JP3900325B2 - プローブの清掃装置 - Google Patents

プローブの清掃装置 Download PDF

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Publication number
JP3900325B2
JP3900325B2 JP20064498A JP20064498A JP3900325B2 JP 3900325 B2 JP3900325 B2 JP 3900325B2 JP 20064498 A JP20064498 A JP 20064498A JP 20064498 A JP20064498 A JP 20064498A JP 3900325 B2 JP3900325 B2 JP 3900325B2
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Japan
Prior art keywords
probe
tip
cleaning
stage
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP20064498A
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English (en)
Japanese (ja)
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JP2000028637A (ja
JP2000028637A5 (enExample
Inventor
英博 清藤
毅 井沼
英貴 鈴木
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP20064498A priority Critical patent/JP3900325B2/ja
Publication of JP2000028637A publication Critical patent/JP2000028637A/ja
Publication of JP2000028637A5 publication Critical patent/JP2000028637A5/ja
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Publication of JP3900325B2 publication Critical patent/JP3900325B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP20064498A 1998-07-15 1998-07-15 プローブの清掃装置 Expired - Lifetime JP3900325B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20064498A JP3900325B2 (ja) 1998-07-15 1998-07-15 プローブの清掃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20064498A JP3900325B2 (ja) 1998-07-15 1998-07-15 プローブの清掃装置

Publications (3)

Publication Number Publication Date
JP2000028637A JP2000028637A (ja) 2000-01-28
JP2000028637A5 JP2000028637A5 (enExample) 2005-07-14
JP3900325B2 true JP3900325B2 (ja) 2007-04-04

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ID=16427833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20064498A Expired - Lifetime JP3900325B2 (ja) 1998-07-15 1998-07-15 プローブの清掃装置

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JP (1) JP3900325B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100444191B1 (ko) * 2003-03-17 2004-08-21 주식회사 파이컴 프로브 포지셔닝 및 본딩시스템 및 그 방법
KR100797318B1 (ko) * 2006-12-08 2008-01-22 동부일렉트로닉스 주식회사 프로브 카드 니들의 접촉저항 측정장치 및 측정방법
JP2009115720A (ja) * 2007-11-08 2009-05-28 Japan Electronic Materials Corp プローブのクリーニング方法およびプローブのクリーニング装置
JP6123310B2 (ja) * 2013-01-28 2017-05-10 株式会社Ihi 放散システム

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Publication number Publication date
JP2000028637A (ja) 2000-01-28

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