long side of a rectangular substrate in which a barrier rib forming film and a mask having an opening corresponding to the discharge portion are laminated,
A plurality of spray nozzles are attached to a first moving mechanism that is orthogonal to the substrate transport direction along the long side of the substrate, and the entire first moving mechanism is parallel to the substrate transport direction and the same as the substrate transport speed. mounted on a second moving mechanism for moving at speed, as a predetermined angle corresponding to the injection nozzle in the conveying speed before Symbol substrate by driving the first and second moving mechanisms simultaneously across the substrate Move
Abrasive grains are sprayed from the moving spray nozzle onto the partition wall forming film to cut the portion of the partition wall forming film exposed in the opening of the mask, and the partition wall forming film remaining on the substrate forms the partition wall. A method for forming a partition wall of a plasma display panel, characterized by comprising: A method of forming a barrier rib of a plasma display panel comprising a barrier rib partitioning a discharge part on a substrate,
While transporting at a predetermined speed in a direction along the long side of a rectangular substrate in which a barrier rib forming film and a mask having an opening corresponding to the discharge portion are laminated,
A plurality of spray nozzles arranged in a staggered manner with respect to two opposing long sides of the substrate are attached to a first moving mechanism orthogonal to the substrate transport direction along the long side of the substrate and the first movement Attach the whole mechanism in a second moving mechanism for moving at the same speed as the conveying speed of the substrate in the conveying direction and parallel to the substrate, pre-Symbol the injection nozzle by driving the first and second moving mechanisms simultaneously Move across the substrate at a predetermined angle corresponding to the substrate transport speed,
Abrasive grains are sprayed from the moving spray nozzle onto the partition wall forming film to cut the portion of the partition wall forming film exposed in the opening of the mask, and the partition wall forming film remaining on the substrate forms the partition wall. A method for forming a partition wall of a plasma display panel. 3. The method of forming a partition wall of a plasma display panel according to claim 1, wherein the spray nozzle sprays abrasive grains in a slit shape .

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