JP3745186B2 - Tape-like member transport device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
In the present invention, a predetermined work is performed by feeding from a supply reel together with a protective second tape-like member for protecting the fine gap portion of the long first tape-like member having fine gaps formed at predetermined intervals. The present invention also relates to a transport device for a tape-shaped member in which a second tape-shaped member is overlapped on the first tape-shaped member and wound on a take-up reel.
[0002]
[Prior art]
In an electronic component in which a large number of leads are arranged at a narrow pitch, for example, a driver IC used in a liquid crystal display device, the number of leads is determined by the number of pixels, and the number of leads increases as the number of pixels increases.
Further, since the package of this drive IC is integrally attached to the liquid crystal display panel, it is required to be small and thin.
In order to arrange a large number of leads in a package whose outer dimensions are limited in this way, it is necessary not only to reduce the width of the leads but also to reduce the arrangement interval, and for that reason, it is necessary to reduce the thickness of the leads. Generally manufactured using TAB tape.
An example of an electronic component (semiconductor device) using the TAB tape is shown in FIGS. In the figure, reference numeral 1 denotes a long insulating tape 1, which has a rectangular through hole 1a at a predetermined interval in the longitudinal direction at an intermediate position in the width direction, and feed holes 1b at regular intervals on both sides. Yes.
2 is a conductive pattern formed by etching a conductive foil laminated on the insulating tape 1, a part of which is extended into the through hole 1a to form an inner lead 2a, and an outer lead 2b is formed on the insulating tape 1, The insulating tape 1 and the conductive pattern constitute a TAB tape 3.
A rectangular semiconductor pellet 4 has a large number of electrodes (not shown) formed on one surface, is disposed in the through hole 1a of the TAB tape 3, and is electrically connected to the inner lead 2a.
A resin 5 is applied on the semiconductor pellet 4 to cover and protect the connection portion between the electrode on the pellet and the inner lead 2a.
The arrangement interval of the outer leads 2 b of the TAB tape 3 is determined by the effective length in the width direction of the insulating tape 1 and the number of leads, and the arrangement interval of the inner leads 2 a is determined by the electrode interval of the semiconductor pellet 4.
For this reason, in an electronic component in which the distance between the leads of the outer lead 2b is, for example, 25 μm, the distance between the leads of the inner lead 2a must be narrowed to 7 to 10 μm. Care must be taken when handling the TAB tape 3.
The electronic component manufacturing apparatus will be described below. In the figure, reference numeral 6 denotes a supply reel, which is wound around an TAB tape 3 with an interlayer tape 7 protecting the inner lead 2a of the tape 3 being overlapped.
The TAB tape 3 wound around the reels 6 and 11 may be bent and the inner lead 2a may be bent or short-circuited, and the conductive pattern 2 on the overlapping insulating tape 1 may be rubbed and partly peeled to generate foreign matter. However, the above-mentioned concern is solved by the interlayer tape 7 using a material that is smooth and does not easily generate foreign matter even if the surface in contact with the TAB tape 3 is easily displaced.
The interlayer tape 7 is also structured so as not to be in direct contact with the inner lead 2a.
Reference numerals 8a, 8b, 8c and 8d denote a plurality of first guide rollers for guiding the TAB tape 3 fed from the supply reel 6, and horizontally guides a part of the fed TAB tape 3. 9 is a work position arranged along the horizontal movement path of the TAB tape 3. For example, a pellet feeder for supplying the semiconductor pellet 4 to a position overlapping the through hole 1 a of the TAB tape 3, or the semiconductor pellet 4 and the inner lead 2 a A lead bonding apparatus to be connected is arranged.
Reference numerals 10a and 10b denote a plurality of second guide rollers for guiding the interlayer tape 7 fed from the supply reel 6 above the moving path of the TAB tape 3, and 11 denotes the TAB tape 3 and the interlayer tape 7 that have completed predetermined work. This shows a take-up reel that is rolled up in an overlapping manner.
The TAB tape 3 is fed from the supply reel 6 by rotationally driving the first guide rollers 8b and 8c in addition to the take-up reel 11, but the supply reel 6 is braked and the first guide rollers 8a and 8d are moved. By making it swingable in the horizontal direction, tension is applied to the TAB tape 3 so that it does not slack on the transport path.
12a and 12b are arranged along the moving path of the TAB tape 3 between the supply reel 6 and the take-up reel 11, and ionizers that ionize and neutralize peripheral air, and 13a and 13b are on the TAB tape 3 that has been neutralized by the ionizer 12. Nozzles for blowing air to the air, 14a and 14b are ducts for sucking and removing foreign matter blown off by the air nozzles 13a and 13b, and 15a and 15b are magnets for attracting and removing the magnetic foreign matter on the TAB tape 3.
The reel 11 on which the TAB tape 3 to which the semiconductor pellet 4 is fixed is wound by this apparatus is sent to the same resin coating process as this apparatus, and the semiconductor pellet 4 is coated with the resin 5, and further an electrical inspection process. Or sent to the cutting process and separated into individual electronic components.
On the other hand, the apparatus shown in FIG. 6 has a rotating part and a sliding part, from which unwanted foreign matter is constantly generated.
If conductive foreign matter adheres on or between leads with a narrow interval, a withstand voltage failure or a short-circuit accident occurs, resulting in a defective electronic component.
Insulating foreign matter does not damage the electronic component itself due to a decrease in withstand voltage or a short circuit, but it may damage the external connection of the lead or make the electrical connection unstable. For this reason, electronic components with a large number of leads arranged at a narrow pitch are manufactured in a highly clean work environment, and the parts that may generate foreign matter in the manufacturing equipment are covered to suppress the scattering of foreign matters. An ionizer 12, an air nozzle 13, a suction duct 14, and a magnet 15 are disposed on the movement path of the TAB to remove foreign matters adhering to the TAB tape 3 to prevent the foreign matters from adhering to the TAB tape 3 again.
In addition to the one shown in FIG. 6 that removes foreign matters during the manufacturing process of electronic components, a vibrator is applied to a lead frame to vibrate and the attached foreign matters are shaken off (Japanese Patent Laid-Open No. 59-101844: Prior Art 1). ), On the panel that moves the cleaner head, which has an air outlet opening on the bottom and an air discharge chamber with an ultrasonic generator inside, and an air suction chamber with an air suction chamber on the bottom. Arranged, blown ultrasonic waves to the panel, and sucked and removed to the air suction chamber together with foreign matter on the panel surface (Japanese Utility Model Laid-Open No. 5-80573: Prior Art 2), the air suction chamber of Prior Art 2 A structure in which air discharge chambers are arranged in the front and rear (Japanese Patent Laid-Open No. 7-60211: Prior Art 3), and a rotating brush roll in which a brush is implanted on the peripheral surface of a rotating body in which a rotating shaft is horizontally arranged Is surrounded by a cylindrical body so that a part of the cylindrical body protrudes from the lower end, and the foreign matter that has been mechanically separated by rotating the brush while sucking air from the lower end of the cylindrical body is removed by suction into the cylindrical body 10-309541 gazette: Prior art 4) is known.
[0003]
[Problems to be solved by the invention]
By the way, the TAB tape 3 requires heat resistance and positional accuracy, so a tough and low-stretch material such as polyimide resin is used, whereas the interlayer tape 7 that protects the TAB tape 3 is made of a relatively soft resin. It is done.
On the other hand, as shown in FIG. 7, when foreign matter A enters between the contact surfaces of the TAB tape 3 and the interlayer tape 7 in the supply reel 6 for some reason, the foreign matter A is pressed against the tapes 3 and 7 by winding the tape. Is done.
Further, when the TAB tape 3 is fed from the braked supply reel 6, the tension applied to the tape 3 concentrates on the foreign matter A on the inner layer interlayer tape 7, and the foreign matter A bites into the interlayer tape 7.
Since the foreign matter A that has digged into the interlayer tape 7 moves behind the TAB tape 3 being fed out, the foreign matter A moves to the upper surface of the tape 7 without being affected by the ionizer 12, the air nozzle 13, the suction duct 14, and the like. Then, it is taken up as it is on the take-up reel 11 and comes into contact with the TAB tape 3 again.
At this time, since the winding diameter of the TAB tape 3 in each reel 6 and 11 is different, the magnitude and direction of the force applied to the foreign matter A on the interlayer tape 7 is different and the tightly attached foreign matter A is in a peelable state. In some cases, the tape was peeled off from the tape fed out again and adhered to an undesired portion on the TAB tape.
In addition, foreign matter electrostatically adsorbed on the interlayer tape 7 may reattach to the TAB tape 3, and particularly when fine foreign matter enters between fine inner leads having an arrangement interval of several tens of μm, the spray pressure of the air nozzle 13 Even if the height is increased, the pressure between the inner leads cannot be increased, and the foreign matter cannot be removed reliably. Therefore, it has been desired to remove the foreign matter on the interlayer tape 7 with certainty.
[0004]
[Means for Solving the Problems]
The present invention has been proposed for the purpose of solving the above-mentioned problems, and a first tape-shaped member in which fine gaps are formed at predetermined intervals in the longitudinal direction and a second tape for protecting the first tape-shaped member. Each tape-like member is fed out from a supply reel wound with the like-like member and wound, and a second tape-like member is placed on the first tape-like member that has been subjected to a predetermined operation on the moving path, and wound around the take-up reel. In the tape-shaped member conveyance device, a tape-shaped member conveyance device is provided, wherein a mechanism for cleaning the second tape-shaped member is disposed between the supply reel and the take-up reel.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
The transport device for a tape-shaped member according to the present invention is characterized in that a mechanism for cleaning the second tape-shaped member, which is an interlayer tape, is disposed between the supply reel and the take-up reel. The cleaning mechanism is configured such that the second tape-shaped member is opposed to the moving path of the second tape-shaped member, and a pair of wiping portions sandwiching the second tape-shaped member when the second tape-shaped member moves, and the wiping portion volatilizes. And a cleaning agent supplying unit for supplying a constant amount of the cleaning agent and moistening it.
As a wiping portion of a mechanism for cleaning the second tape-shaped member, a box-shaped container that houses a wiping member and a volatile cleaning agent, and a wiping member that protrudes from the open end of the box-shaped container A thing provided with the drive mechanism made to contact / separate to a tape-like member can be used.
The box-shaped member can be easily attached to and detached from the drive mechanism, thereby facilitating maintenance and inspection.
In the apparatus of the present invention, a tensioner that makes the winding tension of the second tape-shaped member constant can be arranged between the mechanism for cleaning the second tape-shaped member and the take-up reel.
[0006]
【Example】
Embodiments of the present invention will be described below with reference to FIGS. In the figure, the same components as those in FIG. In the apparatus according to the present invention, the TAB tape (first tape-like member) 3 fed from the supply reel 6 is guided by the first guide rollers 8a, 8b, 8c and 8d as in the apparatus of FIG. The working position 9 is arranged on the movement path between the guide rollers 8b and 8c.
Ionizer 12 that ionizes and neutralizes peripheral air along the moving path of TAB tape 3, the nozzle 13 that blows air onto TAB tape 3 that has been neutralized by ionizer 12, and foreign matter blown away by air nozzles 13 a and 13 b are removed by suction. A duct 14 and a magnet 15 for attracting and removing magnetic foreign matter on the TAB tape 3 are arranged, supplied to the work position 9, and subjected to predetermined work and taken up on the take-up reel 11 as much as possible from the TAB tape 3. To be removed.
Further, the interlayer tape (second tape-like member) 7 fed out from the supply reel 6 is guided by the second guide rollers 10 a and 10 b, superimposed on the TAB tape 3, and taken up on the take-up reel 11.
A cleaning mechanism indicated by reference numeral 16 is arranged on the movement path of the interlayer tape 7.
As shown in FIG. 2, the cleaning mechanism 16 includes a pair of wiping portions 17a and 17b that are opposed to each other across the movement path of the interlayer tape 7 and sandwich the interlayer tape 7 when the interlayer tape 7 is moved. Tank 18 containing a cleaning detergent, one end connected to tank 18 and the other end branched, pipe 19 connected to wiping portions 17a, 17b, inserted between pipes 19, and wiped cleaning agent in tank 18 And a cleaning agent supply unit 21 including a pump 20 to be sent to the units 17a and 17b.
Further, as shown in FIG. 3, the wiping parts 17a and 17b protrude from the open ends of the box-like containers 23a and 23b and the box-like containers 23a and 23b that contain the wiping members 22a and 22b and the volatile cleaning agent. Drive mechanisms 24a and 24b for bringing the wiped members 22a and 22b thus brought into contact with and separating from the interlayer tape 7 and cylinders in the illustrated example are provided.
The operation of the cleaning mechanism 16 will be described below. First, the ionizer 12, the nozzle 13, and the duct 14 are operated to feed the interlayer tape 7 together with a leader tape (not shown) connected to the TAB tape 3 from the supply reel 6, and to the take-up reel 11 through the respective movement paths. Roll it over again.
Next, the pump 20 is operated to feed the cleaning agent from the tank 18 into the box-like containers 23a and 23b. As a result, the surfaces of the wiping members 22a and 22b are wetted.
Next, the cylinders 24a and 24b are operated to hold the interlayer tape 7 between the wiping portions 17a and 17b.
As a result, the wiping members 22 a and 22 b are in close contact with the interlayer tape 7, and the cleaning agent contacts both surfaces of the interlayer tape 7.
In this state, the transport device is operated, the TAB tape 3 is intermittently fed, and a predetermined work is performed thereon.
The interlayer tape 7 is also intermittently fed in conjunction with the movement of the TAB tape 3, but the foreign matter adhering to the surface of the interlayer tape 7 and pressure-bonded is caught on the wiping members 22a and 22b and mechanically separated, and the wiping member 22a, It is confined in 22b.
At this time, the cleaning agent that has exuded from the wiping members 22a and 22b enters the adhering surface on the foreign matter and the interlayer tape 7 to facilitate the separation of the foreign matter and to prevent the foreign matter from adhering to the interlayer tape 7 again. .
As described above, the apparatus according to the present invention can surely remove the foreign matter adhered or pressure-bonded to the interlayer tape 7 and prevent re-adhesion, so that the foreign matter is not brought into the TAB tape 3 wound around the take-up reel 11. it can.
In addition, this invention is not limited only to the said Example, The box-shaped members 23a and 23b of the wiping parts 17a and 17b can be made detachable with respect to the drive mechanism 24, as shown in FIG.
In the illustrated example, a support frame 25 can be attached to the drive mechanism 24, and a magnet (not shown) can be attached to the opposing portion of the support frame 25 and the box-shaped member 23a and held by this magnet.
This facilitates maintenance and inspection of the wiping portions 17a and 17b.
Further, a tensioner that keeps the tension of the interlayer tape 7 constant can be disposed between the guide roller 10 b and the take-up reel 11.
Thereby, the movement between the wiping portions 17a and 17b of the interlayer tape 7 that is intermittently fed can be smoothly performed, the shock applied to the interlayer tape 7 when the intermittent operation is disclosed, and the contact between the interlayer tape 7 and the wiping portions 17a and 17b can be stabilized. can do.
The present invention can be applied not only to a TAB tape, but also to a tape having a minute gap and causing a minute foreign matter. In general, this tape and an interlayer tape are overlapped and wound around a reel, and again wound around a take-up reel. Applicable.
[0007]
【The invention's effect】
As described above, according to the present invention, it is possible to reliably remove fine foreign matters that are attached to or pressed against the second tape-shaped member inserted between the layers of the first tape-shaped member having a minute gap and wound around the reel. It can be removed and foreign substances can be prevented from being brought onto the first tape-shaped member wound on the reel.
[Brief description of the drawings]
FIG. 1 is a front view showing a tape-like member conveying apparatus according to an embodiment of the present invention. FIG. 2 is a front sectional view of a main part showing a cleaning mechanism of the apparatus shown in FIG. FIG. 4 is a perspective view of a principal part of a semiconductor device using a TAB tape. FIG. 5 is a side sectional view of the semiconductor device. FIG. 6 is a TAB tape transport for manufacturing the semiconductor device. Front view of the device [Fig. 7] Cross-sectional side view showing foreign matter caught between the tapes wound around the reel [Explanation of symbols]
3 First tape-shaped member (TAB tape)
7 Second tape-shaped member (interlayer tape)
6 Supply reel 11 Take-up reel 16 Cleaning mechanism

Claims (4)

Each tape-shaped member from a supply reel in which a first tape-shaped member in which a minute gap is formed at a predetermined interval in the longitudinal direction and a second tape-shaped member protecting the first tape-shaped member are overlapped and wound In the tape-shaped member conveying apparatus in which the second tape-shaped member is overlapped with the first tape-shaped member that has been subjected to a predetermined operation on the movement path and wound on the take-up reel.
A mechanism for cleaning the second tape-shaped member is disposed between the supply reel and the take-up reel,
The mechanism for cleaning the second tape-shaped member is a pair of wiping units that are arranged to face each other across the movement path of the second tape-shaped member and sandwich the second tape-shaped member when the second tape-shaped member moves. And a cleaning agent supplying unit for supplying a constant amount of volatile cleaning agent to the wiping unit and moistening the wiping unit. The wiping portion of the mechanism for cleaning the second tape-shaped member includes a box-shaped container that houses the wiping member and a volatile cleaning agent, and a wiping member that protrudes from the opening end of the box-shaped container. The transport device for a tape-shaped member according to claim 1, further comprising a drive mechanism that contacts and separates the tape-shaped member. 3. The tape-shaped member conveying apparatus according to claim 2, wherein the box-shaped member is detachably attached to the driving mechanism. 2. The tape-shaped tape according to claim 1, wherein a tensioner that makes the winding tension of the second tape-shaped member constant is disposed between the mechanism for cleaning the second tape-shaped member and the take-up reel. Member conveying device.

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