JP3893691B2 - 結像光学系 - Google Patents

結像光学系 Download PDF

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Publication number
JP3893691B2
JP3893691B2 JP27211497A JP27211497A JP3893691B2 JP 3893691 B2 JP3893691 B2 JP 3893691B2 JP 27211497 A JP27211497 A JP 27211497A JP 27211497 A JP27211497 A JP 27211497A JP 3893691 B2 JP3893691 B2 JP 3893691B2
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JP
Japan
Prior art keywords
phase region
imaging
optical system
optical filter
diffracted light
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Expired - Fee Related
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JP27211497A
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English (en)
Japanese (ja)
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JPH1195174A (ja
JPH1195174A5 (enExample
Inventor
稔彦 小澤
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Nikon Corp
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Nikon Corp
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Priority to JP27211497A priority Critical patent/JP3893691B2/ja
Publication of JPH1195174A publication Critical patent/JPH1195174A/ja
Publication of JPH1195174A5 publication Critical patent/JPH1195174A5/ja
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Publication of JP3893691B2 publication Critical patent/JP3893691B2/ja
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JP27211497A 1997-09-17 1997-09-17 結像光学系 Expired - Fee Related JP3893691B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27211497A JP3893691B2 (ja) 1997-09-17 1997-09-17 結像光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27211497A JP3893691B2 (ja) 1997-09-17 1997-09-17 結像光学系

Publications (3)

Publication Number Publication Date
JPH1195174A JPH1195174A (ja) 1999-04-09
JPH1195174A5 JPH1195174A5 (enExample) 2005-06-09
JP3893691B2 true JP3893691B2 (ja) 2007-03-14

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ID=17509289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27211497A Expired - Fee Related JP3893691B2 (ja) 1997-09-17 1997-09-17 結像光学系

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JP (1) JP3893691B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7593157B2 (en) 2004-11-29 2009-09-22 Nikon Corporation Zoom microscope
EP2037310B1 (en) 2006-07-04 2015-06-03 Nikon Corporation Microscope device
NL2004323A (en) * 2009-04-16 2010-10-18 Asml Netherlands Bv Device manufacturing method and lithographic apparatus.
JP5829212B2 (ja) * 2010-08-25 2015-12-09 株式会社ニコン 顕微鏡光学系の製造方法

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Publication number Publication date
JPH1195174A (ja) 1999-04-09

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