JP3608313B2 - Film peeling and conveying device - Google Patents

Description

[0001]
[Technical field to which the invention belongs]
In the present invention, at least one end portion of the protective film adhered to one side of the substrate is partially peeled from the substrate, and then the protective film partially peeled at one end is conveyed while being peeled from the substrate, and completely It is related with the film peeling conveyance apparatus of the form which conveys the peeled protective film to a film accommodating part.
[0002]
[Prior art]
In the production of printed wiring boards, copper foil is pasted on both sides of a core plate made of glass fiber reinforced epoxy resin or the like to form a copper clad laminate, and a photoresist layer and both sides of the copper clad laminate are formed. The printed wiring board material which laminated the protective film is used. Then, both sides of the printed wiring board material are irradiated with a circuit pattern to expose the photoresist layer, and thereafter a protective film (hereinafter simply referred to as “film”) present on both surfaces is peeled off.
[0003]
A film peeling / conveying apparatus capable of peeling a film from at least one side of a substrate such as a printed wiring board material having a rectangular shape when viewed from above is disclosed in, for example, Japanese Patent Application Laid-Open No. Sho 62-83974 and Japanese Patent Publication No. 7-17308. And Japanese Patent Publication No. 7-17309. Among these, the film peeling / conveying device disclosed in Japanese Patent Application Laid-Open No. Sho 62-83974 forcibly conveys a film from which one end of the film attached to one side of the substrate is partially peeled upward from the substrate. Including film peeling and conveying means. The film peeling / conveying means includes an upper belt mechanism disposed above the substrate conveying path and a lower belt mechanism disposed below the conveying path. The upper belt mechanism is formed with an upper conveying path for conveying the film upward and then conveyed downward, and the lower belt mechanism is for conveying the film unloaded from the upper conveying path further downward. A lower conveyance path is formed. The film peeled from one side of the substrate is transported from the upper transport path to the lower transport path, and is transported into the film container from the lower transport path.
[0004]
In the film peeling and conveying apparatus described above, in the process in which the film is conveyed from the upper conveying path to the lower conveying path, the film passes through while blocking the conveying path of the substrate. Since the substrate cannot be transported while passing through the substrate transport path, there is a problem that the processing capability of the substrate is reduced.
[0005]
The film peeling / conveying means in the film peeling / conveying device disclosed in Japanese Patent Publication No. 7-17308 includes an upper belt mechanism disposed above the conveying path of the substrate, and the upper belt mechanism has the film facing upward. An upper transporting / unloading path is formed which transports (and discharges) the peeled film to one side in the extending direction of the transport path of the substrate. A film container is detachably mounted upstream of the upper conveyance / delivery path and above the substrate conveyance path. The film peeling / conveying means is provided with a fluid ejecting means for ejecting a fluid in a direction in which the peeled film is carried out from the upper conveyance carrying-out path. When the peeled film is unloaded from the upper conveyance / unloading path into the film container, the unloading is promoted by the fluid ejected by the fluid ejecting means and unloaded into the film container. Therefore, according to the film peeling / conveying device, the film unloaded from the upper conveying path does not pass while blocking the conveying path of the substrate, so the above-mentioned problem of the film peeling / conveying device described above is solved. It can be said.
[0006]
However, in the film peeling and conveying apparatus disclosed in Japanese Patent Publication No. 7-17308, it is difficult to attach and detach the film container because the film container is detachably mounted above the substrate conveying path. In addition, the structure becomes complicated, and a considerable amount of fluid must be ejected to promote the removal of the peeled film, so that the so-called running cost is increased. There is another problem such as that there is a strong tendency to become a lump and there is a possibility of blocking the upper conveyance carry-out path.
[0007]
The film peeling / conveying means in the film peeling / conveying device disclosed in Japanese Patent Publication No. 7-17309 includes an upper belt mechanism disposed above the conveying path of the substrate, and the upper belt mechanism has the film facing upward. An upper transporting / unloading path is formed for transporting and then stripping the peeled film to one side in the extending direction of the transport path of the substrate. An air duct is disposed downstream of the upper transport / conveyance path and above the substrate transport path. The air duct is arranged to extend in a direction perpendicular to the substrate transport path. A blower fan, an ion generator, and a jet air blowing nozzle are provided on the front surface of the air duct. A release film discharge duct is connected to the rear surface of the air duct. The release film carry-out duct is disposed so as to extend downward in the vertical direction along the side of the substrate transport path and open to a film container disposed below the substrate transport path.
[0008]
When the peeled film is carried into the air duct from the upper conveyance carry-out path, air containing ions is blown into the air duct from the jet air blowing nozzle, and after the elapse of a predetermined time during the blowing, the center of the air duct is further Air containing ions is sprayed on the surface. The film in the air duct is unloaded into the film container through the release film unloading duct. Therefore, also in this film peeling / conveying apparatus, since the film carried out from the upper conveying path does not pass while blocking the conveying path of the substrate, the above-mentioned problem of the film peeling / conveying apparatus described above is solved. It can be said.
[0009]
[Problems to be solved by the invention]
However, the film peeling / conveying device disclosed in Japanese Patent Publication No. 7-17309 is considerably complicated in configuration due to the provision of an air duct, a fan for blowing air, an ion generating device, a jet air blowing nozzle, and the like. Furthermore, in order to forcibly carry out the peeled film, a considerable amount of air has to be ejected, so that the so-called running cost is increased, and the film is lumped by the action of the ejected air. There is another problem, such as that the release film carry-out duct may be blocked.
[0010]
The present invention has been made on the basis of the above facts, and its purpose is to be able to manufacture the film peeled off from the substrate sufficiently reliably as desired, while being relatively simple in construction and capable of being manufactured at low cost. It is to provide an improved film peeling and conveying apparatus that can.
[0011]
[Means for Solving the Problems]
According to the present invention, at least one end of the film attached to one side of the substrate is completely peeled off from the substrate, and peeling means for completely peeling the film from the substrate is contained. Conveying means for conveying to the means, the peeling means includes film peeling and conveying means for forcibly conveying the partially peeled film upward from the substrate, and the film peeling and conveying means is provided on the substrate. An upper belt mechanism disposed above the conveyance path, wherein the upper belt mechanism conveys the film upward and then conveys the substrate toward one of the extending directions of the substrate. In the film peeling / conveying apparatus, a conveying / unloading path is formed, and the conveying means conveys the film unloaded from the upper conveying / unloading path toward the film accommodating means.
The transport means is disposed above the transport path of the substrate so as to slide down the film transported from the upper transport transport path from one side to the other side of the transport path of the substrate. A film transport slide arranged to be inclined so as to be lowered toward the other side;And
The film transport slide is provided with a sweeping means for sweeping out the film discharged from the upper transport carry-out path onto the film transport slide, and the sweep means is configured to remove the slope of the film transport slide. A sweep member disposed so as to extend along the upper surface of the film transport slide in a direction perpendicular to the direction, and the sweep member, and an upper end position and a lower end position of the film transport slide in the direction of the inclination Reciprocating means for reciprocating between the two,A film peeling / conveying device is provided.
[0012]
In the present invention, the film unloaded from the upper conveyance path of the upper belt mechanism is unloaded onto the film conveyance slide disposed above the substrate conveyance path, and is slid down to the side of the substrate conveyance path. . The film is unloaded without passing through the transfer path of the substrate, and can be naturally dropped after being unloaded from the upper transfer / unload path. This possibility increases as the tilt angle of the film transport slide increases. Therefore, according to this invention, the film peeled from the board | substrate can be conveyed reliably as desired. This effect can be achieved by disposing the film transport slide above the substrate transport path. Therefore, the film peeling and conveying apparatus according to the present invention has a simple configuration and can be manufactured at low cost.
In the present invention, the sweeping member can be swept down between the upper end position and the lower end position in the inclination direction of the film transport slide, so that the film transported to the film transport slide can be swept away. The film is transported more reliably.
[0013]
According to the present invention, in addition to the above-described configuration, the film transporting slide further comprises a film peeling transport device comprising a slide guide plate having a plurality of continuous uneven shapes in a cross section in a direction orthogonal to the direction of the inclination. Provided.
In this invention, the clearance gap between the film carried out on the sliding guide plate and the upper surface of a sliding guide plate increases, and the area which a film adheres by static electricity decreases. As a result, the force with which the film sticks to the sliding guide plate is reduced, and the film is easily slipped off.
[0014]
According to the present invention, in addition to the first configuration described above, the lower surface of the film transport slide is further provided with a chamber that forms a space sealed against outside air between the lower surface and the lower surface. The chamber is connected to an air supply source, and the film transport slide is formed with a plurality of holes for discharging air supplied into the chamber by the air supply source to the upper surface side of the film transport slide. A film peeling and conveying apparatus is provided.
In this invention, since air is discharged from each of the holes of the film transport slide to the upper surface side, an air gap is formed between the film transported to the film transport slide and the upper surface of the film transport slide. Comes up. As a result, the film can easily fall naturally on the film transport slide.
[0016]
According to the present invention, in addition to the first configuration described above, the lower surface of the film transport slide is further provided with a chamber that forms a space sealed against outside air between the lower surface and the lower surface. The chamber is connected to an air supply source, and the film transport slide is formed with a plurality of holes for discharging the air supplied into the chamber by the air supply source to the upper surface side of the film transport slide. A film peeling and conveying apparatus is provided in which the upper surface of the conveying slide is formed by a brush.
In the present invention, since air is discharged from each of the holes of the film transport slide to the upper surface side, the film carried out to the brush of the film transport slide floats on the brush. In this state, the film can be swept down by reciprocating the sweep member between the upper end position and the lower end position in the inclination direction of the film transport slide, so that the film transport is performed more reliably. The
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, with reference to an accompanying drawing, an embodiment of a film exfoliation conveyance device constituted according to the present invention is described in detail.
[0018]
With reference to FIG. 1, the film peeling conveyance apparatus 2 which makes the novel characteristic of this invention is provided as a part of film peeling apparatus 100 which the whole is not shown in figure. Before describing the film peeling / conveying device 2, first, an outline of the film peeling device 100 will be described.
[0019]
The film peeling apparatus 100 includes a substrate transfer unit 102 disposed on the entrance side. The substrate transport means 102 includes a plurality of transport rollers 104 arranged substantially horizontally at intervals in the transport direction F of the substrate P. These transport rollers 104 are rotationally driven by an electric motor, and can move the substrate P in the transport direction F along the substrate transport surface PL. In this embodiment, the substrate P is composed of a printed wiring board having films attached to both sides.
[0020]
A clamping means and positioning means (not shown) and an end peeling means 106 are disposed at the downstream end of the substrate transport means 102. The clamping means includes a pair of clamp members that are spaced apart from each other across the transport path of the substrate P (substantially horizontal transport path along the substrate transport surface PL), and releases the substrate P onto the transport path. It is configured so that it can be clamped freely. The positioning means is configured to detect the front end of the substrate P transported by the transport roller 104 by a reflective optical sensor and stop the substrate P at a predetermined position.
[0021]
The end peeling means 106 includes a moving body 108 configured to reciprocate in the width direction of the transport path of the substrate P, and a pair of pressure rollers arranged with a space in the vertical direction across the transport path of the substrate P 110 is provided. The pair of press contact rollers 110 is configured to press the substrate P on the transport path so as to be releasable. In a state where the substrate P is clamped at a predetermined position by the clamping means, each pair of the pressure rollers 110 is pressed against the upper surface of each film end at the end of the substrate P with a predetermined pressure. In this state, each pair of the pressure rollers 110 is reciprocated in the width direction by the moving body 108, and the end portions of the respective films on the substrate P are partially peeled off.
[0022]
A film peeling / conveying device 2, which will be described in detail later, is disposed on the downstream side of the end peeling means 106, and another substrate conveying means 112 is disposed on the downstream side of the film peeling / conveying device 2. The films on both sides of the substrate P, the edges of which have been partially peeled off by the edge peeling means 106, are completely peeled off by the film peeling / conveying device 2 and conveyed into the film container 114 as described later. The film container 114 is detachably mounted below the transport path of the substrate P. The substrate transport means 112 disposed on the outlet side of the film peeling apparatus 100 is provided to transport the substrate P, which is completely peeled off and does not exist, further downstream, and is similar to the transport roller 116 similar to the transport roller 104. Are provided.
[0023]
Next, with reference to FIG.1 and FIG.2, the film peeling conveyance apparatus 2 which concerns on this invention is demonstrated. The film peeling / conveying device 2 was completely peeled off from the peeling means 4 for completely peeling the film from which the one end of the film adhered to one side (upper surface) of the substrate P was partially peeled from the substrate P. A transport unit 6 for transporting the film to a film storage container 114 which is a film storage unit.
[0024]
The peeling means 4 includes a film peeling / conveying means 8 for forcibly conveying the partially peeled film upward from the substrate P, and an air injection means 9. The air ejecting means 9 is configured such that compressed air is ejected from a cylindrical member extending in the width direction toward the upstream direction of the transport path of the substrate P, and is disposed above the transport path of the substrate P. Such an air injection means 9 may have substantially the same configuration as that disclosed in, for example, Japanese Patent Application Laid-Open No. 4-164770, and detailed description thereof will be omitted. The film peeling / conveying means 8 includes an upper belt mechanism 10 disposed above the conveying path of the substrate P. Belt wheels 11 and 12 are disposed below the upper belt mechanism 10, and belt wheels 13, 14, 15, 16 and 17 are disposed above. A plurality of belt wheels 11 to 17 are provided on a rotation shaft (not shown) extending in the width direction. An endless belt 18 is wound around each of the belt wheels 11, 15 and 16, and an endless belt 19 is wound between each of the belt wheels 12, 13 and 14. The outer peripheral surface side of the endless belt 19 is disposed so as to be in pressure contact with the belt wheel 17. The outer peripheral surface side of the endless belt 18 is disposed so as to be in pressure contact with the belt wheel 13.
[0025]
As indicated by arrows in FIG. 1, the film is sandwiched between the endless belts 18 and 19 and transported upward, and then the direction in which the transport path of the substrate P extends (left and right in FIG. 1). Direction), that is, in this embodiment, an upper transport / unload path L is formed for transporting toward the transport direction F of the substrate P. As shown in FIG. 1, the carry-out portion arranged at the upper end portion of the upper conveyance carry-out path L is arranged so as to extend substantially horizontally. Although not shown, a means for blowing out static elimination air is disposed at the carry-out portion of the upper conveyance carry-out path L. Such an upper belt mechanism 10 is drivingly connected to an electric motor (not shown), and is driven to rotate so that the endless belts 18 and 19 move as described above.
[0026]
A plurality of wire guide pairs W for guiding the film from the upper transport carry-out path L toward the film transport slide 20 described later are provided at the upper end of the upper transport carry-out path L at intervals in the width direction. . Each of the wire guide pairs W is disposed so as to extend in the vertical direction between the width directions of the endless belts 18 and 19. Each of the wire guide pairs W is also grounded to prevent charging.
[0027]
1 to 4, the transport unit 6 is configured to transport the film transported from the upper transport / unload path L of the upper belt mechanism 10 toward the film storage container 114. The transport means 6 is configured to transfer a film unloaded from the upper transport / unload path L from one side of the transport path of the substrate P to the other side (front side of FIG. In order to slide down in the direction from the right side to the back side, and from the right side to the left side in FIG. 2, a film transport slide 20 is provided that is inclined so as to be lowered from the one side to the other side.
[0028]
As shown in FIG. 3, frames 22 and 24 extending in the transport direction F of the substrate P are disposed on the main body side of the film peeling apparatus 100. The frame 22 is disposed at a relatively high position on one side of the transport path of the substrate P, and the frame 24 is disposed at a relatively low position on the other side of the transport path of the substrate P. The film transport slide 20 is inclined between the frames 22 and 24. The film transport slide 20 is a slide guide plate in which a cross section in a direction (the same direction as the transport direction F of the substrate P) orthogonal to the direction of inclination (the direction orthogonal to the transport direction F of the substrate P) forms a plurality of continuous uneven shapes. 26. The sliding guide plate 26 is formed of a metal plate such as stainless steel. An antistatic paint (conductive paint) is applied to the upper surface of the sliding guide plate 26, and the sliding guide plate 26 is grounded. In the illustrated embodiment, the concave and convex shape of the sliding guide plate 26 is such that the convex portion has an arc shape and the concave portion formed between the convex portions is flat. The cross-sectional shape of the sliding guide plate 26 is constant from the upper end to the lower end in the inclination direction, and extends linearly in the same direction.
[0029]
A chamber 28 is formed on the lower surface of the sliding guide plate 26 so as to form a space sealed against the outside air. The chamber 28 is formed by enclosing the lower surface of the sliding guide plate 26 in a substantially box shape with an appropriate plate member. An electric fan 30, which is an air supply source for supplying air into the chamber 28, is attached to the bottom 29 of the chamber 28. In relation to this configuration, the slide guide plate 26 has a plurality of small holes for discharging the air supplied into the chamber 28 by the electric fan 30 to the upper surface side of the slide guide plate 26 (FIG. 3). reference). The diameter of each small hole may be about 1 mm.
[0030]
The sliding guide plate 26 is provided with a sweeping means 40 for sweeping off the film discharged from the upper conveyance / unloading path L onto the sliding guide plate 26. The sweeping means 40 includes a sweeping member 42 disposed so as to extend along the upper surface of the sliding guide plate 26 in a direction perpendicular to the direction of inclination of the sliding guide plate 26, and the sweeping member 42. A rodless pneumatic cylinder mechanism 44 (which constitutes a reciprocating means) is provided for reciprocating between the upper end position and the lower end position of the plate 26 in the inclination direction. The sweep member 42 includes a frame (not shown) and a plate member 42 a, and the plate member 42 a that directly sweeps the film is disposed so as to stand upright with respect to the sliding guide plate 26. The lower end of the plate member 42a has substantially the same shape as the concavo-convex shape of the sliding guide plate 26, and is disposed so as to be positioned above the upper surface of the sliding guide plate 26 with a substantially constant gap (FIG. 4). reference).
[0031]
Referring to FIG. 2, a side conveyance path 50 extending in the vertical direction is disposed on the other side of the conveyance path of the substrate P. The upper end of the side conveyance path 50 opens to the lower end of the sliding guide plate 26, and the lower end of the side conveyance path 50 is arranged to open to the film storage container 114.
[0032]
In this embodiment, there is provided other peeling means for completely peeling the film from which the one end of the film attached to the other surface (lower surface) of the substrate P is partially peeled from the substrate P. . Referring to FIG. 1, the other peeling means includes a lower belt mechanism 120 which is a film peeling and conveying means for forcibly conveying a partially peeled film downward from the substrate P, and an air injection means (not shown). Is included. The lower belt mechanism 120 and the air ejecting means are disposed below the transport path of the substrate P. The air injection means is configured such that compressed air is injected in the upstream direction from a cylindrical member extending in the width direction. The compressed air is blown between the lower surface of the substrate P and the front end portion of the partially peeled film, and the peeling from the substrate P is promoted and deflected downward. The film deflected downward is conveyed downward by the lower belt mechanism 120 and carried out into the film container 114. The lower belt mechanism 120 and the air ejecting means do not form a novel configuration of the present invention, and may have substantially the same configuration as that disclosed in, for example, Japanese Patent Application Laid-Open No. 4-164770. Is omitted.
[0033]
Next, the effect | action of the film peeling conveyance apparatus 2 comprised as mentioned above is demonstrated. 1 to 4, when the front end portion of the film on the upper surface is partially peeled off by the edge peeling means 106 and the substrate P is conveyed below the upper belt mechanism 10, the air jetting means 9 compresses it. Air is blown between the substrate P and the film partially peeled from the front end. Thereby, peeling of a film is accelerated | stimulated and the front-end part is deflected upwards. The upwardly deflected film is sandwiched between the endless belts 18 and 19 of the upper belt mechanism 10 and is transported upward along the upper transport carry-out path L and then substantially horizontally toward the transport direction F of the substrate P. Then, it is carried out on the sliding guide plate 26.
[0034]
The sliding guide plate 26 has an uneven shape as described above, and air is constantly supplied into the chamber 28 on the lower surface of the sliding guide plate 26 by an electric fan 30. By being discharged to the upper surface side of the sliding guide plate 26 through a large number of holes, the film carried out on the sliding guide plate 26 floats without being in close contact with the sliding guide plate 26. The film unloaded on the sliding guide plate 26 is further forcibly moved in the direction of the lower end of the sliding guide plate 26 by the reciprocating motion of the sweeping member 42 of the sweeping means 40. It is conveyed in the path 50. The film conveyed into the side conveyance path 50 does not become a lump like the conventional one, and is accommodated in the film container 114 by natural fall.
[0035]
The amount of air supplied by the electric fan 30 into the chamber 28 on the lower surface of the sliding guide plate 26 may be an amount necessary to lift the film from the upper surface of the sliding guide plate 26. Therefore, the amount of air used is relatively small, and the running cost is remarkably low compared to the conventional case.
[0036]
In the above embodiment, since the film transport slide 20 is constituted by the combination of the slide guide plate 26, the chamber 28, the electric fan 30, and the sweeping means 40, the film transport effect is remarkably high. Therefore, the inclination angle of the sliding guide plate 26 with respect to the horizontal plane can be made relatively gentle, the height of the entire apparatus can be kept low, and the apparatus becomes compact. In the above embodiment, the inclination angle of the sliding guide plate 26 is about 25 ° to 30 °.
[0037]
FIG. 5 shows another embodiment in which the upper surface of the sliding guide plate 26 is formed by a brush 60. The other configuration is substantially the same as that of the embodiment shown in FIG. The brush 60 is provided with a thin line member or a hair-like member made of synthetic resin having elasticity and rigidity sufficient to maintain a substantially upright state. Can be formed. The upper surface of the brush 60 is formed substantially flat. The film carried to the upper surface of the brush 60 from the upper conveying / unloading path L is lifted by the air supplied by the electric fan 30, and is further moved in the lower end direction in the same manner as described above by the reciprocating motion of the sweeping member 42 of the sweeping means 40. Is forced to move. The lower surface of the sweep-off member 42 is formed in a straight line substantially parallel to the upper surface of the brush 60, and is disposed so as to move along substantially the same surface or a surface slightly lower than the upper surface of the brush 60. It is preferable (the separation of the film from the upper surface of the brush 60 is good).
[0038]
As mentioned above, although the embodiment of the film peeling and conveying apparatus according to the present invention has been described, the present invention is not limited to the above embodiment, and various modifications or corrections can be made without departing from the scope of the present invention. is there. For example, in the above embodiment, the film transport slide 20 is configured by a combination of the sliding guide plate 26, the chamber 28, the electric fan 30, and the sweeping means 40. A combination of the fans 30 may be used.
[0039]
Moreover, the example which comprises the film conveyance slide 20 only with the metal sliding guide board which consists of one surface with the flat surface without an unevenness | corrugation is also considered. In this case, making the inclination angle of the sliding guide plate with respect to the horizontal plane relatively steep and / or applying an antistatic paint to the surface of the sliding guide plate and grounding promotes the natural fall of the film. It is effective. It is also conceivable to form this sliding guide plate from a synthetic resin. Further, there is a combination of the flat sliding guide plate and the sweeping means 40, or a combination of forming a plurality of small holes in the flat sliding guide plate and providing the chamber 28 and the electric fan 30 on the lower surface.
[0040]
Similarly, an example in which the film transport slide 20 is constituted only by the above-described slide guide plate 26 having unevenness is also conceivable. In that case, the hole of the sliding guide plate 26 is unnecessary. The sliding guide plate 26 may be formed of a synthetic resin as described above. There is also a combination of the sliding guide plate 26 and the sweeping means 40.
[0041]
In the embodiment shown in FIG. 5, the sliding guide plate 26 may be constituted by a sliding guide plate made of metal or synthetic resin having a flat surface with no unevenness.
[0042]
In the above embodiment, the electric fan 30 is used as a means for supplying air to the chamber 28. However, a means using an air supply source of a factory can be given as an example. In this case, the air supply source and the chamber 28 may be connected via a pressure reducing valve and an on-off valve.
[0043]
In the above-described embodiment, the upper belt mechanism 10 is formed with the upper conveyance / unloading path L that conveys the film upward and then unloads the film toward one side F in the direction in which the conveyance path of the substrate P extends. The direction in which the film is carried out on the upper carrying-out path L may be the direction opposite to the carrying direction F of the substrate P.
[0044]
【The invention's effect】
According to the film peeling / conveying apparatus configured according to the present invention, the structure is relatively simple and can be manufactured at low cost, and the film peeled from the substrate can be conveyed sufficiently reliably as desired.
[Brief description of the drawings]
FIG. 1 is a side view schematically showing an embodiment of a film peeling and conveying apparatus configured according to the present invention.
FIG. 2 is a schematic view of FIG. 1 viewed from the left.
3 is a perspective view showing a part of the film peeling and conveying apparatus shown in FIG. 1. FIG.
4 is a cross-sectional view taken along the line AA in FIG. 3;
FIG. 5 is a cross-sectional view showing another embodiment of a film transport slide.
[Explanation of symbols]
2 Film peeling and conveying device
4 Peeling means
6 Transport means
8 Film peeling and conveying means
10 Upper belt mechanism
20 Film transport slide
26 Sliding guide board
28 rooms
30 Electric fan
40 Sweeping means
42 Sweeping member
44 Rodless pneumatic cylinder mechanism
50 Side transport path
60 brushes
100 Film peeling device
114 Film container
F Transport direction of substrate P
L Upper transport route
P substrate
Transfer surface of PL substrate P

Claims (5)

A peeling means for completely peeling the film from which the one end of the film attached to at least one surface of the substrate is partially peeled from the substrate, and a conveying means for transporting the completely peeled film to the film accommodating means. The peeling means includes a film peeling / conveying means for forcibly conveying the partially peeled film upward from the substrate, and the film peeling / conveying means is disposed above the conveying path of the substrate. The upper belt mechanism is formed with an upper conveying / unloading path for conveying the film upward and then unloading the substrate toward one of the extending directions of the conveying path of the substrate. In the film peeling / conveying apparatus, the conveying means conveys the film unloaded from the upper conveying / unloading path toward the film accommodating means.
The transport means is disposed above the transport path of the substrate so as to slide down the film transported from the upper transport transport path from one side to the other side of the transport path of the substrate. It is provided with a film transport slide arranged so as to be lowered toward the other side,
The film transport slide is provided with a sweeping means for sweeping out the film discharged from the upper transport carry-out path onto the film transport slide, and the sweep means is configured to remove the slope of the film transport slide. A sweep member arranged to extend along the upper surface of the film transport slide in a direction perpendicular to the direction, and an upper end position and a lower end position of the film transport slide in the inclination direction of the film transport slide And a reciprocating means for reciprocating between the two. The film peeling / conveying apparatus according to claim 1, wherein the film conveying slide comprises a sliding guide plate in which a cross section in a direction orthogonal to the direction of the inclination forms a plurality of continuous uneven shapes. The sweep member includes a plate member that directly sweeps the film, and the plate member is disposed so as to stand upright with respect to the slide guide plate, and a lower end of the plate member has substantially the same shape as the slide guide plate. The film peeling / conveying device according to claim 2, wherein the film peeling / conveying device is positioned above and with a substantially constant gap with respect to the upper surface of the sliding guide plate. On the lower surface of the film transport slide, a chamber is formed which forms a space sealed against the outside air between the lower surface and the chamber is connected to an air supply source. The film peeling / conveying device according to claim 1, wherein a plurality of holes for discharging air supplied into the chamber by a source to the upper surface side of the film conveying slide are formed. On the lower surface of the film transport slide, a chamber is formed which forms a space sealed against the outside air between the lower surface and the chamber is connected to an air supply source. 2. The film according to claim 1, wherein a plurality of holes for discharging air supplied into the chamber by a source to the upper surface side of the film transport slide are formed, and the upper surface of the film transport slide is formed by a brush. Peeling and conveying device.

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