JP3891164B2 - 吐出装置 - Google Patents
吐出装置 Download PDFInfo
- Publication number
- JP3891164B2 JP3891164B2 JP2003355257A JP2003355257A JP3891164B2 JP 3891164 B2 JP3891164 B2 JP 3891164B2 JP 2003355257 A JP2003355257 A JP 2003355257A JP 2003355257 A JP2003355257 A JP 2003355257A JP 3891164 B2 JP3891164 B2 JP 3891164B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- axis direction
- nozzle row
- head
- discharged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 95
- 239000011344 liquid material Substances 0.000 claims description 44
- 239000000463 material Substances 0.000 description 142
- 239000010410 layer Substances 0.000 description 87
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- 238000004519 manufacturing process Methods 0.000 description 55
- 238000001035 drying Methods 0.000 description 45
- 238000000034 method Methods 0.000 description 40
- 239000011159 matrix material Substances 0.000 description 33
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- 230000032258 transport Effects 0.000 description 27
- 229910052751 metal Inorganic materials 0.000 description 23
- 239000002184 metal Substances 0.000 description 23
- 239000010409 thin film Substances 0.000 description 23
- 239000007788 liquid Substances 0.000 description 21
- 239000010408 film Substances 0.000 description 20
- 239000011521 glass Substances 0.000 description 16
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 12
- 239000008186 active pharmaceutical agent Substances 0.000 description 12
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- 238000004381 surface treatment Methods 0.000 description 11
- 238000005192 partition Methods 0.000 description 10
- 238000005401 electroluminescence Methods 0.000 description 9
- 238000009832 plasma treatment Methods 0.000 description 9
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- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 6
- 238000007599 discharging Methods 0.000 description 5
- 230000002265 prevention Effects 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
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- 239000011229 interlayer Substances 0.000 description 3
- 230000002940 repellent Effects 0.000 description 3
- 239000005871 repellent Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
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- 238000007789 sealing Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 101100507312 Invertebrate iridescent virus 6 EF1 gene Proteins 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910003445 palladium oxide Inorganic materials 0.000 description 1
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
- H10K71/236—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers using printing techniques, e.g. applying the etch liquid using an ink jet printer
Landscapes
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electroluminescent Light Sources (AREA)
- Ink Jet (AREA)
- Liquid Crystal (AREA)
- Nozzles (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003355257A JP3891164B2 (ja) | 2003-10-15 | 2003-10-15 | 吐出装置 |
| KR1020040081635A KR100698572B1 (ko) | 2003-10-15 | 2004-10-13 | 토출 장치, 도포 방법, 컬러 필터 기판의 제조 방법,일렉트로루미네선스 표시 장치의 제조 방법, 플라즈마표시 장치의 제조 방법, 및 배선 제조 방법 |
| CNB2004100881439A CN100379560C (zh) | 2003-10-15 | 2004-10-14 | 喷出装置、涂布方法、滤色器基板的制造方法 |
| US10/965,005 US7748824B2 (en) | 2003-10-15 | 2004-10-14 | Ejecting apparatus, applying method, manufacturing method of color filter substrate, manufacturing method of electroluminescence display apparatus, manufacturing method of plasma display apparatus, and manufacturing method of wire |
| TW093131162A TW200526326A (en) | 2003-10-15 | 2004-10-14 | Ejecting apparatus, applying method, manufacturing method of color filter substrate, manufacturing method of electroluminescence display apparatus, manufacturing method of plasma display apparatus, and manufacturing method of wire |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003355257A JP3891164B2 (ja) | 2003-10-15 | 2003-10-15 | 吐出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005118656A JP2005118656A (ja) | 2005-05-12 |
| JP3891164B2 true JP3891164B2 (ja) | 2007-03-14 |
Family
ID=34612917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003355257A Expired - Fee Related JP3891164B2 (ja) | 2003-10-15 | 2003-10-15 | 吐出装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7748824B2 (enExample) |
| JP (1) | JP3891164B2 (enExample) |
| KR (1) | KR100698572B1 (enExample) |
| CN (1) | CN100379560C (enExample) |
| TW (1) | TW200526326A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100493735C (zh) * | 2006-01-17 | 2009-06-03 | 欣兴电子股份有限公司 | 涂布工艺 |
| JP2009000837A (ja) * | 2007-06-19 | 2009-01-08 | Seiko Epson Corp | 液体吐出装置及び液体吐出方法 |
| TWI484301B (zh) * | 2012-10-26 | 2015-05-11 | Nat Univ Tsing Hua | 形成連續性三維結構的噴墨方法 |
| JP6232239B2 (ja) * | 2013-09-30 | 2017-11-15 | 株式会社Screenホールディングス | 塗布装置 |
| KR102092149B1 (ko) * | 2013-11-01 | 2020-03-23 | 세메스 주식회사 | 처리액 토출 장치 및 방법, 그리고 처리액 도포 설비 |
| KR102314565B1 (ko) * | 2014-03-10 | 2021-10-18 | 무사시 엔지니어링 가부시키가이샤 | 도포 장치 및 도포 방법 |
| CN103895346B (zh) * | 2014-04-04 | 2016-03-30 | 深圳市华星光电技术有限公司 | 一种喷墨涂布装置及喷涂方法 |
| TWI659784B (zh) * | 2015-02-04 | 2019-05-21 | 萬潤科技股份有限公司 | Liquid material coating method and device |
| US10940501B2 (en) * | 2018-01-30 | 2021-03-09 | Ford Motor Company | Composite ultrasonic material applicators with individually addressable micro-applicators and methods of use thereof |
| US11872580B2 (en) * | 2018-01-30 | 2024-01-16 | Ford Motor Company | Composite ultrasonic material applicators with embedded shaping gas micro-applicators and methods of use thereof |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0911455A (ja) | 1995-06-29 | 1997-01-14 | Mita Ind Co Ltd | 画像記録装置 |
| JP3059678B2 (ja) * | 1995-07-14 | 2000-07-04 | キヤノン株式会社 | カラーフィルタの製造方法及び製造装置 |
| US6328400B1 (en) * | 1997-04-02 | 2001-12-11 | Seiko Epson Corporation | Printer system, method of generating image, and recording medium for realizing the method |
| JPH10286966A (ja) | 1997-04-16 | 1998-10-27 | Minolta Co Ltd | インクジェット記録装置 |
| JP4028067B2 (ja) * | 1998-02-26 | 2007-12-26 | 東芝テック株式会社 | 記録ヘッドの駆動方法 |
| JP2000255045A (ja) * | 1999-03-05 | 2000-09-19 | Seiko Epson Corp | インターレース式プリンタおよびインターレース式プリント方法 |
| JP2001026101A (ja) | 1999-07-15 | 2001-01-30 | Canon Inc | インクジェット記録装置及び記録ヘッド駆動方法 |
| JP2001088291A (ja) * | 1999-09-21 | 2001-04-03 | Seiko Epson Corp | インクジェット式記録ヘッド |
| JP2002137388A (ja) * | 2000-11-01 | 2002-05-14 | Konica Corp | インクジェットヘッド |
| JP3997747B2 (ja) | 2001-10-19 | 2007-10-24 | セイコーエプソン株式会社 | ヘッドユニット、そのセット方法および電子機器 |
| US6679583B2 (en) * | 2001-10-31 | 2004-01-20 | Agfa-Gevaert | Fast mutually interstitial printing |
| JP2003275647A (ja) * | 2002-03-20 | 2003-09-30 | Seiko Epson Corp | 機能液滴吐出装置、並びにこれを用いた液晶表示装置の製造方法、有機el装置の製造方法、電子放出装置の製造方法、pdp装置の製造方法、電気泳動表示装置の製造方法、カラーフィルタの製造方法、有機elの製造方法、スペーサ形成方法、金属配線形成方法、レンズ形成方法、レジスト形成方法および光拡散体形成方法 |
| JP4408608B2 (ja) * | 2002-06-24 | 2010-02-03 | 株式会社リコー | ヘッド駆動制御装置及び画像記録装置 |
-
2003
- 2003-10-15 JP JP2003355257A patent/JP3891164B2/ja not_active Expired - Fee Related
-
2004
- 2004-10-13 KR KR1020040081635A patent/KR100698572B1/ko not_active Expired - Fee Related
- 2004-10-14 US US10/965,005 patent/US7748824B2/en active Active
- 2004-10-14 CN CNB2004100881439A patent/CN100379560C/zh not_active Expired - Lifetime
- 2004-10-14 TW TW093131162A patent/TW200526326A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005118656A (ja) | 2005-05-12 |
| US20060051496A1 (en) | 2006-03-09 |
| CN1611356A (zh) | 2005-05-04 |
| KR100698572B1 (ko) | 2007-03-21 |
| TW200526326A (en) | 2005-08-16 |
| CN100379560C (zh) | 2008-04-09 |
| TWI292726B (enExample) | 2008-01-21 |
| US7748824B2 (en) | 2010-07-06 |
| KR20050036748A (ko) | 2005-04-20 |
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