JP2005109112A - Method and device for cleaning tape-shaped member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for cleaning a tape-shaped member, wherein no damages are applied to the surface of the tape-shaped member, and foreign matter can be removed by its sticking capability. <P>SOLUTION: In the method and device for cleaning the tape-shaped member, the tape-shaped member is formed with fine circuits at a predetermined space in a longitudinal direction on a surface thereof and is consecutively shifted to the longitudinal direction and a constant direction, to clean the tape-shaped member on this shifting path. A cleaning fluid is atomized by the force of an air pressure and is sprayed to the tape-shaped member, whereby cleaning is performed by colliding fine particles of the cleaning fluid with the tape-shaped member. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a cleaning method and a cleaning apparatus for a tape-like member that is cleaned by spraying a cleaning liquid while continuously moving a long tape-like member in which fine circuits are formed at predetermined intervals.

As tape-like members used for manufacturing semiconductor devices, there are COF tapes, TAB tapes, and spacer tapes for protecting them. Since these COF tapes and TAB tapes are incorporated into, for example, liquid crystal display panels, they are required to be small and thin. In addition, the number of leads is increased due to the increase in the recording density of the driver IC, and the lead line width and interval are becoming very narrow. Adhering foreign matter has become a major factor in yield reduction and reliability reduction. In order to remove these obstruction factors, a conveying device has been devised in which a tape-like member is taken out from a take-out reel and then taken up by a take-up reel after cleaning the tape-like member on a moving path. As a cleaning method, a method of sucking foreign matter blown and removed from a nozzle by compressed air, which is a dry method, or a method of sucking foreign matter blown and removed to a tape-like member by applying ultrasonic waves to the compressed air has been adopted. (For example, refer to Patent Document 1). In some cases, an adhesive roll or a rotating brush having a strong foreign matter removing power is applied to the spacer tape.
JP 2001-237282 A

  Conventional dry-type cleaning methods mainly using air blow have been widely used because they can be configured with a relatively simple structure. However, this method has a weak point that since the air density is low, only a weak external force can be applied to the foreign matter, and the foreign matter cannot be sufficiently removed. Moreover, the adhesive roll with a high removal capability has a weak point that an adhesive remains after the treatment. Similarly, a rotating brush having a high removal capability has a weak point that deforms the inner lead of the TAB tape and damages the wiring pattern of the COF tape. For this reason, there has been a demand for a cleaning method and a cleaning device for a tape-like member that does not damage the inner lead and damage the wiring pattern and has a foreign matter removing ability.

The present invention has been proposed to solve the above problems, and relates to the following.
(1) A tape-shaped member having a surface on which fine circuits are formed at predetermined intervals in the longitudinal direction is continuously moved in the longitudinal direction and in a predetermined direction, and the tape-shaped member is cleaned on the moving path. The cleaning method according to claim 1, wherein the cleaning is performed by causing the cleaning liquid to collide with the tape-shaped member by atomizing the cleaning liquid by a force of air pressure and spraying the cleaning liquid on the tape-shaped member. Method for cleaning the shaped member.

(2) The cleaning is performed by spraying the cleaning liquid onto the tape-shaped member and then blowing the gas onto the tape-shaped member on the moving path in the predetermined direction to drain the cleaning liquid attached to the tape-shaped member. The cleaning method according to (1).
(3) The cleaning method according to (1) or (2), wherein tension is applied to the tape-like member during the movement in the predetermined direction.

(4) A tape-like member having a fine circuit formed on the surface in the longitudinal direction at a predetermined interval and a spacer tape having no circuit formed on the surface are separately moved in the longitudinal direction and moving. A cleaning method for a tape-like member and a spacer tape, which are wound on a single roll-like material after cleaning each other, and each of the tape-like member and the spacer tape on a moving path that moves in a certain direction. The cleaning liquid is atomized by the force of air pressure and the cleaning liquid is sprayed on each of the tape-like member and the spacer tape to cause the cleaning liquid to collide with each of the tape-like member and the spacer tape, and then the tape. The cleaning liquid adhering to the tape-shaped member and spacer tape by blowing gas to each of the tape-shaped member and spacer tape Cleaning method carried out by.
(5) The cleaning method according to (4), wherein tension is applied to at least one of the tape-shaped member and the spacer tape while each of the tape-shaped member and the spacer tape moves in a certain direction during cleaning.

  (6) A transport device for continuously moving a tape-like member having a fine circuit formed on the surface in the longitudinal direction at predetermined intervals in the longitudinal direction, and a moving path by atomizing the cleaning liquid by the force of air pressure A cleaning device for a tape-shaped member having a spraying device for spraying the upper tape-shaped member and causing cleaning liquid particles to collide with the tape-shaped member for cleaning, and the conveying device keeps the tape-shaped member being cleaned constant. Cleaning device that moves in the direction.

(7) The cleaning apparatus according to (6), further including an air knife that blows gas to the tape-shaped member moving in the predetermined direction to drain the cleaning liquid attached to the tape-shaped member.
(8) The cleaning device according to (6) or (7), further including a tension unit that applies tension to the tape-like member during the movement in the predetermined direction.

(9) A transport device that continuously moves a tape-shaped member having a fine circuit formed on the surface at a predetermined interval in the longitudinal direction and a spacer tape having no circuit formed on the surface in the longitudinal direction separately. A spray device that moves the cleaning liquid into fine particles by the force of air pressure on the moving path and sprays each of the tape-shaped member and spacer tape to cause the cleaning liquid to collide with each of the tape-shaped member and spacer tape. A cleaning device having an air knife that blows gas to each of the tape-shaped member and the spacer tape on the path to drain the cleaning liquid adhering to the tape-shaped member and the spacer tape. Each of the spacer tapes has a cleaning tape and a cleaning tape and a spacer tape. Is moved in a direction, the spraying device and then by the air knife cleaning, overlapping the two and has a mechanism for winding a single roll-like object cleaning apparatus.
(10) The cleaning apparatus according to (9), further including a tension unit that applies tension to at least one of the tape-like member and the spacer tape that are moving in the predetermined direction.

According to the cleaning method and cleaning device for a tape-shaped member of the present invention, it is possible to remove fine foreign matters and foreign matters having a strong adhesive force that cannot be removed by a conventional dry method mainly using air blow for removing foreign matters from the tape-shaped member. Can now. In addition, in a COF tape or TAB tape having a circuit such as a fine inner lead on the surface, foreign matter can be removed without causing deformation of the inner lead, so that the present invention can also be applied to a COF tape or TAB tape. This is a feature of the present invention.
Further, according to the cleaning method and the cleaning device for the tape-shaped member and the spacer tape of the present invention, in addition to the above effects, both can be cleaned at the same time, and then can be immediately stacked to form a roll-like material, which is efficient. In addition, there is an effect that it can be suitably used for mounting in a clean state after cleaning.

  The tape-shaped member to be cleaned in the present invention is a long tape having fine circuits formed on the surface at predetermined intervals in the longitudinal direction, and examples thereof include a COF tape and a TAB tape. Such a tape has a plurality of fine circuits made of copper, tin plating, etc. at a predetermined interval in the longitudinal direction of the tape on one or both sides of a flexible plastic film such as a polyimide film or a polyethylene terephthalate film. The thickness is usually 25 to 90 μm and the width is usually 35 to 105 mm. Sprocket holes may be provided at regular intervals on both side edges of the tape-like member. Examples of the spacer tape include a flexible plastic film, such as a polyethylene terephthalate film and a polyetherimide film. The thickness is usually 50 to 100 μm, and usually has the same width as the tape-like member to be overlapped. Have. Moreover, the same sprocket hole as a tape-shaped member may be provided.

  The conveying device used for cleaning the tape-shaped member is not particularly limited as long as it continuously moves the tape-shaped member in the longitudinal direction. Usually, a feeding unit such as a feeding reel that feeds the roll-shaped tape-shaped member; It is preferable to have a winding part such as a winding reel for winding the tape-like member after cleaning. As a method of moving the tape-shaped member in a certain direction during cleaning, there is a method of performing cleaning on a moving path between only the feeding portion and the winding portion. Further, if necessary, one or more guide rollers are arranged between the feeding portion and the winding portion to change the moving direction of the tape-like member, and between the feeding portion and the guide roller or winding. The cleaning may be performed on a moving path in a certain direction between the section and the guide roller or between the two guide rollers. A sprocket may be used as the guide roller.

  Also, it may be connected to the tape-shaped member manufacturing process without using a supply reel or a take-up reel, and may be directly cleaned after manufacturing, or may be directly sent to the semiconductor chip mounting process without being wound after cleaning. Good.

  The transport device used for cleaning the tape-like member and spacer tape separately moves both in the longitudinal direction separately, moves each in a certain direction during cleaning, and after cleaning, overlaps both to form one roll There is no particular limitation as long as it has a winding mechanism. For example, a feeding portion composed of a feeding reel for feeding out a roll-shaped tape-shaped member and a spacer tape feeding reel for feeding out a roll-shaped spacer tape, etc., and a tape-shaped member after cleaning and a spacer tape are stacked to form a single roll-shaped material. What has winding parts, such as a winding reel to wind up, is suitable. Further, when the tape-like member and the spacer tape are overlapped before cleaning to form a roll-like material, a feeding portion comprising one feeding reel can be used. As a method for moving the tape-shaped member and the spacer tape in a fixed direction at the time of cleaning, there is a method of performing cleaning on a moving path between only two feeding portions and a winding portion. Further, if necessary, one or more guide rollers are arranged between at least one feeding portion and the winding portion to change the moving direction of the tape-shaped member, and between the feeding portion and the guide roller, Alternatively, cleaning may be performed on a moving path in a certain direction between the winding unit and the guide roller or between the two guide rollers. A sprocket may be used as the guide roller. In the case where the feeding portion is composed of one feeding reel, at least one guide roller is required in order to move the tape-shaped member and the spacer tape separately for cleaning.

  As a spraying device for atomizing and spraying the cleaning liquid by the force of air pressure, the pressurized cleaning liquid supply section and the compressed air supply section for supplying the pressurized cleaning liquid and the compressed air, and the supplied pressurized cleaning liquid and the compressed air are mixed. And a spray nozzle portion that is jetted out. The spray nozzle section has a cleaning liquid discharge port that discharges pressurized cleaning liquid and a compressed air discharge port that is disposed near the cleaning liquid discharge port and discharges compressed air. The arrangement of the cleaning liquid discharge port and the compressed air discharge port is not particularly limited. For example, the cleaning liquid discharge port and the compressed air discharge port may be arranged adjacent to each other at an angle where the discharged cleaning liquid and the discharge air collide. Further, a cleaning liquid discharge port having an outer shape smaller than the inner diameter of the compressed air discharge port may be disposed in the compressed air discharge port. In the latter case, a spraying effect may be enhanced by attaching a cap having a small-diameter discharge port at the tip of the compressed air discharge port.

  For example, there is a device that blows gas from a small-diameter hole as a device that removes the cleaning solution that has adhered to the tape-like member and spacer tape after spraying the cleaning solution. An air knife is preferable.

  In addition, it is preferable to apply tension when the tape-like member or the spacer tape is moved in a certain direction and cleaned. By applying tension, there is an effect of preventing blurring of the tape-like member or the spacer tape due to spraying at the time of cleaning or blowing of gas at the time of liquid removal. When the weight reel is used, the degree of tension is preferably 200 g to 600 g, and more preferably 300 g to 400 g, as the weight of the weight reel.

  FIG. 1 shows one mode of a cleaning mechanism portion of a cleaning apparatus used in the cleaning method of the present invention. Guide rollers 1a and 1b are disposed above and below the cleaning mechanism 6a, and the tape-like member 7 continuously moves in a fixed direction between the guide rollers 1a and 1b, and is cleaned by the cleaning mechanism 6a. The cleaning mechanism 6a includes spray nozzles 2a, 2b disposed on both sides of the moving tape-like member 7, and air knives 3a disposed on both sides in the moving direction of the tape-like member 7 relative to the spray nozzles 2a, 2b. 3b, a casing A in which these members are installed and divided into respective parts, and exhaust parts 5a and 5b provided at the upper and lower parts of the casing A. Or you may add the air knives 4a and 4b which blow a hot air as needed ahead of the moving direction of the tape-shaped member 7 rather than the air knives 3a and 3b. Among them, the guide rollers 1a and 1b are arranged near the entrance / exit of the housing as shown in FIG. 1, but may be arranged at other locations as required. A sprocket or a roll can be used as the guide roller.

The casing A is not essential, but by covering the cleaning mechanism 6a with the casing A, it is possible to prevent the sprayed cleaning liquid and the gas for draining from diffusing. Further, the casing A may not be separated, but by separating, the sprayed cleaning liquid fine particles can be prevented from being scattered in the liquid draining portion, and the liquid draining can be efficiently performed. it can.
When the housing A is provided, the atmosphere in the housing A is exhausted from the exhaust parts 5a and 5b through the exhaust duct (not shown) and exhaust fan (not shown). The sprayed cleaning liquid fine particles and the gas used for draining can be efficiently discharged without diffusing to the surroundings.

  In FIG. 1, the cleaning mechanism is illustrated by vertical conveyance, but when incorporated in an apparatus such as a tape-shaped member production line, the cleaning mechanism may be conveyed horizontally in accordance with the apparatus. The conveyance speed is generally in the range of 0.5 to 15 m / min, but can be changed by arbitrarily controlling the rotation speed of the sprocket or roll.

  FIG. 2 shows an embodiment of an apparatus for simultaneously cleaning a tape-shaped member and a spacer tape (hereinafter, both may be referred to simply as a tape) and winding them on one roll-shaped material. As shown in FIG. 2, the feeding unit 9 and the winding unit 10 are arranged as necessary, and are configured to be simultaneously cleaned and simultaneously transported in two systems for cleaning the tape-like member 7 and for cleaning the spacer tape 8. You can also. The tape-shaped member 7 and the spacer tape 8 that are formed into a roll-like material are continuously fed out from the feeding portion 9, and the tape-like member 7 reaches the winding portion 10 through the guide rollers 1d, 1c, 1b, and 1a. The cleaning mechanism 6a cleans the guide rollers 1b and 1a when moving in a fixed direction. On the other hand, the spacer tape 8 reaches the winding unit 10 through the guide rollers 1g, 1f, and 1e, and is cleaned by the cleaning mechanism unit 6b when moving in a fixed direction between the guide rollers 1f and 1e. The cleaning mechanism unit 6b has the same configuration as the cleaning mechanism unit 6a. Between the guide rollers 1d and 1c, a weight reel 11 for applying tension to the tape-like member 7 being cleaned is disposed. In this case, at least the guide rollers 1c and 1b are not sprockets but rolls.

The spray nozzle part sprays the cleaning liquid by the force of the air pressure, but it can also be arranged on one side or both sides of the tape-like member or the tape-like member and the spacer tape. The pressure when spraying the cleaning liquid is preferably in the range of 4.9 × 10 ^{4 to} 68.6 × 10 ⁴ Pa (0.5 to 7 kg / cm ² ) for both the cleaning liquid pressure and the air pressure, and 29.4 × and more preferably in a range of ^{10 4 ~49.0 × 10 4 Pa (} 3~5kg / cm 2). If it is less than 4.9 × 10 ⁴ Pa (0.5 kg / cm ² ), the spray sprayed from the nozzle may not be a fine mist, and the cleaning power may be remarkably reduced. Conversely, 68.6 × 10 ⁴ Pa. If it exceeds (7 kg / cm ² ), the amount of air to be used becomes extremely large, and at the same time the amount of exhaust must be increased in order to discharge these mists, which is not economical. If the cleaning fluid pressure and air pressure are set to the same level, it is easy to balance. The distance between the spray nozzle part and the tape is preferably in the range of 10 to 100 mm, more preferably in the range of 20 to 50 mm. If it is less than 10 mm, the spray width becomes extremely narrow. As a result, the required number of nozzles increases and the amount of air used increases, which is economically disadvantageous, and the tape and nozzle come into contact with each other due to tape flapping and damage the tape. There is fear and it is not preferable. On the other hand, if it exceeds 100 mm, the spray pressure is reduced with respect to the tape, and there is a possibility that the foreign matter removing force is also reduced in proportion thereto. The nozzle angle with respect to the tape is preferably a right angle in consideration of the striking force. However, in order to prevent the mist from moving in the advancing direction of the tape (upper part in FIGS. 1 and 2), the angle of the tape is 10 to 45 degrees from the right angle. It can also be tilted backward in the direction of travel (downward in FIGS. 1 and 2). In any case, it is preferable that the angle can be arbitrarily adjusted with respect to the tape.

  As the type of cleaning liquid, it is possible to use pure water that has been treated with an ion exchange resin and then passed through a filter, electrolytic water, or a cleaning liquid to which a cleaning agent is added. The cleaning liquid may be used at room temperature, but may be heated to 30 to 80 ° C. in order to enhance the cleaning effect. If it is less than 30 ° C, the effect that the cleaning power does not change much is the same as that at room temperature, but conversely if it exceeds 80 ° C, a high heat-resistant material must be used in the component material of the device, and the device price increases. This is not preferable because there is a fear that the operation may be complicated.

After cleaning, the cleaning liquid needs to be drained. For this purpose, it is preferable to arrange an air knife that blows air at a predetermined pressure so as to face both surfaces of the tape. The slit width of the air knife is preferably in the range of 0.1 to 1 mm, and more preferably in the range of 0.15 to 0.3 mm. If it is less than 0.1 mm, the pressure loss becomes large, the amount of air blown out may be reduced, and the effect of draining may be reduced. On the other hand, if it exceeds 1 mm, the pressure of the air sprayed on the tape surface is lowered, and there is a possibility that the liquid drainage property is lowered. The air pressure is preferably in the range of 4.9 × 10 ⁴ to 49 × 10 ⁴ (0.5 to ⁵ kg / cm ² ). If it is less than 4.9 × 10 ⁴ Pa (0.5 kg / cm ² ), there is a risk that the drainage will be reduced, and if it exceeds 49 × 10 ⁴ Pa (5 kg / cm ² ), the amount of air will increase and the exhaust will be exhausted. The amount must be increased and it is not economical. The distance between the air knife and the tape is preferably in the range of 3 to 20 mm, more preferably in the range of 5 to 10 mm. If it is less than 3 mm, the tape and the air knife may come into contact with each other and damage the tape. Conversely, if it exceeds 20 mm, the air pressure sprayed on the tape may be reduced and the effect of draining may be reduced. The angle at which the air knife is attached to the tape may be a right angle direction, but in order to reduce the risk of the sprayed droplets reattaching, the tape travels backward by 10 to 45 degrees from the right angle (downward in FIGS. 1 and 2). ) Can also be attached. In any case, a structure that can be adjusted to an arbitrary angle is preferable.

  Although the tape surface can be brought into a dry state only by draining, in order to further improve the dry state, it is preferable to perform hot air treatment after the draining. The air knife used for the hot air treatment should have the same specifications as the air knife used when draining the liquid, but it should be placed on both sides facing the tape. At this time, the air pressure, the distance between the tape and the air knife, and the air knife The mounting angle may be the same as in the case of liquid draining. There is also a method using a blower in addition to using an air knife. There is no particular limitation as long as it generates hot air and enhances the dry state. The hot air temperature is preferably 40 to 120 ° C, more preferably 60 to 90 ° C. If it is less than 40 degreeC, there exists a possibility that a drying effect may fall, and if it exceeds 120 degreeC, there exists a possibility that the copper foil and tin plating of a circuit material may be oxidized and denatured.

  As described above, the gas used in the spray nozzle part and the air knife has been described mainly with air, but nitrogen gas may be used in addition to air. As shown in FIG. 2, the entire cleaning apparatus can be cleaned by arranging two cleaning mechanisms shown in FIG. 1 in parallel so that the tape-like member 7 and the spacer tape 8 can be cleaned simultaneously. Further, the feeding unit 9 may be disposed before the cleaning mechanism unit, and the winding unit 10 may be disposed after the cleaning mechanism unit. In this way, the conventional dry method has been performed by blowing compressed air, sucking air, applying ultrasonic waves to the compressed air, or combining these, but it cannot be removed by the dry method The foreign matter can be easily removed by adopting the present invention. Moreover, in the case of such a cleaning device having a high cleaning power, it is common that the fine TAB inner lead is deformed and cannot be adopted for this purpose. However, in the present invention, the cleaning power is high (foreign matter removal property is low). It is suitable as a cleaning device for a tape-like member that does not deform a fine TAB inner lead.

Embodiment 1 of the present invention will be described below.
The cleaning apparatus shown in FIG. 2 was used. A TAB tape (tape-like member) 7 having an inner lead with a width of 48 mm in which fine circuits are formed at predetermined intervals in the longitudinal direction and a spacer tape 8 for protecting the TAB tape are continuously provided from the feeding portion 9 at a moving speed of 3 m / min. Moved. The TAB tape 7 is tensioned by a weight reel 11 having a weight of 500 g via the movement, and is fed to the cleaning mechanism 6a while being guided by the guide rollers 1a, 1b, 1c, and 1d. In the cleaning mechanism section, pure water obtained by filtering room temperature ion-exchanged water with a 0.1 μm filter is supplied at a pressure of 39.2 × 10 ⁴ Pa (4 kg / cm ² ) as a cleaning liquid in the spray nozzle sections 2a and 2b. A force of 39.2 × 10 ⁴ Pa (4 kg / cm ² ) was applied, atomized in the nozzle portion and sprayed to collide with the TAB tape 7 to remove foreign matter adhering to the TAB tape 7. As the spray nozzle at this time, a general commercially available product (manufactured by Spraying Co., Ltd., model: SU13) was used. The spray nozzle was disposed so as to face both sides of the TAB tape 7, the distance from the TAB tape 7 was set to 30 mm, and the angle with respect to the TAB tape 7 was disposed to be about 30 degrees downward from the perpendicular direction. Immediately after cleaning, it is moved between the upper air knives 3a and 3b in order to drain the liquid, but the air knives 3a and 3b are arranged so as to face each other with the TAB tape 7 between them so that liquid can be drained simultaneously. is there. The specifications of the air knives 3a and 3b were a slit width of 0.15 mm and a slit portion length of 100 mm. The air pressures of the air knives 3a and 3b can be adjusted individually on the left and right sides, but both the left and right sides were 1.5 kg / cm ² and sufficient liquid draining was performed with a good balance. The distance between the air knives 3a and 3b and the TAB tape 7 was 7 mm, and the mounting angle was about 30 degrees downward from the perpendicular direction. The tape surface was almost dried only by this treatment, but in order to obtain a higher dry state, the tape was moved between hot air knives 4a and 4b for blowing out the hot air at the top, and drying was added. The set temperature of the hot air at this time was 90 ° C., and the other air knife conditions were the same as the air knife conditions at the time of liquid removal. The spacer tape 8 was also sent to the cleaning mechanism 6b while being guided by the guide rollers 1e, 1f, and 1g, and the same processing as the TAB tape 7 was performed. After cleaning, the TAB tape 7 and the spacer tape 8 were wound up by being overlapped at the winding unit 10.

  The evaluation of the cleaning effect was performed based on how much adhered foreign matter was removed by cleaning. As a result, it was confirmed that the 50 foreign substances marked before cleaning were all removed after cleaning and the cleaning power was high.

Comparative Example 1
Using the same apparatus as in Example 1, evaluation of the detergency of the dry method that has been generally performed has been performed. The cleaning liquid was not sprayed. Compressed air is blown out from an air knife, and foreign substances are removed by the impact force at this time, which is an example of a general dry method. The removed foreign matter is transported instantaneously by powerful exhaust and therefore does not reattach. The air pressure at this time was set to 49 × 10 ⁴ Pa (5 kg / cm ² ), and the distance between the tape and the air knife was set to a minimum of 3 mm. The mounting angle of the air knife is the same as in the first embodiment. As a result, of the 50 foreign materials marked before cleaning, 21 were removed, and the removal rate was about 40%. Example 1 and Comparative Example 1 demonstrated the high cleaning power of the present invention in which the cleaning liquid was atomized in the spray nozzle by the force of air pressure and sprayed onto the tape.

The front view which shows the washing | cleaning apparatus of 1 aspect of this invention. The front view which shows the washing | cleaning apparatus of the other aspect of this invention (Example 1).

Explanation of symbols

1a, 1b, 1c, 1d, 1e, 1f, 1g: guide roller 2a, 2b: spray nozzle part 3a, 3b: air knife 4a, 4b: hot air air knife 5a, 5b: exhaust part 6a, 6b: cleaning mechanism part A : Housing 7: Tape-like member (or TAB tape)
8: Spacer tape 9: Feeding part 10: Winding part 11: Weight reel

Claims (10)

  A tape-shaped member cleaning method for continuously moving a tape-shaped member having a fine circuit formed on a surface thereof at predetermined intervals in the longitudinal direction in a longitudinal direction and a fixed direction, and cleaning the tape-shaped member on the moving path. The cleaning is performed by causing the cleaning liquid to collide against the tape-shaped member by atomizing the cleaning liquid by the force of air pressure and spraying the cleaning liquid on the tape-shaped member. Cleaning method.   The cleaning is performed by spraying the cleaning liquid onto the tape-shaped member and then spraying gas onto the tape-shaped member on the moving path in the predetermined direction to drain the cleaning liquid adhering to the tape-shaped member. Cleaning method.   The cleaning method according to claim 1 or 2, wherein tension is applied to the tape-shaped member during the movement in the predetermined direction.   A tape-shaped member having a fine circuit formed on the surface in the longitudinal direction at a predetermined interval and a spacer tape having no circuit formed on the surface are moved separately in the longitudinal direction separately, A cleaning method for a tape-like member and a spacer tape, which are wound on one roll-like object after cleaning, and cleaning the tape-like member and the spacer tape on a moving path each moving in a certain direction, In cleaning, the cleaning liquid is atomized by the force of air pressure and sprayed onto each of the tape-shaped member and the spacer tape, so that the cleaning liquid particles collide with each of the tape-shaped member and the spacer tape, and then the tape-shaped member and Blow off the cleaning liquid adhering to the tape-shaped member and spacer tape by blowing gas onto each spacer tape. Cleaning method carried out by the.   The cleaning method according to claim 4, wherein at least one of the tape-shaped member and the spacer tape is tensioned while moving in a certain direction during cleaning.   Tape on the surface of the moving path, and a transport device that continuously moves the tape-shaped member with fine circuits formed in the longitudinal direction at predetermined intervals on the surface, and the cleaning liquid is atomized by the force of air pressure. A cleaning device for a tape-shaped member having a spraying device for spraying the surface-shaped member and causing cleaning liquid particles to collide with the tape-shaped member for cleaning, and the conveying device moves the tape-shaped member being cleaned in a certain direction. Cleaning device that is what makes you   The cleaning apparatus according to claim 6, further comprising an air knife for draining a cleaning liquid adhering to the tape-like member by blowing gas onto the tape-like member moving in the predetermined direction.   The cleaning apparatus according to claim 6 or 7, further comprising tension means for applying tension to the tape-like member during the movement in the predetermined direction.   On the moving path, a transport device that continuously moves the tape-shaped member with fine circuits formed on the surface at predetermined intervals in the longitudinal direction and the spacer tape on which the circuit is not formed on the surface separately in the longitudinal direction. In the spraying device that causes the cleaning liquid to collide with each of the tape-shaped member and the spacer tape by atomizing the cleaning liquid by the force of air pressure and spraying it on each of the tape-shaped member and the spacer tape, on the moving path A cleaning device having an air knife that blows gas to each of the tape-shaped member and the spacer tape to drain the cleaning liquid attached to the tape-shaped member and the spacer tape. Each with a spraying device and an air knife cleaning tape-like member and spacer tape, each in a certain direction The moved, after cleaning by spraying unit and the air knife, overlapping the two and has a mechanism for winding a single roll-like object cleaning apparatus. The cleaning apparatus according to claim 9, further comprising a pulling unit that applies tension to at least one of the tape-like member and the spacer tape that are moving in the predetermined direction.

Images