JP2006263720A - Tape material washing device and tape material washing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tape material washing device and a tape material washing method capable of improving the washability of a tape material. <P>SOLUTION: Immersion water 411b is accumulated so as to bury a second guide roller 46 and a third guide roller 47 inside the immersion tub 411 of the tape material washing device 1 and thus a tape material 100 under conveyance is immersed. Also, inside the immersion tub 411, an ultrasonic washing means 4132 is provided facing a fourth guide roller. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a tape material cleaning apparatus and a tape-shaped member cleaning method for cleaning a film carrier tape for mounting electronic components such as a TAB tape and a COF tape.

  In recent years, as a tape material, for example, a film carrier tape for mounting electronic components such as a TAB tape and a COF tape used for a flat panel display, a printer, and the like is known.

  In the film carrier tape for mounting electronic parts, foreign matters such as dust floating in the air, friction powder with the reel, and metal powder generated from each device adhere to the tape during manufacture and inspection. These foreign substances adhering to the tape cause a connection failure such as a short circuit of the printed wiring board, and therefore are required to be removed.

Accordingly, a cleaning device has been proposed that removes foreign matter adhering to the tape by immersing it in a cleaning solution in the cleaning tank while transporting the tape, and applying ultrasonic vibration in the cleaning solution (see Patent Document 1). ).
Japanese Patent Laid-Open No. 2003-24888

  However, in the conventional cleaning apparatus, the foreign matter removed from the tape by ultrasonic vibration remains in the cleaning liquid. Therefore, even if the foreign matter is removed from the tape, the foreign matter again adheres to the tape, so the cleaning property is not good.

  This invention is made | formed in view of this conventional subject, and it aims at providing the tape material washing | cleaning apparatus and tape material washing | cleaning method which can improve the washability of a tape material.

  Accordingly, as a result of intensive studies, the present inventors have adopted the following tape material cleaning apparatus and tape material cleaning method in order to solve the above-described problems.

Tape material cleaning apparatus of the present invention:
In the tape material cleaning apparatus of the present invention, ultrasonic vibration is applied to the transport means for transporting the tape material, the immersion tank for immersing the tape material being transported, and the tape material that has been immersed in the immersion tank. And an ultrasonic cleaning means for removing foreign substances adhering to the tape material by spraying the cleaning liquid.

  In such a configuration, the foreign matter adhering to the tape material swells during dipping and the adhesion is weakened. Moreover, since the foreign material is removed from the tape material that has passed through the dipping tank, the foreign material removed from the tape material can be prevented from reattaching to the tape material.

  In the tape material cleaning apparatus of the present invention, the transport unit includes a support unit that supports the tape material at a spraying position by the ultrasonic cleaning unit in a transport line.

  In such a configuration, even if the cleaning liquid is sprayed onto the tape material by the ultrasonic cleaning means, the tape material does not shake, so that foreign matters can be easily removed from the tape material.

  The tape material cleaning apparatus of the present invention further includes a pre-cleaning means for removing foreign matter adhering to the tape material that has been immersed in the immersion tank before the cleaning by the ultrasonic cleaning means. It is characterized by.

  In such a configuration, since the number of foreign matters adhering to the tape material is reduced during cleaning by the ultrasonic cleaning means, it is possible to easily remove foreign matters from the tape material.

  Moreover, in the tape material cleaning apparatus of the present invention, the transport means includes a plurality of guide means for guiding the tape material that has been immersed in the immersion tank upward, and the pre-cleaning means includes the plurality of guides. The apparatus is characterized in that foreign substances adhering to the tape material conveyed upward by the means are removed.

  In such a configuration, the cleaning distance of the pre-cleaning means is ensured longer than when the tape material that has been immersed is transported horizontally. Accordingly, the number of foreign matters adhering to the tape material is further reduced during the cleaning by the ultrasonic cleaning means, and the foreign matters can be further easily removed.

  Furthermore, in the tape material cleaning apparatus of the present invention, it is preferable that an inclination angle of the tape material conveyed upward by the plurality of guide means is set to 10 degrees to 170 degrees.

  Here, when the inclination angle of the tape material is less than 10 degrees or more than 170 degrees, the cleaning distance of the tape material by the pre-cleaning means is almost the same as when the tape material is transported horizontally. The removal processability of is hardly changed and is not preferable.

  Moreover, in the tape material cleaning apparatus of the present invention, the transport means includes a plurality of guide means for horizontally guiding the tape material that has been immersed in the immersion tank, and the pre-cleaning means includes the plurality of guides. The apparatus is characterized in that foreign matter adhering to the tape material conveyed horizontally by the means is removed.

  In such a configuration, the height of the apparatus can be reduced as compared with the case where the tape material that has been immersed is guided upward.

  Moreover, in the tape material cleaning apparatus of the present invention, the conveying unit is configured such that the guide unit positioned on the ultrasonic cleaning unit side among the plurality of guide units also serves as the support unit, while the ultrasonic unit The cleaning means is configured to spray the cleaning liquid onto the tape material supported by the transport line by the guide means.

  In such a configuration, the number of parts can be reduced.

  Further, the tape material cleaning apparatus of the present invention is characterized by comprising a post-cleaning means for removing foreign matter adhering to the tape material after cleaning by the ultrasonic cleaning means.

  In such a configuration, even if foreign matter remains after cleaning by the ultrasonic cleaning means, it can be removed.

  The tape material cleaning apparatus of the present invention is characterized in that it includes a drying unit that dries the tape material that has been cleaned by the ultrasonic cleaning unit or the post-cleaning unit.

  In such a configuration, it is possible to shorten the time required for cleaning and drying of the tape material as compared with the case where cleaning and drying of the tape material are performed separately.

  Further, the tape material cleaning apparatus of the present invention is characterized in that a draining means for removing the cleaning liquid adhering to the tape material that has been cleaned is provided before the drying means.

  In such a configuration, the amount of cleaning liquid during drying is reduced, so that the drying time is shortened.

Further, in the tape material cleaning device of the present invention, the tape material on which the spacer tape is stacked is cleaned, and the transport means is a tape for feeding the tape material to a transport line while separating the spacer tape. It is characterized by comprising a material supply means and a tape material accommodation means for accommodating another spacer tape while being stacked on the cleaned tape material dried by the drying means.

  In such a configuration, the unwinding unit smoothly separates the spacer tape from the tape material, while the winding unit damages the cleaned tape material surface (for example, the wiring pattern on the surface of the tape material) by the spacer tape. It can be prevented smoothly.

  In the tape material cleaning apparatus of the present invention, a dust-free packing chamber for dust-free packing of the tape material cleaned by the tape material storage means is provided.

  In such a configuration, it is possible to prevent foreign matters from adhering during packaging of the tape material that has been cleaned and dried.

  In the tape material cleaning device of the present invention, the tape material is a film carrier tape for mounting electronic components, while the tape material cleaning device removes foreign matter adhering to the film carrier tape for mounting electronic components. It is characterized by being a cleaning device.

  In such a configuration, the same action as that of the tape material cleaning device described above can be obtained with respect to the film carrier tape for mounting electronic components.

Tape material cleaning method of the present invention:
In the tape material cleaning method of the present invention, in the tape material cleaning method for cleaning while transporting the tape material, an immersion step in which the tape material is immersed, and a cleaning liquid in which ultrasonic vibration is applied to the tape material that has been immersed And an ultrasonic cleaning process for removing foreign substances adhering to the tape material.

  In such a configuration, the foreign matter adhering to the tape material swells during the dipping process, and the adhesive force is weakened. Moreover, since an ultrasonic cleaning process is performed with respect to the tape material which completed the immersion process, it can prevent that the foreign material removed from the tape material reattaches to a tape material.

  In the tape material cleaning method of the present invention, in the ultrasonic cleaning step, the cleaning liquid is sprayed while the tape material is supported at a spray position set on a transport line.

  In such a configuration, even if the cleaning liquid is sprayed onto the tape material in the ultrasonic cleaning process, the tape material does not shake, so that foreign matters can be easily removed from the tape material.

  The tape material cleaning method of the present invention is characterized in that a pre-cleaning step for removing foreign matters adhering to the tape material that has been immersed is provided before the ultrasonic cleaning step.

  In such a configuration, since the number of foreign substances adhering to the tape material is reduced in the ultrasonic cleaning process, the foreign substances can be more easily removed from the tape material.

  In the tape material cleaning method of the present invention, in the pre-cleaning step, the tape material that has been immersed is transported upward.

  In such a configuration, a longer cleaning distance is ensured in the pre-cleaning step than when the tape material that has been immersed is transported horizontally. Therefore, in the ultrasonic cleaning process, the number of foreign matters attached to the tape material is further reduced, and foreign matters can be more easily removed from the tape material.

  Furthermore, in the tape material cleaning method of the present invention, it is preferable that an inclination angle of the tape material conveyed upward in the pre-cleaning step is set to 10 degrees to 170 degrees.

  Here, when the inclination angle of the tape material is less than 10 degrees or more than 170 degrees, the cleaning distance of the tape material in the pre-cleaning process is almost the same as in the case where the tape material is transported horizontally. The removal processability of is hardly changed and is not preferable.

  In the tape material cleaning method of the present invention, in the pre-cleaning step, the tape material that has been immersed is transported horizontally.

  In such a configuration, it is possible to keep the transport area low compared to the case where the tape material that has been immersed is transported upward.

  In the tape material cleaning method of the present invention, a post-cleaning step for removing foreign matter adhering to the tape material is provided after the ultrasonic cleaning step.

  In such a configuration, even if foreign matter remains in the tape material after the cleaning in the ultrasonic cleaning process, it can be removed.

  Moreover, in the tape material cleaning method of the present invention, a drying step for drying the tape material that has been cleaned is provided after either one of the ultrasonic cleaning step or the post-cleaning step. Yes.

  In such a configuration, it is possible to shorten the time required for cleaning and drying of the tape material as compared with the case where cleaning and drying of the tape material are performed separately.

  The tape material cleaning method of the present invention is characterized in that a water draining step for removing the cleaning liquid adhering to the tape material that has been cleaned is provided before the drying step.

  In this configuration, the amount of cleaning liquid during the drying process is reduced, so that the drying time is shortened.

  The tape material cleaning method of the present invention is a method for cleaning the tape material on which spacer tapes are stacked, which is provided before the dipping step and transports the tape material while separating the spacer tape. It is characterized by comprising: a feeding step for sending to a line; and a housing step that is provided after the drying step and is accommodated while another spacer tape is stacked on the dried tape material that has been dried.

  In such a configuration, the unwinding unit smoothly separates the spacer tape from the tape material, while the winding unit damages the cleaned tape material surface (for example, the wiring pattern on the surface of the tape material) by the spacer tape. It can be prevented smoothly.

  The tape material cleaning method of the present invention is characterized in that a dust-free packing step of packing the tape material stored in a dust-free state is provided after the storage step.

  In such a configuration, it is possible to prevent foreign matters from adhering during packaging of the tape material that has been cleaned and dried.

  In the tape material cleaning method of the present invention, the tape material is a film carrier tape for mounting electronic components, while the tape material cleaning method removes foreign matters adhering to the film carrier tape for mounting electronic components. It is the method to do.

  In such a configuration, the same action as that of the tape material cleaning method described above can be obtained for the film carrier tape for mounting electronic components.

  In the tape material cleaning apparatus of the present invention, the foreign material adhering to the tape material swells or absorbs moisture by immersing the tape material in a liquid (pure water or a mixture of pure water and a cleaning agent). Therefore, the foreign matter can be easily removed by the ultrasonic cleaning means. Moreover, since the foreign material is removed by the ultrasonic cleaning means with respect to the tape material that has passed through the dipping tank, it is possible to prevent the foreign material removed from the tape material from reattaching to the tape material. Therefore, the cleaning property of the tape material can be improved.

  In the tape material cleaning apparatus of the present invention, the tape material is prevented from shaking by the support means even when the cleaning liquid is sprayed onto the tape material by the ultrasonic cleaning means. Therefore, it is possible to easily remove foreign matters from the tape material. Therefore, the cleaning property of the tape material can be further enhanced.

  Further, in the tape material cleaning apparatus of the present invention, foreign matters are removed in advance by the pre-cleaning means so that the number of foreign matters adhering to the tape material is reduced during cleaning by the ultrasonic cleaning means. Accordingly, it is possible to more easily remove foreign substances from the tape material. Therefore, the cleaning property of the tape material can be further enhanced.

  In the tape material cleaning apparatus of the present invention, the tape material that has been immersed is transported upward by a plurality of guide means, so that the tape material is cleaned by the pre-cleaning means as compared with the case where the tape material is transported horizontally. A long distance was secured. Accordingly, the number of foreign matters adhering to the tape material is further reduced during the cleaning by the ultrasonic cleaning means, and the foreign matters can be further easily removed. Therefore, the cleaning property of the tape material can be further enhanced.

  Moreover, in the tape material cleaning apparatus of the present invention, the cleaning distance of the tape material by the pre-cleaning means is transported horizontally by setting the inclination angle of the tape material transported upward to 10 degrees to 170 degrees. Since it is ensured sufficiently long compared to the case, high cleaning properties can be obtained with certainty.

  Moreover, in the tape material cleaning apparatus of the present invention, the height of the apparatus is suppressed to be lower than when the tape material is transported upward by horizontally transporting the tape material that has been dipped by a plurality of guide means. I made it. Therefore, the installation space can be reduced.

  Further, in the tape material cleaning device of the present invention, the guide means on the ultrasonic cleaning means side is also used as the support means, so that the number of parts is reduced. Therefore, the cleaning cost of the tape material can be improved while suppressing the manufacturing cost.

  Further, in the tape material cleaning apparatus of the present invention, even if foreign matter remains after cleaning by the ultrasonic cleaning means, the foreign matter is removed by the post-cleaning means. Therefore, the cleaning property of the tape material can be further enhanced.

  Moreover, in the tape material cleaning apparatus of the present invention, the cleaning and drying of the tape material are performed in the same apparatus, so that the cleaning and drying of the tape material are performed in comparison with the case where the cleaning and drying of the tape material are performed separately. The time required was shortened. Therefore, the productivity of the tape material can be increased.

  Further, in the tape material cleaning apparatus of the present invention, the amount of cleaning liquid during drying is reduced by previously removing the cleaning liquid adhering to the tape material that has been cleaned with a draining means. As a result, the drying time is shortened, so that the time required from the cleaning of the tape material to the drying is further shortened. Therefore, the productivity of the tape material can be further increased.

  Further, in the tape material cleaning apparatus of the present invention, the spacer tape is separated while supplying the tape material, and the tape material cleaned while stacking the spacer tape is accommodated. Therefore, this tape material cleaning device smoothly separates the spacer tape from the tape material at the unwinding portion, while the surface of the tape material cleaned by the spacer tape at the winding portion (for example, the wiring on the surface of the tape material). Pattern) can be prevented smoothly. Therefore, the productivity of the tape material on which the spacer tape is stacked can be increased.

  Moreover, in the tape material cleaning apparatus of the present invention, a dust-free packing chamber is provided to prevent foreign matter from adhering during packing of the tape material that has been cleaned and dried. Therefore, the quality of the tape material can be improved.

  Moreover, in the tape material cleaning device of the present invention, the above-described tape material cleaning device has a structure for cleaning a film carrier tape for mounting electronic components so as to clean the film carrier tape for mounting electronic components. The same effect as the effect can be obtained.

  Further, in the tape material cleaning method of the present invention, foreign matters attached to the tape material swell or absorb moisture by immersing the tape material in a liquid (pure water or a mixture of pure water and a cleaning agent). Since the adhesive force is weakened, the foreign matter can be easily removed in the ultrasonic cleaning process. Moreover, since an ultrasonic cleaning process is performed with respect to the tape material which passed the immersion process, it can prevent that the foreign material removed from the tape material adheres to a tape material again. Therefore, the cleaning property of the tape material can be improved.

  Further, in the tape material cleaning method of the present invention, since the tape material is not shaken even if the cleaning liquid is sprayed on the tape material in the ultrasonic cleaning process, it is possible to more easily remove foreign matters from the tape material. Therefore, the cleaning property of the tape material can be further enhanced.

  Further, in the tape material cleaning method of the present invention, foreign matters are removed in advance in the pre-cleaning step, so that the number of foreign matters adhering to the tape material is reduced in the ultrasonic cleaning step. Can be more easily removed. Therefore, the cleaning property of the tape material can be further enhanced.

  Further, in the tape material cleaning method of the present invention, the tape material cleaned in the pre-cleaning process is secured longer than in the case where the tape material is transported horizontally by transporting the tape material that has been immersed upward. It was made to be. Therefore, in the ultrasonic cleaning process, the number of foreign matters attached to the tape material is further reduced, and foreign matters can be more easily removed from the tape material. Therefore, the cleaning property of the tape material can be further enhanced.

  Further, in the tape material cleaning method of the present invention, the cleaning distance of the tape material in the pre-cleaning step is set by setting the inclination angle of the tape material transported upward after the immersion is finished to 10 degrees to 170 degrees. Since it is ensured sufficiently long compared to the case of being transported horizontally, high cleaning properties can be reliably obtained.

  Moreover, in the tape material washing | cleaning method of this invention, the conveyance area | region was restrained low compared with the case where a tape material is conveyed upwards by conveying the tape material which immersion was complete | finished horizontally. Therefore, the conveyance area can be reduced.

  Further, in the tape material cleaning method of the present invention, even if foreign matter remains on the tape material after the cleaning in the ultrasonic cleaning process, it is removed in the post-cleaning process. Therefore, the cleaning property of the tape material can be further enhanced.

  Further, in the tape material cleaning method of the present invention, by continuously drying the tape material that has been cleaned, the tape material can be cleaned and dried as compared with the case where the tape material is cleaned and dried separately. The time required was shortened. Therefore, the productivity of the tape material can be increased.

  Further, in the tape material cleaning method of the present invention, the amount of cleaning liquid in the drying process is reduced by removing the cleaning liquid adhering to the tape material that has been cleaned in advance in the draining process. As a result, the drying time is shortened, so that the time from cleaning the tape material to drying is further shortened. Therefore, the productivity of the tape material can be further increased.

  Moreover, in the tape material washing | cleaning method of this invention, the spacer tape was isolate | separated, supplying a tape material, and the tape material wash | cleaned while stacking another spacer tape was accommodated. Therefore, this tape material cleaning method smoothly separates the spacer tape from the tape material at the unwinding portion, while the surface of the tape material cleaned by the spacer tape at the winding portion (for example, the wiring on the surface of the tape material). Pattern) can be prevented smoothly. Therefore, the productivity of the tape material on which the spacer tape is stacked can be increased.

  Further, in the tape material cleaning method of the present invention, a dust-free packaging step is provided to prevent foreign matters from adhering during packaging of the tape material that has been cleaned and dried. Therefore, the quality of the tape material can be improved.

  Moreover, in the tape material washing | cleaning method of this invention, when comprised for the film carrier tape for electronic component mounting, it is the same as the effect which the tape material washing | cleaning method mentioned above has at the time of washing | cleaning of the film carrier tape for electronic component mounting. An effect can be obtained.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
First embodiment:
FIG. 1 is a schematic view of a tape material cleaning apparatus 1 showing a first embodiment of the present invention. The cleaning device 1 is a cleaning device for a film carrier tape 100 used for a TAB tape. In the following description, the film carrier tape 100 will be referred to as a tape material 100 and described below.

  The tape material cleaning device 1 is installed in the clean room R as a whole, and is installed in a line on the clean booth 2 installed on the floor F of the clean room R and the floor F in the clean booth 2. A tape material supply unit 3, a tape material cleaning unit 4, a tape material storage unit 5, and a control device (not shown) installed on a floor F outside the clean booth 2 are provided. Further, without providing the clean booth 2, the tape material supplying means 3, the tape material cleaning means 4, the tape material accommodating means 5, and the control device are respectively installed in the clean room R to constitute the tape material cleaning apparatus. Also good.

  As shown in FIG. 2, the clean booth 2 includes three storage booths 21 to 23 arranged in a row and a packing booth 24 adjacent to the side of the storage booth 23 at one end.

  The three storage booths 21 to 23 are formed so that the tape material supply means 3, the tape material cleaning means 4, and the tape material storage means 5 are stored in an independent state. The storage booth 21 of the tape material supply means 3 is configured such that the side can be opened so that an operator can mount the tape material 100 and the like.

  In addition, the packing booth 24 is formed in such a size that an operator can pack the cleaned tape material 100, and the side of the packing booth 24 can be opened so that the operator can go in and out. Furthermore, the packing booth 24 has a higher dustproof function than the other storage booths 21 to 23.

  On the other hand, the tape material supply means 3 sends the tape material 100 before cleaning to the tape material cleaning means 4. The tape material supply means 3 includes a support body (not shown) provided on the floor F in the storage booth 21 and a tape material supply reel detachably provided on the support body via a rotary shaft 31. 33, a spacer tape take-up reel 34 detachably provided on the lower portion of the support body via another rotating shaft 32, two guide rollers 35, 36 disposed on the support body, And drive means (not shown) connected to the rotary shafts 31 and 32.

  The tape material supply reel 33 is configured to be rotatably supported by the support body via the rotation shaft 31. The reel 33 is wound with a tape material 100 having a dummy tape (not shown) connected to the base end side and a spacer tape 101 stacked on the wiring pattern surface 100a side of the tape material 100. Yes.

  Further, the spacer tape take-up reel 34 is configured to be rotatably supported by the support body via the rotation shaft 32. The reel 34 is formed so that the spacer tape 101 wound around the tape material supply reel 33 can be taken up, and is provided in an empty state before cleaning.

  The plurality of guide rollers 35, 36 are arranged closer to the tape material cleaning means 4 than the spacer tape winding guide roller 35 provided on the support body between the reels 33, 34 and the tape material supply reel 33. It is comprised from the tape material supply guide roller 36 provided in the said support body.

  The spacer tape take-up guide roller 35 is configured to guide the spacer tape 101 to the spacer tape take-up reel 34 while applying tension to the spacer tape 101 taken out from the tape material supply reel 33.

  The tape material supply guide roller 36 is configured to guide the tape material 100 to the tape material cleaning means 4 while applying tension to the tape material 100 taken out from the tape material supply reel 33.

  The drive means is configured to rotate the upper rotating shaft 31 in the supply direction A of the tape material 100, whereby the tape material supply reel 33 sends the tape material 100 to the tape material cleaning means 4. It is configured as follows.

  Further, the drive means is configured to rotate the lower rotary shaft 32 in the winding direction B of the spacer tape 101 (the direction opposite to the supply direction A), whereby the spacer tape take-up reel 34 is The spacer tape 101 is separated from the tape material supply reel 33 and wound.

  On the other hand, the tape material cleaning means 4 cleans the tape material 100 sent from the tape material supply means 3, and drains and dries it. This tape material cleaning means 4 is provided in the booth 22 adjacent to the cleaning section 41 provided on the floor F in the storage booth 22, the draining section 42 provided on the upper side of the cleaning section 41, and the draining section 42. And a plurality of guide rollers 44 to 49 disposed in a substantially U-shape in the storage booth 22.

  The plurality of guide rollers 44 to 49 are a pair of first guide rollers 44 and 45 provided on the tape supply unit 3 side of the draining portion 42, and a lower portion in the cleaning unit 41 below the guide rollers 44 and 45. The second guide roller 46 provided on the side, the third guide roller 47 provided horizontally on the tape material accommodation means 5 side of the second guide roller 46, and the third guide roller 47 in the cleaning unit 41. And a fourth guide roller 48 provided obliquely upward from the tape material supply means 3 side, and a fifth guide roller 49 provided adjacent to the draining portion 42 above the fourth guide roller 48. Has been.

  The first guide rollers 44 and 45 are configured to guide downward toward the second guide roller 46 while sandwiching the tape material 100 fed from the tape material supply guide roller 36.

  The second guide roller 46 is configured to horizontally guide the tape material 100 sent from the first guide rollers 44 and 45 toward the third guide roller 47.

  Further, the third guide roller 47 is configured to guide the tape material 100 sent from the second guide roller 46 obliquely upward toward the fourth guide roller 48.

  Further, the fourth guide roller 48 is configured to guide the tape material 100 sent from the third guide roller 47 upward toward the fifth guide roller 49.

  The fifth guide roller 49 is configured to horizontally guide the tape material 100 sent from the fourth guide roller 48 toward the tape material accommodation means 5.

  On the other hand, the cleaning unit 41 includes an immersion tank 411 provided on the floor F, a circulation system 412 connected to the immersion tank 411, and a cleaning unit body 413 provided in the immersion tank 411.

  As shown in FIG. 3, the immersion tank 411 has an accommodation space 411a formed therein. Further, an insertion port (not shown) through which the tape material 100 is passed is provided in the tape material supply means 3 side on the upper surface of the immersion tank 411 and a portion overlapping the draining portion 42 on the upper surface of the immersion tank 411. .

  And in the said accommodation space 411a, the immersion water 411b is stored so that the 2nd guide roller 46 and the 3rd guide roller 47 may be buried, and the tape material 100 currently conveyed is immersed by this. It is configured. The liquid used for the immersion water 411b is pure water or a mixture of pure water and a cleaning agent, and these may be appropriately changed according to the type of the tape material 100.

  Further, a drain port and a water supply port (not shown) are provided on the bottom surface of the immersion tank 411, and a circulation system 412 is connected to the drain port and the water supply port.

  The circulation system 412 includes a pump 412b connected to the drain of the immersion tank 411 via a drain pipe 412a, a filter 412c connected to the outlet side of the pump 412b, and a sterilizing means connected to the outlet side of the filter 412c. 412d, and the outlet side of the sterilizing means 412d is connected to the water supply port of the immersion tank 411 through the water supply pipe 412e.

  Then, the circulation system 412 sucks the immersion water 411b in the immersion tank 411 with the pump 412b, filters it with the filter 412c to remove foreign matters such as dust, and further sterilizes the sterilization means 412d to circulate the immersion water 411b. It is configured as follows.

  On the other hand, the cleaning unit main body 413 is provided to face the pair of pre-cleaning means 4131 and 4131 provided between the third guide roller 47 and the fourth guide roller 48 and the fourth guide roller 48. The ultrasonic cleaning means 4132 and a pair of post-cleaning means 4133 and 4133 provided above the fourth guide roller 48 are provided.

  The pre-cleaning means 4131 and 4131 are provided so as to face each other with the tape material 100 passing between the third guide roller 47 and the fourth guide roller 48 interposed therebetween, and a tank (see FIG. And a nozzle 4131a that is connected to the tank and sprays the cleaning liquid onto both surfaces of the tape material 100.

  The ultrasonic cleaning means 4132 includes a tank (not shown) in which the cleaning liquid is stored, a nozzle 4132a that is connected to the tank and sprays a film-like cleaning liquid onto the wiring pattern surface 100a of the tape material 100, and the cleaning liquid. A vibration plate 4132b for applying ultrasonic vibration and an ultrasonic transmitter (not shown) for ultrasonically vibrating the vibration plate 4132b are provided.

  The post-cleaning means 4133 and 4133 are provided at positions facing each other across the tape material 100 that has passed through the fourth guide roller 48, and a tank (not shown) in which cleaning liquid is stored, and this tank And a nozzle 4133a for spraying the cleaning liquid on both surfaces of the tape material 100.

  On the other hand, the draining part 42 includes a storage part 421 provided on the immersion tank 411 and two sets of air knives 422 and 422 which are the draining means of the present invention provided in the storage part 421.

  The accommodating portion 421 has an accommodating space 421a formed therein. In addition, on the upper and lower surfaces of the accommodating portion 421, insertion holes (not shown) through which the tape material 100 passes are provided so as to face the insertion holes of the immersion tank 411.

  On the other hand, the air knives 422 and 422 are provided so as to face each other with the tape material 100 in between, a tank (not shown) in which compressed air is stored, and both surfaces of the tape material 100 connected to the tank. And a nozzle 422a that blows air on.

  The hot air heater 43 is provided so as to face each other with the tape material 100 that has passed through the fifth guide roller 49 interposed therebetween, and warm air is supplied to both sides of the hot air heater main body 43a and the tape material 100, respectively. And an outlet 43b for blowing out.

  On the other hand, as shown in FIG. 1, the tape material accommodation means 5 accommodates the tape material 100 that has been washed, drained and dried. The tape material storage means 5 includes a support (not shown) provided on the floor F in the storage booth 23, and a spacer tape supply reel provided detachably on the lower part of the support via a rotating shaft 51. 53, a tape material take-up reel 54 that is detachably provided on the upper portion of the support via another rotating shaft 52, and a plurality of guide rollers 55 to 57 provided on the support. And driving means (not shown) connected to the rotating shafts 51 and 52.

  The spacer tape supply reel 53 is configured to be rotatably supported by the support body via the rotating shaft 51, and the spacer tape 102 is wound around the reel 53. This spacer tape 102 is different from the spacer tape 101 and is a cleaned spacer tape.

  Further, the tape material take-up reel 54 is configured to be rotatably supported by the support. The reel 54 is formed so that the tape material 100 sent through the hot air heater 43 and the spacer tape 101 wound around the spacer tape supply reel 53 can be wound on each other. It is provided in an empty state before cleaning.

  The plurality of guide rollers 55 to 57 include a spacer tape supply guide roller 55 provided on the spacer tape supply reel 53 side between both reels 53 and 54 and a tape material take-up reel between both reels 53 and 54. The spacer tape winding guide roller 56 provided on the 54 side and the tape material winding guide roller 57 provided above the tape material winding reel 54 are configured.

  The spacer tape supply guide roller 55 is configured to guide the spacer tape 102 to the spacer tape winding guide roller 56 while applying tension to the spacer tape 102 taken out from the spacer tape supply reel 53.

  The spacer tape take-up guide roller 56 guides the spacer tape 102 to the tape material take-up reel 54 while further applying tension to the spacer tape 102 sent from the spacer tape supply guide roller 55. It is configured.

  The tape material take-up guide roller 57 is configured to guide the tape material 100 to the tape material take-up reel 54 while applying tension to the tape material 100 sent through the warm air heater 43. Has been.

  The driving means is configured to rotate the lower rotating shaft 51 in the supply direction C of the spacer tape 102. Accordingly, the spacer tape supply reel 53 is configured to send the spacer tape 102 to the tape material take-up reel 54.

  Further, the drive means is configured to rotate the upper rotary shaft 52 in the winding direction D of the tape material 100 and the spacer tape 102. As a result, the tape material take-up reel 54 is configured to wind up the tape material 100 and the spacer tape 101 wound around the spacer tape supply reel 53 in an overlapping manner.

  The tape material take-up guide roller 57 and the tape material supply guide roller 36 and the plurality of guide rollers 44 to 49 in the storage booth 22 constitute a transport line 110 of the tape material 100. .

  The transport line 110 is formed in a substantially U shape in the storage booth 22, and the tape material 100 is transported obliquely upward from the third guide roller 47 to the fourth guide roller 48. The inclination angle α is set to 45 degrees (see FIG. 3).

  Furthermore, these guide rollers 36, 44 to 49, 57, drive means for the tape material supply means 3 and the tape material accommodation means 5, and reels 33, 34, 53 provided in both means 3, 5, 54 constitutes a conveying means for the tape material 100.

  The control device is connected to the drive means of the tape material supply means 3, the drive means of the tape material storage means 5, the circulation system 412, the cleaning unit main body 413, the air knives 422 and 422, the hot air heater 43, etc. And are configured to control these operations.

  In this configuration, a method for cleaning the tape material 100 will be described. First, the operator pulls out the tape material 100 and the spacer tape 101 from the tape material supply reel 33 and fixes the tip of the spacer tape 101 to the spacer tape take-up reel 34.

  Next, the operator connects one end of a dummy tape (not shown) to the tip of one of the drawn tape members 100, and attaches this dummy tape to each guide roller 36, 44, 45, 46-49, 57. Pass in order. Further, the operator pulls out the spacer tape 102 from the spacer tape supply reel 53, passes it through both guide rollers 55 and 56, overlaps the dummy tape, and connects to the tape material take-up reel 54.

  Next, the operator turns on the control device and drives the drive means of the tape material supply means 3 and the drive means of the tape material accommodation means 5 to convey the tape material 100 in the conveyance direction A, and The units and the devices connected to the control device are driven, and the steps described below are sequentially performed.

Supply process:
The tape material supply reel 33 rotates in the transport direction A, the tape material 100 is pulled out, and is placed on the transport line 110 from the tape material supply guide roller 36. At the same time, the spacer tape take-up reel 34 is also rotated in the take-up direction B to separate the spacer tape 101 from the tape material 100, and is taken up by the spacer tape take-up reel 34 via the spacer tape take-up guide roller 35. It is done.

Immersion process:
As shown in FIG. 3, the tape material 100 placed on the transport line 110 from the tape material supply means 3 is transported downward by the first guide rollers 44 and 45 and enters the immersion water 411b of the immersion tank 411. The second guide roller 46 changes the direction forward (to the tape material accommodation means 5 side) and is immersed while being transported horizontally to the third guide roller 47.

Pre-cleaning process:
The tape material 100 that has been conveyed is folded back (to the tape material supply means 3 side) by the third guide roller 47 and conveyed obliquely upward to the fourth guide roller 48, while the tape material 100 being conveyed is A cleaning liquid is sprayed on both surfaces of the front surface by pre-cleaning means 4131 and 4131.

Ultrasonic cleaning process:
The tape 100 that has been conveyed is sprayed by the ultrasonic cleaning means 4132 onto the wiring pattern surface 100 a while being supported by the fourth guide roller 48.

Post-cleaning process:
The tape material 100 that has passed through the ultrasonic cleaning means 4132 is conveyed upward to the fifth guide roller 49, while the cleaning liquid is sprayed by the post-cleaning means 4133 and 4133 on both surfaces of the tape material 100 in the immersion tank 411. It is done.

Draining process:
The tape material 100 that has passed through the post-cleaning means 4133 and 4133 enters the accommodating portion 421 of the draining portion 42, and compressed air is blown onto both surfaces of the tape material 100 by the two air knives 422 and 422.

Drying process:
The tape material 100 that has passed through the air knives 422 and 422 is turned to the right (tape material accommodation means 5 side) by the fifth guide roller 49 and is conveyed horizontally in the hot air heater 43. At this time, warm air is blown to both surfaces of the tape material 100 from the air outlet 43b.

Containment process:
The tape material 100 that has passed through the hot air heater 43 is fed to the tape material take-up reel 54 via the tape material take-up guide roller 57 as shown in FIG. At the same time, the spacer tape supply reel 53 rotates in the supply direction C, and the spacer tape 102 is fed to the tape material take-up reel 54 via both guide rollers 55 and 56.

  Then, the tape material take-up reel 54 rotates in the take-up direction D so that the cleaned and dried tape material 100 is overlapped with the spacer tape 102 sent from the spacer tape supply reel 53 and taken up on the reel 54. It is done.

Dust-free packing process:
After the tape material 100 is completely wound on the take-up reel 54 in a state where the tape material 100 is overlapped with the spacer tape 102, the operator removes the take-up reel 54 from the rotary shaft 52 and in the packing booth 24 (see FIG. 2). And carry out packing work.

  As described above, in cleaning the tape material 100, the tape material 100 is immersed in the immersion water 411b in the immersion process before the cleaning. As a result, the foreign matter adhering to the tape material 100 swells or absorbs moisture, so that the adhesion force of the foreign matter to the tape material 100 is weakened.

  Therefore, in the ultrasonic cleaning process, foreign substances can be easily removed from the tape material 100 by the ultrasonic cleaning means 4132. In addition, unlike the conventional case, the foreign matter removal processing by the ultrasonic cleaning means 4132 is performed on the tape material 100 that has been immersed, so that the foreign matter removed from the tape material 100 is prevented from reattaching to the tape material 100. be able to. Therefore, in the tape material washing | cleaning apparatus 1 and tape material washing | cleaning method of this Embodiment, the washability of the tape material 100 can be improved.

  In addition, the distance 110L (refer FIG. 3) between the 2nd guide roller 46 arrange | positioned in the immersion tank 411 in order to immerse the tape material 100 in conveyance and the 3rd guide roller 47 is a tape material. It is preferable to set an appropriate distance (about 300 mm to 2000 mm) so that the foreign matter adhering to 100 sufficiently swells or absorbs moisture in the immersion water 411b.

  Further, in the ultrasonic cleaning process, when the cleaning liquid is sprayed on the tape material 100, the tape material 100 is supported by the fourth guide roller 48 at the spray position 110 a of the transport line 110, so that it does not shake. Therefore, it becomes possible to remove foreign substances from the tape material 100 more easily, and the cleaning property of the tape material 100 can be further improved.

  The ultrasonic cleaning means 4132 is preferably installed so that the distance between the tip of the nozzle 4132a and the wiring pattern surface 100a of the tape material 100 is usually 1 mm to 50 mm, and more preferably 10 mm to 30 mm. It is preferable to install so that it becomes.

  Here, if the distance between the tip of the nozzle 4132a and the wiring pattern surface 100a is too short, when the inner lead (terminal) is formed on the wiring pattern surface 100a, the inner lead ( (Terminal) may be bent, which is not preferable. On the other hand, when the distance between the tip of the nozzle 4132a and the wiring pattern surface 100a is too long, the cleaning liquid sprayed from the nozzle 4132a does not reach the wiring pattern surface 100a sufficiently, so that the cleaning performance is deteriorated. .

  Therefore, by setting the distance between the tip of the nozzle 4132a and the wiring pattern surface 100a to the above-described appropriate distance, it is possible to prevent the inner lead from being bent and to prevent the cleaning performance of the tape material 100 from being deteriorated. . For example, the prevention of the bending of the inner lead formed on the three-layer product tape having the device hole is dealt with by setting the distance between the tip of the nozzle 4132a and the wiring pattern surface 100a within a range of 10 mm to 30 mm. it can.

  In addition, before the ultrasonic cleaning process, since the cleaning liquid is sprayed onto the tape material 100 by the pre-cleaning means 4131 and 4131 in the pre-cleaning process, the foreign matter adhering to the tape material 100 at this time is removed. .

  Therefore, in the ultrasonic cleaning process, the number of foreign matters adhering to the tape material 100 is reduced as compared with the case where there is no pre-cleaning step, and the foreign matter removal process is further facilitated. Can be increased.

  Further, in the pre-cleaning step, the tape material 100 that has been immersed is conveyed obliquely upward. Accordingly, the cleaning distance 4131L of the pre-cleaning means 4131 and 4131 is secured longer than when the tape material 100 that has been immersed is transported horizontally, so that more foreign matter adhering to the tape material 100 is removed. It becomes possible to do.

  Therefore, in the ultrasonic cleaning process, the number of foreign matters adhering to the tape material 100 is further reduced and the foreign matter removal process is further facilitated, so that the cleaning property of the tape material 100 can be further improved.

  In the tape material cleaning apparatus 1 of the present embodiment, the inclination angle α of the tape material 100 conveyed upward in the pre-cleaning process is set to 45 degrees, but the inclination angle is not necessarily limited to this angle. It is preferably set in the range of 10 degrees to 170 degrees, more preferably in the range of 10 degrees to 89 degrees or 91 degrees to 170 degrees.

  Here, when the inclination angle of the tape material 100 is less than 10 degrees or exceeds 170 degrees, it is not possible to secure the installation location of the pre-cleaning means 4131 and 4131, and compared with the case where the tape material 100 is transported horizontally. Since the cleaning distances of the pre-cleaning means 4131 and 4131 are substantially the same, the foreign matter removal processability is hardly changed, which is not preferable.

  On the other hand, when the inclination angle of the tape material 100 is 90 degrees, the fourth guide roller 48 and the tape material 100 are in line contact as compared with the case where the inclination angle is 10 degrees to 89 degrees or 91 degrees to 170 degrees. Therefore, it is difficult for the guide roller 48 to support the tape material 100 on the transport line 110, and the guide roller 48 is not preferable because it cannot sufficiently fulfill the role as the guide roller 48.

  Then, by setting the inclination angle of the tape material 100 within a range of 10 degrees to 170 degrees, the cleaning distance 4131L of the pre-cleaning means 4131 and 4131 is secured sufficiently longer than when the tape material 100 is transported horizontally. Therefore, high detergency can be reliably obtained. More specifically, the cleaning distance 4131L is a distance at which the cleaning liquid sprayed onto the tape material 100 from the pre-cleaning means 4131 and 4131 flows down.

  In the tape material cleaning apparatus 1 of the present embodiment, the guide roller 48 on the ultrasonic cleaning means 4132 side of the two guide rollers 47 and 48 for inclining the tape material 100 also serves as the support means of the present invention. Configured. As a result, the number of parts is reduced and the cleaning distance of the pre-cleaning means 4131 and 4131 is ensured long, while the tape material 100 can be prevented from shaking even if the cleaning liquid is sprayed from the ultrasonic means 4132. Therefore, in the tape material washing | cleaning apparatus 1 of this Embodiment, the washability of the tape material 100 can be improved by suppressing manufacturing cost.

  On the other hand, the cleaning liquid is sprayed by the post-cleaning means 4133 and 4133 in the post-cleaning process on the tape material 100 after the ultrasonic cleaning process. Therefore, as a result of performing the ultrasonic cleaning process, the foreign matter remains on the tape material 100 without being removed, or in contact with the fourth guide roller 48 in the ultrasonic cleaning process, the wiring pattern surface 100a of the tape material 100 and Even if foreign matters newly adhere to the opposite surface, these foreign matters can be removed. Therefore, the cleaning property of the tape material 100 can be further improved. In the ultrasonic cleaning process, if the foreign matter adhering to the tape material 100 is removed to an amount that does not cause a deterioration in the quality of the tape material 100, the subsequent cleaning process may not be performed.

  In addition, compressed air is blown onto the tape material 100 after the post-cleaning process by the air knives 422 and 422 in the draining process before entering the drying process. Thereby, since the cleaning liquid adhering to the tape material 100 is removed and removed, the amount of the cleaning liquid is reduced during the drying process. Therefore, since the drying time of the tape material 100 is shortened compared with the case where there is no draining process, the productivity of the tape material 100 can be further increased.

  Further, in the tape material cleaning apparatus 1 of the present embodiment, since the tape material 100 is also cleaned by the hot air heater 43, the tape material 100 is cleaned compared to the case where the cleaning and drying of the tape material 100 are performed separately. The time required for 100 production is reduced. Therefore, the productivity of the tape material 100 can be increased.

  The hot air heater 43 has a total length (length along the transport direction A of the tape material 100) of 500 mm to 3000 mm and a temperature of the hot air of 60 ° C. to evaporate the cleaning liquid adhering to the tape material 100. What was set to 140 degreeC is preferable.

  Further, in the tape material cleaning apparatus 1 of the present embodiment, the spacer tape 101 is separated while supplying the tape material 100, and another spacer tape 102 is stacked and accommodated on the cleaned and dried tape material 100. . Therefore, the tape material cleaning apparatus 1 smoothly separates the spacer tape 101 from the tape material 100 at the unwinding portion, while the tape material surface 100a (for example, the tape material surface 100a) cleaned by the spacer tape 102 at the winding portion. Can be prevented smoothly. Therefore, it is possible to increase the productivity of the tape material 100 that is made into a product by overlapping the spacer tape.

  Furthermore, in the tape material cleaning apparatus 1 according to the present embodiment, by providing the dust-free packing booth 24, it is possible to prevent foreign matters from adhering to the tape material 100 after cleaning and drying. Therefore, the quality of the tape material 100 can be improved.

Second embodiment:
FIG. 4 is a schematic diagram of a main part of a tape material cleaning apparatus 200 showing a second embodiment of the present invention. In this embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and different parts are mainly described.

  The tape material cleaning apparatus 200 according to the present embodiment includes three guide rollers 47, 240, and 241 for horizontally folding and guiding the tape material 100 that has been immersed in the immersion tank 411, and includes pre-cleaning means 4131 and 4131. Is configured to clean the tape material 100 conveyed horizontally by these guide rollers 47, 240, and 241.

  In such a configuration, the cleaning device described in the first embodiment has the transport region of the tape material 100, in other words, the height 200h of the cleaning device 200, as compared with the case where the tape material 100 that has been immersed is transported upward. 1 can be kept lower than the height 1h (see FIG. 3). Therefore, in the tape material cleaning apparatus 200 of the present embodiment, the installation space can be reduced.

  Furthermore, since the guide roller 241 on the ultrasonic cleaning means 4132 side is also configured as the support means of the present invention, the number of parts can be reduced. Therefore, in the cleaning device 200 of the present embodiment, the cleaning performance of the tape material 100 can be improved while suppressing the manufacturing cost, as in the tape material cleaning device 1 of the first embodiment.

Third embodiment:
FIG. 5 is a schematic view of a main part of a tape material cleaning apparatus 300 showing a third embodiment of the present invention. In this embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and different parts are mainly described.

  In the tape material cleaning apparatus 300 according to the present embodiment, the support means of the present invention is configured by three guide rollers 348 provided vertically apart along the transport line 100a.

  In such a configuration, since the number of guide rollers is increased as compared with the guide roller 48 of the first embodiment and the guide roller 241 of the second embodiment, a long support distance by the tape material 100 is secured. Therefore, the tape material 100 can be stably supported on the transport line 100a.

  Therefore, even if the cleaning liquid is sprayed from the ultrasonic means 4132 to the tape material 100, the tape material 100 can be reliably prevented from shaking. Therefore, in the tape material cleaning apparatus 300 of the present embodiment, the cleaning property of the tape material 100 can be improved.

  Furthermore, since the lowermost guide roller 348 constitutes one of the two guide means (the ultrasonic cleaning means 4132 side) that transports the tape material 100 that has been immersed obliquely upward, as described above. As in each embodiment, the cleaning cost of the tape material 100 can be improved while suppressing the manufacturing cost.

Fourth embodiment:
FIG. 6 is a schematic view of a main part of a tape material cleaning apparatus 400 showing a fourth embodiment of the present invention. In this embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and different parts are mainly described.

  In the tape material cleaning apparatus 400 of the present embodiment, the support means 448 of the present invention is formed in a belt conveyor shape, and a pair of rollers 448a, 448a provided vertically apart along the transport line 110, And an annular belt 448b hung on both rollers 448a and 448a.

  In this configuration, the support means 448 ensures a larger support area and support distance by the tape material 100 than the guide roller 48 of the first embodiment and the guide roller 241 of the second embodiment. Therefore, the tape material 100 can be stably supported on the transport line 110.

  Therefore, even if the cleaning liquid is sprayed from the ultrasonic means 4132 to the tape material 100, the tape material 100 can be reliably prevented from shaking. Therefore, in the tape material cleaning apparatus 400 of the present embodiment, the cleaning property of the tape material 100 can be improved.

  Further, the support means 448 constitutes one of the two guide means (ultrasonic cleaning means 4132 side) that conveys the tape material 100 that has been immersed obliquely upward, so that it is the same as in the above-described embodiments. In addition, the cleaning cost of the tape material 100 can be improved while suppressing the manufacturing cost.

  In the embodiment, the case of cleaning a film carrier tape for mounting electronic components such as TAB tape, COF tape, BGA tape, and CSP tape has been described, but a wide roll tape material such as a spacer tape and FPC, etc. Even when the present invention is applied to, the same effects as those described in the embodiment can be obtained. The tape material cleaning apparatus may change the type of cleaning liquid according to the type of tape material to be cleaned, or change the configuration of the conveying means, each cleaning means, draining means, drying means, and the control method thereof.

  Further, in the embodiment, the case where one tape material cleaning device 1 is installed in the clean booth 2 has been described. However, the number of tape material cleaning devices 1 to be installed is not limited to this. In the booth 2, a plurality of tape material cleaning devices 1 may be installed side by side. Furthermore, in the embodiment, the ultrasonic cleaning means 4132 is installed above the immersion water 411b. However, in addition to the ultrasonic cleaning means 4132, another ultrasonic cleaning means 500 (two-dot chain line) as shown in FIG. Or the same ultrasonic cleaning means 4132 may be installed with the nozzle placed in the immersion water 411b.

  Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples. The present invention is not limited to the following examples.

Cleaning tape material 100:
The tape material cleaning apparatus 1 described in the first embodiment was used. However, the pre-cleaning means 4131 and 4131 were not used in order to clarify the difference in effect from the comparative example. Below, the kind of tape material 100 used by the present Example and the various conditions of the tape material washing | cleaning apparatus 1 are shown.

(1) Tape material 100 to be cleaned: A two-layer COF film carrier tape was used. This tape is formed of a polyimide base film tape layer having a thickness of 38 μm and a copper layer having a thickness of 8 μm.
(2) Conveying means: The conveying speed was set to 3 m / min.
(3) Immersion tank 411: Pure water was used, and the water temperature was set to 25 ° C.
(4) Ultrasonic cleaning means 4132: those manufactured by Kaijo Co., Ltd. (ultrasonic transmitter model number 68101, diaphragm model number 6879BK) were used. The frequency was set to 950 kHz, the water flow rate: 25 L / min, and the injection pressure was set to 0.2 MPa.
(5) Post-cleaning means 4133, 4133: water flow rate: 4 L / min, injection pressure was set to 0.2 MPa.
(6) Hot air heater 43: A heater with a total length of 2000 mm was used, and the temperature was set to 100 ° C. ± 5 ° C.

Measurement of the number of foreign matters remaining on the tape material 100 after cleaning:
While observing the number of foreign matters adhering to the outermost part of the tape material 100 wound on the tape material take-up reel 54 immediately before shipment at a magnification of 10 using a stereomicroscope (optical microscope), the size is 50 μm or more. The foreign material was counted.

Cleaning tape material 100:
The tape material cleaning apparatus 200 described in the second embodiment is used. Other conditions were set in the same manner as in Example 1.

Measurement of the number of foreign matters remaining on the tape material 100 after cleaning:
The number of foreign matters was measured in the same manner as in Example 1.

Cleaning tape material 100:
As shown in FIG. 4, ultrasonic cleaning means 500 (illustrated by a two-dot chain line) having a diaphragm 501 of Model No. 6281A manufactured by Kaijo Corporation was used. Specifically, in the tape material cleaning apparatus 200 described in the second embodiment, the nozzle 502 is placed in the immersion water 411b so as to face the tape material 100 transported in the immersion water 411b in an up-and-down direction. A cleaning means 500 was installed. Other conditions were set to the same conditions as in Example 2.

Measurement of the number of foreign matters remaining on the tape material 100 after cleaning:
The number of foreign matters was measured in the same manner as in Example 1.

Comparative example

Cleaning tape material 100:
The same ultrasonic cleaning means 500 as in Example 3 was used in the tape material cleaning apparatus described in Patent Document 1.

Measurement of the number of foreign matters remaining on the tape material 100 after cleaning:
The number of foreign matters was measured in the same manner as in Example 1.

<Comparison of Examples and Comparative Examples>
Table 1 shows the result of counting the number of foreign matters finally attached to the tape material 100 in each of the examples and the comparative examples. The number of foreign objects is an average value per meter. In Table 1, “white” is a plastic organic material that appears to be generated from the tape material 100 or the reel. “Black” is an inorganic substance that is considered to correspond to a component of the conductive coating of the spacer tape 102. “Thread” is a thread-like substance that appears to be generated from the dust-proof clothing of the worker. “Metal” is iron, aluminum, or the like that appears to be generated from equipment used in the manufacturing process and inspection process.

  As is clear from Table 1, it can be seen that the tape material cleaning apparatus of the present invention is superior in the ability to remove foreign substances adhering to the tape material 100 as compared with the conventional tape material cleaning apparatus.

  As described above, in the tape material cleaning apparatus and the tape material cleaning method of the present invention, the cleaning performance of the tape material can be improved, and thus it can be sufficiently used in this technical field.

It is a schematic diagram of the tape material washing | cleaning apparatus which shows the 1st Embodiment of this invention. It is a top view of the tape material washing | cleaning apparatus in the embodiment. It is an enlarged view which shows the principal part of FIG. It is a principal part schematic diagram of the tape material cleaning apparatus which shows the 2nd Embodiment of this invention. It is a principal part schematic diagram of the tape material washing | cleaning apparatus which shows the 3rd Embodiment of this invention. It is a principal part schematic diagram of the tape material washing | cleaning apparatus which shows the 4th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Tape material washing | cleaning apparatus 3 Tape material supply means 5 Tape material accommodating means 24 Packing booth 43 Hot air heater 47 3rd guide roller 48 4th guide roller 100 Tape material 110 Conveyance line 110a Spraying position 200 Tape material washing apparatus 240 Guide Roller 241 Guide roller 300 Tape material cleaning device 348 Guide roller 400 Tape material cleaning device 411 Immersion tank 422 Air knife 448 Support means 4131 Pre-cleaning means 4132 Ultrasonic cleaning means 4133 Post-cleaning means 4133 Post-cleaning means α Inclination angle

Claims (25)

Conveying means for conveying the tape material;
An immersion tank for immersing the tape material being conveyed;
A tape comprising: an ultrasonic cleaning means for spraying a cleaning liquid to which ultrasonic vibration is applied to the tape material that has been immersed in the immersion tank, and removing foreign substances adhering to the tape material. Material cleaning equipment. 2. The tape material cleaning apparatus according to claim 1, wherein the transport means includes support means for supporting the tape material at a spray position by the ultrasonic cleaning means in a transport line. 3. The tape according to claim 1, further comprising a pre-cleaning means for removing foreign matter adhering to the tape material that has been immersed in the immersion tank before cleaning by the ultrasonic cleaning means. Material cleaning equipment. The transport means includes a plurality of guide means for guiding the tape material that has been immersed in the immersion tank upward, and the pre-cleaning means adheres to the tape material transported upward by the plurality of guide means. 4. The tape material cleaning device according to claim 3, wherein the tape material cleaning device is configured to remove foreign matter. The tape material cleaning apparatus according to claim 4, wherein an inclination angle of the tape material conveyed upward by the plurality of guide means is set to 10 degrees to 170 degrees. The transport means includes a plurality of guide means for horizontally guiding the tape material that has been immersed in the immersion tank, and the pre-cleaning means adheres to the tape material transported horizontally by the plurality of guide means. 4. The tape material cleaning device according to claim 3, wherein the tape material cleaning device is configured to remove foreign matter. The conveying means constitutes the guide means located on the ultrasonic cleaning means side among the plurality of guide means also as the support means, while the ultrasonic cleaning means is connected to the conveying line by the guide means. The tape material cleaning apparatus according to any one of claims 4 to 6, wherein the cleaning liquid is sprayed on the supported tape material. The tape material cleaning apparatus according to any one of claims 1 to 7, further comprising a post-cleaning unit that removes foreign matter adhering to the tape material after cleaning by the ultrasonic cleaning unit. . 9. The tape material cleaning apparatus according to claim 1, further comprising a drying unit that dries the tape material that has been cleaned by the ultrasonic cleaning unit or the post-cleaning unit. The tape material cleaning apparatus according to claim 9, further comprising a draining means for removing a cleaning liquid adhering to the tape material that has been cleaned before the drying means. The tape material cleaning device is a device for cleaning the tape material on which a spacer tape is stacked,
The conveying means is
Tape material supply means for sending the tape material to a conveying line while separating the spacer tape,
The tape material cleaning device according to claim 9 or 10, further comprising a tape material storage means for storing another tape tape stacked on the cleaned tape material dried by the drying means. 12. The tape material cleaning apparatus according to claim 11, further comprising a dust-free packing chamber for dust-free packing of the cleaned tape material stored by the tape material storage means. The tape material is a film carrier tape for mounting electronic components, while the tape material cleaning device is a cleaning device for removing foreign matter adhering to the film carrier tape for mounting electronic components. The tape material washing | cleaning apparatus of any one of 1-12. In the tape material cleaning method of cleaning while transporting the tape material,
An immersion step of immersing the tape material;
A tape material cleaning method comprising: an ultrasonic cleaning step of spraying a cleaning liquid to which ultrasonic vibration is applied to the tape material that has been dipped, and removing foreign matter adhering to the tape material. 15. The tape material cleaning method according to claim 14, wherein, in the ultrasonic cleaning step, the cleaning liquid is sprayed while the tape material is supported at a spray position set on a transport line. 16. The tape material cleaning method according to claim 14, further comprising a pre-cleaning step for removing foreign matter adhering to the tape material that has been dipped before the ultrasonic cleaning step. The tape material cleaning method according to claim 16, wherein in the pre-cleaning step, the tape material that has been immersed is transported upward. The tape material cleaning method according to claim 17, wherein, in the pre-cleaning step, an inclination angle of the tape material conveyed upward is set to 10 degrees to 170 degrees. The tape material cleaning method according to claim 16, wherein in the pre-cleaning step, the tape material that has been immersed is transported horizontally. The tape material cleaning method according to any one of claims 14 to 19, further comprising a post-cleaning step for removing foreign matter adhering to the tape material after the ultrasonic cleaning step. 21. The tape material cleaning method according to claim 14, further comprising a drying step of drying the tape material that has been cleaned after any one of the ultrasonic cleaning step and the post-cleaning step. . The tape material cleaning method according to claim 21, wherein a water draining step for removing a cleaning liquid adhering to the tape material that has been cleaned is provided before the drying step. The tape material cleaning method is a method of cleaning the tape material on which a spacer tape is stacked,
A feeding step that is provided before the dipping step and sends the tape material to a conveying line while separating the spacer tape,
The tape material cleaning method according to claim 21 or 22, further comprising: an accommodating step of accumulating another spacer tape on the cleaned tape material that has been provided and dried after the drying step. 24. The tape material cleaning method according to claim 23, further comprising a dust-free packing step of packing the tape material stored in a dust-free state after the storing step. 15. The tape material is a film carrier tape for mounting electronic components, while the tape material cleaning method is a method for removing foreign matters adhering to the film carrier tape for mounting electronic components. The tape material washing | cleaning method of any one of -24.

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