JP3785247B2 - 半導体製造装置 - Google Patents

半導体製造装置 Download PDF

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Publication number
JP3785247B2
JP3785247B2 JP17144197A JP17144197A JP3785247B2 JP 3785247 B2 JP3785247 B2 JP 3785247B2 JP 17144197 A JP17144197 A JP 17144197A JP 17144197 A JP17144197 A JP 17144197A JP 3785247 B2 JP3785247 B2 JP 3785247B2
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JP
Japan
Prior art keywords
purge gas
seal cap
furnace
end opening
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17144197A
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English (en)
Japanese (ja)
Other versions
JPH1116846A5 (enExample
JPH1116846A (ja
Inventor
直人 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP17144197A priority Critical patent/JP3785247B2/ja
Publication of JPH1116846A publication Critical patent/JPH1116846A/ja
Publication of JPH1116846A5 publication Critical patent/JPH1116846A5/ja
Application granted granted Critical
Publication of JP3785247B2 publication Critical patent/JP3785247B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP17144197A 1997-06-27 1997-06-27 半導体製造装置 Expired - Fee Related JP3785247B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17144197A JP3785247B2 (ja) 1997-06-27 1997-06-27 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17144197A JP3785247B2 (ja) 1997-06-27 1997-06-27 半導体製造装置

Publications (3)

Publication Number Publication Date
JPH1116846A JPH1116846A (ja) 1999-01-22
JPH1116846A5 JPH1116846A5 (enExample) 2005-05-12
JP3785247B2 true JP3785247B2 (ja) 2006-06-14

Family

ID=15923186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17144197A Expired - Fee Related JP3785247B2 (ja) 1997-06-27 1997-06-27 半導体製造装置

Country Status (1)

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JP (1) JP3785247B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100835102B1 (ko) 2002-12-16 2008-06-03 동부일렉트로닉스 주식회사 보트 회전체
JP6180276B2 (ja) * 2013-10-25 2017-08-16 光洋サーモシステム株式会社 熱処理装置
KR102680412B1 (ko) * 2018-11-27 2024-07-02 삼성전자주식회사 반도체 처리 장치 및 반도체 처리 시스템
CN115132624B (zh) * 2022-07-13 2025-10-10 北京北方华创微电子装备有限公司 半导体工艺设备

Also Published As

Publication number Publication date
JPH1116846A (ja) 1999-01-22

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