JP3873398B2 - 酸素センサ素子及びその製造方法 - Google Patents

酸素センサ素子及びその製造方法 Download PDF

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Publication number
JP3873398B2
JP3873398B2 JP26284197A JP26284197A JP3873398B2 JP 3873398 B2 JP3873398 B2 JP 3873398B2 JP 26284197 A JP26284197 A JP 26284197A JP 26284197 A JP26284197 A JP 26284197A JP 3873398 B2 JP3873398 B2 JP 3873398B2
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Japan
Prior art keywords
oxygen sensor
sensor element
protective layer
dense layer
layer
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Expired - Fee Related
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JP26284197A
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English (en)
Japanese (ja)
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JPH1183789A (ja
JPH1183789A5 (https=
Inventor
浩 杉野
並次 藤井
泰道 堀田
博美 佐野
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Denso Corp
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Denso Corp
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Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP26284197A priority Critical patent/JP3873398B2/ja
Publication of JPH1183789A publication Critical patent/JPH1183789A/ja
Publication of JPH1183789A5 publication Critical patent/JPH1183789A5/ja
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Publication of JP3873398B2 publication Critical patent/JP3873398B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)
JP26284197A 1997-09-09 1997-09-09 酸素センサ素子及びその製造方法 Expired - Fee Related JP3873398B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26284197A JP3873398B2 (ja) 1997-09-09 1997-09-09 酸素センサ素子及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26284197A JP3873398B2 (ja) 1997-09-09 1997-09-09 酸素センサ素子及びその製造方法

Publications (3)

Publication Number Publication Date
JPH1183789A JPH1183789A (ja) 1999-03-26
JPH1183789A5 JPH1183789A5 (https=) 2004-12-16
JP3873398B2 true JP3873398B2 (ja) 2007-01-24

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ID=17381370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26284197A Expired - Fee Related JP3873398B2 (ja) 1997-09-09 1997-09-09 酸素センサ素子及びその製造方法

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JP (1) JP3873398B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1154263A4 (en) 1999-10-27 2006-08-30 Ngk Spark Plug Co OXYGEN DETECTOR AND METHOD FOR MANUFACTURING DETECTION ELEMENT
JP2002031618A (ja) * 2000-05-12 2002-01-31 Denso Corp ガスセンサ
JP4520648B2 (ja) * 2001-01-31 2010-08-11 日本特殊陶業株式会社 ガスセンサ及びその製造方法
JP4622146B2 (ja) 2001-04-25 2011-02-02 株式会社デンソー ガスセンサ素子の製造方法
JP4631926B2 (ja) * 2001-07-31 2011-02-16 株式会社デンソー ガスセンサ
JP2007078473A (ja) * 2005-09-13 2007-03-29 Toyota Motor Corp ガスセンサ
JP5298633B2 (ja) * 2008-05-19 2013-09-25 株式会社デンソー 酸素センサ
JP6451534B2 (ja) * 2014-11-19 2019-01-16 株式会社デンソー ガスセンサ素子
WO2016080176A1 (ja) * 2014-11-19 2016-05-26 株式会社デンソー ガスセンサ素子

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Publication number Publication date
JPH1183789A (ja) 1999-03-26

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