JP3764742B2 - 摺動装置及びフォーセットバルブ - Google Patents
摺動装置及びフォーセットバルブ Download PDFInfo
- Publication number
- JP3764742B2 JP3764742B2 JP2004140456A JP2004140456A JP3764742B2 JP 3764742 B2 JP3764742 B2 JP 3764742B2 JP 2004140456 A JP2004140456 A JP 2004140456A JP 2004140456 A JP2004140456 A JP 2004140456A JP 3764742 B2 JP3764742 B2 JP 3764742B2
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- Prior art keywords
- valve body
- peak
- sliding
- carbon film
- hard carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Sliding Valves (AREA)
- Carbon And Carbon Compounds (AREA)
Description
30:固定弁体
21、31:摺接面
22、32:流体通路
34:非晶質硬質炭素膜
Claims (6)
- 互いに摺動する2つの摺動部材の少なくとも一方の摺接面に非晶質硬質炭素膜を備えてなる摺動装置において、上記非晶質硬質炭素膜は、レーザーラマン分光法によるラマンスペクトルのピークが1200〜1400cm−1と1500〜1600cm−1の少なくとも一方の範囲にあり、上記ピークは平坦部分に対する強度比が2倍以上であり、かつ上記ピークにおける最大強度の90%以上の頂部の幅が10cm−1以上であることを特徴とする摺動装置。
- 上記摺動部材を弁体で形成するとともに、該弁体の表面の平坦度を3μm以下としたことを特徴とする請求項1に記載の摺動装置。
- 上記弁体の表面の中心線平均粗さ(Ra)が0.5μm以下であることを特徴とする請求項2に記載の摺動装置。
- 上記非晶質硬質炭素膜の膜厚が0.1〜2.0μmであることを特徴とする請求項2又は3に記載の摺動装置。
- 上記弁体はアルミナ、ジルコニア、窒化珪素、炭化珪素、窒化アルミニウムを主成分とするセラミックスが用いられることを特徴とする請求項1〜4の何れかに記載の摺動装置。
- 互いに摺動する2枚の円板状の弁体の少なくとも一方の摺接面に非晶質硬質炭素膜を備えてなるフォーセットバルブにおいて、上記非晶質硬質炭素膜は、レーザーラマン分光法によるラマンスペクトルのピークが1200〜1400cm−1と1500〜1600cm−1の少なくとも一方の範囲にあり、上記ピークは平坦部分に対する強度比が2倍以上であり、かつ上記ピークにおける最大強度の90%以上の頂部の幅が10cm−1以上であることを特徴とするフォーセットバルブ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004140456A JP3764742B2 (ja) | 2004-05-10 | 2004-05-10 | 摺動装置及びフォーセットバルブ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004140456A JP3764742B2 (ja) | 2004-05-10 | 2004-05-10 | 摺動装置及びフォーセットバルブ |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32645194A Division JP3612098B2 (ja) | 1994-12-27 | 1994-12-27 | ディスクバルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004324890A JP2004324890A (ja) | 2004-11-18 |
JP3764742B2 true JP3764742B2 (ja) | 2006-04-12 |
Family
ID=33509249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004140456A Expired - Lifetime JP3764742B2 (ja) | 2004-05-10 | 2004-05-10 | 摺動装置及びフォーセットバルブ |
Country Status (1)
Country | Link |
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JP (1) | JP3764742B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4687131B2 (ja) * | 2005-02-15 | 2011-05-25 | 千住金属工業株式会社 | 摺動材料およびその製造方法 |
US9939415B2 (en) | 2011-01-12 | 2018-04-10 | Dionex Softron Gmbh | High-pressure control valve for high-performance liquid chromatography |
DE102011000104B4 (de) * | 2011-01-12 | 2013-02-07 | Dionex Softron Gmbh | Hochdruck-Schaltventil für die Hochleistungsflüssigkeitschromatographie |
US10697552B2 (en) * | 2017-01-26 | 2020-06-30 | Toto Ltd. | Faucet valve |
-
2004
- 2004-05-10 JP JP2004140456A patent/JP3764742B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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JP2004324890A (ja) | 2004-11-18 |
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