JP3924051B2 - 被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 - Google Patents
被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 Download PDFInfo
- Publication number
- JP3924051B2 JP3924051B2 JP22046797A JP22046797A JP3924051B2 JP 3924051 B2 JP3924051 B2 JP 3924051B2 JP 22046797 A JP22046797 A JP 22046797A JP 22046797 A JP22046797 A JP 22046797A JP 3924051 B2 JP3924051 B2 JP 3924051B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- guide bush
- inner peripheral
- peripheral surface
- auxiliary electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22046797A JP3924051B2 (ja) | 1996-08-15 | 1997-08-15 | 被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21555996 | 1996-08-15 | ||
| JP21555696 | 1996-08-15 | ||
| JP8-215556 | 1996-08-19 | ||
| JP8-215559 | 1996-08-19 | ||
| JP8-217352 | 1996-08-19 | ||
| JP21735296 | 1996-08-19 | ||
| JP22046797A JP3924051B2 (ja) | 1996-08-15 | 1997-08-15 | 被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10121247A JPH10121247A (ja) | 1998-05-12 |
| JPH10121247A5 JPH10121247A5 (enExample) | 2005-06-02 |
| JP3924051B2 true JP3924051B2 (ja) | 2007-06-06 |
Family
ID=27476740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22046797A Expired - Fee Related JP3924051B2 (ja) | 1996-08-15 | 1997-08-15 | 被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3924051B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4957746B2 (ja) * | 2009-04-13 | 2012-06-20 | 株式会社デンソー | プラズマ発生装置 |
-
1997
- 1997-08-15 JP JP22046797A patent/JP3924051B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10121247A (ja) | 1998-05-12 |
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