JP3851679B2 - 空間光変調器 - Google Patents

空間光変調器 Download PDF

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Publication number
JP3851679B2
JP3851679B2 JP09704196A JP9704196A JP3851679B2 JP 3851679 B2 JP3851679 B2 JP 3851679B2 JP 09704196 A JP09704196 A JP 09704196A JP 9704196 A JP9704196 A JP 9704196A JP 3851679 B2 JP3851679 B2 JP 3851679B2
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Japan
Prior art keywords
yoke
address
mirror
pixel
address electrode
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Expired - Fee Related
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JP09704196A
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Japanese (ja)
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JPH08334709A (ja
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ジェイ．ホーンベック ラリー
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テキサス インスツルメンツ インコーポレイテツド
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
JP09704196A 1995-04-18 1996-04-18 空間光変調器 Expired - Fee Related JP3851679B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US424021 1995-04-18
US08/424,021 US5535047A (en) 1995-04-18 1995-04-18 Active yoke hidden hinge digital micromirror device

Publications (2)

Publication Number Publication Date
JPH08334709A JPH08334709A (ja) 1996-12-17
JP3851679B2 true JP3851679B2 (ja) 2006-11-29

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JP09704196A Expired - Fee Related JP3851679B2 (ja) 1995-04-18 1996-04-18 空間光変調器

Country Status (8)

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US (1) US5535047A (cg-RX-API-DMAC7.html)
EP (1) EP0738910B1 (cg-RX-API-DMAC7.html)
JP (1) JP3851679B2 (cg-RX-API-DMAC7.html)
KR (1) KR100416679B1 (cg-RX-API-DMAC7.html)
CN (1) CN1160218A (cg-RX-API-DMAC7.html)
CA (1) CA2173637C (cg-RX-API-DMAC7.html)
DE (1) DE69634222T2 (cg-RX-API-DMAC7.html)
TW (1) TW295631B (cg-RX-API-DMAC7.html)

Families Citing this family (421)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US6426013B1 (en) 1993-10-18 2002-07-30 Xros, Inc. Method for fabricating micromachined members coupled for relative rotation
US6467345B1 (en) 1993-10-18 2002-10-22 Xros, Inc. Method of operating micromachined members coupled for relative rotation
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6680792B2 (en) 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US5703728A (en) * 1994-11-02 1997-12-30 Texas Instruments Incorporated Support post architecture for micromechanical devices
KR100213281B1 (ko) * 1994-10-31 1999-08-02 전주범 광로조절장치
US5650881A (en) * 1994-11-02 1997-07-22 Texas Instruments Incorporated Support post architecture for micromechanical devices
US5671083A (en) * 1995-02-02 1997-09-23 Texas Instruments Incorporated Spatial light modulator with buried passive charge storage cell array
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5835256A (en) * 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US5739941A (en) * 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
US6172496B1 (en) 1995-09-18 2001-01-09 James P. Karins Static event detection/protection device
US5867202A (en) * 1995-12-15 1999-02-02 Texas Instruments Incorporated Micromechanical devices with spring tips
US6686291B1 (en) 1996-05-24 2004-02-03 Texas Instruments Incorporated Undercut process with isotropic plasma etching at package level
US5825529A (en) * 1996-06-27 1998-10-20 Xerox Corporation Gyricon display with no elastomer substrate
US5754332A (en) * 1996-06-27 1998-05-19 Xerox Corporation Monolayer gyricon display
US5914805A (en) * 1996-06-27 1999-06-22 Xerox Corporation Gyricon display with interstitially packed particles
US6055091A (en) * 1996-06-27 2000-04-25 Xerox Corporation Twisting-cylinder display
US5894367A (en) * 1996-09-13 1999-04-13 Xerox Corporation Twisting cylinder display using multiple chromatic values
US5922268A (en) * 1997-10-30 1999-07-13 Xerox Corporation Method of manufacturing a twisting cylinder display using multiple chromatic values
US5904790A (en) * 1997-10-30 1999-05-18 Xerox Corporation Method of manufacturing a twisting cylinder display using multiple chromatic values
US5771116A (en) * 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
DE19710597C1 (de) * 1997-03-14 1998-07-23 Block Augenoptische Und Ophtha Vorrichtung zur Erzeugung eines beleuchteten Bereiches mit hoher, lokal veränderbarer Energiedichte mit Hilfe eines Lasers und einer DMD
DE69806846T2 (de) * 1997-05-08 2002-12-12 Texas Instruments Inc., Dallas Verbesserungen für räumliche Lichtmodulatoren
US5817569A (en) * 1997-05-08 1998-10-06 Texas Instruments Incorporated Method of reducing wafer particles after partial saw
US5903383A (en) * 1997-05-19 1999-05-11 The Charles Stark Draper Laboratory Inc. Electrostatic memory micromirror display system
US5808780A (en) * 1997-06-09 1998-09-15 Texas Instruments Incorporated Non-contacting micromechanical optical switch
US5774254A (en) * 1997-06-26 1998-06-30 Xerox Corporation Fault tolerant light modulator display system
US5790297A (en) 1997-06-26 1998-08-04 Xerox Corporation Optical row displacement for a fault tolerant projective display
DE19733370C2 (de) * 1997-08-01 2000-07-06 Agfa Gevaert Ag Vorrichtung und Verfahren zum Kopieren von Bilder auf lichtempfindliches Aufzeichnungsmaterial
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
DE19757197A1 (de) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Herstellungsverfahren für mikromechanische Vorrichtung
US5900192A (en) * 1998-01-09 1999-05-04 Xerox Corporation Method and apparatus for fabricating very small two-color balls for a twisting ball display
US5976428A (en) * 1998-01-09 1999-11-02 Xerox Corporation Method and apparatus for controlling formation of two-color balls for a twisting ball display
EP2332645A1 (en) * 1998-02-11 2011-06-15 The University Of Houston Apparatus for chemical and biochemical reactions using photo-generated reagents
US20040035690A1 (en) * 1998-02-11 2004-02-26 The Regents Of The University Of Michigan Method and apparatus for chemical and biochemical reactions using photo-generated reagents
WO1999042813A1 (en) 1998-02-23 1999-08-26 Wisconsin Alumni Research Foundation Method and apparatus for synthesis of arrays of dna probes
US6206290B1 (en) 1998-03-06 2001-03-27 Symbol Technologies, Inc. Control system for oscillating optical element in scanners
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
US6271957B1 (en) * 1998-05-29 2001-08-07 Affymetrix, Inc. Methods involving direct write optical lithography
DE19824709A1 (de) * 1998-06-03 1999-12-09 Bundesdruckerei Gmbh Erzeugung von Leuchtdichte-Arrays mit digitalem Array-Strahlungsprozessoren
US6962419B2 (en) 1998-09-24 2005-11-08 Reflectivity, Inc Micromirror elements, package for the micromirror elements, and projection system therefor
US6529310B1 (en) 1998-09-24 2003-03-04 Reflectivity, Inc. Deflectable spatial light modulator having superimposed hinge and deflectable element
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
US5991066A (en) * 1998-10-15 1999-11-23 Memsolutions, Inc. Membrane-actuated charge controlled mirror
US6123985A (en) * 1998-10-28 2000-09-26 Solus Micro Technologies, Inc. Method of fabricating a membrane-actuated charge controlled mirror (CCM)
US6700606B1 (en) * 1999-06-09 2004-03-02 Activcard Ireland Limited Micromirror optical imager
US6671005B1 (en) 1999-06-21 2003-12-30 Altman Stage Lighting Company Digital micromirror stage lighting system
US7306338B2 (en) 1999-07-28 2007-12-11 Moxtek, Inc Image projection system with a polarizing beam splitter
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6741383B2 (en) 2000-08-11 2004-05-25 Reflectivity, Inc. Deflectable micromirrors with stopping mechanisms
US6396619B1 (en) 2000-01-28 2002-05-28 Reflectivity, Inc. Deflectable spatial light modulator having stopping mechanisms
US6529311B1 (en) * 1999-10-28 2003-03-04 The Trustees Of Boston University MEMS-based spatial-light modulator with integrated electronics
US6412972B1 (en) 1999-12-10 2002-07-02 Altman Stage Lighting Company Digital light protection apparatus with digital micromirror device and rotatable housing
US6440252B1 (en) 1999-12-17 2002-08-27 Xerox Corporation Method for rotatable element assembly
JP2001249287A (ja) * 1999-12-30 2001-09-14 Texas Instr Inc <Ti> 双安定マイクロミラー・アレイを動作させる方法
US6545671B1 (en) 2000-03-02 2003-04-08 Xerox Corporation Rotating element sheet material with reversible highlighting
US6498674B1 (en) 2000-04-14 2002-12-24 Xerox Corporation Rotating element sheet material with generalized containment structure
FR2807844B1 (fr) * 2000-04-17 2003-05-16 Commissariat Energie Atomique Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique
KR100708077B1 (ko) * 2000-05-01 2007-04-16 삼성전자주식회사 화상표시장치용 마이크로미러 디바이스
US6504525B1 (en) 2000-05-03 2003-01-07 Xerox Corporation Rotating element sheet material with microstructured substrate and method of use
US6813053B1 (en) * 2000-05-19 2004-11-02 The Regents Of The University Of California Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
US6781742B2 (en) * 2000-07-11 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
US7099065B2 (en) * 2000-08-03 2006-08-29 Reflectivity, Inc. Micromirrors with OFF-angle electrodes and stops
US6545758B1 (en) * 2000-08-17 2003-04-08 Perry Sandstrom Microarray detector and synthesizer
US6847347B1 (en) 2000-08-17 2005-01-25 Xerox Corporation Electromagnetophoretic display system and method
US6567163B1 (en) 2000-08-17 2003-05-20 Able Signal Company Llc Microarray detector and synthesizer
US7012731B2 (en) * 2000-08-30 2006-03-14 Reflectivity, Inc Packaged micromirror array for a projection display
US6522454B2 (en) 2000-09-29 2003-02-18 Texas Instruments Incorporated Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
EP1348144A2 (en) * 2000-11-22 2003-10-01 Flixel Ltd. Display devices manufactured utilizing mems technology
US6614576B2 (en) * 2000-12-15 2003-09-02 Texas Instruments Incorporated Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
US6524500B2 (en) 2000-12-28 2003-02-25 Xerox Corporation Method for making microencapsulated gyricon beads
US6897848B2 (en) 2001-01-11 2005-05-24 Xerox Corporation Rotating element sheet material and stylus with gradient field addressing
US6690350B2 (en) 2001-01-11 2004-02-10 Xerox Corporation Rotating element sheet material with dual vector field addressing
US6970154B2 (en) 2001-01-11 2005-11-29 Jpmorgan Chase Bank Fringe-field filter for addressable displays
US6480320B2 (en) 2001-02-07 2002-11-12 Transparent Optical, Inc. Microelectromechanical mirror and mirror array
US6585378B2 (en) 2001-03-20 2003-07-01 Eastman Kodak Company Digital cinema projector
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US7023606B2 (en) * 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
JP3750574B2 (ja) * 2001-08-16 2006-03-01 株式会社デンソー 薄膜電磁石およびこれを用いたスイッチング素子
KR100398310B1 (ko) 2001-09-13 2003-09-19 한국과학기술원 엇물린 외팔보들을 이용한 마이크로미러 디바이스 및 그응용소자
US6844952B2 (en) * 2001-09-18 2005-01-18 Vitesse Semiconductor Corporation Actuator-controlled mirror with Z-stop mechanism
US6809851B1 (en) * 2001-10-24 2004-10-26 Decicon, Inc. MEMS driver
US6699570B2 (en) 2001-11-06 2004-03-02 Xerox Corporation Colored cyber toner using multicolored gyricon spheres
US6885492B2 (en) 2001-11-08 2005-04-26 Imaginative Optics, Inc. Spatial light modulator apparatus
DE60214111T2 (de) * 2001-11-21 2007-02-22 Texas Instruments Inc., Dallas Jochlose digitale Mikrospiegel-Vorrichtung mit verdecktem Gelenk
WO2003048836A2 (en) * 2001-12-03 2003-06-12 Flixel Ltd. Display devices
US7116459B2 (en) * 2001-12-27 2006-10-03 Texas Instruments Incorporated Field diode detection of excess light conditions for spatial light modulator
US6909473B2 (en) 2002-01-07 2005-06-21 Eastman Kodak Company Display apparatus and method
US7061561B2 (en) 2002-01-07 2006-06-13 Moxtek, Inc. System for creating a patterned polarization compensator
US6808269B2 (en) * 2002-01-16 2004-10-26 Eastman Kodak Company Projection apparatus using spatial light modulator
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US20030187330A1 (en) * 2002-03-28 2003-10-02 Fuji Photo Optical Co., Ltd. Electronic endoscope apparatus using micromirror device
US7018268B2 (en) * 2002-04-09 2006-03-28 Strasbaugh Protection of work piece during surface processing
WO2003086955A1 (en) * 2002-04-12 2003-10-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for operating a micromechanical element
US6996292B1 (en) 2002-04-18 2006-02-07 Sandia Corporation Staring 2-D hadamard transform spectral imager
US6676260B2 (en) 2002-04-25 2004-01-13 Eastman Kodak Company Projection apparatus using spatial light modulator with relay lens and dichroic combiner
US6648475B1 (en) 2002-05-20 2003-11-18 Eastman Kodak Company Method and apparatus for increasing color gamut of a display
US7034984B2 (en) * 2002-06-19 2006-04-25 Miradia Inc. Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
US20030234994A1 (en) * 2002-06-19 2003-12-25 Pan Shaoher X. Reflective spatial light modulator
US7206110B2 (en) * 2002-06-19 2007-04-17 Miradia Inc. Memory cell dual protection
US6992810B2 (en) * 2002-06-19 2006-01-31 Miradia Inc. High fill ratio reflective spatial light modulator with hidden hinge
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US20040069742A1 (en) * 2002-06-19 2004-04-15 Pan Shaoher X. Fabrication of a reflective spatial light modulator
US6736514B2 (en) 2002-06-21 2004-05-18 Eastman Kodak Company Imaging apparatus for increased color gamut using dual spatial light modulators
US6843574B2 (en) * 2002-08-20 2005-01-18 Intel Corporation Gimbaled micromechanical rotation system
JP2004101826A (ja) * 2002-09-09 2004-04-02 Fuji Photo Optical Co Ltd プロジェクタ用光学系およびこれを用いたプロジェクタ装置
US6809873B2 (en) * 2002-09-09 2004-10-26 Eastman Kodak Company Color illumination system for spatial light modulators using multiple double telecentric relays
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US6733144B2 (en) * 2002-09-27 2004-05-11 Intel Corporation Shock protectors for micro-mechanical systems
US6769772B2 (en) * 2002-10-11 2004-08-03 Eastman Kodak Company Six color display apparatus having increased color gamut
US6870659B2 (en) * 2002-10-11 2005-03-22 Exajoule, Llc Micromirror systems with side-supported mirrors and concealed flexure members
US6825968B2 (en) * 2002-10-11 2004-11-30 Exajoule, Llc Micromirror systems with electrodes configured for sequential mirror attraction
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US6802613B2 (en) * 2002-10-16 2004-10-12 Eastman Kodak Company Broad gamut color display apparatus using an electromechanical grating device
US6807010B2 (en) * 2002-11-13 2004-10-19 Eastman Kodak Company Projection display apparatus having both incoherent and laser light sources
US6947459B2 (en) * 2002-11-25 2005-09-20 Eastman Kodak Company Organic vertical cavity laser and imaging system
US7405860B2 (en) * 2002-11-26 2008-07-29 Texas Instruments Incorporated Spatial light modulators with light blocking/absorbing areas
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US20040150794A1 (en) * 2003-01-30 2004-08-05 Eastman Kodak Company Projector with camcorder defeat
FR2850762A1 (fr) * 2003-01-31 2004-08-06 Commissariat Energie Atomique Dispositif d'orientation d'un objet
US7436573B2 (en) * 2003-02-12 2008-10-14 Texas Instruments Incorporated Electrical connections in microelectromechanical devices
US6885494B2 (en) * 2003-02-12 2005-04-26 Reflectivity, Inc. High angle micro-mirrors and processes
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7423794B2 (en) * 2003-02-20 2008-09-09 Technion Research & Development Foundation Ltd. Device and method for stacked multi-level uncoupled electrostatic actuators
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
US6758565B1 (en) * 2003-03-20 2004-07-06 Eastman Kodak Company Projection apparatus using telecentric optics
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US7015885B2 (en) * 2003-03-22 2006-03-21 Active Optical Networks, Inc. MEMS devices monolithically integrated with drive and control circuitry
US7375874B1 (en) 2003-03-22 2008-05-20 Active Optical Mems Inc. Light modulator with integrated drive and control circuitry
US7221759B2 (en) * 2003-03-27 2007-05-22 Eastman Kodak Company Projector with enhanced security camcorder defeat
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
US7095546B2 (en) * 2003-04-24 2006-08-22 Metconnex Canada Inc. Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
EP1636628A4 (en) * 2003-06-02 2009-04-15 Miradia Inc REFLECTIVE ROOM LIGHT MODULATOR WITH HIGH FILLING RATIO WITH HORIZONTAL SWITCHING MEMBER
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
US6839181B1 (en) * 2003-06-25 2005-01-04 Eastman Kodak Company Display apparatus
US7212359B2 (en) * 2003-07-25 2007-05-01 Texas Instruments Incorporated Color rendering of illumination light in display systems
US7131762B2 (en) * 2003-07-25 2006-11-07 Texas Instruments Incorporated Color rendering of illumination light in display systems
US20050094241A1 (en) * 2003-11-01 2005-05-05 Fusao Ishii Electromechanical micromirror devices and methods of manufacturing the same
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
JP4406549B2 (ja) 2003-09-22 2010-01-27 富士フイルム株式会社 光変調素子及び光変調アレイ素子並びにそれを用いた露光装置
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
JP2005121906A (ja) 2003-10-16 2005-05-12 Fuji Photo Film Co Ltd 反射型光変調アレイ素子及び露光装置
US8238019B2 (en) * 2003-11-01 2012-08-07 Silicon Quest Kabushiki-Kaisha Projection apparatus with coherent light source
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7026695B2 (en) * 2003-11-19 2006-04-11 Miradia Inc. Method and apparatus to reduce parasitic forces in electro-mechanical systems
US7428353B1 (en) 2003-12-02 2008-09-23 Adriatic Research Institute MEMS device control with filtered voltage signal shaping
US7295726B1 (en) 2003-12-02 2007-11-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US6902277B1 (en) 2004-01-06 2005-06-07 Eastman Kodak Company Housing for a spatial light modulator
JP4162606B2 (ja) 2004-01-26 2008-10-08 富士フイルム株式会社 光変調素子、光変調素子アレイ、及び画像形成装置
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7333260B2 (en) * 2004-08-09 2008-02-19 Stereo Display, Inc. Two-dimensional image projection system
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
CN1930892B (zh) * 2004-03-19 2012-04-18 汤姆森特许公司 视频处理器对准箝位弹簧
US7304782B2 (en) 2004-03-24 2007-12-04 Fujifilm Corporation Driving method of spatial light modulator array, spatial light modulator array, and image forming apparatus
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US7068409B2 (en) * 2004-03-31 2006-06-27 Lucent Technologies Inc. Tip-tilt-piston actuator
US7060895B2 (en) 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7449284B2 (en) 2004-05-11 2008-11-11 Miradia Inc. Method and structure for fabricating mechanical mirror structures using backside alignment techniques
US20050255666A1 (en) * 2004-05-11 2005-11-17 Miradia Inc. Method and structure for aligning mechanical based device to integrated circuits
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7787170B2 (en) * 2004-06-15 2010-08-31 Texas Instruments Incorporated Micromirror array assembly with in-array pillars
US7042619B1 (en) * 2004-06-18 2006-05-09 Miradia Inc. Mirror structure with single crystal silicon cross-member
US7483126B2 (en) * 2004-06-23 2009-01-27 Texas Instruments Incorporated Performance analyses of micromirror devices
US7113322B2 (en) * 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
US7068417B2 (en) * 2004-07-28 2006-06-27 Miradia Inc. Method and apparatus for a reflective spatial light modulator with a flexible pedestal
EP1855142A3 (en) 2004-07-29 2008-07-30 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7259449B2 (en) 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7460246B2 (en) 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7368803B2 (en) 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
BRPI0509575A (pt) 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7535466B2 (en) 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US7420728B2 (en) 2004-09-27 2008-09-02 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7586484B2 (en) 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
CN1769945A (zh) 2004-09-30 2006-05-10 富士胶片株式会社 微型机电式调制元件和微型机电式调制元件阵列
US7092143B2 (en) * 2004-10-19 2006-08-15 Reflectivity, Inc Micromirror array device and a method for making the same
US7158279B2 (en) * 2004-10-19 2007-01-02 Texas Instruments Incorporated Spatial light modulators with non-uniform pixels
US7961393B2 (en) 2004-12-06 2011-06-14 Moxtek, Inc. Selectively absorptive wire-grid polarizer
US7800823B2 (en) 2004-12-06 2010-09-21 Moxtek, Inc. Polarization device to polarize and further control light
US7570424B2 (en) 2004-12-06 2009-08-04 Moxtek, Inc. Multilayer wire-grid polarizer
US7630133B2 (en) 2004-12-06 2009-12-08 Moxtek, Inc. Inorganic, dielectric, grid polarizer and non-zero order diffraction grating
US7106492B2 (en) * 2004-12-21 2006-09-12 Texas Instruments Incorporated Bias voltage routing scheme for a digital micro-mirror device
US8207004B2 (en) * 2005-01-03 2012-06-26 Miradia Inc. Method and structure for forming a gyroscope and accelerometer
US7172921B2 (en) 2005-01-03 2007-02-06 Miradia Inc. Method and structure for forming an integrated spatial light modulator
US7142349B2 (en) * 2005-01-07 2006-11-28 Miradia Inc. Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
US7199918B2 (en) * 2005-01-07 2007-04-03 Miradia Inc. Electrical contact method and structure for deflection devices formed in an array configuration
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
CA2536722A1 (en) * 2005-02-16 2006-08-16 Jds Uniphase Inc. Articulated mems structures
US7295363B2 (en) 2005-04-08 2007-11-13 Texas Instruments Incorporated Optical coating on light transmissive substrates of micromirror devices
JP4851443B2 (ja) * 2005-04-11 2012-01-11 パナソニック株式会社 微小機械構造体
US20060238530A1 (en) * 2005-04-20 2006-10-26 Texas Instruments Incorporated Micro-mirror element and method
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
EP1878001A1 (en) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamic driver ic and display panel configuration
US7262900B2 (en) * 2005-05-10 2007-08-28 Texas Instruments Incorporated Utilizing a protective plug to maintain the integrity of the FTP shrink hinge
US7927423B1 (en) 2005-05-25 2011-04-19 Abbott Kenneth A Vapor deposition of anti-stiction layer for micromechanical devices
US7202989B2 (en) 2005-06-01 2007-04-10 Miradia Inc. Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate
US7298539B2 (en) * 2005-06-01 2007-11-20 Miradia Inc. Co-planar surface and torsion device mirror structure and method of manufacture for optical displays
US20060279708A1 (en) * 2005-06-13 2006-12-14 Eastman Kodak Company Electronic display apparatus having adaptable color gamut
US7190508B2 (en) * 2005-06-15 2007-03-13 Miradia Inc. Method and structure of patterning landing pad structures for spatial light modulators
US7184195B2 (en) 2005-06-15 2007-02-27 Miradia Inc. Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
JP4484778B2 (ja) 2005-07-08 2010-06-16 富士フイルム株式会社 微小薄膜可動素子および微小薄膜可動素子アレイ並びに微小薄膜可動素子の駆動方法
JP2007015067A (ja) 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
WO2007013939A1 (en) 2005-07-22 2007-02-01 Qualcomm Incorporated Support structure for mems device and methods therefor
RU2468988C2 (ru) 2005-07-22 2012-12-10 Квалкомм Инкорпорэйтэд Устройства мэмс, имеющие поддерживающие структуры, и способы их изготовления
EP2495212A3 (en) 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
JP2007033787A (ja) 2005-07-26 2007-02-08 Fujifilm Corp 微小薄膜可動素子および微小薄膜可動素子アレイ並びに微小薄膜可動素子アレイの駆動方法
US7139113B1 (en) * 2005-07-29 2006-11-21 Texas Instruments Incorporated Digital micro-mirror device with free standing spring tips and distributed address electrodes
US20070041077A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Pocket-sized two-dimensional image projection system
US8031578B2 (en) * 2005-08-26 2011-10-04 Panasonic Corporation Microarray with actuators inside and outside of light-irradiated region, and optical head device and optical information device incorporating the same
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7374962B2 (en) * 2005-09-29 2008-05-20 Miradia Inc. Method of fabricating reflective spatial light modulator having high contrast ratio
US7502158B2 (en) 2005-10-13 2009-03-10 Miradia Inc. Method and structure for high fill factor spatial light modulator with integrated spacer layer
US7675670B2 (en) 2005-10-28 2010-03-09 Miradia Inc. Fabrication of a high fill ratio silicon spatial light modulator
US7630114B2 (en) * 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7522330B2 (en) * 2005-10-28 2009-04-21 Miradia Inc. High fill ratio silicon spatial light modulator
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
JP2007199101A (ja) 2006-01-23 2007-08-09 Fujifilm Corp 微小電気機械素子アレイ装置及び画像形成装置
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7582952B2 (en) 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
DE102006013140A1 (de) * 2006-03-20 2007-09-27 Siemens Ag Head-Up-Display, insbesondere für ein Kraftfahrzeug
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7430072B2 (en) * 2006-04-12 2008-09-30 Texas Instruments Incorporated System and method for increasing image quality in a display system
US7324196B2 (en) * 2006-04-13 2008-01-29 Neil Goldstein Spectral encoder
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7477219B2 (en) * 2006-05-08 2009-01-13 Texas Instruments Incorporated Micro-mirror and method
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
WO2007143623A2 (en) 2006-06-02 2007-12-13 Stalford Harold L Methods and systems for micro machines
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7385744B2 (en) 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
JP5282883B2 (ja) * 2006-07-06 2013-09-04 株式会社ニコン 光学デバイス及び露光装置、並びにデバイス製造方法
US7566664B2 (en) 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8171804B2 (en) * 2006-12-22 2012-05-08 Texas Instruments Incorporated Motion conversion system
US7535621B2 (en) 2006-12-27 2009-05-19 Qualcomm Mems Technologies, Inc. Aluminum fluoride films for microelectromechanical system applications
US7884021B2 (en) * 2007-02-27 2011-02-08 Spartial Photonics, Inc. Planarization of a layer over a cavity
US20080273234A1 (en) * 2007-05-01 2008-11-06 Texas Instruments Incorporated System and method for integrated, analog mode mirror devices
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7789515B2 (en) 2007-05-17 2010-09-07 Moxtek, Inc. Projection device with a folded optical path and wire-grid polarizer
US7625825B2 (en) 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US20090112482A1 (en) * 2007-10-26 2009-04-30 Sandstrom Perry L Microarray detector and synthesizer
US20090122272A1 (en) * 2007-11-09 2009-05-14 Silverstein Barry D Projection apparatus using solid-state light source array
US20090153752A1 (en) * 2007-12-14 2009-06-18 Silverstein Barry D Projector using independent multiple wavelength light sources
DE102008004379A1 (de) 2008-01-15 2009-07-16 Robert Bosch Gmbh Vorrichtung und Verfahren zum Prüfen eines optischen Regensensors
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US7891816B2 (en) * 2008-02-25 2011-02-22 Eastman Kodak Company Stereo projection using polarized solid state light sources
US7926951B2 (en) * 2008-07-11 2011-04-19 Eastman Kodak Company Laser illuminated micro-mirror projector
US7924441B1 (en) 2008-08-08 2011-04-12 Mirrorcle Technologies, Inc. Fast and high-precision 3D tracking and position measurement with MEMS micromirrors
US8098265B2 (en) 2008-10-10 2012-01-17 Ostendo Technologies, Inc. Hierarchical multicolor primaries temporal multiplexing system
US8016422B2 (en) * 2008-10-28 2011-09-13 Eastman Kodak Company Etendue maintaining polarization switching system and related methods
US8541850B2 (en) * 2008-12-12 2013-09-24 Texas Instruments Incorporated Method and system for forming resonators over CMOS
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US8610986B2 (en) * 2009-04-06 2013-12-17 The Board Of Trustees Of The University Of Illinois Mirror arrays for maskless photolithography and image display
US8810796B2 (en) 2009-04-21 2014-08-19 Michigan Aerospace Corporation Light processing system and method
US8797550B2 (en) 2009-04-21 2014-08-05 Michigan Aerospace Corporation Atmospheric measurement system
US8066389B2 (en) * 2009-04-30 2011-11-29 Eastman Kodak Company Beam alignment chamber providing divergence correction
US8132919B2 (en) * 2009-04-30 2012-03-13 Eastman Kodak Company Digital projector using arrayed light sources
EP2430392B1 (en) * 2009-05-15 2015-07-22 Michigan Aerospace Corporation Range imaging lidar
US8033666B2 (en) 2009-05-28 2011-10-11 Eastman Kodak Company Beam alignment system using arrayed light sources
US8235531B2 (en) * 2009-06-22 2012-08-07 Eastman Kodak Company Optical interference reducing element for laser projection
US8248696B2 (en) 2009-06-25 2012-08-21 Moxtek, Inc. Nano fractal diffuser
US8220938B2 (en) 2009-06-25 2012-07-17 Eastman Kodak Company Image path light intensity sensing during a blanking period between a left-eye light beam and a right-eye light beam in a stereoscopic light projector
US20100328611A1 (en) * 2009-06-25 2010-12-30 Silverstein Barry D Leakage light intensity sensing in light projector
US8142021B2 (en) 2009-06-25 2012-03-27 Eastman Kodak Company Dump path light intensity sensing in light projector
US8237777B2 (en) * 2009-06-25 2012-08-07 Eastman Kodak Company Stereoscopic image intensity balancing in light projector
US8162483B2 (en) 2009-06-25 2012-04-24 Eastman Kodak Company Hierarchical light intensity control in light projector
US8220931B2 (en) 2009-07-07 2012-07-17 Eastman Kodak Company Etendue reduced stereo projection using segmented disk
US8066382B2 (en) 2009-07-14 2011-11-29 Eastman Kodak Company Stereoscopic projector with rotating segmented disk
CN102834761A (zh) 2010-04-09 2012-12-19 高通Mems科技公司 机电装置的机械层及其形成方法
US8342690B2 (en) 2010-04-29 2013-01-01 Eastman Kodak Company Off-state light baffle for digital projection
WO2011144458A1 (en) * 2010-05-17 2011-11-24 Iee International Electronics & Engineering S.A. Imaging device for imaging a scene using time - of - flight and thermographic measurements
US8649094B2 (en) 2010-05-21 2014-02-11 Eastman Kodak Company Low thermal stress birefringence imaging lens
US8504328B2 (en) 2010-05-21 2013-08-06 Eastman Kodak Company Designing lenses using stress birefringence performance criterion
US8287129B2 (en) 2010-05-21 2012-10-16 Eastman Kodak Company Low thermal stress birefringence imaging system
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
JP4951724B2 (ja) * 2010-09-24 2012-06-13 貴央 山口 反射型表示装置
CN101963698B (zh) * 2010-09-30 2012-01-18 西北工业大学 一种微机械空间光调制器
US8558956B2 (en) * 2011-01-11 2013-10-15 Panasonic Corporation Image display system
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
DE102011102132A1 (de) 2011-05-19 2012-11-22 blnsight3D GmbH Mehrkanalanzeige mit MOEMS und Verfahren der Superposition nicht-normal abgestrahlter Bildstrahlen in Mehrkanalanzeigen mit MOEMS
US8830580B2 (en) 2011-10-27 2014-09-09 Eastman Kodak Company Low thermal stress catadioptric imaging optics
US8786943B2 (en) 2011-10-27 2014-07-22 Eastman Kodak Company Low thermal stress catadioptric imaging system
US8854281B2 (en) * 2011-12-02 2014-10-07 Automotive Research & Test Center Head up display (HUD)
ITMI20112296A1 (it) * 2011-12-16 2013-06-17 St Microelectronics Srl Dispositivo elettronico flessibile incapsulato e relativo metodo di fabbricazione
US8922890B2 (en) 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
WO2013142083A2 (en) 2012-03-22 2013-09-26 Nikon Corporation Mirror assembly with heat transfer mechanism
EP2834697B1 (en) 2012-04-03 2021-05-19 Imax Theatres International Limited Color dependent aperture stop
US8754829B2 (en) 2012-08-04 2014-06-17 Paul Lapstun Scanning light field camera and display
EP2926164A4 (en) 2012-11-30 2015-12-16 Tchoryk Peter ATMOSPHERE MEASURING SYSTEM
CN103439858A (zh) * 2013-02-22 2013-12-11 杭州能基科技有限公司 一种激光数码投影机
CA3068678C (en) 2013-03-15 2021-11-09 Imax Theatres International Limited Projector optimized for modulator diffraction effects
WO2014145003A1 (en) 2013-03-15 2014-09-18 Ostendo Technologies, Inc. Dynamic gamut display systems, methods, and applications thereof
US9696540B2 (en) 2013-03-22 2017-07-04 Lumentum Operations Llc Hidden hinge MEMS with temporary gimbal anchor
US9348076B2 (en) 2013-10-24 2016-05-24 Moxtek, Inc. Polarizer with variable inter-wire distance
CA2933514A1 (en) 2013-12-31 2015-07-09 F. Hoffmann-La Roche Ag Methods of assessing epigenetic regulation of genome function via dna methylation status and systems and kits therefor
US9927786B2 (en) 2014-10-02 2018-03-27 Anne Dewitte Expandable and collapsible shape element for a programmable shape surface
CN104317050A (zh) * 2014-11-12 2015-01-28 成都艾塔科技有限公司 新型数字微镜器件
WO2018033478A1 (en) 2016-08-15 2018-02-22 F. Hoffmann-La Roche Ag Method and composition for detection of peptide cyclization using protein tags
CN106526785B (zh) * 2016-12-27 2017-09-12 西安交通大学 偏转轴相交于反射镜表面的低高度双轴偏转装置及方法
KR102402616B1 (ko) 2017-05-26 2022-05-27 엘지이노텍 주식회사 렌즈 구동 장치, 및 이를 포함하는 카메라 모듈 및 광학 기기
US10928624B2 (en) 2017-12-29 2021-02-23 Texas Instruments Incorporated Microelectromechanical system (MEMS) structure and method of formation

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US4710732A (en) * 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4956619A (en) * 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5105369A (en) * 1989-12-21 1992-04-14 Texas Instruments Incorporated Printing system exposure module alignment method and apparatus of manufacture
US5142405A (en) * 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5331454A (en) * 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
CA2063744C (en) * 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5233456A (en) * 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5202785A (en) * 1991-12-20 1993-04-13 Texas Instruments Incorporated Method and device for steering light
US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device

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US5535047A (en) 1996-07-09
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DE69634222T2 (de) 2006-01-05
CN1160218A (zh) 1997-09-24

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