JP3827116B2 - 真空装置内の基体除電装置 - Google Patents
真空装置内の基体除電装置 Download PDFInfo
- Publication number
- JP3827116B2 JP3827116B2 JP01790498A JP1790498A JP3827116B2 JP 3827116 B2 JP3827116 B2 JP 3827116B2 JP 01790498 A JP01790498 A JP 01790498A JP 1790498 A JP1790498 A JP 1790498A JP 3827116 B2 JP3827116 B2 JP 3827116B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- roll
- film
- vacuum
- unwound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 19
- 239000010408 film Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000003068 static effect Effects 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 7
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 3
- 230000005291 magnetic effect Effects 0.000 claims description 3
- 238000006386 neutralization reaction Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 13
- 238000007740 vapor deposition Methods 0.000 description 13
- 230000008030 elimination Effects 0.000 description 9
- 238000003379 elimination reaction Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 230000005294 ferromagnetic effect Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 208000028659 discharge Diseases 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01790498A JP3827116B2 (ja) | 1998-01-13 | 1998-01-13 | 真空装置内の基体除電装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01790498A JP3827116B2 (ja) | 1998-01-13 | 1998-01-13 | 真空装置内の基体除電装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11200044A JPH11200044A (ja) | 1999-07-27 |
| JPH11200044A5 JPH11200044A5 (enrdf_load_html_response) | 2005-08-04 |
| JP3827116B2 true JP3827116B2 (ja) | 2006-09-27 |
Family
ID=11956742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01790498A Expired - Fee Related JP3827116B2 (ja) | 1998-01-13 | 1998-01-13 | 真空装置内の基体除電装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3827116B2 (enrdf_load_html_response) |
-
1998
- 1998-01-13 JP JP01790498A patent/JP3827116B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11200044A (ja) | 1999-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1686197B1 (en) | Take-up vacuum deposition method and take-up vacuum deposition apparatus | |
| EP0041850B2 (en) | A method of vacuum depositing a layer on a plastics film substrate | |
| CN221740432U (zh) | 卷绕式镀膜系统 | |
| US5595792A (en) | Method and apparatus for producing magnetic recording medium | |
| JP2006152448A (ja) | 巻取式真空蒸着装置及び巻取式真空蒸着方法 | |
| JPH07109571A (ja) | 電子ビーム式連続蒸着装置 | |
| JP3827116B2 (ja) | 真空装置内の基体除電装置 | |
| JPH09111458A (ja) | 成膜装置及び成膜方法 | |
| JP4601387B2 (ja) | 圧力勾配型イオンプレーティング式成膜装置 | |
| JP4613056B2 (ja) | 圧力勾配型イオンプレーティング式成膜装置および成膜方法 | |
| JPH11238595A (ja) | 除電装置および除電方法 | |
| JP4613048B2 (ja) | 圧力勾配型イオンプレーティング式成膜装置 | |
| US6471848B1 (en) | Electrodeposition method of forming an oxide film | |
| JP2006124738A (ja) | 圧力勾配型イオンプレーティング式成膜装置 | |
| JPH08311645A (ja) | Ｉｔｏ成膜装置 | |
| JP7574749B2 (ja) | 加工プラスチックフィルムの製造方法 | |
| JP2006219759A (ja) | シートの薄膜形成装置および薄膜付きシートの製造方法 | |
| JPH02281420A (ja) | 金属薄膜型磁気記録媒体の保護膜製造方法およびその装置 | |
| JPH0586470A (ja) | 巻取り式電子ビーム真空蒸着装置 | |
| JP2001073130A (ja) | リアクティブ・スパッタリング装置 | |
| JPH07150355A (ja) | 電子ビーム加熱式巻取り蒸着装置 | |
| JP2003301260A (ja) | 巻き取り式電子ビーム真空蒸着装置 | |
| JPH10298758A (ja) | 薄膜製造方法及び装置 | |
| JP3781154B2 (ja) | 真空蒸着装置 | |
| JP3818719B2 (ja) | 可撓性支持体への蒸着方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041217 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050113 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20050225 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050804 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050819 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20051017 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20051027 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060309 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060428 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20060629 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20060629 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090714 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100714 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110714 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120714 Year of fee payment: 6 |
|
| LAPS | Cancellation because of no payment of annual fees |