JP2011167590A - Washing apparatus of web - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing apparatus of a web that can remove minute dust stuck to the surface of a web and that can prevent washing liquid from scattering. <P>SOLUTION: In the washing apparatus 60, a nozzle 36 capable of removing minute dust stuck to the surface of a web is arranged inside a water tank 62 in a manner immersed in a liquid 64 stored in the water tank 62. The liquid 64 has a larger specific gravity and a higher viscosity compared with gas. Consequently, by arranging the nozzle 36 immersed in the liquid 64, a washing liquid discharged from the inlet and the outlet 53b of the nozzle 36 has the kinetic energy diffused by the liquid 64. As a result, according to the washing apparatus 60, the washing liquid is prevented from scattering from the inlet and the outlet 53b of the nozzle 36. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a web cleaning apparatus that cleans a web such as a plastic film and removes dust such as dust, web pieces, and dirt adhering to the surface of the web, and in particular, an FPD field that requires high clean quality. The present invention relates to a web cleaning apparatus used in the electronics field and optical field.

  Plastic films are used in various fields such as FPD (Flat Panel Display) field, electronics field, and optical field. Plastic films used in the FPD field and the electronics field are used as members and process materials through processes such as film formation, coating, and bonding. The manufacturing process must be handled in a clean environment from beginning to end. Defects such as dust, fibers and film fragments mixed in and adhered to the product, and physical defects such as scratches and imprints resulting from them. Defects are strictly quality controlled. In addition, market requirements for the frequency of these defects are rapidly becoming stricter. Furthermore, with regard to the degree of defects, very fine defects that have not been considered a problem in the past are no longer tolerated, and improvements are required.

  In recent years, in order to solve such a defect problem, efforts are being made to clean the plastic film and remove dust adhering to the plastic film.

  Patent Document 1 proposes a cleaning nozzle that is provided with an ultrasonic generation nozzle and removes dust adhering to the film by an air current generated by the air generated from the ultrasonic generation nozzle and vibrations generated by the ultrasonic waves.

  Further, in Patent Document 2, the cleaning liquid is continuously sprayed from the cleaning nozzle onto the film, the falling cleaning liquid is recirculated to the cleaning nozzle by the cleaning liquid recirculation means, and hot air is continuously blown onto the film by the drying means. An optical plastic film cleaning / drying method for drying the cleaned film has been proposed.

JP-A-11-239761 JP 2002-292347 A

  However, in the cleaning nozzle of Patent Document 1, dust blown from the film is scattered in the vicinity by the air jetted from the nozzle and may be reattached to the film. There was a problem that it could not be removed.

  Further, in the cleaning device of Patent Document 2, since the plastic film for optical use, which is a cleaning target, contains a plasticizer, the plasticizer is eluted when washed with alcohol, ester, etc., and the film characteristics change. In addition, there is a problem that the uniformity of the characteristics is lowered.

  In order to solve the problems of Patent Documents 1 and 2, film characteristics can be obtained by using cleaning liquid instead of air as dust removing means, and using pure water instead of chemicals such as alcohol and ester as cleaning liquid. It is possible to sufficiently remove the dust adhering to the film without changing.

  However, in a structure in which pure water is simply sprayed onto the film, the pure water sprayed from the nozzle and mist is scattered near the nozzle and adheres to the peripheral members. The pure water in the form of mist contains dust that has been peeled off from the film, and there is a risk that peripheral members will be contaminated by this dust.

  The present invention has been made in view of such circumstances, and provides a web cleaning apparatus capable of removing fine dust adhering to the surface of the web and preventing scattering of cleaning liquid. With the goal.

  In order to achieve the above object, the present invention provides a supply port to which a cleaning liquid is supplied, a discharge port for discharging the cleaning liquid supplied to the supply port toward the surface of the web, and a discharge port from the discharge port. A nozzle having a cleaning section for changing the cleaning liquid into a flow along the surface of the web, the nozzle being disposed in the water tank and being immersed in the liquid stored in the water tank. A web cleaning device is provided.

  In order to achieve the above object, the present invention provides a supply port to which a cleaning liquid is supplied, a discharge port for discharging the cleaning liquid supplied to the supply port toward the surface of the web, and a discharge port from the discharge port. A nozzle having a cleaning section for changing the cleaning liquid into a flow along the surface of the web, and an inlet section and an outlet section of the web provided in the nozzle are communicated with a water tank, and the inlet section and the outlet section Provided is a web cleaning apparatus, wherein the section is immersed in a liquid stored in the water tank.

According to the web cleaning apparatus of the present invention, the cleaning liquid supplied to the nozzle supply port is sprayed from the nozzle discharge port toward the surface of the web, and the sprayed cleaning liquid passes through the nozzle cleaning unit. By doing so, the web is washed in a water flow parallel to the surface of the web. By this action, the cleaning liquid generates a force that effectively separates the dust attached to the web, so that the dust attached to the web can be efficiently and reliably removed. In the present invention, the nozzle is disposed in a liquid having a large specific gravity and high viscosity as compared with gas. Thereby, since the kinetic energy of the cleaning liquid discharged from the web inlet and / or outlet of the nozzle is dispersed by the liquid, scattering of the cleaning liquid from the web inlet and outlet of the nozzle can be prevented. Further, the same effect is obtained when water tanks are individually connected to the web inlet and outlet of the nozzle. In the present invention, the nozzle is disposed in the liquid. However, since the distance (depth) from the liquid level of the water tank is about 1 m, and 9.8 × 10 ⁻³ MPa (0.1 atm), the influence on the cleaning ability is not affected. It is minute.

  In the present invention, it is preferable that the cleaning liquid and the liquid in the water tank are the same liquid, and a circulation means for circulating the liquid between the nozzle and the water tank is provided. By making the cleaning liquid of the nozzle and the liquid in the water tank the same liquid, the liquid can be circulated between the nozzle and the water tank by the circulation means.

  In this invention, it is preferable that the said circulation means is equipped with the pump which pumps a liquid from the said water tank to the said nozzle, and the filter which removes the foreign material in the said liquid circulated. By providing a filter in the circulation path of the liquid, foreign matters in the liquid, that is, dust that has peeled off from the web can be removed by the circulation path. Thereby, the liquid ejected from the nozzle can always be maintained in a clean state, and reattachment of dust to the web can be prevented.

  In this invention, the roll arrange | positioned at the said water tank is comprised by the porous member, this air is ejected from the surface of the said roll by supplying air to the said roll, and it winds around the said roll with this ejected air It is preferable that the web to be supported is supported in a non-contact manner with respect to the roll. Thereby, generation | occurrence | production of the dust which arises by abrasion of a web by contact with a roll and a web can be prevented, and it can prevent that the liquid of a water tank and washing water are contaminated with the said dust.

  According to the web cleaning apparatus of the present invention, fine dust adhering to the surface of the web can be removed, and scattering of the cleaning liquid can be prevented.

The block diagram which showed the structure of the coating device of the film in which the washing | cleaning apparatus of embodiment was integrated Explanatory drawing which showed the structure of the nozzle of 1st Embodiment. The principal part enlarged view which showed the structure of the nozzle of 2nd Embodiment. Explanatory drawing showing the relationship between the simplified nozzle model and the cleaning fluid pressure distribution Explanatory drawing which showed the structure of the nozzle of 3rd Embodiment. The principal part enlarged view which showed the structure of the nozzle of 4th Embodiment. Explanatory drawing which showed the structure of the nozzle of 5th Embodiment. The perspective view which showed the structure of the washing | cleaning apparatus of 1st Embodiment. The perspective view which showed the structure of the washing | cleaning apparatus of 2nd Embodiment.

  Embodiments of a web cleaning apparatus according to the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is a block diagram showing an overall configuration of a film coating apparatus 40 in which a nozzle 36 of a web cleaning apparatus according to an embodiment is incorporated.

  The film coating apparatus 40 includes a film roll unwinding portion 42 and a nozzle 36 according to the embodiment from the upstream side to the downstream side in the transport direction of a plastic film (hereinafter referred to as a film) 12. A drying unit 10, a coating unit 44, a drying unit (drying unit after coating) 46, and a winding unit 48 are arranged in this order. The sheet-like film 12 unwound from the unwinding section 42 is carried into the cleaning / drying unit 10 by the transport rollers 14 and 16.

  The cleaning / drying unit 10 includes two nozzles 36 and 36 that spray a cleaning liquid toward the film 12 that is continuously running, and a drying unit 38 that dries the cleaned film 12. In the cleaning unit 10 of FIG. 1, two nozzles 36 are disposed on the upstream side and the downstream side, and one drying unit 38 is disposed on the subsequent stage. However, the number of these units is limited to this. Is not to be done. For example, a configuration in which three nozzles 36 and two drying units 38 are arranged may be employed. The nozzles 36 and 36 and the drying unit 38 are covered with a cover 50 and are configured as one unit.

  The cleaning / drying unit 10 shown in FIG. 1 winds the film 12 in a horizontal direction in a horizontal direction by winding the film 12 around a plurality of rollers 18, 20, 22, 24, 26, and 28. Although it is the structure which wash | cleans and dries, it is not limited to this. For example, you may employ | adopt the structure wash | cleaned and dried, making the film 12 meander and convey vertically.

  The coating unit 44 is disposed in the vicinity of the outlet of the cleaning / drying unit 10. The film 12 carried out from the outlet of the cleaning / drying unit 10 is wound around a pair of rollers 30 and 32, whereby tension is applied between the rollers 30 and 32. Paint is applied from a nozzle (not shown).

  The film 12 that has passed through the coating unit 44 is carried into the drying unit 46, dried there, and then wound up from the drying unit 46 to the winding unit 48 via the roller 34.

  Incidentally, the object to be cleaned by the nozzle 36 is very fine dust, film pieces, and dirt of several μm attached to the front and back surfaces of the film 12. The nozzle 36 has a structure that forms a water flow along at least one surface by discharging the cleaning liquid to at least one surface side of the front and back surfaces of the film 12 that is continuously running, and cleans the film 12 by this water flow. . The cleaning liquid is continuously supplied to the nozzle 36.

  FIG. 2 shows the nozzle 36 of the first embodiment. 2A is a perspective view of the nozzle 36, and FIG. 2B is a partial enlarged cross-sectional view of the nozzle 36 viewed from the side. 2 is a nozzle that is disposed to face one side of the film 12 and cleans one side. However, in the case of washing both surfaces, the nozzle 36 having the same configuration is placed facing the top and bottom across the film 12. Configured.

  The nozzle 36 includes a single plate-like body 53 configured in a rectangular shape. A supply port 52 for supplying a cleaning liquid is opened on the upper surface of the plate-like body 53, and a discharge port 55 for discharging the cleaning liquid to one side of the film 12 is opened on the lower surface of the plate-like body 53. The supply port 52 and the discharge port 55 communicate with each other in the same shape, and are slit-shaped openings formed in a direction orthogonal to the transport direction of the film 12 indicated by an arrow. In addition, the length of the slit-like opening is set slightly shorter than the width of the film 12. Further, the height D of the gap (cleaning part) 54 between the plate-like body 53 and the film 12 is preferably 0.25 mm or less. As a result, the cleaning liquid discharged from the discharge port 55 of the plate-like body 53 toward the film 12 is changed to a flow along the surface of the film 12 in the gap 54.

  In particular, when the height D of the gap 54 between the plate 53 and the film 12 is 0.25 mm or less, the flow rate of the cleaning liquid has a large velocity gradient in the narrow gap 54 of 0.25 mm or less. In the cleaning section 54, a parallel flow parallel to the surface of the film 12 and having a high flow velocity is generated. With the energy of this water flow, even very fine dust of several μm, film pieces, and dirt can be removed from the film 12.

  According to the nozzle 36 of the embodiment, the horizontal force represented by the following formula (Togashi et al., Japan Society of Mechanical Engineers) acts on the dust adhering to the film 12 due to the water flow parallel to the film 12, and the dust is applied to the dust. Since it removes, the damage to the film 12 can be suppressed and dust can be removed effectively.

〔数１〕の〔Ｆｄｅｔ〕は塵芥に働く力、〔ｄ〕は塵芥の直径、〔ｕ〕は水流の速度、〔η〕は水の粘度係数、〔ｃ〕は補正係数を表している。

In [Equation 1], [Fdet] represents the force acting on the dust, [d] represents the diameter of the dust, [u] represents the velocity of the water flow, [η] represents the viscosity coefficient of water, and [c] represents the correction coefficient.

  FIG. 3 is a principal structural diagram showing the nozzle 36 of the second embodiment. The nozzle 36 includes a supply port 52a to which a cleaning liquid is supplied from the outside, a throttle 52b for reducing the pressure of the cleaning liquid supplied to the supply port 52a, and a discharge for discharging the reduced cleaning liquid to the cleaning surface of the film 12. The outlet 52 c is configured by being provided in the plate-like body 53.

  In the nozzle 36 of FIG. 3, the diaphragm 52b is configured by a plurality of perforations, and the length of the film 12 in the longitudinal direction can be shortened. Therefore, when a plurality of discharge ports to be described later are provided. This is effective for making the nozzle 36 compact.

  FIG. 4 is an explanatory diagram showing the relationship between the simplified model of the nozzle 36 of FIG. 3 and the cleaning liquid pressure distribution. In explaining this figure, it is assumed that the film 12 is conveyed in a state in which an appropriate tension is applied by the upstream and downstream rollers. Assuming that the pressure of the cleaning liquid supplied to the nozzle supply port 52a is Ps, the pressure of the cleaning liquid is reduced by passing through the throttle 52b and becomes the pressure Pi at the discharge port 52c. Then, the cleaning liquid flows along the surface of the film 12 in the gap 54, and after cleaning the film 12, the pressure becomes a pressure Po in the vicinity of the film inlet 53a and the outlet 53b of the nozzle. A force (the area of the triangle Pi in FIG. 4) that tries to separate the film 12 from the plate-like body 53 is generated by the pressure generated in the gap 54.

  Here, when the film 12 approaches the plate-like body 53 of the nozzle, the flow resistance between the film 12 and the plate-like body 53 increases, and the pressure Pi of the discharge port 52c rises to Pi + ΔPi. The force trying to pull the film 12 increases to the triangle Pi + ΔPi. On the other hand, when the film 12 is separated from the plate-like body 53, the force for separating the film 12 from the plate-like body 53 is reduced. Therefore, the distance between the plate-like body 53 and the film 12 is automatically maintained by arranging the plate-like bodies 53 and 53 so as to be opposed to each other above and below the film 12.

  FIG. 5A is an enlarged cross-sectional view showing a main part of the nozzle 36 according to the third embodiment. The diaphragm 52d has a labyrinth-like gap structure with respect to the straight tubular diaphragm 52b of the nozzle 36 of FIG. It has been changed. In order to provide the diaphragm 52d in the plate-like body 53, the plate-like body 53 is bonded to five rectangular plate materials 53c, 53d, 53e, 53f, and 53g having the same side length as shown in FIG. It is constituted by. That is, a circular supply port 52a is opened at the center of the plate material 53c. The plate material 53d is configured in a frame shape, and a space portion of the frame becomes a part of the diaphragm 52d. The plate member 53e is formed with a pair of rectangular openings sandwiching the center portion, and the pair of openings becomes a part of the diaphragm 52d. Further, the plate material 53f is configured in a frame shape, and a space portion of the frame becomes a part of the diaphragm 52d. Furthermore, a slit-like discharge port 52c is formed in the plate material 53g. By adhering the five plate members 53c to 53g, the nozzle 36 shown in FIG. 5A can be easily manufactured.

  Like the nozzles 36 and 36 shown in FIGS. 3 and 5, by providing the throttles 52b and 52e for reducing the pressure at which the cleaning liquid is discharged to the film 12, the pressure of the cleaning liquid supplied to the discharge port 52c is reduced to a plate-like body. Since the distance between the film 53 and the film 12 is automatically adjusted, the distance between the plate-like body 53 and the film 12 can be kept constant.

  FIG. 6 is a perspective view showing the nozzle 36 of the fourth embodiment.

  The nozzle 36 shown in the figure includes two plate-like bodies 53 and 53. In these plate-like bodies 53, 53, slit-like discharge ports 52 e, 52 e for discharging the cleaning liquid perpendicularly to the front and back surfaces of the film 12 are opened. The height D of the gaps 54 and 54 between the two plate-like bodies 53 and 53 and the surface of the film 12 is preferably set to 0.25 mm or less.

  By flowing the cleaning liquid through such a narrow gap 54, the flow rate of the cleaning liquid has a large velocity gradient, so that the gaps 54, 54 between the front and back surfaces of the film 12 and the two plate-like bodies 53, 53 are provided. A parallel flow parallel to the surface of the film 12 and having a high flow velocity is generated. As a result, even very fine dust, film pieces, and dirt of several μm can be removed from the film 12.

  FIG. 7A is a cross-sectional view showing the nozzle 36 of the fifth embodiment, and is a nozzle in which a plurality of discharge ports 52e shown in FIG. .

  Since a large number of discharge ports 52e are provided in this manner, a cleaning liquid recovery port 56 for discharging the cleaning liquid from the narrow gap is provided between the discharge ports 52e and 52e in order to prevent the cleaning liquid from staying in the narrow gap. It has been. The nozzle 36 shown in FIG. 7A can repeat the cleaning by the nozzle 36 shown in FIG. 5 in a plurality of stages, so that fine dust on the film 12 can be removed more efficiently.

  7B, the position of the discharge port 52e may be shifted on the front and back surfaces of the film 12. By shifting the positions of the opposed discharge port 52e and the cleaning liquid recovery port 56, the film 12 is slightly displaced when the film 12 passes through the nozzle 36. The cleaning effect can be enhanced by the minute displacement of the film 12.

  FIG. 8 is an overall perspective view showing the web cleaning device 60 according to the first embodiment. The nozzle 36 of the cleaning device 60 can be applied as long as it is the nozzle 36 of the first to fifth embodiments shown in FIGS.

  By the way, when the nozzle 36 is used in the atmosphere, the pure water which is sprayed from the nozzle 36 and becomes mist is scattered in the vicinity of the nozzle 36 and adheres to peripheral devices. The mist-like pure water contains dust that has been peeled off from the film 12, and there is a risk that peripheral equipment will be contaminated by this dust.

  Therefore, in the cleaning device 60 of the first embodiment, the nozzle 36 is disposed inside the water tank 62 as shown in FIG. 8 and is immersed in the liquid 64 stored in the water tank 62.

  The liquid 64 has a higher specific gravity and higher viscosity than gas (air). Accordingly, by immersing the nozzle 36 in the liquid 64, the kinetic energy of the cleaning liquid discharged from the inlet 53a (see FIG. 4) and the outlet 53b of the nozzle 36 is dispersed by the liquid 64. As a result, according to the cleaning device 60 of the first embodiment, scattering of the cleaning liquid from the inlet 53a and the outlet 53b of the nozzle 36 can be prevented.

  FIG. 9 is an overall perspective view showing the web cleaning device 70 of the second embodiment. Similarly, the nozzle 36 of the cleaning device 70 can be applied to the nozzle 36 of the first to fifth embodiments shown in FIGS. 2 to 7.

  In the cleaning device 70 of FIG. 9, the inlet 53 a (see FIG. 4) of the nozzle 36 is communicated with the water tank 72, and the outlet 53 b is communicated with the water tank 74. The inlet 53 a is immersed in the liquid 76 stored in the water tank 72, and the outlet 53 b is immersed in the liquid 78 stored in the water tank 74. Similarly to the cleaning device 70 shown in FIG. 8, the cleaning device 70 can prevent the cleaning liquid from being scattered from the inlet 53 a and the outlet 53 b of the nozzle 36.

The nozzle 36 of FIGS. 8 and 9 is configured in a box body in which only the inlet 53a and the outlet 53b of the nozzle 36 are opened to the outside. In the embodiment, the nozzles 36 are arranged in the liquids 64, 76, and 78, but the pressure applied to the nozzles 36 is about 9.8 × around 1 m from the liquid surface L (depth) of the water tanks 62, 72, and 74. Since it is 10 ⁻³ MPa (0.1 atm), the influence on the cleaning ability of the nozzle 36 is very small. The water depth of the nozzle 36 may be a depth that can prevent the cleaning liquid from splashing from the inlet 53a and the outlet 53b. For example, the upper edges of the inlet 53a and the outlet 53b may be submerged several cm with respect to the liquid level L. .

  In the cleaning devices 60 and 70 shown in FIGS. 8 and 9, the cleaning liquid ejected from the nozzle 36 and the liquids 64, 76, and 78 are the same liquid, and pure water, for example, is used. For this reason, it is preferable to provide a circulation means for circulating the liquids 64, 76, 78 between the nozzle 36 and the water tanks 62, 72, 74. By making the cleaning liquid of the nozzle 36 and the liquids 64, 76, 78 in the water tanks 62, 72, 74 the same liquid, the liquid is circulated between the nozzle 36 and the water tanks 62, 72, 74 by the circulation means. can do.

  As an example of the circulation means, the cleaning device 60 in FIG. 8 includes a liquid circulation device including a pipe 80, a pump 82, and a filter 84.

  Here, the water tank 62 of the cleaning device 60 includes a cube-shaped main body portion 62a in which the nozzle 36 is immersed and a hopper portion 62b provided integrally with a lower portion of the main body portion 62a. One end of a pipe 80 constituting the above-described circulation device is connected to the bottom 62c of the hopper 62b, and a pump 82 and a filter 84 are attached to the pipe 80. The other end of the pipe 80 is connected to a pair of pipes 86 and 86 that supply the cleaning liquid to the nozzle 36.

  During the cleaning of the filter 12 by the nozzle 36, the cleaning liquid sprayed from the nozzle 36 to the filter 12 is accompanied by very fine dust, film pieces, dirt, etc. of several μm from the inlet 53 a and the outlet 53 b of the nozzle 36. It flows into the liquid 64 in the water tank 62. The dust mixed in the liquid 64 settles along the hopper portion 62b and is sucked together with the liquid 64 from the bottom portion 62c of the hopper portion 62b to the pipe 80 by driving the pump 82 of the circulation device. The dust is pumped through the pipe 80 together with the liquid 64 by the pump 82, and is disposed in the rear stage of the pump 82 (may be the front stage) (micropure filter cartridge MPX type (polypropylene filter material): manufactured by Loki Techno Co., Ltd.) It is removed from the liquid 64 by passing through 84. As a result, only the liquid 64 from which dust has been removed is supplied from the pipe 80 to the nozzle 36 via the pair of pipes 86 and 86. Therefore, by providing such a circulation device in the cleaning device 60 (70), the cleaning liquid sprayed from the nozzle 36 can always be maintained in a clean state, and dust reattaches to the filter 12 being cleaned. Can be prevented.

  On the other hand, in the cleaning devices 60 and 70, a roll (air turn bar: manufactured by BELLMATIC Co., Ltd.) 88 disposed in the water tanks 62, 72, and 74 is formed of a porous member. The roll 88 is connected to an air supply device that supplies compressed air to the roll 88. Compressed air is supplied from the air supply device to the roll 88, and the compressed air is ejected from the surface of the roll 88. The film 12 wound around the roll 88 is supported in a non-contact manner with respect to the roll 88 by the jetted air.

  Thereby, generation | occurrence | production of the dust which arises by abrasion of the film 12 by the contact with the roll 88 and the film 12 can be prevented, and the liquids 64, 76, 78 of the water tanks 62, 72, 74 and the washing water are caused by the dust. It is possible to prevent contamination.

  In addition, it is preferable to provide the air knife which removes the washing | cleaning liquid adhering to the film 12, and the static elimination mechanism which ionizes the air supplied to the blowing blow of an air knife in the back | latter stage of the washing | cleaning apparatuses 60 and 70. FIG.

  The plastic film used in the present invention is not particularly limited as long as it is web-shaped. For example, polyester film, polyethylene film, polypropylene film, cellophane film, diacetylcellulose film, triacetylcellulose film, acetylcellulose buty Rate film, polyvinyl chloride film, polyvinylidene chloride film, polyvinyl alcohol film, ethylene vinyl alcohol film, polystyrene film, polycarbonate film, polymethylpenter film, polysulfone film, polyether ketone film, polyether sulfone film, polyether imide Film, polyimide film, fluororesin film, nylon film, polycycloolefin Down film, a thermoplastic resin film such as an acrylic film, and at least one surface of these plastic films, and coated, coating, laminating, a multi-layer film subjected to processing such as printing. When using a triacetyl cellulose film, polyester film, polycycloolefin film, or polycarbonate film that requires high transmittance and high film uniformity, it is easy to check defects caused by dust, etc. .

  The thickness of the film 12 to be cleaned can be arbitrarily selected from the range of 5 to 2000 μm, preferably 15 to 500 μm, particularly preferably 20 to 200 μm.

  As mentioned above, although the embodiment of the web cleaning apparatus of the present invention has been described based on the drawings, the present invention is not limited to the embodiments described in the drawings, and the configurations described in the respective drawings are appropriately combined. The configuration can be appropriately changed without departing from the characteristics of the present invention.

  The web cleaning apparatus of the present invention is a functional optical plastic film used as a member or process material in various electronic display fields represented by liquid crystal displays, plasma displays, rear projection displays, organic EL displays, SEDs, CRTs and the like. It is possible to remove dust such as dust, fibers, and film pieces (soot) mixed in or firmly attached to the film. Thereby, it can use suitably for the washing | cleaning method of the web which is hygienic and has few dirt and a defect, and its washing | cleaning apparatus.

  DESCRIPTION OF SYMBOLS 10 ... Cleaning / drying unit, 12 ... Plastic film, 14, 16 ... Conveyance roller, 18, 20, 22, 24, 26, 28, 30, 32, 34 ... Roller, 36 ... Nozzle, 38 ... Drying part, 44 ... Application part 46 ... Drying part 48 ... Winding part 50 ... Cover 60 ... Cleaning device 62 ... Water tank 64 ... Liquid 70 ... Cleaning device 72 ... Water tank 74 ... Water tank 76 ... Liquid 78 ... liquid, 80 ... pipe, 82 ... pump, 84 ... filter, 86 ... pipe, 88 ... roll

Claims (5)

A supply port to which a cleaning liquid is supplied, a discharge port for discharging the cleaning liquid supplied to the supply port toward the surface of the web, and the cleaning liquid discharged from the discharge port in a flow along the surface of the web A nozzle having a cleaning section to be changed,
The said nozzle is arrange | positioned at the water tank, and it is immersed and arrange | positioned at the liquid stored by the said water tank, The washing | cleaning apparatus of the web characterized by the above-mentioned. A supply port to which a cleaning liquid is supplied, a discharge port for discharging the cleaning liquid supplied to the supply port toward the surface of the web, and the cleaning liquid discharged from the discharge port in a flow along the surface of the web A nozzle having a cleaning section to be changed,
A web cleaning apparatus, wherein an inlet and an outlet of the web provided in the nozzle are communicated with a water tank, and the inlet and the outlet are immersed in a liquid stored in the water tank. .   The web cleaning apparatus according to claim 1, wherein the cleaning liquid and the liquid in the water tank are the same liquid, and a circulation means for circulating the liquid between the nozzle and the water tank is provided.   4. The web cleaning apparatus according to claim 3, wherein the circulation unit includes a pump that pumps liquid from the water tank to the nozzle and a filter that removes foreign matters in the circulated liquid.   The roll arranged in the water tank is constituted by a porous member, and the web is wound around the roll by the air jetted from the surface of the roll by supplying air to the roll. The web cleaning apparatus according to claim 1, wherein the web is supported in a non-contact manner with respect to the roll.

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