JPH1036965A5 - - Google Patents

Info

Publication number
JPH1036965A5
JPH1036965A5 JP1996196105A JP19610596A JPH1036965A5 JP H1036965 A5 JPH1036965 A5 JP H1036965A5 JP 1996196105 A JP1996196105 A JP 1996196105A JP 19610596 A JP19610596 A JP 19610596A JP H1036965 A5 JPH1036965 A5 JP H1036965A5
Authority
JP
Japan
Prior art keywords
substrate
recess
substrate holder
coating
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996196105A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1036965A (ja
JP3859774B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP19610596A priority Critical patent/JP3859774B2/ja
Priority claimed from JP19610596A external-priority patent/JP3859774B2/ja
Publication of JPH1036965A publication Critical patent/JPH1036965A/ja
Publication of JPH1036965A5 publication Critical patent/JPH1036965A5/ja
Application granted granted Critical
Publication of JP3859774B2 publication Critical patent/JP3859774B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP19610596A 1996-07-25 1996-07-25 回転基板ホルダー Expired - Fee Related JP3859774B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19610596A JP3859774B2 (ja) 1996-07-25 1996-07-25 回転基板ホルダー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19610596A JP3859774B2 (ja) 1996-07-25 1996-07-25 回転基板ホルダー

Publications (3)

Publication Number Publication Date
JPH1036965A JPH1036965A (ja) 1998-02-10
JPH1036965A5 true JPH1036965A5 (enExample) 2004-08-05
JP3859774B2 JP3859774B2 (ja) 2006-12-20

Family

ID=16352324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19610596A Expired - Fee Related JP3859774B2 (ja) 1996-07-25 1996-07-25 回転基板ホルダー

Country Status (1)

Country Link
JP (1) JP3859774B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6447853B1 (en) 1998-11-30 2002-09-10 Kawasaki Microelectronics, Inc. Method and apparatus for processing semiconductor substrates
CN109183001A (zh) * 2018-11-27 2019-01-11 中山德华芯片技术有限公司 一种应用于半导体材料外延生长的石墨盘

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