KR20080089183A - Method and device for removing dust of conveyed article - Google Patents

Abstract

An apparatus and a method for removing dust on an object to be conveyed are provided to reduce defects caused by foreign particles generated on a surface of the object, thereby realizing a high productivity. A single wafer type object(15) is continuously conveyed through a boundary portion, which is formed in an object-passing opening(40), between two cleaning rooms. The object is passed while the object is guided by guide rollers(42,43,44). A pressure wind-jetting device(48) is installed in the object-passing opening to remove foreign particles(46), which adhere to the single wafer type object, through wind pressure. A roller(50) is installed oppositely to the pressure wind-jetting device with the single wafer type object therebetween. The single wafer type object is put between the pressure wind-jetting device and the roller. Accordingly, the wind pressure of the pressure wind-jetting device removes the foreign particles on one surface of the single wafer type object while the roller supports the single wafer type object to suppress vibration generated on an end portion of the single wafer type object.

Description

Method and apparatus for dust removal of conveyed material {METHOD AND DEVICE FOR REMOVING DUST OF CONVEYED ARTICLE}

TECHNICAL FIELD The present invention relates to a method and a device for dust removal of a conveyed product, and more particularly, to a method and an apparatus for dust removal of a conveyed product when continuously conveying a planar conveyed object through an opening for passing a conveyed object between two or more adjacent clean rooms. .

Recently, in manufacturing products such as semiconductors, liquid crystal displays in the electronics industry, pharmaceutical packaging containers in the pharmaceutical field, and filling containers in the food field, planar conveyances such as films and thin substrates have been used. Many have the process of forming and processing, conveying. In this formation and processing process, it is installed in a clean room in order to ensure product quality and to prevent foreign substances from mixing. Moreover, in each process, the clean room is partitioned, respectively, and the opening part for conveying a conveyed object is formed in the partitioned boundary part.

In patent document 1, it is proposed to arrange | position two vibration damping apparatus so that a film may be clamped in two clean room boundary parts in a laminated body film transfer installation and a transfer method. Patent Document 2 proposes a method and apparatus for preventing foreign matters generated by rubbing treatment from being discharged out of the dust collecting box to the outside of the dust collecting system and preventing adhesion to a continuous substrate or deposition on peripheral devices. In patent document 3, in order to suppress the bright spot failure which arises from a rubbing process in a continuous rubbing processing apparatus, the damping of the rubbing roller (roller which wound the rubbing sheet) and the film damping after a rubbing process are proposed.

[Patent Document 1] Japanese Unexamined Patent Publication No. 2003-71932

[Patent Document 2] Japanese Unexamined Patent Publication No. 2005-266019

[Patent Document 3] Japanese Patent Application Laid-Open No. 9-166784

However, in patent document 1, there exists a problem that a vibration generate | occur | produces in the film which is a conveyed thing by a change in conveyance tension, etc., and a flaw or dust generate | occur | produce by rubbing a film. In addition, when manufacturing a product having a different width, the air of the vibration damper also comes in contact with a portion exceeding the product width, causing vibration of the film end, and blowing dust attached to the room, causing contamination of the room. And in patent document 2, there exists a problem that the micro foreign material conveyed with a film cannot be removed by accompanying air of the film vicinity, and it will scatter out of a dust collecting box. In addition, in Patent Document 3, foreign matters are reattached after dust removal when the film is damped in a low clean room, and foreign matters that have been peeled off before dust removal are reattached at the downstream side of the vibration damper when dust is removed in a high clean room.

Moreover, the width | variety of the conveyed material conveyed and damped in a clean room is not constant, and it is common that the width | variety of a conveyed object differs by the kind of a conveyed object, or a lot. In this case, due to the difference in the width of the conveyed material, the airflow of the gas blown out for dust removal occurs, and, for example, adhesion of a very small amount of dust, such as an optical compensation film, may require precise dust removal, which adversely affects optical characteristics. In this case, it is necessary not to disturb the airflow even if the width of the conveyed article is changed.

This invention is made | formed in view of such a situation, For example, in the case of a sheet type manufacturing process, such as a board | substrate, or an optical compensation film manufacturing process, the defect by foreign material adhesion to a planar conveyance object is suppressed, and it has high yield. It is an object of the present invention to provide a method and apparatus for dust removal of a conveyed product that can be manufactured.

In order to achieve the above object, the invention of claim 1 is a dust removal method of a planar conveyed object which is continuously conveyed in a plurality of clean rooms arranged in series adjacently through a boundary portion in which an opening for conveying object passing is formed. At the position, a gas is sprayed onto the other surface of the conveyed object by a pressurized air blowing device disposed opposite to the roller while supporting one side of the front and back surfaces of the conveyed object to remove foreign matters adhered to the conveyed object by wind pressure. It provides the dust removal method of the conveyed object characterized by providing the dust removal process.

The disturbance of the airflow caused by the change of the width of the conveyed object is such that when the width of the conveyed product decreases with respect to the width of the gas ejected from the pressurized air blowing device (the width corresponding to the conveyed product width direction), the rate at which the gas is ejected to the portion without the conveyed product increases. It is easy to occur because of.

Therefore, in this invention, since the roller was provided facing the pressurized air blowing device, even if the width | variety of the conveyed material conveyed by the roller changes, the gas blown out from the pressurized air blowing device can be picked up by a roller, and the airflow disturbance does not arise easily. .

According to claim 1 of the present invention, in the method for removing dust of a flat-shaped conveyed product which is continuously conveyed in a plurality of clean rooms arranged in series adjacently through a boundary portion in which an opening for passing a conveyed object is formed, the conveyed product is pressurized by the air at the opening for conveyed object passing. The roller provided on the other side of a conveyed object is made into the structure sandwiched between a blower and a roller, and removes the foreign material of the upper surface of the conveyed object which arose in the process in the upstream side by the wind pressure of a pressurized air blower, and adhered. Since the back surface of a conveyed object can be supported, generation | occurrence | production of the vibration of a conveyed object edge part can be suppressed. Moreover, the foreign material after dust removal by the wind pressure of a pressurized air blowing device can return to the back surface of a conveyed material, and can reattach with the roller provided in the back surface of a conveyed object.

Therefore, the conveyance method which can manufacture at high yield by suppressing the defect by the adhesion of the foreign material to a planar conveyance in a sheet type manufacturing process, such as a board | substrate, or an optical compensation film manufacturing process can be provided.

Claim 2 is a suction device of Claim 1 characterized by the addition of a suction device.

According to Claim 2, since the suction device is added to the pressurized air blowing device, foreign matter removed from the conveyed object by the wind pressure of the pressurized air blowing device is sucked by the suction device, and thus the inside of the clean room can be prevented from being contaminated.

Claim 3 is a roller of Claim 1 or 2 characterized by the above-mentioned roller being a roller which has an adhesion layer on the surface.

According to Claim 3, since the foreign material adhering to the back surface of a conveyed object can also be removed with a roller, it is more preferable.

Claim 4 is characterized in that cleanliness is equal or more in the downstream of the conveyance direction compared with the upstream of the several clean rooms arrange | positioned adjacently.

According to claim 4, it is preferable for the several clean rooms arrange | positioned adjacently to suppress the defect by foreign matter adhesion to a planar conveyance that the downstream side of a conveyance direction is equal or more compared with an upstream side.

Claim 5 is characterized in that an ultrasonic wave generator is added to the pressurized air blowing device.

According to claim 5, since the ultrasonic generator is added to the pressurized air blowing device, the compressed air which vibrates ultrasonically can be injected to a conveyed object, and micro foreign matter can be removed effectively.

The method according to any one of claims 1 to 5, wherein the pressurized wind of the pressurized air blowing device uses air that has passed through the foreign matter removing filter.

According to Claim 6, since the air which passed the foreign matter removal filter by the pressurized wind of the pressurized air blowing device is used, micro foreign matter can be removed more effectively.

Claim 7 is characterized in that the said conveyed object is an elongate conveyed object in any one of Claims 1-6. Furthermore, claim 8 is characterized in that the conveyed article is a single sheet conveyed article according to any one of claims 1 to 6.

In order to achieve the said objective, invention of Claim 9 is the vibration suppression apparatus of the planar conveyed object conveyed continuously in several clean rooms arranged adjacently in series through the boundary part in which the conveyance for opening of conveyed goods was formed, WHEREIN: And a roller for supporting one side of the front and back surfaces of the conveyed object, and a pressurized air blowing device disposed on the roller so as to face the upper surface of the conveying surface. Provided is a dust removal apparatus for a conveyed product.

The invention of claim 9 constitutes the device invention of the method invention of claim 1.

10. The relationship of L1 <L2 ≤ L3 when the width of the conveyed object is L1, the length of the conveyed product width direction of the jet port of the pressurized air blowing device is L2, and the length of the roller is L3 according to claim 9; It is characterized by.

According to invention of Claim 10, it is especially effective when L1 <L2 <= L3 when the width | variety of conveyed material is L1, and the length of the said conveyance width direction of the blowing port of a pressurized air blowing device is L2, and the length of a roller is L3. .

Effect of the Invention

According to the present invention, there is provided a method and apparatus for dedusting flat conveyed objects that are continuously conveyed in a plurality of clean rooms arranged adjacently in series through a boundary portion formed with openings for conveying a conveyed object. The dust removal method and apparatus which can suppress and manufacture with a high yield can be provided.

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of the dust removal method and apparatus of the conveyed goods of this invention is described in detail with attached drawing. In addition, although the case of an optical compensation film manufacturing process is demonstrated here, it is not limited to an optical compensation film manufacturing process, If it is a planar shape, it can apply to any manufacturing process.

1 is an example of the manufacturing apparatus which manufactures an optical compensation film using the film which has a resin layer for orientation film formation. As shown in FIG. 1, you may perform the process until it creates and winds up an optical compensation sheet continuously by consistent production. The transparent resin film 14 which has the resin layer for orientation film formation from the film roll 12 which has the resin layer for orientation film formation is sent out by the sending machine 16, and the guide roller fixed to the rubbing roller 18 and the roller stage The rubbing process is performed by the rubbing device which consists of the damper 22 with which the rubbing roller was equipped, and the surface of the formed orientation film is damped by the surface damper 22 provided adjacent to the rubbing device. The transparent resin film 14 in which the alignment film was formed is conveyed by a driving roller, and a coating liquid containing a liquid crystalline discotic compound was applied by the applicator 24 on the alignment film, and then the solvent was evaporated. In the heating zone 26, the coating layer is heated to a discoticmatic phase formation temperature (wherein the residual solvent of the coating layer is also evaporated) to form a discoticmatic liquid crystal layer.

The liquid crystal layer is then irradiated with ultraviolet rays by an ultraviolet (UV) lamp 28, and the liquid crystal layer is crosslinked. In order to crosslink, it is necessary to use the liquid crystalline discotic compound which has a crosslinkable functional group as a liquid crystalline discotic compound. In the case of using a liquid crystalline discotic compound having no crosslinkable functional group, this ultraviolet irradiation step is omitted and immediately cooled. In this case, it is necessary to cool rapidly so that the discomatic phase does not change during cooling. As for the transparent resin film in which the orientation film and the liquid crystal layer were formed, the optical characteristic of the surface of a transparent resin film is measured by the inspection apparatus 30, and the inspection as to whether there exists an abnormality is performed. Subsequently, the protective film 32 is laminated by the lamination group 34 on the liquid crystal layer surface, and wound up by the winding device 36.

Here, the optical compensation film manufacturing process mainly carries out the rubbing process on the surface of a resin layer on the transparent resin film in which the resin layer for oriented film formation was formed in 1) the transparent resin film 14 sending process A, 2), and is transparent. Rubbing process B which forms an oriented film on a resin film, 3) Coating process C of a liquid crystalline discotic compound which apply | coats the coating liquid containing a liquid crystalline discotic compound on an oriented film, 4) The said application layer is dried, and the said application | coating is carried out Drying step of evaporating the solvent in the layer D, 5) Process of crosslinking the liquid crystal layer by light irradiation when a liquid crystal discotic compound which solidifies the liquid crystal layer (that is, having a crosslinkable functional group) is used E, 6) Although it is comprised by the winding process F which winds up the transparent resin film in which the orientation film and the liquid crystal layer were formed, the apparatus of each process A-F is provided in the clean room partitioned, respectively, as shown in FIG. Each clean room is provided with an opening 40 for conveyance passing between two clean rooms in contact with each other.

The present invention relates to a method for dust removal of a flat-shaped conveyed product which is continuously conveyed in a plurality of clean rooms arranged in series adjacently through a boundary portion in which an opening for passing a conveyed object is formed, wherein one of front and back surfaces of the conveyed object is located at a position of the opening for passing the conveyed object. While the surface is supported by a roller, a vibration damping process is provided in which a gas is blown onto the other surface of the conveyed object by a pressurized air blowing device disposed opposite to the roller to remove foreign matter adhered to the conveyed object by wind pressure. do.

Hereinafter, the clean room (b) of rubbing process B and the clean room (c) of application | coating process C are demonstrated.

Usually, the pressurized air blowing apparatus for removing a foreign material is provided in the upstream of the applicator 24 in the clean room c.

The transparent resin film 14 is guided by the guide rollers 42 and 44 so as to run. In this invention, as shown in FIG. 2, the pressurized air blowing apparatus 48 which removes the foreign material 46 adhering to the transparent resin film 14 by wind pressure is provided in the opening 40 for conveyance object passage. The roller 50 is provided to face the pressurized air blowing device 48 via the transparent resin film 14. It is preferable that the suction device is added to the pressurized air blowing device 48. As shown in FIG. 3, the pressurized air blowing device 48 has one ejection opening 48a and one suction port 48b (A), one ejection opening 48a, and two suction ports 48b. The thing (B), two ejection openings 48a, and one suction port 48b (C), etc. are considered.

In the dust removal method of the planar conveyance object continuously conveyed in the several clean room arrange | positioned adjacently in series through the boundary part in which the opening part for conveyance object passing was formed, the transparent resin film 14 was pressurized by the opening part 40 for conveyance object passage. The transparent resin film 14 which has a structure sandwiched between the blowing device 48 and the roller 50, and was generated and attached in the process in the upstream side clean room b by the wind pressure of the pressurized air blowing device 48. By removing the foreign material 46 on one side of the roller, the roller 50 provided on the other side of the transparent resin film 14 can support the transparent resin film 14, so that the end of the transparent resin film 14 Generation of vibration can be suppressed. Moreover, the foreign material after the dust removal by the wind pressure of the pressurized air blowing device 48 returns to another surface of the transparent resin film 14, and is reattached by the roller provided in the other surface of the transparent resin film 14 further. It can also be prevented. And since the suction device is added to the pressurized air blowing device 48, the inside of clean room b, c is contaminated by the foreign material removed from the transparent resin film 14 by the wind pressure of the pressurized air blowing device 48. Can be prevented. Moreover, it is preferable to provide the roller 50 which supports one surface of the front and back of a conveyed material in the upper surface of the transparent resin film 14 like FIG.

Therefore, in the optical compensation film manufacturing process, the defect by foreign matter adhesion to a planar conveyance can be suppressed, and it can manufacture at high yield.

In addition, the higher the pressure of the pressurized air blowing device 48, the more the foreign matter removal ability is increased. However, when the pressure is higher than 10 KPa, the conveyed material is vibrated and is likely to come into contact with the pressurized air blowing device 48. It is necessary to give a suction device. It is preferable to use the wind pressure of the pressurized air blowing device 48 in 8 KPa-40KPa.

Moreover, the lap angle of the roller 50 and the transparent resin film 14 which oppose the pressurized air blowing device 48 is 38 degrees or more normally, Preferably they are 43 degrees-180 degrees.

As the transparent resin film 14 to be used, generally, polyethylene terephthalate (PET), polyethylene-2,6-naphthalate, cellulose die having a width of 300 to 2000 mm, a length of 45 to 10000 m, and a thickness of 2 to 200 μm 2 carbon atoms such as plastic films such as acetate, cellulose triacetate, cellulose acetate propionate, polyvinyl chloride, polyvinylidene chloride, polycarbonate, polyimide, polyamide, paper, polyethylene, polypropylene, and ethylene butene copolymer The strip | belt-shaped object which formed the processed layer on the surface based on the plastic strip | belt-shaped thing which consists of paper which apply | coated or laminated (-10) -polyolefins, or the strip | belt-shaped object as a base material is contained.

As a coating amount of the coating liquid to the transparent resin film 14, the range of 2-15 mL / m <2> can be employ | adopted preferably. Moreover, as a coating width of the coating liquid to the transparent resin film 14, the range of 500-2000 mm can be employ | adopted preferably.

Moreover, as a viscosity of a coating liquid, the range of 0.8-10cp (0.8-10 * 10 <^-3> Pa * s) can be employ | adopted suitably.

As mentioned above, although the conveyance method of this invention was demonstrated about the case of the manufacturing process of the optical compensation film which is an elongate conveyance article, it is not limited to the optical compensation film manufacturing process which is an elongate conveyance article, The conveyed thing is a single sheet conveyance thing, such as a board | substrate. It is also applicable to a manufacturing process.

4 is a step of conveying the sheet-form conveyed product 15 continuously through a boundary portion in which an opening for conveying a product is formed between two contacting clean rooms in a step of forming and processing a conveyed product in a planar shape such as a thin substrate. It is a figure which shows the form which becomes.

The flat conveyance 15 is guided by the guide rollers 42, 43, 44, and is made to travel. As shown to FIG. 4 (A), the pressurized air blowing device 48 which removes the foreign material 46 adhering to the sheet | seat conveyance 15 by wind pressure is provided in the opening 40 for conveyance through. The roller 50 is provided to face the pressurized air blowing device 48 with the sheet conveying material 15 therebetween.

Thus, in the dust removal method of the planar conveyance object continuously conveyed in the several clean room arrange | positioned adjacently in series through the boundary part in which the conveyance object opening part was formed, in the conveyance object opening part 40, the single-leaf conveyed object 15 is carried out. Is a structure sandwiched between the pressurized air blowing device 48 and the rollers 50, and the single sheet type conveyed object generated and attached in the process in the clean room 1 on the upstream side by the wind pressure of the pressurized air blowing device 48. By removing the foreign material 46 on one side of (15), since the roller 50 provided on the other side of the sheet type conveyed material 15 can support the sheet type conveyed material 15, the single sheet conveyed object 15 Generation of vibration at the end can be suppressed. Moreover, the foreign material after the dust removal by the wind pressure of the pressurized air blowing device 48 returns to the other surface of the sheet | leaf conveyed material 15 by the roller provided in the other surface of the sheet conveyed object 15, and is reattached. It can also be prevented.

Therefore, not only the manufacturing process of elongate conveyances, such as an optical compensation film, but also the manufacturing process of the single conveyance of a single wafer conveyance, such as a board | substrate, can suppress defects by foreign matter adhesion to a planar conveyance, and can manufacture it with a high yield.

If the distance H between the pressurized air blowing device 48 and the conveyed product 15 is small, the foreign matter removing ability increases, but when the tension of the conveyed product 15 is low, the pressurized air ejecting device 48 is caused by tension variation. It is more likely to come in contact with. On the other hand, when the distance H between the pressurized air blowing device 48 and the conveyed object 15 is made large, the foreign substance removal ability will fall and it cannot remove all the adhered foreign substances with a conveyed object. Therefore, although FIG.4 (B) is an enlarged view of the dotted line part 40a of FIG.4 (A), there exists an appropriate range in the distance H of the pressurized air blowing device 48 and the conveyed material 15. FIG. According to the experiment of the applicant of this application, it is good to provide the pressurized air blowing device 48 with respect to the conveyed material 15 normally with 1 mm-3 mm, Preferably it is 1 mm-2 mm. Moreover, even if the width | variety of a conveyed thing arises, in order to manufacture without changing a pressurized air blowout and a suction width, the distance H 'of the pressurized air blower 48 and the roller 50 is the distance H'. Installed within the same range. Here, when the diameter of the roller 50 becomes small, adjustment of clearance with the conveyed material 15 is difficult. In general, the diameter is 100 mm or more, but according to the applicant's experiment, the range of preferably 150 mm to 300 mm is preferable.

And it is preferable that the roller 50 is a roller which has the adhesion layer for the purpose of removing a foreign material on the surface. It is because the foreign material adhering to the back surface of the pressurized air blowing device 48 of the conveyed material 15 can also be removed with a roller. In the case of using a roller having a pressure-sensitive adhesive layer for the purpose of removing foreign matters, if the adhesive force is small, the foreign matter removing ability is reduced. On the other hand, when the adhesive force is large, the conveyance speed fluctuation becomes large, and the conveyed material is charged, causing other failures in subsequent steps, or increasing the possibility of dust adhesion. Therefore, there exists an appropriate range of adhesive force, According to the experiment of this applicant, it is 40-135 hPa normally, Preferably it is 45-100 hPa.

In addition, it is preferable that the downstream side of a conveyance direction has the cleanliness | equality more than the upstream side, in several adjacent clean rooms. It is because it is preferable for the downstream side of a conveyance direction to make cleanliness high or the same cleanliness compared with an upstream side, in order to suppress the defect by foreign material adhesion to a conveyance of a planar shape in the several clean rooms arrange | positioned adjacently. In addition, when a suction device is not added to the pressurized air blowing device as shown in FIG. 3, as shown in FIG. 5, the pressurized air blowing device so that the air of the pressurized air blowing device 48 goes to the upstream side in the conveying direction ( 48) Tilt downstream.

In addition, it is preferable that the ultrasonic wave generator is added to the pressurized air blowing device 48. Since the ultrasonic generator is added to the pressurized air blowing device, the compressed air which vibrates ultrasonically can be injected to a conveyed material, and micro foreign matter can be removed effectively. And it is preferable to use the air which passed the foreign material removal filter for the pressurized wind of the pressurized air blowing device 48. Since the air passing through the foreign matter removing filter is used as the pressurized air of the pressurized air blowing device, it is possible to more effectively remove the fine foreign matter.

Moreover, as shown in FIG. 6, when L1 and the length of the roller are made into L3 the length of the conveyance width direction of L1 and the blower outlet of a pressurized air blowing device, it is preferable that L1 <L2 <= L3 is preferable. . By the relationship of L1 <L2 ≤ L3, it is possible to effectively suppress the generation of vibration at the end of the conveyed article, and also to prevent the foreign matter after dust removal due to the wind pressure of the pressurized air blowing device from returning to the back of the conveyed article and reattaching it.

<Example>

Next, an Example is demonstrated using the optical compensation film manufacturing apparatus 10 shown in FIG.

(Preparation of coating liquid for optical compensation film)

Ethylene oxide modified trimetholol propane triacrylate (V # 360, Osaka Yugaku Chemical Co., Ltd.) was used for a mixture in which the weight ratio of R (1) and R (2) of the discotic compound TE-8 shown below is 4: 1. 10% by weight of the agent), 0.6% by weight of cellulose acetate butyrate (CAB531-1, manufactured by Eastman Chemical Co., Ltd.), 3% by weight of the photopolymerization initiator (Singacure 907, manufactured by Nippon Chiba Co., Ltd.), and a sensitizer. (Kayacure DET-X, manufactured by Nippon Kayaku Co., Ltd.) was added 1% by weight, and finally, 32% by weight of methyl ethyl ketone solution of the mixture was used. A fluorine-based surfactant (fluoro aliphatic group-containing copolymer, Megapack F780, manufactured by Dainippon Ink, Inc.) was further added to the liquid containing the liquid crystalline compound to obtain a coating liquid.

(Application condition)

· Bar device for scrap. Wire bar which wound wound wire of 0.07mm firmly to cylinder-shaped core material of diameter 8mm

· Application speed… 20m / min

· Application tension… 200 N / m

Comparative Example 1

As shown in patent document 1 (Unexamined-Japanese-Patent No. 2003-71932), the pressurized air blowing device 48 was provided in the opening part 40 for conveyance of the conveyed object of FIG. In addition, a suction device was added to the pressurized air blowing device 48. Moreover, the pressurized air blowing apparatus 48 was installed in the place where distance H is 2 mm with respect to a conveyed object.

Comparative Example 2

As shown in patent document 2 (Unexamined-Japanese-Patent No. 2005-266019), the suction apparatus was provided in the opening part 40 for conveyance of the conveyed object of FIG. Moreover, the suction apparatus was installed in the place where distance H is 2 mm with respect to a conveyed object.

Comparative Example 3

Nothing was provided in the opening 40 for conveyance of the conveyed object of FIG.

Example 1

The pressurized air blowing device 48 was installed in the opening 40 for conveyance of the conveyed object of FIG. Moreover, the pressurized air blowing apparatus 48 was installed in the place where distance H is 2 mm with respect to a conveyed object. And the roller 50 was installed across the conveyed object in the face of the pressurized air blowing device 48. In addition, the diameter of the roller was 150 mm.

Example 2

The pressurized air blowing device 48 was installed in the opening 40 for conveyance of the conveyed object of FIG. In addition, a suction device was added to the pressurized air blowing device 48. In addition, the pressurized air blowing apparatus 48 was installed in the place where distance H is 2 mm with respect to a conveyed object. And the roller 50 was installed across the conveyed object in the face of the pressurized air blowing device 48. Moreover, the diameter of the roller was 150 mm.

Example 3

The pressurized air blowing device 48 was installed in the opening 40 for conveyance of the conveyed object of FIG. In addition, the pressurized air blowing apparatus 48 was installed in the place where distance H is 2 mm with respect to a conveyed object. And the roller 50 which has the adhesion layer on the surface was installed across the conveyed object in the face of the pressurized air blowing device 48. Moreover, the diameter of the roller was 150 mm.

Example 4

The pressurized air blowing device 48 was installed in the opening 40 for conveyance of the conveyed object of FIG. In addition, a suction device was added to the pressurized air blowing device 48. Moreover, the pressurized air blowing apparatus 48 was installed in the place where distance H is 2 mm with respect to a conveyed object. And the roller 50 which has the adhesion layer on the surface was installed across the conveyed object in the face of the pressurized air blowing device 48. In addition, the diameter of the roller was 150 mm.

(evaluation)

Table 1 shows a comparison result of the foreign matter removal water after the 2000 m long coating object was coated and inspected. About the vibration, by visual observation, (circle), 50-100% of (triangle | delta) and 100% or more were evaluated for x as 50% or less of the vibration which passes through the normal opening 40 for conveying objects. In addition, regarding the evaluation of foreign matter adhesion, a defect caused by foreign matter adhesion after application was inspected by 30% or less of the number of normal foreign matter failures, and ○○○, 30-50%, ○○, 50 ~ 70%, ○, 70-100 (Triangle | delta) and 100% or more were evaluated by x as%.

(Test result)

As can be seen from the results in Table 1, in the step of continuously conveying through the conveying object passage opening between two contacting clean rooms, the conveyed article is carried out by the wind pressure of the pressurized air blowing device in the conveying object upper surface at the conveying object passage opening. In addition to removing the foreign matter adhering to the upper surface, and provided with a roller through the conveying object against the pressurized air blowing device, Examples 1 to 4 are good results in the evaluation of vibration and foreign matter adhesion compared to Comparative Examples 1 to 3 that are not It is. From the comparison between Example 1 and Example 2, the suction device is added to the pressurized air blowing device, which is a good result in the evaluation of foreign matter adhesion. Moreover, from the comparison of Example 2 and Example 4, it is a good result in the foreign material adhesion evaluation that the roller has the adhesion layer for the purpose of removing a foreign material on the surface.

[Examples 5-9]

Moreover, the test was performed by changing the distance H and the diameter of a roller on the conditions of Example 1. The conditions which changed and the foreign material adhesion evaluation result are shown in Table 2.

(Test result)

As can be seen from the results in Table 2, the distance H of the pressurized air blowing device 48 and the conveyed object has a suitable range from Examples 1, 5, and 6, and preferably has a pressure of 1 mm to 2 mm. It is good to provide the air blowing device 48 with respect to a conveyed object. Moreover, it turns out that the range of 150 mm-300 mm of the diameter of the roller 50 is preferable from Example 1 and 7-9.

1 is a schematic view showing an example of a manufacturing process of an optical compensation sheet.

2 is an explanatory diagram illustrating an opening for passing a conveyed object according to the present invention.

It is explanatory drawing explaining the pressurized air blowing device and roller which concern on this invention.

It is explanatory drawing explaining the opening part for conveyance through when a conveyed object is a single | leaf single conveyed object.

It is explanatory drawing explaining the pressurized air blowing device of the opening part for conveyance passing through this invention.

6 is a front view illustrating an opening for passing a conveyed object according to the present invention.

<Description of the symbols for the main parts of the drawings>

10 optical compensation film production apparatus 12 film roll

14 transparent resin film 15 conveyed material

16: discharge machine 18: rubbing roller

20: guide roller 22: vibration damper

24: applicator 26: heating zone

28 UV lamp 30 Inspection device

32: protective film 34: laminate group

36: winding device 40: opening for conveyance

42, 43, 44: guide roller 46: foreign matter

48: pressurized air blowing device 50: roller

Claims (10)

In the dust removal method of the planar-form conveyed material continuously conveyed in the several clean room arrange | positioned adjacently in series through the boundary part in which the opening for conveyance passed is formed: A gas is sprayed onto the other side of the conveyed object by a pressurized air blowing device disposed opposite the roller while supporting one side of the front and back surfaces of the conveyed object at the position of the opening for conveying the conveyed object attached to the conveyed object. The dust removal method which removes a foreign material by wind pressure is provided, The dust removal method of the conveyed material characterized by the above-mentioned. The method for dust removal of a conveyed product according to claim 1, wherein a suction device is attached to the pressurized air blowing device. The vibration damping method according to claim 1 or 2, wherein the roller is a roller having an adhesive layer on its surface. The dust removal method of the conveyed goods in any one of Claims 1-3 whose cleanliness is equal or more in the downstream of the conveyance direction compared with the upstream side in the several adjacent clean rooms arrange | positioned. The vibration suppression method according to any one of claims 1 to 4, wherein an ultrasonic wave generator is attached to the pressurized air blowing device. The method according to any one of claims 1 to 5, wherein the pressurized wind of the pressurized air blowing device uses air that has passed through the foreign matter removing filter. 7. The method for dust removal of a conveyed article according to any one of claims 1 to 6, wherein the conveyed article is an elongated conveyed article. 7. The method for dust removal of a conveyed product according to any one of claims 1 to 6, wherein the conveyed product is a single sheet conveyed product. In the vibration suppression apparatus of the planar conveyed object conveyed continuously in the several clean room arrange | positioned adjacently in series through the boundary part in which the opening for conveyance passed was formed: A roller provided at a position of the opening for passing the conveyed object to support one of the front and back surfaces of the conveyed object; And The roller is provided with the pressurized air blowing device which opposes the said conveyance through the said conveyed material, and ejects gas to the upper surface of the said conveyance surface, The damping apparatus of the conveyed material characterized by the above-mentioned. The width | variety of the said conveyed material is L1, The length of the said conveyance width direction of the blower outlet of the said pressurized air blowing device is L2, and when the length of the said roller is L3, it has a relationship of L1 <L2 <= L3. Vibration damper.

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