JP2000028637A5 - - Google Patents

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Publication number
JP2000028637A5
JP2000028637A5 JP1998200644A JP20064498A JP2000028637A5 JP 2000028637 A5 JP2000028637 A5 JP 2000028637A5 JP 1998200644 A JP1998200644 A JP 1998200644A JP 20064498 A JP20064498 A JP 20064498A JP 2000028637 A5 JP2000028637 A5 JP 2000028637A5
Authority
JP
Japan
Prior art keywords
pressing
cleaning member
needle tip
wrapping film
probe against
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998200644A
Other languages
English (en)
Japanese (ja)
Other versions
JP3900325B2 (ja
JP2000028637A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP20064498A priority Critical patent/JP3900325B2/ja
Priority claimed from JP20064498A external-priority patent/JP3900325B2/ja
Publication of JP2000028637A publication Critical patent/JP2000028637A/ja
Publication of JP2000028637A5 publication Critical patent/JP2000028637A5/ja
Application granted granted Critical
Publication of JP3900325B2 publication Critical patent/JP3900325B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP20064498A 1998-07-15 1998-07-15 プローブの清掃装置 Expired - Lifetime JP3900325B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20064498A JP3900325B2 (ja) 1998-07-15 1998-07-15 プローブの清掃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20064498A JP3900325B2 (ja) 1998-07-15 1998-07-15 プローブの清掃装置

Publications (3)

Publication Number Publication Date
JP2000028637A JP2000028637A (ja) 2000-01-28
JP2000028637A5 true JP2000028637A5 (enExample) 2005-07-14
JP3900325B2 JP3900325B2 (ja) 2007-04-04

Family

ID=16427833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20064498A Expired - Lifetime JP3900325B2 (ja) 1998-07-15 1998-07-15 プローブの清掃装置

Country Status (1)

Country Link
JP (1) JP3900325B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100444191B1 (ko) * 2003-03-17 2004-08-21 주식회사 파이컴 프로브 포지셔닝 및 본딩시스템 및 그 방법
KR100797318B1 (ko) * 2006-12-08 2008-01-22 동부일렉트로닉스 주식회사 프로브 카드 니들의 접촉저항 측정장치 및 측정방법
JP2009115720A (ja) * 2007-11-08 2009-05-28 Japan Electronic Materials Corp プローブのクリーニング方法およびプローブのクリーニング装置
JP6123310B2 (ja) * 2013-01-28 2017-05-10 株式会社Ihi 放散システム

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