CN101274325A - Method for removing dust of transported substance and device - Google Patents
Method for removing dust of transported substance and device Download PDFInfo
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- CN101274325A CN101274325A CNA2008100900230A CN200810090023A CN101274325A CN 101274325 A CN101274325 A CN 101274325A CN A2008100900230 A CNA2008100900230 A CN A2008100900230A CN 200810090023 A CN200810090023 A CN 200810090023A CN 101274325 A CN101274325 A CN 101274325A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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Abstract
The invention provides a dust removal method and device separated from planar conveying objects that are consecutively conveyed within a plurality of purification chambers which are formed with conveying objects and use a border part of an opening part to be serially configured in a manner of adjacent connection, the method and device are the dust removal method and device for the conveying objects manufactured in high product rate and capable of constraining pitfall caused by attachment of the foreign bodies to the planar conveying objects. In the dust removal method separated from planar conveying objects (15) that are consecutively conveyed within a plurality of purification chambers (1), (2) which are formed with conveying objects and use the border part of the opening part (40) to be serially configured in a manner of adjacent connection, the procedures are set as follows: at the position where the conveying objects pass through the opening part (40), an idler wheel (50) is used to support one of surface and back surface of the conveying objects (15), and meanwhile, a pressurization wind ejection device (48), which is configured opposite to the idler wheel (50), is used to eject gas toward another surface of the conveying objects (15), the wind pressure is applied to removing the foreign bodies attached to the conveying objects (15).
Description
Technical field
The present invention relates to a kind of dust collection method and device of transported substance, relate in particular between 2 above clean rooms of adjacency across transported substance by with the peristome dust collection method and the device of transported substance during transporting flat shape transported substance continuously.
Background technology
In recent years, when the pharmaceutical packing container in semiconductor in making the electronic industry field or LCD, the pharmaceuticals field, the goods such as filling containers in the field of food, has the operation that in plane transported substances such as handle thin films or laminal substrate, forms, processes mostly.In order to guarantee Products Quality and prevent that foreign matter from sneaking into that this formation, manufacturing procedure are arranged in the clean room.In addition, in each operation, the clean room is separated respectively, is provided for carrying the peristome of transported substance in this boundary portion that separates.
In patent documentation 1, propose, in stacked film transfer apparatus and printing transferring method, dispose 2 dust arresters for the clamping film 2 clean room's boundary portion.In patent documentation 2, proposed not allow the scattering foreign matter that produces in the polishing beyond disposal box and be discharged to outside the system, thus prevent to continuous substrate adhere to or to the method and the device of the accumulation of peripheral device.In patent documentation 3, in the continuous polishing treating apparatus,, the dedusting of polishing roller (roller of the polishing sheet material that curls) and the film dedusting after the polishing have been proposed in order to suppress the bright spot fault that polishing causes.
Patent documentation 1: the spy opens the 2003-71932 communique
Patent documentation 2: the spy opens the 2005-266019 communique
Patent documentation 3: the spy opens flat 9-166784 communique
But, in patent documentation 1,, that is, in as the film of transported substance, produce vibration owing to carrying gravitation change etc. to have this problem, adhere to flaw when making friction film or dust takes place.In addition, when making the goods of different in width, the part that exceeds the goods width is also blown to by the air of dust arrester and the vibration of film end takes place, and adhered dust flies to indoor blowing, and becomes to pollute indoor reason.So, in patent documentation 2, can not utilize near the air of following of film to remove the small foreign matter of carrying with film, and disperse to the outside of disposal box.In addition, in patent documentation 3, carry out in low cleaning degree chamber under the situation of dedusting of film, foreign matter can adhere to once more after the dedusting, and under the situation of carrying out in the high cleanliness chamber, the foreign matter that strips off before dedusting can adhere to once more in the deduster downstream.
In addition, the width of the transported substance of the dedusting of carrying in the clean room is fixing, usually since the kind of transported substance or batch change and the width difference of transported substance.In this case, the difference of the width of transported substance causes the air-flow of the gas that sprays for dedusting to get muddled, as optical compensating film, adhering to also of the dust of denier can bring harmful effect to optical characteristics, thereby must carry out under the situation of accurate dedusting, even the width of transported substance changes, it is necessary that air-flow also can not get muddled.
Summary of the invention
One of the present invention provides a kind of dust collection method of transported substance in order to realize described purpose, it is for across be formed with the dust collection method of transported substance by the plane transported substance that comes with the boundary portion of peristome in series to carry continuously in a plurality of clean rooms of configuration, wherein, be provided with following operation, promptly, pass through to use the position of peristome at described transported substance, support the one side in the table back side of described transported substance with roller, utilize simultaneously with this pair of rollers to the pressurization wind blowoff of configuration another side gas jet to described transported substance, thereby utilize blast to remove to be attached to the dedusting operation of the foreign matter of described transported substance.
The width (width of corresponding transported substance width) of the gas of wind blowoff ejection if pressurize relatively, the width of transported substance diminishes, then the ratio to the part ejection gas that does not have transported substance becomes big, thereby the width that transported substance takes place easily changes the disorder of the air-flow that causes.
Therefore, in the present invention, owing to pressurization wind blowoff subtend roller is set, even carry the width of the transported substance of this roller to change, the gas that sprays from pressurization wind blowoff is blocked by roller, so be difficult to take place the disorder of air-flow.
If utilize one of the present invention, in being formed with the dust collection method of transported substance by the plane transported substance that comes with the boundary portion of peristome in series in a plurality of clean rooms of configuration, to be carried continuously, by at transported substance by become structure with peristome with pressurization wind blowoff and roller clamping transported substance, utilize the blast of pressurization wind blowoff, remove the foreign matter above the transported substance that takes place in the operation in the clean room of upstream side and adhere to, the roller that is arranged at the another side of transported substance can support the back side of transported substance, so can suppress the generation of the vibration of transported substance end.In addition, utilize the roller that the transported substance back side is set, the foreign matter after the dedusting that the blast of the wind blowoff that also can prevent to pressurize causes adheres to once more around going into the transported substance back side.
Thereby, can be in single sheet type manufacturing process such as substrate or optical compensating film manufacturing process, can suppress the carrying method that defective that foreign matter adheres to plane transported substance is made with high yields thereby provide a kind of.
The present invention's two is in one of the present invention, and additional in described pressurization wind blowoff suction device is arranged is feature.
If utilize the present invention's two, there are suction device, the foreign matter that the blast of pressurized wind blowoff is removed from transported substance to be attracted device attraction by additional in pressurization wind blowoff, so can prevent clean room's internal contamination.
The present invention's three is in one of the present invention or two, and described roller is that the roller that has adhesive layer on the surface is a feature.
If utilize the present invention's three, the foreign matter that is attached to the transported substance back side also can be removed by roller, thereby more preferably.
The present invention's four is in any of one of the present invention～three, it is characterized in that, in a plurality of clean rooms of described adjacency configuration, the cleannes in the downstream of throughput direction are compared with upstream side, more than equal.
If utilize the present invention's four, more than the cleannes in the downstream of throughput direction and upstream side are in a ratio of on an equal basis in a plurality of clean rooms of adjacency configuration, can suppress foreign matter and adhere to the defective that causes, so preferred to plane transported substance.
The present invention's five is in any of one of the present invention～four, it is characterized in that, adding in described pressurization wind blowoff has ultrasonic generator.
According to the present invention five, by additional ultrasonic generator in pressurization wind blowoff, can spray the compressed air of ultrasonic vibration to transported substance, so can remove small foreign matter effectively.
The present invention's six is in any of one of the present invention～five, it is characterized in that, the pressurization wind of described pressurization wind blowoff uses the air of having removed filter by foreign matter.
If utilize the present invention's six, because using, the pressurization wind of pressurization wind blowoff removed the air of filter by foreign matter, so can further remove small foreign matter effectively.
The present invention's seven is in any of one of the present invention～six, it is characterized in that described transported substance is the strip transported substance.In addition, the present invention's eight is in any of one of the present invention～six, it is characterized in that described transported substance is the single sheet type transported substance.
The present invention's nine provides a kind of dust arrester of transported substance in order to realize described purpose, it is across be formed with the dust arrester of transported substance by the plane transported substance that comes with the boundary portion of peristome in series to be carried continuously in a plurality of clean rooms of configuration, wherein, have:
Roller, it is arranged at described transported substance by with the position of peristome, and supports the one side in the table back side of described transported substance; With pressurization wind blowoff, itself and described roller dispose across described transported substance subtend, and above described transported substance ejection gas.
The present invention's nine is the inventions that one of the present invention's method constituted device.
The present invention's ten be the present invention nine in, it is characterized in that, be made as L1, the length of the described transported substance width of the ejiction opening of described pressurization wind blowoff is made as L2, when the length of described roller is made as L3, satisfies the relation of L1＜L2≤L3 at width described transported substance.
If according to the present invention ten, be made as L1, the length of the described transported substance width of the ejiction opening of described pressurization wind blowoff is made as L2, the length of described roller is made as under the situation of L3 at width described transported substance, effective especially when satisfying the concerning of L1＜L2≤L3.
The present invention proposes in view of such situation, its purpose is, for example in single sheet type manufacturing process such as substrate or optical compensating film manufacturing process, can suppress foreign matter adheres to dust collection method from the transported substance that the defective that causes makes with high yields to plane transported substance and device thereby provide a kind of.
If utilize the present invention, a kind of dust collection method and device of transported substance can be provided, it is across being formed with dust collection method and the device of transported substance by the plane transported substance that comes with the boundary portion of peristome in series to carry continuously in a plurality of clean rooms of configuration, thereby it can suppress foreign matter and adheres to the defective that causes to plane transported substance with the high yields manufacturing.
Description of drawings
Fig. 1 is the schematic diagram of an example of the manufacturing process of expression optical compensating gage.
Fig. 2 is that the transported substance among explanation the present invention passes through the key diagram with peristome.
Fig. 3 be explanation among the present invention pressurization wind blowoff and the key diagram of roller.
Fig. 4 illustrates that the transported substance when transported substance is the single sheet type transported substance passes through the key diagram of usefulness peristome.
Fig. 5 is that the transported substance among explanation the present invention passes through the schematic diagram with the pressurization wind blowoff of peristome.
Fig. 6 is that the transported substance among explanation the present invention passes through the front view with peristome.
Among the figure, 10-optical compensating film manufacturing installation, 12-film roll, 14-transparent resin film; the 15-transported substance, 16-exports machine, and 18-polishes roller, 20-guide roller; the 22-dust removal machine, 24-coating machine, 26-heating region, 28-ultraviolet ray (UV) lamp; the 30-testing fixture, 32-protective film, 34-laminating machine; 36-coiler device, 40-transported substance be by using peristome, and 42,43, the 44-guide roller; the 46-foreign matter, 48-pressurization wind blowoff, 50-roller.
The specific embodiment
Below utilize accompanying drawing that the dust collection method of transported substance of the present invention and the preferred implementation of device are described in detail.In addition, at this, the situation of optical compensating film manufacturing process is illustrated, but is not limited to optical compensating film manufacturing process, as long as transported substance is that plane then any manufacturing process can be suitable for.
Fig. 1 is to use has the manufacturing installation of optical compensating film is made in alignment films formation with the film of resin bed a example.As shown in Figure 1, also the operation that makes till optical compensating gage arrives coiling can be carried out continuous productive process continuously.Form the film roll 12 of using resin bed from having alignment films, utilize 16 outputs of output machine to have alignment films and form the transparent resin film 14 of using resin bed, utilization by polishing roller 18, be fixed in the guide roller 20 of roller loading stage and be arranged on the burnishing device that constitutes of dust removal machine 22 of polishing roller, implement polishing, the surface of the alignment films of formation is arranged at surperficial dust removal machine 22 dedustings of burnishing device by adjacency.The transparent resin film 14 that is formed with alignment films is driven roller and carries, on alignment films, utilize coating machine 24 coatings to include the coating liquid of the discoid compound of liquid crystal liquid crystal property, then, make the solvent evaporation, in heating region 26, overlay is heated to former plate-like to being listed as (disconematic) phase formation temperature (at this then, the residual solvent of overlay also evaporates), form the nematic liquid crystal layer of former plate-like.
Then, described liquid crystal layer is utilized ultraviolet ray (UV) lamp 28 irradiation ultraviolet radiations, liquid crystal layer is crosslinked.In order to make it crosslinked, need to use to have the discoid compound of liquid crystal liquid crystal property of bridging property functional group as the discoid compound of liquid crystal liquid crystal property.Under the situation of using the discoid compound of liquid crystal liquid crystal property that does not have bridging property functional group, omit this ultraviolet ray irradiation process, make its cooling immediately.In this case, in cooling, change, need cool off apace in order not make former plate-like nematic phase.Utilize testing fixture 30 to measure the optical characteristics on the transparent resin film surface that is formed with alignment films and liquid crystal layer, check whether it exists unusually.Then, utilize laminating machine 34,, on coiler device 36, reel at liquid crystal layer surface laminated protective film 32.
At this, optical compensating film manufacturing process is mainly by 1) transparent resin film 14 output operation A; 2) be formed with alignment films on the surface and form, implement polishing, on transparent resin film, form the polishing process B of alignment films on the surface of resin bed with on the transparent resin film of resin bed; 3) coating includes the working procedure of coating C of the discoid compound of liquid crystal liquid crystal property of the coating liquid of the discoid compound of liquid crystal liquid crystal property on alignment films; 4) thus dry this overlay makes the drying process D of the solvent evaporation in this overlay; 5) solidify the operation E of this liquid crystal layer (that is, use under the situation of the discoid compound of liquid crystal liquid crystal property, utilize illumination to penetrate to make liquid crystal layer crosslinked) with bridging property functional group; 6) coiling is formed with the coiling operation F formation of the transparent resin film of this alignment films and liquid crystal layer, and as shown in Figure 1, the device of each operation A～F is arranged at respectively in the clean room that is spaced.Each clean room is provided with transported substance by using peristome 40 between 2 clean rooms of adjacency.
The present invention is across be formed with the dust collection method of transported substance by the plane transported substance that comes with the boundary portion of peristome in series to be carried continuously in a plurality of clean rooms of configuration, it is characterized in that, following operation is set, that is: in the position of described transported substance by the usefulness peristome, support the one side in the table back side of described transported substance with roller, and utilize simultaneously and the pressurization wind blowoff of this pair of rollers to configuration, to the another side gas jet of described transported substance, thereby utilize blast to remove to be attached to the dedusting operation of the foreign matter of described transported substance.
Below the b of clean room of polishing process B and the c of clean room of working procedure of coating C are described.
Usually, the pressurization wind blowoff that is used to remove foreign matter is arranged at the upstream side of the coating machine 24 in the c of clean room.
In being formed with the dust collection method of transported substance by the plane transported substance that comes with the boundary portion of peristome in series in a plurality of clean rooms of configuration, to be carried continuously, by at transported substance by become structure with peristome 40 with pressurization wind blowoff 48 and roller 50 clamping transparent resin films 14, utilize the blast of pressurization wind blowoff 48, remove the foreign matter 46 of transparent resin film 14 one sides that take place in the operation in the b of the clean room of upstream side and adhere to, the roller 50 that is arranged at the another side of transparent resin film 14 can support transparent resin film 14, thereby can suppress the generation of the vibration of transparent resin film 14 ends.In addition, utilize the roller be arranged at transparent resin film 14 back sides, the foreign matter after the dedusting that the blast of the wind blowoff 48 that also can prevent to pressurize causes adheres to once more around the another side of going into transparent resin film 14.Then, by additional suction device in pressurization wind blowoff 48, the blast that can prevent pressurized wind blowoff 48 is in the b of foreign substance pollution clean room, c that transparent resin film 14 is removed.In addition, as shown in Figure 2, the roller 50 of the one side in the table back side of supporting transported substance is set on transparent resin film 14 preferably.
Thereby, in optical compensating film manufacturing process, can suppress foreign matter and adhere to the defective that causes and with the high yields manufacturing to plane transported substance.
In addition, the pressure of the blast of pressurization wind blowoff 48 is high more, and then the foreign matter ability of removing increases more, but under the situation that surpasses the 10KPa use, the transported substance vibration, the possibility that contacts with pressurization wind blowoff 48 uprises, and must pay suction device.The blast of pressurization wind blowoff 48 preferably uses in the scope of 8KPa～40KPa.
In addition, be generally more than 38 degree, be preferably 43 degree～180 degree with the roller 50 of pressurization wind blowoff 48 subtends and bag (wrap) angle of transparent resin film 14.
As the transparent resin film 14 that uses, generally including its width is 300～2000mm, length is 45～10000m, thickness be 2～200 μ m by PETG (PET), gather 2, the 6-(ethylene naphthalate), cellulose diacetate, cellulose triacetate, cellulose-acetate propionate, polyvinyl chloride, Vingon, Merlon, polyimides, plastic sheetings such as polyamide, paper, apply or be laminated with polyethylene, polypropylene, the flexible ribbon thing of the formations such as paper of the α-TPO of carbon numbers such as ethylene-butylene copolymer 2～10 or be base material and then the ribbon that forms machined layer on its surface with this ribbon.
Coating amount as the coating liquid of transparent resin film 14 can preferably adopt 2～15mL/m
2Scope.In addition, as the application width of the coating liquid of transparent resin film 14, can preferably adopt the scope of 500～2000mm.
In addition, the viscosity as coating liquid can preferably adopt 0.8～10cp (0.8～10 * 10
- 3Pas) scope.
More than be that the situation of manufacturing process of the optical compensating film of strip transported substance is illustrated to carrying method of the present invention, but be not limited to the optical compensating film manufacturing process of strip transported substance, also can be suitable for transported substance is single sheet type (Mei Leaf formulas such as substrate) manufacturing process of transported substance.
Fig. 4 is in the operation that forms, processes when carrying plane transported substance such as laminal substrate, between 2 clean rooms of adjacency, across being formed with transported substance by with the boundary portion of peristome, the figure of the mode that single sheet type transported substance 15 is carried continuously.
Plane transported substance 15 is directed to roller 42,43,44 guiding and moves.Shown in Fig. 4 (A), at transported substance by the pressurization wind blowoff 48 that utilizes blast to remove to be attached to the foreign matter 46 of single sheet type transported substance 15 is set with peristome 40 places.Then, across single sheet type transported substance 15, roller 50 is set with pressurization wind blowoff 48 subtends.
Like this, in being formed with the dust collection method of transported substance by the plane transported substance that comes with the boundary portion of peristome in series in a plurality of clean rooms of configuration, to carry continuously, by at transported substance by become structure with peristome 40 with pressurization wind blowoff 48 and roller 50 clamping single sheet type transported substances 15, utilize the blast of pressurization wind blowoff 48, remove the foreign matter 46 of single sheet type transported substance 15 one sides that take place in the operation in the clean room 1 of upstream side and adhere to, the roller 50 that is arranged at the another side of single sheet type transported substance 15 can support single sheet type transported substance 15, thereby can suppress the generation of the vibration of single sheet type transported substance 15 ends.In addition, utilize the roller of the another side be arranged at single sheet type transported substance 15, the foreign matter after the dedusting that the blast of the wind blowoff 48 that also can prevent to pressurize causes adheres to once more around the another side of going into single sheet type transported substance 15
Thereby, not only in the manufacturing process of strip transported substances such as optical compensating film, and be in the manufacturing process of single sheet type transported substance of substrate etc. at transported substance, also can suppress foreign matter and adhere to the defective that causes and with the high yields manufacturing to plane transported substance.
In addition, if the distance H of reduce to pressurize wind blowoff 48 and transported substance 15, then the foreign matter ability of removing increases, but under the low situation of the tension force of transported substance 15, tension change causes that the possibility that contacts with the wind blowoff 48 that pressurizes uprises.On the other hand, if strengthen the distance H of pressurization wind blowoff 48 and transported substance 15, then the foreign matter ability of removing reduces, and can not fully remove the foreign matter that adheres to of transported substance.Fig. 4 (B) is the enlarged drawing of the dotted line part 40a of Fig. 4 (A), thereby there is suitable scope in pressurization wind blowoff 48 with the distance H of transported substance 15.According to the applicant's experiment, usually with 1mm～3mm, preferably pressurization wind blowoff 48 is set and gets final product with the relative transported substance 15 of the scope of 1mm～2mm.In addition, even also can not pressurize the wind ejection and attract the change of width for the width of transported substance changes during manufacturing, the distance H of pressurization wind blowoff 48 and roller 50 is set in the scope identical with distance H '.At this, if the diameter of roller 50 diminishes, then the gap with transported substance 15 is difficult to regulate.Usually, diameter is more than the 100mm, but according to the applicant's experiment, preferred diameter is in the scope of 150mm～300mm.
Then, roller 50 is preferably the roller that has adhesive layer in order to remove foreign matter on the surface.This is because also can remove foreign matter at the back side of the pressurization wind blowoff 48 of transported substance 15 with roller.Under the situation of using the roller with adhesive layer in order to remove foreign matter, if bonding force is little, then the foreign matter ability of removing reduces.On the other hand, if bonding force is big, then transporting velocity change becomes big, and transported substance is charged and then bring out the possibility that other faults or dirt adhere to uprise in the operation of back.Thereby there is suitable scope in bonding force, and the experiment according to the applicant is generally 40～135hPa, is preferably 45～100hPa.
In addition, in a plurality of clean rooms of configuration, the cleannes in the downstream of preferred throughput direction are compared with upstream side, more than equal.In a plurality of clean rooms of configuration, the cleannes in the downstream of throughput direction are compared with upstream side, and cleannes height or cleannes are identical, can suppress foreign matter and adhere to the defective that causes to plane transported substance, so preferred.In addition, as in pressurization wind blowoff, not adding under the situation of suction device of Fig. 3, as shown in Figure 5, do not make 48 inclinations downstream of pressurization wind blowoff oblique, so that the air of pressurization wind blowoff 48 is to the upstream side ejection of throughput direction.
And then, preferably in pressurization wind blowoff 48, add ultrasonic generator.By additional ultrasonic generator in pressurization wind blowoff, can spray the compressed air of ultrasonic vibration to transported substance, so can remove small foreign matter effectively.Then, the pressurization wind of pressurization wind blowoff 48 preferably uses the air of removing filter by foreign matter.Because using, the pressurization wind of pressurization wind blowoff removed the air of filter by foreign matter, so can further remove small foreign matter effectively.
And then, as shown in Figure 6, be made as L1, the length of the transported substance width of the ejiction opening of the wind blowoff that will pressurize is made as L2, when the length of roller is made as L3, preferably satisfy the relation of L1＜L2≤L3 at width with transported substance.By satisfying the relation of L1＜L2≤L3, can suppress the generation of the vibration of transported substance end effectively, can also prevent to utilize the blast dedusting foreign matter afterwards of pressurization wind blowoff around going into the transported substance back side and then adhering to once more.
Embodiment
Then, use optical compensating film manufacturing installation shown in Figure 1 10 explanation embodiment.
(the optical compensating film preparation of coating liquid)
The R (1) of discoid compound TE-8 shown in following relatively and the weight ratio of R (2) are 4: 1 mixture, add 10 weight % oxirane modification trimethylolpropane triacrylate (V#360, the organic science in Osaka (strain) system), 0.6 weight % cellulose acetate-butyrate (CAB531-1, イ-ス ト マ Application ケ ミ カ Le corporate system), 3 weight % Photoepolymerizationinitiater initiater (Irgacure907, Japan vapour Ba-Jia Ji (strain) system), 1 weight % sensitizer (カ ヤ キ ユ ア one DET-X, Japan's chemical drug (strain) system), finally become 32 weight % methyl ethyl ketone solution of this mixture.Include in the liquid of liquid crystal compounds to this, and then to add 0.3 weight % fluorine be surfactant (interior fluorine-containing fatty group copolymer, メ ガ Off ア Star Network F780, big Japanese イ Application キ (strain) system), as coating liquid.
(coating condition)
Scrape and take the bar ingot device ... on the columned core of diameter 8mm, the line (wire) of the 0.07mm that closely reels forms foundry pig
The coating condition ... the 20m/ branch
Coating tension force ... 200N/m
[comparative example 1]
Shown in patent documentation 1 (spy opens 2003-71932), on peristome 40, pressurization wind blowoff 48 is set at the transported substance of Fig. 1.In addition, at pressurization wind blowoff 48 additional suction devices.In addition, pressurization wind blowoff 48 relative transported substances, distance H is set to 2mm.
[comparative example 2]
Shown in patent documentation 2 (spy opens 2005-266019), on peristome 40, suction device is set at the transported substance of Fig. 1.In addition, the relative transported substance of suction device, distance H is set to 2mm.
[comparative example 3]
At the transported substance of Fig. 1 by any device not being set with peristome 40.
[embodiment 1]
At the transported substance of Fig. 1 by pressurization wind blowoff 48 is set with peristome 40.In addition, pressurization wind blowoff 48 relative transported substances, distance H is set to 2mm.Then, across transported substance, roller 50 is set with pressurization wind blowoff 48 subtends.In addition, the diameter of roller is 150mm.
[embodiment 2]
At the transported substance of Fig. 1 by pressurization wind blowoff 48 is set with peristome 40.In addition, additional suction device on pressurization wind blowoff 48.In addition, pressurization wind blowoff 48 relative transported substances, distance H is set to 2mm.Then, across transported substance, roller 50 is set with pressurization wind blowoff 48 subtends.In addition, the diameter of roller is 150mm.
[embodiment 3]
At the transported substance of Fig. 1 by pressurization wind blowoff 48 is set with peristome 40.In addition, pressurization wind blowoff 48 relative transported substances, distance H is set to 2mm.Then, across transported substance, be arranged on the roller 50 that the surface has adhesive layer with pressurization wind blowoff 48 subtends.In addition, the diameter of roller is 150mm.
[embodiment 4]
At the transported substance of Fig. 1 by pressurization wind blowoff 48 is set with peristome 40.In addition, at pressurization wind blowoff 48 additional suction devices.In addition, pressurization wind blowoff 48 relative transported substances, distance H is set to 2mm.Then, across transported substance, be arranged on the roller 50 that the surface has adhesive layer with pressurization wind blowoff 48 subtends.In addition, the diameter of roller is 150mm.
(evaluation)
It is as shown in table 1 that foreign matter after strip transported substance 2000m coating, the inspection is removed several comparative results.About vibration, utilize visual, with common pass through transported substance by with the vibration of peristome 40 be evaluated as zero below 50%, be evaluated as △ with 50～100%, be evaluated as more than 100% *.In addition, adhere to evaluation about foreign matter, utilize the foreign matter after the inspection machine inspection applies to adhere to the fault that causes, common foreign matter number of faults is evaluated as 000 below 30%, be evaluated as 00 with 30～50%, be evaluated as zero, 70～100% with 50～70% and be evaluated as △, be evaluated as more than 100% *.
[table 1]
| Pressurization wind blowoff | Suction device | Roller | Vibration | Foreign matter adheres to evaluation result | |
| Comparative example 1 | Have | Have | × | △ | |
| Comparative example 2 | Have | × | × | ||
| Comparative example 3 | △ | × | |||
| Embodiment 1 | Have | Have | ○ | ○ | |
| Embodiment 2 | Have | Have | Have | ○ | ○○ |
| |
Have | Bonding roller | ○ | ○ | |
| Embodiment 4 | Have | Have | Bonding roller | ○ | ○○○ |
(result of the test)
As can be known from the results of Table 1, in the operation of between transported substance is by 2 clean rooms that use the peristome adjacency, carrying continuously, pass through to use peristome at transported substance, utilize the blast of pressurization wind blowoff to remove the foreign matter that is attached to above the transported substance, be provided with among the embodiment 1～4 of roller across described transported substance and pressurization wind blowoff subtend simultaneously, with be not that such comparative example 1～3 is compared, adhere to the result who obtains in the evaluation in vibration and foreign matter.From the comparison of embodiment 1 and embodiment 2, as can be known,, adhere to the result who obtains in the evaluation at foreign matter by to the additional suction device of pressurization wind blowoff.In addition, from embodiment 2 and embodiment 4 more as can be known, have the mode of adhesive layer on the surface of roller in order to remove foreign matter, adhere to the result who obtains in the evaluation at foreign matter.
[embodiment 5～9]
And then the diameter of change distance H and roller is tested under the condition of embodiment 1.It is as shown in table 2 that condition that changes and foreign matter adhere to evaluation result.
[table 2]
| The distance H (mm) of pressurization wind blowoff and transported substance | Roller diameter Φ (mm) | Foreign matter adheres to evaluation result | |
| Embodiment 5 | 1 | 150 | ○○ |
| Embodiment 6 | 5 | 150 | △ |
| Embodiment 1 | 2 | 150 | ○ |
| Embodiment 7 | 2 | 100 | ○ |
| Embodiment 8 | 2 | 300 | ○○ |
| Embodiment 9 | 2 | 80 | ○ |
(result of the test)
As can be known from the results of Table 2, from embodiment 1,5 and 6 as can be known, there is suitable scope in pressurization wind blowoff 48 with the distance H of transported substance, preferably with the relative transported substance of the scope of 1mm～2mm pressurization wind blowoff 48 is set.In addition, from embodiment 1 and 7～9 as can be known, the diameter of roller 50 is preferably in the scope of 150mm～300mm.
Claims (10)
1. the dust collection method of a transported substance, it is across be formed with the dust collection method of transported substance by the plane transported substance that comes with the boundary portion of peristome in series to be carried continuously in a plurality of clean rooms of configuration, wherein,
Be provided with following operation, promptly, pass through to use the position of peristome at described transported substance, support the one side in the table back side of described transported substance with roller, utilize simultaneously with described pair of rollers to the pressurization wind blowoff of configuration another side gas jet to described transported substance, thereby utilize blast to remove to be attached to the dedusting operation of the foreign matter of described transported substance.
2. the dust collection method of transported substance according to claim 1 is characterized in that,
In described pressurization wind blowoff, add suction device is arranged.
3. the dust collection method of transported substance according to claim 1 and 2 is characterized in that,
Described roller is the roller that has adhesive layer on the surface.
4. according to the dust collection method of any described transported substance in the claim 1～3, it is characterized in that,
In a plurality of clean rooms of described adjacency configuration, the cleannes in the downstream of throughput direction are compared with upstream side, more than equal.
5. according to the dust collection method of any described transported substance in the claim 1～4, it is characterized in that,
In described pressurization wind blowoff, add ultrasonic generator is arranged.
6. according to the dust collection method of any described transported substance in the claim 1～5, it is characterized in that,
The pressurization wind of described pressurization wind blowoff uses the air of having removed filter by foreign matter.
7. according to the dust collection method of any described transported substance in the claim 1～6, it is characterized in that,
Described transported substance is the strip transported substance.
8. according to the dust collection method of any described transported substance in the claim 1～6, it is characterized in that,
Described transported substance is the single sheet type transported substance.
9. the dust arrester of a transported substance, it is across be formed with the dust arrester of transported substance by the plane transported substance that comes with the boundary portion of peristome in series to be carried continuously in a plurality of clean rooms of configuration, wherein,
Have:
Roller, it is arranged at described transported substance by with the position of peristome, and support in the table back side of described transported substance one side and
Pressurization wind blowoff, itself and described roller dispose across described transported substance subtend, and above described transported substance ejection gas.
10. the dust arrester of transported substance according to claim 9 is characterized in that,
The width of described transported substance is made as L1, the length of the described transported substance width of the ejiction opening of described pressurization wind blowoff is made as L2, the length of described roller is made as under the situation of L3, satisfy the relation of L1＜L2≤L3.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-095556 | 2007-03-30 | ||
| JP2007095556A JP2008253864A (en) | 2007-03-30 | 2007-03-30 | Dust removing method of feed material and dust removing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101274325A true CN101274325A (en) | 2008-10-01 |
Family
ID=39978013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100900230A Pending CN101274325A (en) | 2007-03-30 | 2008-03-31 | Method for removing dust of transported substance and device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008253864A (en) |
| KR (1) | KR20080089183A (en) |
| CN (1) | CN101274325A (en) |
| TW (1) | TW200902171A (en) |
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| CN104512087A (en) * | 2013-08-30 | 2015-04-15 | 日东电工株式会社 | Film laminate manufacturing method and film laminate manufacturing equipment |
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| JPH039694U (en) * | 1989-06-19 | 1991-01-30 | ||
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| JP2003071932A (en) * | 2001-09-07 | 2003-03-12 | Fuji Photo Film Co Ltd | Installation for transferring laminated film and method for transferring the same |
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- 2007-03-30 JP JP2007095556A patent/JP2008253864A/en not_active Abandoned
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- 2008-03-19 KR KR1020080025367A patent/KR20080089183A/en not_active Application Discontinuation
- 2008-03-26 TW TW097110663A patent/TW200902171A/en unknown
- 2008-03-31 CN CNA2008100900230A patent/CN101274325A/en active Pending
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Also Published As
| Publication number | Publication date |
|---|---|
| TW200902171A (en) | 2009-01-16 |
| JP2008253864A (en) | 2008-10-23 |
| KR20080089183A (en) | 2008-10-06 |
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