JP2008253864A - Dust removing method of feed material and dust removing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable high yield manufacture by suppressing the flaw caused by the adhesion of foreign matter to a planar feed material in a dust removing method of the planar feed material continuously fed through a plurality of clean rooms arranged in series so as to be adjacent to each other through a boundary part having a feed material passing opening part formed thereto, and a dust removing apparatus of the planar feed material. <P>SOLUTION: In the dust removing method of the planar feed material 15 continuously fed through a plurality of the clean rooms 1 and 2 arranged in series so as to be adjacent to each other through the boundary part having the feed material passing opening part 40, air is blown against the other surface of the feed material 15 by the pressure air jet device 48 arranged in opposed relation to a roller 50 while the roller 50 supporting either one of the surface or back of the feed material 15 at the position of the feed material passing opening port 40 to remove the foreign matter adhered to the feed material 15 by wind pressure. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a dust removal method and apparatus for a transported object, and in particular, dust removal of a transported object when a planar transported object is continuously transported between two or more adjacent clean rooms via a transported object passage opening. The present invention relates to a method and an apparatus.

  In recent years, when manufacturing products such as semiconductors and liquid crystal displays in the electronics industry, pharmaceutical packaging containers in the pharmaceutical field, filling containers in the food field, etc., it is formed while transporting planar objects such as films and thin-plate substrates.・ There are many steps to process. In this forming / processing step, it is provided in a clean room in order to ensure product quality and prevent foreign matter from entering. In each process, the clean room is partitioned, and an opening for transporting the transported object is provided at the partitioned boundary.

Patent Document 1 proposes that in a laminated film transfer facility and transfer method, two dust removing devices are arranged so as to sandwich a film between two clean room boundaries. Patent Document 2 proposes a method and apparatus for discharging foreign matter generated by rubbing processing outside the system without scattering outside the dust collection box, and preventing adhesion to a continuous substrate and deposition on peripheral devices. Yes. Patent Document 3 proposes dust removal of a rubbing roller (roller wrapped with a rubbing sheet) and film dust removal after the rubbing treatment in order to suppress a bright spot failure caused by the rubbing treatment in a continuous rubbing treatment apparatus. Yes.
JP 2003-71932 A JP 2005-266019 A JP-A-9-166784

  However, in Patent Document 1, there is a problem that vibration is generated in the film being conveyed due to fluctuations in conveyance tension or the like, and the film is scratched or dust is generated by rubbing the film. In addition, when manufacturing products with different widths, the air from the dust removal device is also applied to the part that exceeds the product width, causing vibrations at the edges of the film, blowing off the dust that has adhered to the room and polluting the room. Cause. And in patent document 2, there exists a problem that the micro foreign material conveyed with a film cannot be removed with the entrainment air of the film vicinity, and will be scattered out of a dust collection box. Further, in Patent Document 3, when the dust removal of the film is performed in the low cleanliness chamber, the foreign matter adheres again after the dust removal. There is a problem of sticking.

  In addition, the width of the transported object that is transported in the clean room and removed from the dust is not constant, and the width of the transported object is usually different depending on the type of the transported object and the lot. In this case, due to the difference in the width of the conveyed product, turbulence occurs in the air flow of the gas blown out for dust removal, so that very small amounts of dust such as an optical compensation film may adversely affect the optical characteristics. When precise dust removal is required, it is necessary to prevent the airflow from being disturbed even if the width of the transported object changes.

  The present invention has been made in view of such circumstances. For example, in a single wafer manufacturing process such as a substrate or an optical compensation film manufacturing process, defects due to adhesion of foreign matters to a planar transported object are suppressed. It aims at providing the dust removal method and apparatus of a conveyed product which can be manufactured with a yield.

  In order to achieve the above object, the invention according to claim 1 is a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacently in series via a boundary part in which a transporting object passage opening is formed. In this dust removal method, the one of the front and back surfaces of the transported object is supported by a roller at the position of the opening for passing the transported object, and the compressed air blowing device disposed opposite the roller is used to support the transported object. There is provided a dust removal method for a conveyed product, characterized in that a dust removing step is provided for removing foreign matter adhering to the conveyed product by wind pressure by blowing gas on the other surface.

  The turbulence of the air flow due to the change of the width of the conveyed product is caused by the absence of the conveyed product when the width of the conveyed product becomes smaller than the width of the gas blown from the pressurized air blowing device (the width corresponding to the width direction of the conveyed product). It is likely to occur due to an increase in the ratio of gas blown to the part.

  Therefore, in the present invention, since the roller is provided so as to face the pressurized air jetting device, the gas blown from the pressurized air jetting device is received by the roller even if the width of the transported material transferred by the roller changes. Since it can stop, it is difficult for air turbulence to occur.

  According to claim 1 of the present invention, in the dust removal method for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacently in series via a boundary part where a transported object passage opening is formed, At the opening for passing the transported object, the transported object is sandwiched between the pressurized air jetting device and the roller, and the foreign matter on the upper surface of the transported material generated and adhered in the upstream clean room process by the wind pressure of the pressurized air jetting device By removing, the roller provided on the other surface of the conveyed product can support the back surface of the conveyed product, so that the occurrence of vibration at the end of the conveyed product can be suppressed. In addition, the rollers provided on the back surface of the conveyed product can prevent foreign matter after dust removal due to the wind pressure of the pressurized air jetting device from flowing around and reattaching to the back surface of the conveyed product.

  Therefore, it is possible to provide a transport method that can be manufactured with a high yield while suppressing defects due to the adhesion of foreign matters to a planar transport object in a single wafer manufacturing process such as a substrate or an optical compensation film manufacturing process. .

  A second aspect of the present invention is characterized in that in the first aspect, a suction device is added to the pressurized air jetting device.

  According to the second aspect, since the suction device is added to the pressurized air ejection device, the foreign matter removed from the conveyed product by the wind pressure of the pressurized air ejection device is sucked by the suction device. Can be prevented.

  A third aspect is characterized in that, in the first or second aspect, the roller is a roller having an adhesive layer on a surface thereof.

  According to the third aspect, the foreign matter adhering to the back surface of the conveyed product can be removed by the roller, which is more preferable.

  A fourth aspect of the present invention is characterized in that, in any one of the first to third aspects, the cleanliness of the plurality of adjacently arranged clean rooms is equal to or higher than that of the upstream side in the transport direction compared to the upstream side.

  According to the fourth aspect of the present invention, the plurality of clean rooms arranged adjacent to each other suppresses defects due to the adhesion of foreign matters to a planar transported object so that the downstream side in the transport direction has the same or higher cleanliness than the upstream side. Is preferable.

  A fifth aspect of the present invention is characterized in that in any one of the first to fourth aspects, an ultrasonic generator is added to the pressurized air jetting device.

  According to the fifth aspect of the present invention, since the ultrasonic generator is added to the pressurized air jetting device, the compressed air that is ultrasonically vibrated can be sprayed on the transported object, so that the minute foreign matters are effectively removed. be able to.

  A sixth aspect of the present invention is characterized in that, in any one of the first to fifth aspects, the pressurized air of the pressurized air ejection device uses air that has passed through a foreign matter removal filter.

  According to the sixth aspect, since the air that has passed through the foreign matter removal filter is used for the pressurized air of the pressurized air ejection device, it is possible to further effectively remove minute foreign matters.

  A seventh aspect of the present invention is characterized in that, in any one of the first to sixth aspects, the conveyed product is an elongated conveyed product. An eighth aspect of the present invention is characterized in that, in any one of the first to sixth aspects, the conveyed item is a single-wafer type conveyed item.

  In order to achieve the above object, the invention according to claim 9 is a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacent to each other in series via a boundary part in which a transporting object passage opening is formed. In the dust removing apparatus, a roller that is provided at a position of the opening for passing the conveyed product, and supports one surface of the front and back surfaces of the conveyed product, and is opposed to the roller via the conveyed product, and the conveying surface And a pressurized air jetting device for jetting gas on the upper surface of the transporting object.

  The invention of claim 9 comprises the method invention of claim 1 as an apparatus invention.

  A tenth aspect of the present invention is the method according to the ninth aspect, wherein the width of the conveyed product is L1, the length of the blowout port of the pressurized air blowing device in the conveyed product width direction is L2, and the length of the roller is L3. , L1 <L2 ≦ L3.

  According to the invention of claim 10, when the width of the conveyed product is L1, the length of the outlet of the pressurized air blowing device in the conveyed product width direction is L2, and the length of the roller is L3, L1 <L2 It is particularly effective when the relationship is ≦ L3.

  According to the present invention, in a dust removal method and apparatus for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacently in series via a boundary part where an opening for transporting objects is formed, It is possible to provide a dust removal method and apparatus for a conveyed product that can be manufactured at a high yield while suppressing defects due to foreign matter adhering to the conveyed product.

  Hereinafter, preferred embodiments of the dust removal method and apparatus of the present invention will be described in detail with reference to the accompanying drawings. In addition, although the case of an optical compensation film manufacturing process is demonstrated here, it is applicable not only to an optical compensation film manufacturing process but to any manufacturing process as long as a conveyed product is planar.

  FIG. 1 is an example of a production apparatus for producing an optical compensation film using a film having an alignment film forming resin layer. As shown in FIG. 1, the process from creating an optical compensation sheet to winding it may be performed continuously and in an integrated production. A transparent resin film 14 having an alignment film forming resin layer is fed from a film roll 12 having an alignment film forming resin layer by a feeder 16, and applied to a rubbing roller 18, a guide roller 20 fixed to a roller stage, and a rubbing roller. A rubbing process is performed by a rubbing apparatus including the dust remover 22 provided, and the surface of the formed alignment film is removed by a surface dust remover 22 provided adjacent to the rubbing apparatus. The transparent resin film 14 on which the alignment film is formed is conveyed by a driving roller, a coating liquid containing a liquid crystalline discotic compound is applied onto the alignment film by a coating machine 24, and then the solvent is evaporated and then heated. In the zone 26, the coating layer is heated to a disconematic phase forming temperature (here, the residual solvent of the coating layer is also evaporated) to form a disconematic liquid crystal layer.

  The liquid crystal layer is then irradiated with ultraviolet rays from an ultraviolet (UV) lamp 28, and the liquid crystal layer is crosslinked. In order to crosslink, it is necessary to use a liquid crystalline discotic compound having a crosslinkable functional group as the liquid crystalline discotic compound. When a liquid crystal discotic compound having no crosslinkable functional group is used, this ultraviolet irradiation step is omitted and the liquid crystal is immediately cooled. In this case, the cooling needs to be performed rapidly so that the disconematic phase does not change during cooling. The transparent resin film on which the alignment film and the liquid crystal layer are formed is inspected for an abnormality by measuring the optical characteristics of the transparent resin film surface by the inspection device 30. Next, the protective film 32 is laminated on the surface of the liquid crystal layer by a laminating machine 34 and wound up by a winding device 36.

  Here, the optical compensation film manufacturing process mainly includes 1) transparent resin film 14 sending process A, 2) rubbing treatment on the surface of the resin layer on the transparent resin film on which the alignment layer forming resin layer is formed. And a rubbing step B for forming an alignment film on the transparent resin film, 3) a liquid crystal discotic compound coating step C for applying a coating liquid containing the liquid crystalline discotic compound on the alignment film, 4) the coating Drying step D in which the layer is dried to evaporate the solvent in the coating layer, 5) The liquid crystal layer is solidified (that is, when a liquid crystalline discotic compound having a crosslinkable functional group is used, the liquid crystal layer is irradiated with light. The process E, 6) and the winding process F for winding up the transparent resin film on which the alignment film and the liquid crystal layer are formed are shown in FIG. So that It is provided to Re partitioned in a clean room each. Each clean room is provided with an opening 40 for passing a conveyed product between two clean rooms in contact with each other.

  The present invention relates to a dust removal method for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacent to each other in series via a boundary part in which a transported object passing opening is formed. While supporting one side of the front and back surfaces of the transported object at the position of the roller with a roller, gas is blown onto the other surface of the transported object by a pressurized air jetting device disposed opposite to the roller. A dust removal step is provided to remove the adhered foreign matter by wind pressure.

  Hereinafter, the clean room b in the rubbing process B and the clean room c in the coating process C will be described.

  Usually, the pressurized air ejection device for removing foreign substances is provided on the upstream side of the applicator 24 in the clean room c.

  The transparent resin film 14 is guided by guide rollers 42 and 44 and travels. In the present invention, as shown in FIG. 2, a pressurized air jetting device 48 that removes the foreign matter 46 adhering to the transparent resin film 14 by wind pressure is provided in the conveyed product passage opening 40. A roller 50 is provided so as to face the pressurized air blowing device 48 through the transparent resin film 14. It is preferable that a suction device is added to the pressurized air ejection device 48. As shown in FIG. 3, the pressurized air ejection device 48 has one ejection port 48a and one suction port 48b (A), one ejection port 48a and two suction ports 48b (B). (C) with two jet ports 48a and one suction port 48b can be considered.

  In a dust removal method for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacently in series via a boundary part where a transported object passing opening is formed, the transported object passing opening 40 is transparent. The resin film 14 is sandwiched between the pressurized air ejection device 48 and the roller 50, and the foreign matter 46 on one side of the transparent resin film 14 generated and adhered in the process of the upstream clean room b due to the wind pressure of the pressurized air ejection device 48. By removing, the roller 50 provided on the other surface of the transparent resin film 14 can support the transparent resin film 14, so that the occurrence of vibration at the end of the transparent resin film 14 can be suppressed. Further, the roller provided on the other surface of the transparent resin film 14 prevents foreign matter after dust removal due to the wind pressure of the pressurized air blowing device 48 from flowing around and reattaching to the other surface of the transparent resin film 14. be able to. Further, by adding the suction device to the pressurized air ejection device 48, it is possible to prevent the clean rooms b and c from being contaminated by the foreign matter removed from the transparent resin film 14 by the wind pressure of the pressurized air ejection device 48. In addition, it is preferable to provide the roller 50 which supports one surface among the front and back of a conveyed product on the upper surface of the transparent resin film 14, as shown in FIG.

  Therefore, in the optical compensation film manufacturing process, it is possible to manufacture at a high yield while suppressing defects due to foreign matter adhering to a planar transported object.

  Note that the higher the pressure, the higher the foreign matter removing ability, but if the pressure is higher than 10 KPa, the transported object may vibrate and come into contact with the pressurized air ejection device 48. It becomes expensive and it is necessary to provide a suction device. The wind pressure of the pressurized air ejection device 48 is preferably used in the range of 8 KPa to 40 KPa.

  Note that the wrap angle between the roller 50 facing the pressurized air ejection device 48 and the transparent resin film 14 is usually 38 degrees or more, preferably 43 to 180 degrees.

  The transparent resin film 14 to be used is generally polyethylene terephthalate (PET) having a width of 300 to 2000 mm, a length of 45 to 10,000 m, and a thickness of 2 to 200 μm, polyethylene-2,6-naphthalate, cellulose diacetate, Cellulose triacetate, cellulose acetate propionate, polyvinyl chloride, polyvinylidene chloride, polycarbonate, polyimide, polyamide and other plastic films, paper, polyethylene, polypropylene, ethylene butene copolymer and other α-polyolefins having 2 to 10 carbon atoms Examples include a flexible strip made of paper or the like coated or laminated with a belt or a strip having a processed layer formed on the surface of the strip as a base material.

As a coating amount of the coating liquid to the transparent resin film 14, a range of ^{2 to} 15 mL / m ² can be preferably employed. Moreover, as an application | coating width | variety of the coating liquid to the transparent resin film 14, the range of 500-2000 mm can be employ | adopted preferably.

Moreover, as a viscosity of a coating liquid, the range of 0.8-10cp (0.8-10 * 10 < ^-3 > Pa * s) can be employ | adopted preferably.

  As mentioned above, although the conveyance method of the present invention was explained about the case of the manufacturing process of the optical compensation film which is a long conveyance object, the conveyance object is not limited to the optical compensation film manufacturing process which is a long conveyance object. It is applicable also to the manufacturing process of a single-wafer type conveyed product.

  FIG. 4 shows a sheet-fed type through a boundary portion in which an opening for passing a conveyed product is formed between two clean rooms in contact with each other in a process of forming and processing a planar conveyed product such as a thin plate-like substrate. It is the figure which showed a mode that the conveyed product 15 was conveyed continuously.

  The planar conveyed product 15 is guided by guide rollers 42, 43, 44 and travels. As shown in FIG. 4A, a pressurized air jetting device 48 for removing the foreign matter 46 adhering to the single-wafer type transported object 15 by wind pressure is provided in the transported object passage opening 40. A roller 50 is provided so as to face the pressurized air jetting device 48 through the single-wafer transported object 15.

  As described above, in the dust removal method for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacently in series via a boundary part where a transported object passing opening is formed, the transported object passing opening is provided. 40, a single-wafer type transported article 15 is sandwiched between the pressurized air jetting device 48 and the roller 50, and the single-wafer type is generated and adhered in the process in the upstream clean room 1 by the wind pressure of the pressurized air jetting device 48. By removing the foreign matter 46 on one side of the conveyed product 15, the roller 50 provided on the other surface of the single-wafer-type conveyed product 15 can support the single-wafer-type conveyed product 15. Generation of vibration at the end can be suppressed. In addition, foreign matter after dust removal due to the wind pressure of the pressurized air jetting device 48 wraps around the other surface of the single-wafer type transported object 15 by a roller provided on the other surface of the transparent single-wafer type transported object 15. Adhesion can also be prevented.

  Therefore, not only in the manufacturing process of long transported objects such as optical compensation films, but also in the manufacturing process of single-wafer transported objects such as substrates, it is possible to suppress defects due to foreign matter adhering to flat transported objects. It can be manufactured with high yield.

  In addition, if the distance H between the pressurized air ejection device 48 and the conveyed product 15 is reduced, the foreign matter removing ability is increased. Becomes higher. On the other hand, if the distance H between the pressurized air ejection device 48 and the conveyed product 15 is increased, the foreign matter removing ability is reduced, and all adhered foreign matter on the conveyed product cannot be removed. Accordingly, FIG. 4B is an enlarged view of the dotted line portion 40a in FIG. 4A, but there is an appropriate range for the distance H between the pressurized air ejection device 48 and the conveyed product 15. According to the experiment by the applicant of the present application, it is preferable that the pressurized air ejection device 48 is normally installed on the conveyed product 15 with 1 mm to 3 mm, preferably 1 mm to 2 mm. Further, in order to perform the manufacturing without changing the pressurized air ejection and the suction width even if the width of the conveyed product is changed, the distance H ′ between the pressurized air ejection device 48 and the roller 50 is set to the distance H. Install within the same range. Here, when the diameter of the roller 50 is reduced, it is difficult to adjust the clearance with the conveyed product 15. In a normal case, the diameter is 100 mm or more. However, according to the experiment by the applicant of the present application, a diameter of 150 mm to 300 mm is preferable.

  And it is preferable that the roller 50 is a roller which has the adhesion layer for the purpose of removing a foreign material on the surface. This is because the foreign matter adhering to the back surface of the pressurized air jetting device 48 of the conveyed product 15 can be removed by the roller. When using a roller having an adhesive layer for the purpose of removing foreign matter, the ability to remove foreign matter decreases if the adhesive strength is small. On the other hand, when the adhesive force is large, the conveyance speed fluctuates, and the conveyed product is charged, causing another failure in the subsequent process and increasing the possibility of dust adhesion. Accordingly, there is an appropriate range for the adhesive strength, and according to the experiment by the present applicant, it is usually 40 to 135 hPa, preferably 45 to 100 hPa.

  Moreover, it is preferable that the cleanliness of the plurality of clean rooms arranged adjacent to each other on the downstream side in the transport direction is equal to or higher than that on the upstream side. The multiple clean rooms arranged adjacent to each other have higher cleanliness on the downstream side in the transport direction than the upstream side, or the same cleanliness can suppress defects due to foreign matter adhering to a planar transported object. This is because it is preferable. In addition, when the suction device is not added to the pressurized air ejection device as shown in FIG. 3, the pressurized air ejection device 48 is pressurized so that the air of the pressurized air ejection device 48 goes upstream in the conveying direction as shown in FIG. The wind blowing device 48 is tilted downstream.

  Furthermore, it is preferable that an ultrasonic generator is added to the pressurized air ejection device 48. Since the ultrasonic generator is added to the pressurized air blowing device, compressed air that is ultrasonically vibrated can be sprayed onto the conveyed product, so that minute foreign matters can be effectively removed. And it is preferable to use the air which passed the foreign material removal filter for the pressurized air of the pressurized air ejection apparatus 48. FIG. Since the air that has passed through the foreign matter removal filter is used as the pressurized air of the pressurized air jetting device, it is possible to effectively remove fine foreign matters.

  Furthermore, as shown in FIG. 6, when the width of the conveyed product is L1, the length of the outlet of the pressurized air blowing device in the conveyed product width direction is L2, and the length of the roller is L3, L1 <L2 ≦ It is preferable that the relationship is L3. The relationship of L1 <L2 ≦ L3 can effectively suppress the occurrence of vibration at the end of the conveyed product, and foreign matter after dust removal due to the wind pressure of the pressurized air jetting device wraps around the back of the conveyed product and reattaches. Can also be prevented.

Next, an Example is described using the optical compensation film manufacturing apparatus 10 shown in FIG.
(Preparation of coating solution for optical compensation film)
Ethylene oxide-modified trimethylolpropane triacrylate (V # 360, Osaka Organic Science Co., Ltd.) with respect to a mixture of the discotic compound TE-8 shown below at a weight ratio of R (1) and R (2) of 4: 1. 10% by weight, cellulose acetate petitate (CAB531-1, Eastman Chemical Co., Ltd.) 0.6% by weight, photopolymerization initiator (Irgacure 907, manufactured by Ciba Geigy Japan, Inc.) 3% by weight Sensitizer (Kayacure DET-X, manufactured by Nippon Kayaku Co., Ltd.) was added at 1% by weight, and finally a 32% by weight methyl ethyl ketone solution of the mixture was obtained. To the liquid containing the liquid crystal compound, 0.3% by weight of a fluorine-based interfacial binder (fluoroaliphatic group-containing copolymer, Megafac F780, manufactured by Dainippon Ink Co., Ltd.) was further added. did.

(Application conditions)
・ Scraping bar device: A wire bar in which a 0.07 mm wire is tightly wound around a cylindrical core material having a diameter of 8 mm. Application speed: 20 m / min Application tension: 200 N / m
[Comparative Example 1]
As shown in Patent Document 1 (Japanese Patent Application Laid-Open No. 2003-71932), a pressurized air ejection device 48 is provided in the conveyed product passage opening 40 in FIG. A suction device was added to the pressurized air ejection device 48. The pressurized air blowing device 48 was provided at a distance H of 2 mm with respect to the conveyed product.

[Comparative Example 2]
As disclosed in Patent Document 2 (Japanese Patent Application Laid-Open No. 2005-266019), a suction device is provided in the conveyed product passage opening 40 in FIG. The suction device was provided at a distance H of 2 mm with respect to the conveyed product.

[Comparative Example 3]
Nothing was provided in the opening 40 for passing a conveyed product in FIG.

[Example 1]
A pressurized air blowing device 48 is provided in the conveyed product passage opening 40 of FIG. The pressurized air jet device 48 was provided at a distance H of 2 mm with respect to the conveyed product. And the roller 50 was provided through the conveyed product facing the pressurized air ejection apparatus 48. FIG. The diameter of the roller was 150 mm.

[Example 2]
A pressurized air blowing device 48 is provided in the conveyed product passage opening 40 of FIG. Further, a suction device was added to the pressurized air ejection device 48. The pressurized air jet device 48 was provided at a distance H of 2 mm with respect to the conveyed product. And the roller 50 was provided through the conveyed product facing the pressurized air ejection apparatus 48. FIG. The diameter of the roller was 150 mm.

Example 3
A pressurized air blowing device 48 is provided in the conveyed product passage opening 40 of FIG. The pressurized air jet device 48 was provided at a distance H of 2 mm with respect to the conveyed product. And the roller 50 which has an adhesion layer on the surface through the conveyed product was provided facing the pressurized air ejection apparatus 48. The diameter of the roller was 150 mm.

Example 4
A pressurized air blowing device 48 is provided in the conveyed product passage opening 40 of FIG. Further, a suction device was added to the pressurized air ejection device 48. The pressurized air jet device 48 was provided at a distance H of 2 mm with respect to the conveyed product. And the roller 50 which has an adhesion layer on the surface through the conveyed product was provided facing the pressurized air ejection apparatus 48. The diameter of the roller was 150 mm.

(Evaluation)
Table 1 shows a comparison result of the number of foreign matters removed after application / inspection of the long conveyed product 2000 m. Regarding the vibration, 50% or less of the vibration passing through the normal conveyance object passing opening 40 was evaluated as ○, 50 to 100% as Δ, and 100% or more as ×. In addition, regarding the foreign matter adhesion evaluation, failure due to foreign matter adhesion after coating is checked with an inspection machine, 30% or less of the number of normal foreign matter failures is XX, 30-50% is XX, 50-70% is ◯, 70 ˜100% was evaluated as Δ, and 100% or more was evaluated as ×.

(Test results)
As can be seen from the results in Table 1, in the step of continuously transporting between the two clean rooms that are in contact via the transported object passage opening, the upper surface of the transported object is pressurized air jetting device at the transported object passage opening. Examples 1-4 in which the foreign matter adhered to the upper surface of the conveyed product by the wind pressure of the airflow is removed and the rollers are provided through the conveyed product so as to face the pressurized air blowing device are compared with Comparative Examples 1 to 3 which are not so. In comparison, good results were obtained in vibration and foreign matter adhesion evaluation. From the comparison between Example 1 and Example 2, the addition of a suction device to the pressurized air jetting device gives a good result in the foreign object adhesion evaluation. Further, from the comparison between Example 2 and Example 4, it is better in the foreign matter adhesion evaluation that the roller has an adhesive layer on the surface for the purpose of removing the foreign matter.

[Examples 5 to 9]
Furthermore, the test was performed by changing the distance H and the roller diameter under the conditions of Example 1. Table 2 shows the changed conditions and the foreign matter adhesion evaluation results.

(Test results)
As can be seen from the results of Table 2, from Examples 1, 5 and 6, there is an appropriate range for the distance H between the pressurized air ejection device 48 and the conveyed product, preferably 1 mm to 2 mm. 48 may be installed on the conveyed product. Further, from Examples 1 and 7 to 9, it can be seen that the diameter of the roller 50 is preferably in the range of 150 mm to 300 mm.

Schematic showing an example of manufacturing process of optical compensation sheet Explanatory drawing explaining the opening part for the conveyance article passage based on this invention Explanatory drawing explaining the pressurized-air ejection apparatus and roller which concern on this invention Explanatory drawing explaining the opening part for a conveyed product passage in case a conveyed product is a single wafer type conveyed product Explanatory drawing explaining the pressurized-air ejection apparatus of the opening part for the conveyance article passage based on this invention The front view explaining the opening part for the conveyance article passage based on this invention

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Optical compensation film manufacturing apparatus, 12 ... Film roll, 14 ... Transparent resin film, 15 ... Conveyance thing, 16 ... Sending machine, 18 ... Rubbing roller, 20 ... Guide roller, 22 ... Dust removal machine, 24 ... Coating machine, 26 DESCRIPTION OF SYMBOLS ... Heating zone, 28 ... Ultraviolet (UV) lamp, 30 ... Inspection apparatus, 32 ... Protective film, 34 ... Laminating machine, 36 ... Winding device, 40 ... Opening part for conveyance thing, 42, 43, 44 ... Guide roller , 46 ... foreign matter, 48 ... pressurized air jetting device, 50 ... roller

Claims (10)

In a dust removal method for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacently in series via a boundary part where an opening for transporting objects is formed,
While supporting one side of the front and back surfaces of the transported object with a roller at the position of the opening for passing the transported object, gas is supplied to the other surface of the transported object by a pressurized air jetting device disposed opposite to the roller. A dust removal method for a conveyed product, characterized in that a dust removing step is provided for removing foreign matter adhered to the conveyed product by wind pressure.   The method for removing dust from a conveyed product according to claim 1, wherein a suction device is added to the pressurized air jetting device.   The method for removing dust from a conveyed product according to claim 1 or 2, wherein the roller is a roller having an adhesive layer on a surface thereof.   The method for removing dust from a conveyed product according to any one of claims 1 to 3, wherein the clean rooms arranged adjacent to each other have a cleanliness degree equal to or greater than that of the upstream side in the transport direction.   The method for removing dust from a conveyed product according to any one of claims 1 to 4, wherein an ultrasonic generator is added to the pressurized air jetting device.   The method of removing dust from a conveyed product according to any one of claims 1 to 5, wherein the pressurized air of the pressurized air ejection device uses air that has passed through a foreign matter removal filter.   The method for removing dust from a conveyed product according to any one of claims 1 to 6, wherein the conveyed product is an elongated conveyed product.   The method of removing dust from a conveyed product according to any one of claims 1 to 6, wherein the conveyed product is a single-wafer type conveyed product. In a dust removal device for a planar transported object that is continuously transported in a plurality of clean rooms arranged adjacent to each other in series through a boundary part where a transported object passage opening is formed,
A roller that is provided at a position of the transport object passage opening and supports one surface of the front and back surfaces of the transport object;
A dust removal device for a conveyed product, comprising: a pressurized air jetting device that is arranged to face the roller via the conveyed product and jets gas to the upper surface of the conveying surface.   L1 <L2 ≦ L3, where L1 is the width of the conveyed product, L2 is the length of the outlet of the pressurized air blowing device in the width direction of the conveyed product, and L3 is the length of the roller. The dust removal device for a conveyed product according to claim 9.

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