JP2010094618A - Nozzle apparatus for washing film - Google Patents

Nozzle apparatus for washing film Download PDF

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JP2010094618A
JP2010094618A JP2008268566A JP2008268566A JP2010094618A JP 2010094618 A JP2010094618 A JP 2010094618A JP 2008268566 A JP2008268566 A JP 2008268566A JP 2008268566 A JP2008268566 A JP 2008268566A JP 2010094618 A JP2010094618 A JP 2010094618A
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film
cleaning liquid
cleaning
nozzle device
cleaning nozzle
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Satoru Sugitani
悟 杉谷
Nobuo Tsumaki
伸夫 妻木
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Hitachi Plant Technologies Ltd
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Hitachi Plant Technologies Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a film washing apparatus for continuously removing even extremely fine dust with several μm, film segments, and stains adhering to the surface of a plastic film. <P>SOLUTION: The nozzle apparatus for washing film includes one or two flat members 53 and a washing liquid discharge port 52 formed in the flat member 53 and for blowing a washing liquid to at least one face of the front and rear faces of a film 12 moving in parallel to the flat member 53. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、プラスチックフィルムの表面に付着した、埃、フィルム片、汚れを連続的に洗浄するフィルムの洗浄ノズル装置に関するものであり、特に、クリーンなものが求められるFPD(フラットパネルディスプレイ)分野、エレクトロニクス分野、光学用分野のフィルムの洗浄ノズル装置に関する。   The present invention relates to a film cleaning nozzle device that continuously cleans dust, film pieces, and dirt adhering to the surface of a plastic film. In particular, the FPD (flat panel display) field where a clean one is required, The present invention relates to a film cleaning nozzle device in the fields of electronics and optics.

プラスチックフィルムは、FPD分野、エレクトロニクス分野、光学用分野等、様々な分野で使用されている。FDP分野、エレクトロニクス分野に使用されるプラスチックフィルムは、製膜、塗工、貼合などの工程を経て部材、プロセス材として使用される。その製造工程は、終始クリーン環境下での取り扱いが必須であり、埃、繊維、フィルム粕などの異物の製品への混入や付着などの欠陥、及びそれらに起因するキズ、押し跡などの物理的欠陥の発生は厳重に管理されている。これらの欠陥の発生頻度に対する市場の要求基準は急速に厳しくなってきている。また、欠陥の程度についても、従来問題とされなかった非常に微細な欠陥が許容されなくなってきており、改善を求められている。   Plastic films are used in various fields such as FPD field, electronics field, and optical field. Plastic films used in the FDP field and electronics field are used as members and process materials through processes such as film formation, coating, and bonding. The manufacturing process must be handled in a clean environment from beginning to end, and defects such as dust, fibers, film flaws, etc., and defects such as contamination and adhesion to the product, as well as physical damage such as scratches and imprints. The occurrence of defects is strictly controlled. Market requirements for the frequency of these defects are rapidly becoming stricter. In addition, with respect to the degree of defects, very fine defects that have not been considered as a problem in the past have become unacceptable, and there is a need for improvement.

このような問題を解消するため、近年ではプラスチックフィルムを洗浄することにより、塵芥を除去する取り組みが行われている。   In order to solve such problems, in recent years, efforts have been made to remove dust by washing plastic films.

特許文献1では、超音波発生ノズルを設け、この超音波発生ノズルから噴出されるエアーによる気流と、超音波による振動によってフィルム上の塵嬢を除去する洗浄ノズルが提案されている。   Patent Document 1 proposes a cleaning nozzle that is provided with an ultrasonic generation nozzle and removes dust on the film by an air current blown from the ultrasonic generation nozzle and vibration by the ultrasonic wave.

また、特許文献2では、洗浄手段として洗浄ノズルから連続して洗浄液を噴霧し、洗浄液再循環手段として落下した洗浄液を再循環させ、乾燥手段が連続して温風を吹き付ける光学用プラスチックフィルムの洗浄・乾燥方法が提案されている。
特開平11−239761号公報 特開2002−292347号公報
In Patent Document 2, cleaning liquid is continuously sprayed from a cleaning nozzle as a cleaning means, and the cleaning liquid dropped as a cleaning liquid recirculation means is recirculated, and the drying means continuously cleans the optical plastic film sprayed with warm air.・ A drying method has been proposed.
Japanese Patent Laid-Open No. 11-239761 JP 2002-292347 A

しかしながら、特許文献1では、光学用プラスチックフィルムには可塑剤が含有されており、アルコールで洗浄した場合には可塑剤の溶出が生じ、フィルム特性の変化と均一性の低下が問題となる。   However, in Patent Document 1, a plasticizer is contained in an optical plastic film, and when it is washed with alcohol, the plasticizer is eluted, which causes a problem of a change in film characteristics and a decrease in uniformity.

また、特許文献2では、吹付けたエアーによって剥離した塵境が付近に散乱して、フィルムに再付着する恐れや、強固に付着したものについては十分に除去できないという問題がある。   Moreover, in patent document 2, there exists a problem that the dust boundary which peeled with the air sprayed may scatter to the vicinity, and may adhere to a film again, or it cannot fully remove about what adhered firmly.

そして、これら特許文献1や特許文献2のようにフィルムを洗浄しても、フィルム上の数μmという非常に微細な異物はフィルムへの付着力が強く、好ましく除去することができないという問題があった。   Even when the film is washed as in Patent Document 1 or Patent Document 2, there is a problem that very fine foreign matters of several μm on the film have strong adhesion to the film and cannot be removed preferably. It was.

本発明は、このような事情に鑑みてなされたもので、プラスチックフィルムの表面に付着した数μmという非常に微細な埃、フィルム片、汚れまでも連続的に除去することができるフィルムの洗浄ノズル装置を提供することを目的とする。   The present invention has been made in view of such circumstances, and is a film cleaning nozzle capable of continuously removing even very fine dust, film pieces, and dirt of several μm attached to the surface of a plastic film. An object is to provide an apparatus.

本発明は、前記目的を達成するために、1又は2枚の平部材と、前記平部材に形成され、平部材に平行に走行するフィルムの表裏面の少なくとも一方の面側に対して洗浄液を吹き付ける洗浄液吐出口と、を備えたことを特徴とするフィルムの洗浄ノズル装置を提供する。平部材が2枚のときには、前記洗浄液吐出口を、前記フィルムの表裏に対向させて一対以上設けることが好ましい。   In order to achieve the above object, the present invention provides a cleaning liquid to one or two flat members and at least one surface side of the front and back surfaces of the film formed on the flat member and running parallel to the flat member. There is provided a film cleaning nozzle device comprising a cleaning liquid discharge port for spraying. When there are two flat members, it is preferable to provide a pair or more of the cleaning liquid discharge ports facing the front and back of the film.

そして、平部材には、前記フィルムに吹き付けた洗浄液を回収する洗浄液回収口を備えることが好ましい。平部材が2枚のときには、前記洗浄液回収口は、前記フィルムの表裏に対向させて一対以上設けることが好ましい。   The flat member preferably includes a cleaning liquid recovery port for recovering the cleaning liquid sprayed on the film. When there are two flat members, it is preferable that a pair of the cleaning liquid recovery ports be provided so as to face the front and back of the film.

また、平部材とフィルムとの隙間は、0.25mm以下であることが好ましい。   Moreover, it is preferable that the clearance gap between a flat member and a film is 0.25 mm or less.

このように構成されたフィルムの洗浄ノズル装置により、プラスチックフィルムの表面に付着した数μmという非常に微細な埃、フィルム片、汚れまでも連続的に除去することができる。   The film cleaning nozzle device thus configured can continuously remove even very fine dust, film pieces, and dirt of several μm attached to the surface of the plastic film.

即ち、平部材とフィルムに対して洗浄液を供給する洗浄液吐出口とを備えた洗浄ノズル装置でフィルムを洗浄することにより、平部材とフィルムとの隙間で大きな速度勾配を持つフィルム表裏面の少なくとも一方の面に沿った水流によって数μmという非常に微細な埃、フィルム片、汚れをフィルムから除去することができる。   That is, at least one of the front and back surfaces of the film having a large speed gradient in the gap between the flat member and the film by cleaning the film with a cleaning nozzle device having a flat member and a cleaning liquid discharge port for supplying a cleaning liquid to the film. A very fine dust of several μm, film pieces, and dirt can be removed from the film by the water flow along the surface.

特に、平部材とフィルムとからなる0.25mm以下の隙間とすることで、供給口から供給された洗浄液が0.25mm以下の狭い隙間で大きな速度勾配を持つようになるので、数μmという非常に微細な埃、フィルム片、汚れをフィルムから除去することができる。   In particular, by setting a gap of 0.25 mm or less consisting of a flat member and a film, the cleaning liquid supplied from the supply port has a large speed gradient in a narrow gap of 0.25 mm or less. In addition, fine dust, film pieces and dirt can be removed from the film.

ここで、平部材を1枚だけ備えたフィルムの洗浄ノズル装置は、フィルムの片面のみを洗浄したいときに適用される。   Here, the film cleaning nozzle device having only one flat member is applied when only one side of the film is to be cleaned.

また、フィルムの洗浄ノズル装置には、洗浄液をフィルムに吹き付ける圧力を減圧する減圧機構が設けられていることも好ましい。   In addition, the film cleaning nozzle device is preferably provided with a pressure reducing mechanism for reducing the pressure of spraying the cleaning liquid onto the film.

本発明によれば、プラスチックフィルムの表面に付着した数μmという非常に微細な埃、フィルム片、汚れまでも連続的に除去することができるフィルムの洗浄ノズル装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the washing nozzle apparatus of the film which can remove continuously the very fine dust of several micrometers adhering to the surface of a plastic film, a film piece, and dirt can be provided.

以下、添付図面に従って、本発明の実施の形態を詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

図1は、フィルムの塗布装置に本発明のフィルムの洗浄ノズル装置を組み込んだときの全体構成を示す概略側面図である。   FIG. 1 is a schematic side view showing an overall configuration when the film cleaning nozzle device of the present invention is incorporated in a film coating apparatus.

図1に示すように、本実施の形態のフィルムの塗布装置40は、プラスチックフィルムロールの巻出部42、本発明のフィルムの洗浄ノズル装置36、乾燥部38、塗工部44、乾燥部(塗工後の乾燥部)46、巻取部48を順に設けている。プラスチックフィルムロールの巻出部42より順次巻き出されたシート状のプラスチックフィルム12は、搬送ローラ14、16で本発明のフィルムの洗浄システム10に搬送される。   As shown in FIG. 1, the film coating apparatus 40 of this embodiment includes a plastic film roll unwinding section 42, a film cleaning nozzle apparatus 36 of the present invention, a drying section 38, a coating section 44, a drying section ( A drying section 46 after coating and a winding section 48 are provided in this order. The sheet-like plastic film 12 sequentially unwound from the unwinding portion 42 of the plastic film roll is conveyed to the film cleaning system 10 of the present invention by the conveying rollers 14 and 16.

図1のフィルムの塗布装置40は、走行するフィルムに洗浄液を用いて洗浄を行う洗浄ノズル装置36、36と、洗浄したフィルムの乾燥を行う乾燥部38と、を備えている。ここで、洗浄ノズル装置36は2段、乾燥部38が1段である例を示しているがこの限りでなく、例えば、洗浄ノズル装置36が3段、乾燥部38が2段であっても良い。なお、洗浄ノズル装置36と乾燥部38との全体をカバーする全体カバー50が設けられていることが好ましい。   The film coating apparatus 40 in FIG. 1 includes cleaning nozzle devices 36 and 36 that perform cleaning on a traveling film using a cleaning liquid, and a drying unit 38 that performs drying of the cleaned film. Here, an example is shown in which the cleaning nozzle device 36 has two stages and the drying unit 38 has one stage. However, the present invention is not limited to this. For example, the cleaning nozzle device 36 has three stages and the drying unit 38 has two stages. good. In addition, it is preferable that an entire cover 50 that covers the entire cleaning nozzle device 36 and the drying unit 38 is provided.

本発明における洗浄対象は、プラスチックフィルムの表面に付着した数μmという非常に微細な埃、フィルム片、汚れである。   The objects to be cleaned in the present invention are very fine dust, film pieces, and dirt of several μm attached to the surface of the plastic film.

そして、本発明に係る洗浄ノズル装置36は、フィルムを走行させながらフィルム表裏面の少なくとも一方の面側に洗浄液を供給することにより、少なくとも一方の面に沿った水流で洗浄する構造であるである。洗浄液は絶えず供給されている。   The cleaning nozzle device 36 according to the present invention has a structure in which the cleaning liquid is supplied to at least one surface side of the front and back surfaces of the film while the film is running, thereby cleaning with a water flow along at least one surface. . The cleaning liquid is constantly supplied.

図2は、本発明に係る洗浄ノズル装置36の実施の形態を示したものであり、図2(a)は斜視図であり、図2(b)は側面から見た断面の一部を示した断面図である。なお、図2の洗浄ノズル装置36は、フィルムの片面を洗浄する場合である。   FIG. 2 shows an embodiment of the cleaning nozzle device 36 according to the present invention, FIG. 2 (a) is a perspective view, and FIG. 2 (b) shows a part of a cross section viewed from the side. FIG. The cleaning nozzle device 36 in FIG. 2 is for cleaning one side of the film.

図2に示した洗浄ノズル装置36は、1枚の平部材53と、洗浄液をフィルムの片面に対して垂直に供給する平部材53に設けられた洗浄液吐出口52とからなる。平部材とフィルムとの隙間54は、0.25mm以下の幅Dであることが好ましい。   The cleaning nozzle device 36 shown in FIG. 2 includes a single flat member 53 and a cleaning liquid discharge port 52 provided in the flat member 53 that supplies the cleaning liquid perpendicularly to one side of the film. The gap 54 between the flat member and the film preferably has a width D of 0.25 mm or less.

このように、平部材53とフィルム12に対して洗浄液を供給する洗浄液吐出口52とを備えた洗浄ノズル装置36でフィルム12を洗浄することにより、平部材53とフィルム12との隙間で大きな速度勾配を持つフィルムの表面に沿った水流によって、数μmという非常に微細な埃、フィルム片、汚れをフィルムから除去することができる。   Thus, by cleaning the film 12 with the cleaning nozzle device 36 having the flat member 53 and the cleaning liquid discharge port 52 for supplying the cleaning liquid to the film 12, a large speed is obtained in the gap between the flat member 53 and the film 12. Very fine dust, film pieces, and dirt of several μm can be removed from the film by a water flow along the surface of the film having a gradient.

特に、平部材53とフィルム12との隙間54が0.25mm以下の幅Dである場合、0.25mm以下の狭い隙間で洗浄液の流速が大きな速度勾配を持つようになるので、フィルム表面との平部材53との間には、フィルム面に平行で且つ流速の早い平行流が発生する。これにより、数μmという非常に微細な埃、フィルム片、汚れでもフィルムから除去することが可能となる。   In particular, when the gap 54 between the flat member 53 and the film 12 has a width D of 0.25 mm or less, the flow rate of the cleaning liquid has a large speed gradient in a narrow gap of 0.25 mm or less. A parallel flow parallel to the film surface and having a high flow velocity is generated between the flat member 53. As a result, even very fine dust, film pieces, and dirt of several μm can be removed from the film.

なお、本発明の洗浄ノズル装置によれば、フィルムに対し平行な水流によって、付着した異物に下記式(富樫他,機械学会)で表される水平方向の力が働き、塵埃を除去することから、フィルムへのダメージを抑え効果的に塵埃を除去することが出来る。   According to the cleaning nozzle device of the present invention, the horizontal force represented by the following formula (Togashi et al., Japan Society of Mechanical Engineers) acts on the adhered foreign matter due to the water flow parallel to the film, thereby removing dust. It is possible to effectively remove dust while suppressing damage to the film.

Figure 2010094618
Figure 2010094618

ここで、Fdetは塵埃に働く力、dは塵埃の直径、uは水流の速度、ηは水の粘度係数、cは補正係数を表す。   Here, Fdet is the force acting on the dust, d is the diameter of the dust, u is the velocity of the water flow, η is the viscosity coefficient of water, and c is the correction coefficient.

そして、本発明では、図3に示すように、洗浄ノズル装置36の洗浄液吐出口52を、洗浄液を供給する供給口52aと、供給口52aから供給された洗浄液を減圧するための絞り52bと、減圧された洗浄液をフィルムの洗浄側に吹き出す吹出口52cとで構成することが好ましい。   In the present invention, as shown in FIG. 3, the cleaning liquid discharge port 52 of the cleaning nozzle device 36 is supplied with a supply port 52a for supplying the cleaning liquid, a throttle 52b for reducing the pressure of the cleaning liquid supplied from the supply port 52a, It is preferable to comprise the blower outlet 52c which blows out the pressure-reduced washing | cleaning liquid to the washing | cleaning side of a film.

なお、図3は、絞り52bを複数の穿孔を用いた場合の図であり、フィルム長手方向の長さを短くすることが可能であるので、後述する複数の洗浄液吹出口を設ける場合に洗浄ノズル装置をコンパクトにするのに有効である。   FIG. 3 is a diagram in the case where a plurality of perforations are used for the aperture 52b, and since the length in the film longitudinal direction can be shortened, the cleaning nozzle is provided when a plurality of cleaning liquid outlets described later are provided. It is effective to make the device compact.

図4は、図3の洗浄ノズル装置の簡易モデルと洗浄液圧力分布との関係を示したものである。なお、フィルムは上流側及び下流側のローラにより適度な張力が掛かった状態で搬送されている。洗浄ノズル装置36の供給口52aに供給する洗浄液の圧力をPsとすると、洗浄液は絞り52bを通り吹出口52cでは圧力Piとなり、フィルムを洗浄した後、排出され圧力Poとなる。この圧力によって洗浄ノズル装置36からフィルム12を引き離そうとする力(図4の三角形Piの面積)が発生する。   FIG. 4 shows the relationship between the simple model of the cleaning nozzle device of FIG. 3 and the cleaning liquid pressure distribution. In addition, the film is conveyed in a state where an appropriate tension is applied by rollers on the upstream side and the downstream side. Assuming that the pressure of the cleaning liquid supplied to the supply port 52a of the cleaning nozzle device 36 is Ps, the cleaning liquid passes through the throttle 52b and becomes the pressure Pi at the outlet 52c, and is discharged and becomes the pressure Po after cleaning the film. Due to this pressure, a force (the area of the triangle Pi in FIG. 4) for pulling the film 12 away from the cleaning nozzle device 36 is generated.

ここで、フィルム12が洗浄ノズル装置36に接近すると、フィルム12と洗浄ノズル装置36間の流路抵抗が大きくなり吐出口の圧力PiがPi+ΔPiへ上昇し、洗浄ノズル装置36からフィルム12を引き離そうとする力が三角形Pi+ΔPiへと増加する。また、フィルム12が洗浄ノズル装置36から離れた場合も同様に洗浄ノズル装置36からフィルム12を引き離そうとする力が減少し、洗浄ノズル装置36とフィルム12間の距離を自動的に維持できる。   Here, when the film 12 approaches the cleaning nozzle device 36, the flow path resistance between the film 12 and the cleaning nozzle device 36 increases and the discharge port pressure Pi increases to Pi + ΔPi, so that the film 12 is pulled away from the cleaning nozzle device 36. Force increases to the triangle Pi + ΔPi. Similarly, when the film 12 is separated from the cleaning nozzle device 36, the force for separating the film 12 from the cleaning nozzle device 36 is reduced, and the distance between the cleaning nozzle device 36 and the film 12 can be automatically maintained.

図5(a)は、本発明に係る洗浄ノズル装置36の他の実施の形態を示したものであり、図3の絞り52bを細い隙間構造にした場合の図である。図5(b)に示すように複数からなる板構造53a,53b,…53eによって形成され、容易に製作できるという特徴がある。   FIG. 5 (a) shows another embodiment of the cleaning nozzle device 36 according to the present invention, and is a view when the diaphragm 52b of FIG. 3 has a narrow gap structure. As shown in FIG. 5 (b), it is formed by a plurality of plate structures 53a, 53b,... 53e, and can be easily manufactured.

なお、図3や図5のように洗浄液をフィルムに吹き付ける圧力を減圧する減圧機構(絞り)を設けることで、吹出口52cに供給する洗浄液の圧力が、平部材53とフィルム12との距離に応じて自動的に調整されることから、平部材53とフィルム12との距離を一定に保つ効果がある。   As shown in FIGS. 3 and 5, the pressure of the cleaning liquid supplied to the outlet 52 c is set at the distance between the flat member 53 and the film 12 by providing a pressure reducing mechanism (throttle) that reduces the pressure of spraying the cleaning liquid onto the film. Accordingly, the distance between the flat member 53 and the film 12 is kept constant.

図6は、本発明に係る洗浄ノズル装置36の他の実施の形態を示したものである。   FIG. 6 shows another embodiment of the cleaning nozzle device 36 according to the present invention.

図6に示した洗浄ノズル装置36は、2枚の平部材53、53と、洗浄液をフィルム表裏面に対して垂直に供給する平部材53、53に設けられた洗浄液吐出口52、52と、からなる。2枚の平部材53、53は、それぞれ平部材とフィルムとの隙間の幅Dが0.25mm以下である狭い隙間54、54を形成することが好ましい。   The cleaning nozzle device 36 shown in FIG. 6 includes two flat members 53 and 53, and cleaning liquid discharge ports 52 and 52 provided in the flat members 53 and 53 that supply the cleaning liquid perpendicularly to the front and back surfaces of the film. Consists of. The two flat members 53 and 53 preferably form narrow gaps 54 and 54 in which the gap D between the flat member and the film is 0.25 mm or less, respectively.

このような狭い隙間54に洗浄液を流すことで、洗浄液の流速が大きな速度勾配を持つようになるので、フィルム表裏面と2枚の平部材53、53との間には、フィルム面に平行で且つ流速の早い平行流が発生する。これにより、数μmという非常に微細な埃、フィルム片、汚れでもフィルムから除去することが可能となる。   By flowing the cleaning liquid through such a narrow gap 54, the flow rate of the cleaning liquid has a large speed gradient, so that the film surface is parallel to the film surface between the front and back surfaces of the film and the two flat members 53, 53. A parallel flow with a high flow velocity is generated. As a result, even very fine dust, film pieces, and dirt of several μm can be removed from the film.

さらに、図7(a)は、本発明に係る洗浄ノズル装置36の別の実施形態を示したものであり、図6の洗浄液吐出口52がフィルム表裏面にそれぞれ複数設けられているものである。また、洗浄液吐出口52が多数設けられていることで洗浄液が狭い隙間に滞留するのを防ぐために、狭い隙間から洗浄液を排出するための洗浄液回収口56が洗浄液吐出口52、52間に設けられている。この図7(a)の洗浄ノズル装置36とすることで、図5の洗浄ノズル装置での洗浄を複数段繰り返すことができるので、フィルム上の微細な異物をより除去することができる。   FIG. 7A shows another embodiment of the cleaning nozzle device 36 according to the present invention, in which a plurality of cleaning liquid discharge ports 52 of FIG. 6 are provided on the front and back surfaces of the film, respectively. . In addition, since a large number of cleaning liquid discharge ports 52 are provided, a cleaning liquid recovery port 56 for discharging the cleaning liquid from the narrow gap is provided between the cleaning liquid discharge ports 52 and 52 in order to prevent the cleaning liquid from staying in the narrow gap. ing. By using the cleaning nozzle device 36 shown in FIG. 7A, the cleaning nozzle device shown in FIG. 5 can be cleaned a plurality of stages, so that fine foreign matters on the film can be further removed.

また、図7(b)のように、フィルム表裏面で洗浄液吐出口52の位置がずれていても良い。対向させた洗浄液吐出口52と洗浄液回収口56の位置をずらすことで、フィルムが洗浄ノズル装置を通過する際にフィルムが微小変位する。このフィルムの微小変位によって洗浄効果を高めることができる。   Further, as shown in FIG. 7B, the position of the cleaning liquid discharge port 52 may be shifted on the front and back surfaces of the film. By shifting the positions of the cleaning liquid discharge port 52 and the cleaning liquid recovery port 56 opposed to each other, the film is slightly displaced when the film passes through the cleaning nozzle device. The cleaning effect can be enhanced by the minute displacement of the film.

以上のように本発明のフィルムの洗浄ノズル装置36で洗浄されたフィルム12は、ローラ24,26により乾燥部38へと送られる。   As described above, the film 12 cleaned by the film cleaning nozzle device 36 of the present invention is sent to the drying section 38 by the rollers 24 and 26.

なお、洗浄ノズル装置36の後段には、フィルムに付着している洗浄液を除去するエアーナイフと、エアーナイフの吹き出しロに供給される空気をイオン化する除電機構と、を備えていることが好ましい。   In addition, it is preferable to provide the air nozzle which removes the washing | cleaning liquid adhering to a film, and the static elimination mechanism which ionizes the air supplied to the blower blow of an air knife in the back | latter stage of the washing nozzle apparatus 36. FIG.

洗浄・乾燥されたフィルム12は、塗工部44で塗布液が塗布され、ローラで搬送されながら乾燥部46を通過し、巻取部48にてロール状態に巻き取られる。   The film 12 that has been washed and dried is coated with a coating solution at the coating unit 44, passes through the drying unit 46 while being transported by a roller, and is wound into a roll state at the winding unit 48.

本発明に用いられるプラスチックフィルムは、透明なシートまたはフィルム状のものであれば特に限定されるものではなく、例えば、ポリエステルフィルム、ポリエチレンフィルム、ポリプロピレンフィルム、セロファンフィルム、ジアセチルセルロースフィルム、トリアセチルセルロースフィルム、アセチルセルロースブチレートフィルム、ポリ塩化ビニルフィルム、ポリ塩化ビニリデンフィルム、ポリビニルアルコールフィルム、エチレンビニルアルコールフィルム、ポリスチレンフィルム、ポリカーボネートフィルム、ポリメチルペンテルフィルム、ポリスルフォンフィルム、ポリエーテルケトンフィルム、ポリエーテルスルフォンフィルム、ポリエーテルイミドフィルム、ポリイミドフィルム、フッ素樹脂フィルム、ナイロンフィルム、ポリシクロオレフィンフィルム、アクリルフィルム等の熱可塑性樹脂フィルム、及びこれらのプラスチックフィルムの少なくとも片面に、塗布、塗工、貼合、印刷などの処理を施した多層フィルムを挙げることができる。透過率が高く、高いフィルム均一性が求められるトリアセチルセルロースフィルム、ポリエステルフィルム、ポリシクロオレフィンフィルム、ポリカーボネートフィルムを用いた場合に、塵芥等に起因した欠点の確認が容易である為、効果が大きい。   The plastic film used in the present invention is not particularly limited as long as it is a transparent sheet or film. For example, a polyester film, a polyethylene film, a polypropylene film, a cellophane film, a diacetyl cellulose film, a triacetyl cellulose film. , Acetylcellulose butyrate film, polyvinyl chloride film, polyvinylidene chloride film, polyvinyl alcohol film, ethylene vinyl alcohol film, polystyrene film, polycarbonate film, polymethylpenter film, polysulfone film, polyether ketone film, polyether sulfone film , Polyetherimide film, polyimide film, fluororesin film, nylon fill , Polycycloolefin films, thermoplastic resin film such as an acrylic film, and at least one surface of these plastic films, coating, coating, bonding, may be mentioned multi-layer film subjected to processing such as printing. When using a triacetyl cellulose film, polyester film, polycycloolefin film, or polycarbonate film that requires high transmittance and high film uniformity, it is easy to identify defects caused by dust, etc. .

本発明に用いられるプラスチックフィルムの厚さは、5〜2000μm、好ましくは15〜500μm、特に好ましくは20〜200μmの範囲から任意に選択できる。   The thickness of the plastic film used for this invention can be arbitrarily selected from the range of 5-2000 micrometers, Preferably it is 15-500 micrometers, Most preferably, it is 20-200 micrometers.

以上、本発明のフィルムの洗浄ノズル装置について、図に基づいて説明したが、本発明は上記図に記載した構成に限定されるものではなく、各図に記載した構成を適宜組み合わせる等、その趣旨を逸脱しない範囲において適宜その構成を変更することができるものである。   The film cleaning nozzle device of the present invention has been described with reference to the drawings. However, the present invention is not limited to the configurations described in the above drawings, and the gist of the present invention includes, for example, appropriately combining the configurations described in the respective drawings. The configuration can be changed as appropriate without departing from the scope of the invention.

本発明のフィルムの洗浄ノズル装置を組み入れたフィルムの塗布装置を示す図The figure which shows the coating device of the film incorporating the cleaning nozzle apparatus of the film of this invention 本発明に係る洗浄ノズル装置の実施形態を示す図The figure which shows embodiment of the washing nozzle apparatus which concerns on this invention 本発明に係る洗浄ノズル装置の洗浄液吐出口の他の実施形態を示す図The figure which shows other embodiment of the washing | cleaning liquid discharge port of the washing | cleaning nozzle apparatus which concerns on this invention. 本発明に係る洗浄ノズル装置の簡易モデルと洗浄液圧力分布との関係を示した図The figure which showed the relationship between the simple model of the washing | cleaning nozzle apparatus which concerns on this invention, and washing liquid pressure distribution 本発明に係る洗浄ノズル装置の絞りの他の実施形態を示す図The figure which shows other embodiment of the aperture_diaphragm | restriction of the washing nozzle apparatus which concerns on this invention. 本発明に係る洗浄ノズル装置の他の実施形態を示す図The figure which shows other embodiment of the washing nozzle apparatus which concerns on this invention 本発明に係る洗浄ノズル装置の他の実施形態を示す図The figure which shows other embodiment of the washing nozzle apparatus which concerns on this invention

符号の説明Explanation of symbols

12…フィルム、36…洗浄ノズル装置、38…乾燥部、40…フィルムの塗布装置、42…巻出部、48…巻取部、50…全体カバー、52…洗浄液吐出口、52a…供給口、52b…絞り、53c…吹出口、53…平部材、54…隙間、56…洗浄液回収口、D…平部材とフィルムとの隙間の幅   DESCRIPTION OF SYMBOLS 12 ... Film, 36 ... Cleaning nozzle apparatus, 38 ... Drying part, 40 ... Film coating apparatus, 42 ... Unwinding part, 48 ... Winding part, 50 ... Whole cover, 52 ... Cleaning liquid discharge port, 52a ... Supply port, 52b ... throttle, 53c ... outlet, 53 ... flat member, 54 ... gap, 56 ... cleaning liquid recovery port, D ... width of gap between flat member and film

Claims (6)

1又は2枚の平部材と、
前記平部材に形成され、平部材に平行に走行するフィルムの表裏面の少なくとも一方の面側に対して洗浄液を吹き付ける洗浄液吐出口と、を備えることを特徴とするフィルムの洗浄ノズル装置。
One or two flat members;
A cleaning nozzle device for a film, comprising: a cleaning liquid discharge port that sprays a cleaning liquid on at least one of the front and back surfaces of the film that is formed on the flat member and runs parallel to the flat member.
前記平部材が2枚のときには、
前記洗浄液吐出口を、前記フィルムの表裏に対向させて一対以上設けることを特徴とする請求項1に記載のフィルムの洗浄ノズル装置。
When there are two flat members,
The film cleaning nozzle device according to claim 1, wherein a pair of the cleaning liquid discharge ports are provided to face the front and back of the film.
前記平部材には、前記フィルムに吹き付けた洗浄液を回収する洗浄液回収口を備えることを特徴とする請求項1又は2に記載のフィルムの洗浄ノズル装置。   3. The film cleaning nozzle device according to claim 1, wherein the flat member includes a cleaning liquid recovery port that recovers the cleaning liquid sprayed on the film. 前記平部材が2枚のときには、
前記洗浄液回収口は、前記フィルムの表裏に対向させて一対以上設けることを特徴とする請求項3に記載のフィルムの洗浄ノズル装置。
When there are two flat members,
The film cleaning nozzle device according to claim 3, wherein a pair of the cleaning liquid recovery ports are provided to face the front and back of the film.
前記平部材と前記フィルムとの隙間は、0.25mm以下であることを特徴とする請求項1〜4の何れか1に記載のフィルムの洗浄ノズル装置。   The film cleaning nozzle device according to any one of claims 1 to 4, wherein a gap between the flat member and the film is 0.25 mm or less. 前記フィルムの洗浄ノズル装置には、
洗浄液をフィルムに吹き付ける圧力を減圧する減圧機構が設けられていることを特徴とする請求項1〜5の何れか1に記載のフィルムの洗浄ノズル装置。
In the film cleaning nozzle device,
6. The film cleaning nozzle device according to claim 1, further comprising a pressure reducing mechanism for reducing a pressure of spraying the cleaning liquid onto the film.
JP2008268566A 2008-10-17 2008-10-17 Nozzle apparatus for washing film Pending JP2010094618A (en)

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CN2009102051774A CN101722156B (en) 2008-10-17 2009-10-16 Cleaning nozzle device of film

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114632749A (en) * 2022-03-06 2022-06-17 新谱(广州)电子有限公司 Diaphragm assembling method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07313948A (en) * 1994-05-20 1995-12-05 Namitei Kk Apparatus for treating surface of belt-shaped material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2289618Y (en) * 1996-05-20 1998-09-02 杜中良 Terylene film washing unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07313948A (en) * 1994-05-20 1995-12-05 Namitei Kk Apparatus for treating surface of belt-shaped material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114632749A (en) * 2022-03-06 2022-06-17 新谱(广州)电子有限公司 Diaphragm assembling method
CN114632749B (en) * 2022-03-06 2023-09-22 新谱(广州)电子有限公司 Diaphragm assembling method

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