JP3928373B2 - 試料ステージ - Google Patents

試料ステージ Download PDF

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Publication number
JP3928373B2
JP3928373B2 JP2001176474A JP2001176474A JP3928373B2 JP 3928373 B2 JP3928373 B2 JP 3928373B2 JP 2001176474 A JP2001176474 A JP 2001176474A JP 2001176474 A JP2001176474 A JP 2001176474A JP 3928373 B2 JP3928373 B2 JP 3928373B2
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JP
Japan
Prior art keywords
pad
sample stage
moving
moving table
sliding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001176474A
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English (en)
Japanese (ja)
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JP2002367553A (ja
JP2002367553A5 (enExample
Inventor
英一 瀬谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2001176474A priority Critical patent/JP3928373B2/ja
Publication of JP2002367553A publication Critical patent/JP2002367553A/ja
Publication of JP2002367553A5 publication Critical patent/JP2002367553A5/ja
Application granted granted Critical
Publication of JP3928373B2 publication Critical patent/JP3928373B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Transmission Devices (AREA)
  • Bearings For Parts Moving Linearly (AREA)
JP2001176474A 2001-06-12 2001-06-12 試料ステージ Expired - Fee Related JP3928373B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001176474A JP3928373B2 (ja) 2001-06-12 2001-06-12 試料ステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001176474A JP3928373B2 (ja) 2001-06-12 2001-06-12 試料ステージ

Publications (3)

Publication Number Publication Date
JP2002367553A JP2002367553A (ja) 2002-12-20
JP2002367553A5 JP2002367553A5 (enExample) 2005-03-03
JP3928373B2 true JP3928373B2 (ja) 2007-06-13

Family

ID=19017453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001176474A Expired - Fee Related JP3928373B2 (ja) 2001-06-12 2001-06-12 試料ステージ

Country Status (1)

Country Link
JP (1) JP3928373B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109899388A (zh) * 2019-03-04 2019-06-18 余斯婷 一种室内设计用预埋型绿化的滑动轨道

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5429960B2 (ja) * 2008-12-02 2014-02-26 株式会社アイエイアイ 電動アクチュエータと電動アクチュエータ組立方法
KR102022471B1 (ko) * 2014-09-19 2019-09-18 한화정밀기계 주식회사 기판 검사장치
NL2013783B1 (en) * 2014-11-12 2016-10-07 Phenom-World Holding B V Sample stage.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109899388A (zh) * 2019-03-04 2019-06-18 余斯婷 一种室内设计用预埋型绿化的滑动轨道

Also Published As

Publication number Publication date
JP2002367553A (ja) 2002-12-20

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