JP3859774B2 - 回転基板ホルダー - Google Patents

回転基板ホルダー Download PDF

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Publication number
JP3859774B2
JP3859774B2 JP19610596A JP19610596A JP3859774B2 JP 3859774 B2 JP3859774 B2 JP 3859774B2 JP 19610596 A JP19610596 A JP 19610596A JP 19610596 A JP19610596 A JP 19610596A JP 3859774 B2 JP3859774 B2 JP 3859774B2
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JP
Japan
Prior art keywords
substrate
substrate holder
recess
rotating
rotating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19610596A
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English (en)
Japanese (ja)
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JPH1036965A5 (enExample
JPH1036965A (ja
Inventor
宗憲 石見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP19610596A priority Critical patent/JP3859774B2/ja
Publication of JPH1036965A publication Critical patent/JPH1036965A/ja
Publication of JPH1036965A5 publication Critical patent/JPH1036965A5/ja
Application granted granted Critical
Publication of JP3859774B2 publication Critical patent/JP3859774B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP19610596A 1996-07-25 1996-07-25 回転基板ホルダー Expired - Fee Related JP3859774B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19610596A JP3859774B2 (ja) 1996-07-25 1996-07-25 回転基板ホルダー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19610596A JP3859774B2 (ja) 1996-07-25 1996-07-25 回転基板ホルダー

Publications (3)

Publication Number Publication Date
JPH1036965A JPH1036965A (ja) 1998-02-10
JPH1036965A5 JPH1036965A5 (enExample) 2004-08-05
JP3859774B2 true JP3859774B2 (ja) 2006-12-20

Family

ID=16352324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19610596A Expired - Fee Related JP3859774B2 (ja) 1996-07-25 1996-07-25 回転基板ホルダー

Country Status (1)

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JP (1) JP3859774B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6447853B1 (en) 1998-11-30 2002-09-10 Kawasaki Microelectronics, Inc. Method and apparatus for processing semiconductor substrates
CN109183001A (zh) * 2018-11-27 2019-01-11 中山德华芯片技术有限公司 一种应用于半导体材料外延生长的石墨盘

Also Published As

Publication number Publication date
JPH1036965A (ja) 1998-02-10

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