JP2002126670A - Method and device for cleaning lined paper - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for cleaning lined paper, by which depositions on the lined paper can be removed satisfactorily, a fiber can be prevented from being stuck to naps, or the like, even when a nonwoven fabric is used as the lined paper and costs can be reduced by drastically increasing the number of times to reuse the lined paper and which is particularly suitable for cleaning the lined paper to be used when a heaped film is formed while a belt-like substrate is conveyed continuously. SOLUTION: Depositions stuck to the lined paper are removed by suction or the lined paper is cleaned in the liquid stored in a cleaning tank.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method and an apparatus for removing extraneous matter adhering to slip paper.

[0002]

2. Description of the Related Art For example, Japanese Patent Publication No. 4-32533 discloses a roll-to-roll method for improving mass productivity using a long strip-shaped substrate.
1) A continuous plasma CVD apparatus employing the method is disclosed. According to this, a plurality of glow discharge regions are provided in the deposition film forming apparatus, and each glow discharge region is continuously and continuously penetrated in the longitudinal direction of a sufficiently long flexible band-like substrate having a desired width. It is stated that a conductive semiconductor layer can be deposited in a region to continuously produce an element having a semiconductor junction. Further, the specification discloses the use of slip sheets for protecting the surface of the strip-shaped substrate. As the material of the slip sheet, a material having a certain thickness and a hardness lower than that of the belt-like substrate, for example, when the belt-like substrate is made of metal, a resin, a chemical fiber, and the like are given. . During the fabrication of the device, the interleaf paper is inserted between the substrates while continuously transporting the belt-like substrate, thereby reducing the damage to the deposited film due to the contact between the deposited film surface of the rolled substrate and the back surface thereof. It describes prevention and the like.

Japanese Patent Application Laid-Open No. Hei 6-260421 discloses that in a roll-to-roll type continuous film forming apparatus, a dust removing means for removing a charge is installed on a moving path of a band-shaped substrate or an interleaf paper to remove the charge. A method of carrying while carrying is disclosed. In the method disclosed herein, by removing electricity from the strip-shaped substrate and the interleaf, dust existing in the atmosphere of the processing chamber is prevented from adsorbing to the substrate and the interleaf, thereby preventing the occurrence of element defects. .

As another method for removing dust and the like adhering to a substrate, as shown in JP-A-8-281178, an adhesive roll is brought into contact with a sheet-like substrate to remove dust from the roll. As shown in the method of adhering to the contact surface (surface) and Japanese Patent Application Laid-Open No. 9-274267,
A cleaning method in which cleaning is performed while feeding photographic film continuously, and a cleaning tape is pressed against the photographic film, and dust is blown off by air in the order of the opposite side of the photosensitive surface side and the photosensitive surface side in the vicinity. Has been described.

As described above, in the functional film forming apparatus employing the roll-to-roll method, when winding a substrate after film formation into a roll, a slip sheet is inserted between the substrates and a scratch due to contact is generated. Generation, destruction of the film, and scratches caused by dust when the dust is wound up together with the substrate can be prevented. In addition, by performing cleaning with an adhesive roll or a nonwoven fabric from above and below the slip sheet while transporting the substrate, it is possible to perform cleaning to some extent good.

[0006]

However, in order to further improve the cleaning of the slip sheet, increase the number of reuses of the slip sheet, and realize a low cost, the following problems to be solved are to be solved. There is. That is, the means described in JP-A-6-260421 focuses on preventing the dust existing in the atmosphere of the processing chamber from adsorbing to the substrate and the interleaving paper by eliminating the electricity of the interleaving paper and the substrate. However, there is no suggestion about cleaning or reuse of the slip sheet. The means described in Japanese Patent Application Laid-Open No. 8-281178 focuses on adsorbing dust by an adhesive sheet. Nothing is suggested for use as paper. Also, Japanese Patent Application Laid-Open No. 9-2742
No. 67 discloses that when cleaning a photographic film, a cleaning tape is pressed or air is blown to blow off dust. Nothing is disclosed about using it as a slip sheet.

Further, both sides of the interleaving paper are simply viewed from above and below.
In some cases, dust cannot be sufficiently removed only by continuous cleaning. For example, if cleaning is performed by suction from above the interleaf paper, dust may remain in the form of interleaf paper depending on the size of the dust.

[0008] The factors that cause the dust include, for example, dust in a functional film deposition chamber (hereinafter, deposition chamber) atmosphere, peeling of a film deposited inside the deposition chamber, and a by-product of the deposition process. Particles, cut portions generated by contact with a film forming chamber or the like during the transfer of the substrate, and the like are examples of dust generation sources. The size and shape of the dust here largely depend on the generation process, but the dust to be solved in the present invention generally indicates a particle having a major axis of 1 μm to 3 mm.

Further, when the interleaf paper, which is a nonwoven fabric, is cleaned with the nonwoven fabric, a sheet for removing deposits, the surface of the interleaf paper becomes fluffy and the fibers separate from the interleaf paper and adhere to the film-forming surface of a functional film such as a semiconductor. . Since the film does not adhere to the portion where the fiber adheres to the film forming surface of the functional film in the next film forming step, the appearance and the characteristics may be poor, resulting in an increase in cost. As a countermeasure, the number of reuses of the non-woven paper is limited. However, interleaf paper is expensive, and if the number of reuses is small, it causes a rise in cost. Therefore, an increase in the number of reuses is desired.

Therefore, the present invention solves the above-mentioned problems, can sufficiently remove the attached matter, and can prevent the attachment of fibers due to fluffing or the like even when a nonwoven fabric is used as the slip sheet. A method and an apparatus for cleaning an interleaf paper, which can reduce the cost by dramatically increasing the number of times the interleaf paper can be reused, particularly the interleaf paper used when forming a deposited film while continuously transporting a belt-like substrate. It is an object of the present invention to provide an interleaf sheet cleaning method and apparatus suitable for the cleaning of paper.

[0011]

SUMMARY OF THE INVENTION The present invention, in order to achieve the above object, provides a method and an apparatus for cleaning an interleaf paper which are constituted as follows (1) to (28). (1) A cleaning method for removing adhering substances adhered to interleaving paper, wherein the adhering substances adhering to the interleaving paper are removed by suction. (2) The interleaf is transported so as to include the horizontal direction, and the adhering matter is suctioned from below the interleaf conveyed in the horizontal direction, and the adhering matter adhering to both sides of the interleaf is removed. The interleaf paper cleaning method according to the above (1), characterized in that: (3) The interleaf paper is conveyed in a U-shape between a sending side and a winding side, and the conveying direction includes a horizontal direction. How to clean the slip sheet. (4) The interleaving paper is conveyed so as to include the horizontal direction, and the adhering matter is suctioned from above and below the interleaving paper conveyed in the horizontal direction, and the adhering matter adhering to both sides of the interleaving paper is removed. The interleaf paper cleaning method according to the above (1), characterized in that: (5) the interleaving paper is transported so as to include the vertical direction, and the adhering material is sucked from both sides of the vertically interleaving paper;
The method of cleaning an interleaving paper according to the above (1), wherein the adhering substances adhering to both sides of the interleaving paper are removed. (6) When sucking the attached matter attached to the interleaving paper,
The interleaf paper cleaning method according to any one of the above (1) to (5), wherein the suction is performed through an attached matter removing sheet. (7) The above (6), wherein the adhering substance removal sheet is transported in a direction opposite to a direction in which the slip sheet is transported.
The method for cleaning the slip sheet described in 1. (8) The interleaf paper cleaning method according to the above (6) or (7), wherein the attached matter removal sheet has a surface roughness of 1 μm to 1 mm. (9) The interleaf paper cleaning method according to the above (6) or (7), wherein the attached matter removing sheet is a nonwoven fabric. (10) The above-mentioned (1) to (1) to (10), further including auxiliary means for facilitating removal of the attached matter attached to the interleaf paper.
The method for cleaning a slip sheet according to any one of (9). (11) The method for cleaning a slip sheet according to the above (10), wherein the auxiliary means is means for blowing high-pressure air from a direction opposite to the suction direction across the slip sheet. (12) A cleaning method for removing an adhering substance attached to an interleaf, wherein the interleaf is washed with a liquid. (13) The interleaf cleaning method according to (12), wherein the interleaf is vibrated when the interleaf is washed with a liquid. (14) The slip sheet according to any one of the above (1) to (13), wherein the slip sheet is a slip sheet used for forming a deposited film on a continuously transported band-shaped substrate. Cleaning method. (15) A cleaning device for removing adhering matter adhering to interleaving paper, comprising a suction unit for suctioning and removing the adhering matter adhering to the interleaving paper. (16) The interleaving paper is transported so as to include the horizontal direction,
The above-mentioned (1) is characterized in that it has a suction section for sucking the adhering matter from below the interleaf paper conveyed in the horizontal direction, and the adhering matter adhering to both sides of the interleaf paper is sucked and removed by the suction section.
An interleaf paper cleaning device according to 5). (17) The interleaving paper is conveyed in a U-shape between a sending side and a winding side via a guide roller, and the conveying direction includes a horizontal direction. The slip sheet cleaning device according to (16). (18) the interleaving paper is transported so as to include the horizontal direction,
(15) The suction device according to the above (15), further comprising a suction unit that sucks the attached matter from above and below the interleaf paper conveyed in the horizontal direction, and that removes the attached matter attached to both surfaces of the interleaf paper by the suction unit. The interleaf paper cleaning device according to (1). (19) the slip sheet is transported so as to include a vertical direction,
The above-mentioned (1) is characterized in that it has a suction unit for sucking the attached matter from both sides of the vertically inserted slip sheet, and the attached part sucks and removes the attached matter attached to both sides of the slip sheet.
An interleaf paper cleaning device according to 5). (20) The above-mentioned (15) to (19), wherein an adhering substance removing sheet is provided between the slip sheet and the suction section.
The interleaf paper cleaning device according to any one of the above. (21) The interleaf paper cleaning device according to (20), wherein the adhering matter removal sheet is transported in a direction opposite to a direction in which the interleaf paper is transported. (22) The adhering substance removal sheet has a surface roughness of 1 μm.
The interleaf paper cleaning apparatus according to the above (20) or (21), wherein the distance is 1 mm to 1 mm. (23) The interleaf paper cleaning apparatus according to the above (20) or (21), wherein the extraneous matter removing sheet is a nonwoven fabric. (24) The above-mentioned (15), further comprising an auxiliary means for facilitating removal of the attached matter attached to the slip sheet.
The interleaf paper cleaning device according to any one of (23) to (23). (25) The apparatus for cleaning a slip sheet according to the above (24), wherein the auxiliary means is means for blowing high-pressure air from a direction opposite to the suction direction across the slip sheet. (26) A cleaning device for removing deposits adhering to an interleaving paper, comprising a cleaning tank for cleaning the interleaving paper, wherein the interleaving paper is washed in a liquid in the cleaning tank. Cleaning equipment. (27) The interleaf cleaning apparatus according to (26), further including a means for applying vibration to the interleaf in the cleaning tank. (28) The slip sheet according to any one of the above (15) to (27), wherein the slip sheet is a slip sheet used for forming a deposited film on a continuously transported band-shaped substrate. Cleaning device.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In an embodiment of the present invention,
By applying the above configuration, it is possible to remove dust adhering to the interleaving paper, suppress the fuzz on the interleaving paper surface even when non-woven interleaving paper is used, and dramatically increase the number of reuses of interleaving paper The characteristics and appearance due to the adhesion of the fibers to the deposited film can be prevented, and the cost can be reduced in the interleaving paper and the process using the interleaving paper.

When the present inventor cleans an interleaf used as interleaf for a functional film such as a semiconductor,
Focusing on removing dust and suppressing the fluffing of the slip paper,
This is based on the fact that as a result of intensive studies, it has been found that there is a relationship between the dust suction direction, the surface properties of the slip sheet and the attached matter removal sheet, and the like. That is, in order to achieve the above object, as a result of intensive studies, it has been found that when cleaning the slip sheet, it is extremely important to install a suction port in a range from the horizontal direction to the upward direction of the slip sheet to perform cleaning. It turned out to be effective. In addition, when a nonwoven fabric is used for the interleaving paper, if the adhering material removal sheet is conveyed in the opposite direction to the interleaving paper for cleaning, the surface of the interleaving paper becomes fluffy and causes fibers to adhere to the film forming surface. However, it is possible to further reduce the damage to the slip sheet by directly sucking the dust through the suction port described above. Further, if air is blown from the direction opposite to the suction port with the interleaving paper interposed therebetween so that the dust moves in the suction direction, the cleaning efficiency can be further improved. Here, as the material of the interleaving paper, a material having a certain thickness and having a hardness higher than that of the substrate, for example, resin, chemical fiber, glass wool, paper and the like can be mentioned.

Next, an example of an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows an apparatus for producing a functional film such as a semiconductor. In the figure, a substrate 101 is delivered to a delivery chamber 10.
2 to the take-up chamber 103 continuously,
To form a semiconductor film. At this time, dust generated from the inside of the film formation chamber (size of about 0.1 mm
(2.0 mm) may fall, and in the winding chamber 103, the substrate 101 and the interleaf paper 105 having dust on the back surface are simultaneously wound. At this time, if there is no interleaving paper 105, the dust contacts the film-forming surface of the substrate 101, causing scratches and dents, causing poor characteristics and appearance, reducing the yield, and increasing the cost. However, the slip sheet serves as a buffer between the dust and the substrate 101 to prevent scratches and dents, and the slip sheet traps dust due to the charge of the slip sheet itself and the unevenness of the surface. In the delivery chamber 102, in the previous process, the interleaf paper with the trapped dust adhered is wound up.

FIG. 2 shows an example of an interleaf paper cleaning apparatus to which trapped dust adheres. A guide roller 204 for continuously conveying the slip sheet 201 from the sending side 202 to the winding side 203 and cleaning the slip sheet 201;
The interleaving paper 201 is conveyed in a U-shape by 205, 206 and 207, and both sides of the interleaving paper 201 are sucked from below by suction ports 208 and 209 to remove dust.

In order to confirm the quantity of dust, dust within a desired range was measured using a CCD microscope, and the dust capture rate before and after cleaning was confirmed. The interleaving paper 201 from which the dust has been removed is installed again in the winding chamber of the functional film forming apparatus, and is wound together with the substrate to trap the dust.
With the above-described configuration, the number of reuses of the slip sheet can be increased, and the cost can be reduced.

[0017]

Embodiments of the present invention will be described below. [Embodiment 1] As one mode of Embodiment 1 of the present invention, using the cleaning device of FIG. 2 described above, interleaf paper 201 is suctioned using suction ports 208 and 209 using aramid paper and continuously interleaved. Cleaning was performed while transporting the paper at 20 m / min. As a result, the dust capture rate was 90%. As another embodiment of the first embodiment of the present invention, the apparatus shown in FIG. 3 was used to clean the slip sheet. This apparatus continuously feeds the slip sheet 301 from the sending side 302 to the winding side 303 and guides the slip sheet 301 to the guide rollers 304 and 30.
5, 306, and 307, a non-woven fabric 310, which is an adhering material removing sheet, is sandwiched between the slip paper and the suction ports 308, 309, and the non-woven fabric 310 is transported in the opposite direction to the slip paper 301. The ports 308 and 309 are configured to suction both sides of the slip sheet 301 from below to remove dust.

Using this cleaning device, a slip sheet 30
1 is a non-woven fabric 310, which is an adhering substance removing sheet, sandwiched between an interleaf paper and a suction port while being transported at 20 m / min using aramid paper, and 0.5 m / min.
The cleaning was performed while the interleaving paper was continuously conveyed by suctioning through the suction ports 308 and 309. As a result, the dust capture rate was 90%.

[Embodiment 2] As an embodiment of Embodiment 2 of the present invention, an apparatus shown in FIG. 4 was used to clean the slip sheet. This apparatus continuously transports the interleaving paper 401 from the sending side 402 to the winding side 403, conveys the interleaving paper 401 by guide rollers 404, 405, 406, 407, and sucks the interleaving paper 401 through the suction ports 408, 409. It is configured to suction both sides to remove dust.

Using this cleaning device, a slip sheet 40
No. 1 used an aramid paper to perform cleaning while sucking the suction paper at the suction ports 408 and 409 and continuously transporting the slip paper at 20 m / min. As a result, the dust capture rate was 83%.
was.

As another embodiment of the second embodiment of the present invention, an apparatus shown in FIG. 5 is used for cleaning the slip sheet. This apparatus continuously transports the interleaf 501 from the delivery side 502 to the take-up side 503, transports the interleaf 501 by guide rollers 504, 505, 506, and 507, and interposes the interleaf and the suction ports 508 and 509. The nonwoven fabric 510 which is an adhering substance removing sheet is sandwiched between the nonwoven fabric 510 and the nonwoven fabric 510 is conveyed in a direction opposite to the interleaving paper 501, and the interleaving paper 50 is sucked through suction ports 508 and 509.
It is configured to remove dust by sucking both sides of the first.

Using this cleaning device, a slip sheet 50
1 is a non-woven fabric 510, which is an adhering material removing sheet, sandwiched between an interleaf paper and a suction port while being transported at 20 m / min using aramid paper, and 0.5 m / min in a direction opposite to the interleaf paper 501.
The cleaning was performed while the interleaving paper was continuously conveyed by suctioning through the suction ports 508 and 509. As a result, the dust capture rate was 90%.

Embodiment 3 As an embodiment of Embodiment 3 of the present invention, an apparatus shown in FIG. 6 was used for cleaning the slip sheet. This apparatus continuously transports the slip sheet 601 from the sending side 602 to the winding side 603, transports the slip sheet 601 by guide rollers 604, 605, 606, and 607, and sucks the slip sheet 601 by suction ports 608 and 609. It is configured to suction both sides to remove dust.

Using this cleaning device, a slip sheet 60
In No. 1, cleaning was performed while suctioning the suction paper at the suction ports 608 and 609 using aramid paper and continuously transporting the slip paper at 20 m / min. As a result, the dust capture rate is 90%
was.

As another embodiment of the third embodiment of the present invention, an apparatus shown in FIG. 7 is used for cleaning the slip sheet. This apparatus continuously transports the slip sheet 701 from the sending side 702 to the winding side 703, transports the slip sheet 701 by guide rollers 704, 705, 706, and 707, and moves the slip sheet between the slip sheet and the suction ports 708 and 709. The nonwoven fabric 710 which is an adhering substance removal sheet is sandwiched between the nonwoven fabric 710 and the nonwoven fabric 710 is transported in a direction opposite to the interleaving paper 701, and the interleaving paper 70 is sucked through suction ports 708 and 709.
It is configured to remove dust by sucking both sides of the first.

Using this cleaning device, a slip sheet 70
1 is a non-woven fabric 710, which is an adhering material removal sheet, sandwiched between a slip sheet and a suction port while being transported at a rate of 20 m / min using aramid paper, and 0.5 m / min in a direction opposite to the slip sheet 701.
The cleaning was performed while the interleaving paper was continuously conveyed by suction at the suction ports 708 and 709. As a result, the dust capture rate was 90%.

Embodiment 4 As an embodiment of Embodiment 4 of the present invention, an apparatus shown in FIG. 8 was used for cleaning the slip sheet. This apparatus continuously feeds the interleaving paper 801 from the sending side 802 to the winding side 803, conveys the interleaving paper 801 in a U-shape by guide rollers 804, 805, 806, 807, and sucks the paper at the suction ports 808, 809. When suctioning both sides of the slip sheet 801, the dust is removed by blowing air from the air nozzles 811 and 812 from the side opposite to the suction port across the slip sheet.

Using this cleaning device, a slip sheet 80
Reference numeral 1 denotes an aramid paper that is used for suction at the suction ports 808 and 809, and an air nozzle 8 from the side opposite to the suction port across the slip sheet.
Cleaning was performed while air was blown from 11 and 812 so that dust was allowed to float from the aramid paper, and the interleaf was continuously conveyed at 20 m / min. As a result, the dust capture rate was 97%.

As another embodiment of the fourth embodiment of the present invention, an apparatus shown in FIG. 9 is used for cleaning the slip sheet. This device continuously feeds the interleaving paper 901 from the sending side 902 to the winding side 903, conveys the interleaving paper 901 in a U-shape by guide rollers 904, 905, 906, and 907, and inserts the interleaving paper and the suction port 908. , 909, the nonwoven fabric 910, which is an attached matter removing sheet, is sandwiched between them. The nonwoven fabric 910 is conveyed in the opposite direction to the slip sheet 901, and when the suction ports 908, 909 suction both sides of the slip sheet 901, the slip sheet is sandwiched. , Air is blown from the air nozzles 911 and 912 from the side opposite to the suction port to remove dust.

Using this cleaning device, an interleaving paper 90
1 is a non-woven fabric 910 which is an adhering substance removing sheet interposed between an interleaf paper and a suction port while being transported at a speed of 20 m / min using aramid paper, and 0.5 m / min in a direction opposite to the interleaf paper 901.
min, transported by suction ports 908 and 909,
Air nozzle 911 from the side opposite to the suction port with
Cleaning was performed while air was blown from 912 so that dust was allowed to float from the aramid paper and the interleaf was continuously conveyed. As a result, the dust capture rate was 97%.

Embodiment 5 As an embodiment of Embodiment 5 of the present invention, an apparatus shown in FIG. 10 was used for cleaning the slip sheet. This apparatus continuously feeds the slip sheet 1001 from the sending side 1002 to the winding side 1003, and transports the slip sheet 1001 to guide rollers 1004, 1005, 1006, and 100.
7 and the interleaving paper 10 at the suction ports 1008 and 1009.
In suctioning both surfaces of the sheet No. 01, dust is removed by blowing air from the air nozzles 1011 and 1012 from the side opposite to the suction port across the slip sheet. Using the cleaning device shown in FIG.
Is suctioned using the aramid paper at the suction ports 1008 and 1009, and air is blown from the air nozzles 1011 and 1012 from the side opposite to the suction port with the interleaving paper interposed therebetween so that the dust is continuously floated from the aramid paper. 20m / m paper
The cleaning was performed while being conveyed in. As a result, the dust capture rate was 94%.

As another embodiment of the fifth embodiment of the present invention, an apparatus shown in FIG. 11 is used for cleaning the slip sheet. This apparatus continuously transports the slip sheet 1101 from the sending side 1102 to the winding side 1103, and transports the slip sheet 1101 to guide rollers 1104, 1105, 1106, and 1107.
The nonwoven fabric 1110, which is an attached matter removing sheet, is sandwiched between the interleaf paper and the suction ports 1108 and 1109, and the nonwoven fabric 1110 is conveyed in the opposite direction to the interleaf paper 1101. When suctioning both sides, air is blown from the air nozzles 1111 and 1112 from the side opposite to the suction port across the slip sheet to remove dust.

Using this cleaning device, the slip sheet 11
No. 01 uses an aramid paper, inserts a nonwoven fabric 1110 as an adhering substance removing sheet between the interleaf paper and the suction port, and inserts the interleaf paper 11.
01 is conveyed at a speed of 0.5 m / min in a direction opposite to that of 01, suction is performed at the suction ports 1108 and 1109, and air is blown from the air nozzles 1111 and 1112 from the side opposite to the suction port across the interleaf paper, and dust is discharged from the aramid paper. The cleaning was performed while the interleaf paper was continuously conveyed at 20 m / min so as to float. As a result, the dust capture rate was 94%.

[Embodiment 6] As one form of Embodiment 6 of the present invention, using the cleaning device shown in FIG. 6, the interleaving paper 601 is made of aramid paper, and the interleaving paper is set at 20 m / min.
To carry out cleaning. The same interleaf is cleaned 0, 5, 10, and 15 times, and a functional film is formed by the apparatus shown in FIG. 1. The appearance defect rate due to fiber adhesion of aramid paper was confirmed.

As another embodiment of the sixth embodiment of the present invention, except that the above-described cleaning device shown in FIG. 7 is used.
In the same manner as described above, the same slip sheet is cleaned 0, 5, 10, and 15 times, the functional film is formed by the apparatus shown in FIG. 1, and the number of times the slip sheet is reused and the number of times that the slip sheet is reused are determined. The appearance defect rate due to fiber adhesion of aramid paper on the functional film was confirmed.

FIG. 13 shows the results of the appearance defect rate in both the cleaning apparatus shown in FIG. 6 without using the adhering substance removing sheet and the cleaning apparatus shown in FIG. 7 using the adhering substance removing sheet. As a result, the dust removal ability was not different between the presence and absence of the nonwoven fabric which is the impurity removal sheet,
As is clear from FIG. 13, in terms of the appearance defect ratio, the case where the cleaning is performed without the nonwoven fabric which is the impurity removing sheet is more stable at a very small level. From this, it is understood that cleaning without the nonwoven fabric as the impurity removing sheet has a great effect on durability.

Example 7 As Example 7 of the present invention, an apparatus shown in FIG. 12 was used for cleaning the slip sheet.
This apparatus continuously transports the interleaving paper 1201 from the sending side 1202 to the winding side 1203, and in the process of transporting the interleaving paper 1201 by the guide rollers 1204, the cleaning tank 1208.
The ultrasonic wave is oscillated by the ultrasonic vibrator 1209 inside, so that the interleaf paper is vibrated and washed.

Using this cleaning device, the slip sheet 12
In No. 01, ultrasonic waves of 40 kHz were oscillated by the ultrasonic vibrator 1209 in the cleaning tank 1208 using aramid paper, and the interleaf was continuously conveyed and cleaned at 20 m / min while vibrating the interleaf. After the washing, drying was performed in a drying chamber 1210 in an atmosphere of 130 ° C., and the interleaving paper was wound on the winding side 1203. As a result, the dust capture rate was 97%.

[0039]

As described above, according to the present invention, dust can be sufficiently removed from interleaving paper used for forming a deposited film while continuously transporting a belt-like substrate. Even when non-woven fabric is used as the paper, it is possible to prevent fibers from adhering to the film formation surface due to fluffing, and to dramatically reduce the number of reuses of interleaving paper, thereby enabling cost reduction. A paper cleaning method and apparatus can be realized.

[Brief description of the drawings]

FIG. 1 is a configuration diagram schematically illustrating a deposited film forming apparatus according to an embodiment of the present invention.

FIG. 2 is a configuration diagram schematically illustrating a cleaning device according to an embodiment of the present invention.

FIG. 3 is a configuration diagram schematically illustrating a cleaning device according to another embodiment of the first embodiment of the present invention.

FIG. 4 is a configuration diagram schematically illustrating a cleaning device according to an embodiment of the present invention.

FIG. 5 is a configuration diagram schematically illustrating a cleaning device according to another embodiment of the second embodiment of the present invention.

FIG. 6 is a configuration diagram schematically illustrating a cleaning device according to a third embodiment or a sixth embodiment of the present invention.

FIG. 7 is a configuration diagram schematically showing a cleaning device according to another embodiment of the third or sixth embodiment of the present invention.

FIG. 8 is a configuration diagram schematically illustrating a cleaning device according to an embodiment of the present invention.

FIG. 9 is a configuration diagram schematically illustrating a cleaning device according to another embodiment of the fourth embodiment of the present invention.

FIG. 10 is a configuration diagram schematically illustrating a cleaning device that is one mode of a fifth embodiment of the present invention.

FIG. 11 is a configuration diagram schematically illustrating a cleaning device according to another embodiment of the fifth embodiment of the present invention.

FIG. 12 is a configuration diagram schematically illustrating a cleaning device according to a seventh embodiment of the present invention.

FIG. 13 is a diagram showing the results of the appearance defect rate when the adhering substance removing sheet is used and when the adhering substance removing sheet is not used.

[Explanation of symbols]

101: substrate 104: film forming chamber 105: interleaving paper 201, 301, 401, 501, 601, 701, 8
01, 901, 1001, 1101, 1201: slip sheet 102, 202, 302, 402, 502, 602, 7
02,802,902,1002,1102,120
2: Sending side 103, 203, 303, 403, 503, 603, 7
03,803,903,10031103,1203:
Winding side 204, to 207, 304 to 307, 404 to 407,
504-507, 604-607, 704-707,8
04-807, 904-907, 1004-100
7, 1104 to 1107, 1204: Guide rollers 208, 209, 308, 309, 408, 409, 5
08,509608,609,708,709,80
8,809,908,909,1008,1009,1
108, 1109: Suction port 310, 510, 710, 910, 1110: Non-woven fabric 811, 812, 911, 912, 1011, 101
2,1111,1112: Air nozzle 1208: Cleaning tank 1209: Ultrasonic oscillator 1210: Drying room

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B08B 5/00 B08B 5/00 A C23C 16/54 C23C 16/54

Claims (28)

[Claims] 1. A cleaning method for removing extraneous matter adhering to interleaving paper, wherein the extraneous matter adhering to the interleaving paper is removed by suction. 2. The interleaving paper is conveyed so as to include a horizontal direction, the adhering matter is sucked from below the interleaving paper conveyed in the horizontal direction, and the adhering matter adhering to both sides of the interleaving paper is removed. The method for cleaning slip paper according to claim 1, wherein the cleaning is performed. 3. The interleaving paper is conveyed in a U-shape between a sending side and a winding side, and the conveying direction includes a horizontal direction. The method of cleaning the slip sheet described in the above. 4. The interleaf paper is conveyed so as to include a horizontal direction, the adhering material is sucked from above and below the interleaf paper conveyed in the horizontal direction, and the adhering material adhering to both sides of the interleaf paper is removed. The method for cleaning slip paper according to claim 1, wherein the cleaning is performed. 5. The slip sheet is conveyed so as to include a vertical direction, and the adhering matter is sucked from both sides of the interleaf sheet conveyed in the vertical direction, and the adhering matter adhering to both sides of the interleaf sheet is removed. The method for cleaning interleaf paper according to claim 1, wherein: 6. The interleaving paper according to claim 1, wherein said adhering substance attached to said interleaving paper is sucked through an adhering substance removing sheet. Cleaning method. 7. The method for cleaning a slip sheet according to claim 6, wherein the adhering substance removing sheet is transported in a direction opposite to a direction in which the slip sheet is transported. 8. The adhering substance removing sheet has a surface roughness of 1
The method for cleaning interleaf paper according to claim 6, wherein the thickness is from μm to 1 mm. 9. The method according to claim 6, wherein the adhering substance removing sheet is a non-woven fabric. 10. An apparatus according to claim 1, further comprising an auxiliary means for facilitating removal of the attached matter attached to said slip sheet.
The method for cleaning slip paper according to any one of claims 9 to 9. 11. A method for cleaning a slip sheet according to claim 10, wherein said auxiliary means is means for blowing high-pressure air from a direction opposite to the suction direction across the slip sheet. 12. A method of cleaning interleaf paper, which removes deposits adhering to the interleaf paper, wherein the interleaf paper is washed with a liquid. 13. The method for cleaning slip sheets according to claim 12, wherein vibrations are applied to the slip sheets when the slip sheets are washed with a liquid. 14. The interleaving paper according to claim 1, wherein the interleaving paper is used when forming a deposited film on a belt-shaped substrate that is continuously conveyed. How to clean the slip sheet. 15. An interleaving paper cleaning apparatus for removing adhering substances adhered to interleaving paper, comprising a suction unit for sucking and removing the adhering substances adhering to the interleaving paper. 16. The interleaving paper is conveyed so as to include a horizontal direction, and has a suction unit for sucking an adhering substance from below the interleaved paper conveyed in the horizontal direction. The interleaf paper cleaning device according to claim 15, wherein the adhering substances adhered to both surfaces of the interleaving paper are removed by suction. 17. The method according to claim 17, wherein the slip sheet is conveyed in a U-shape between a sending side and a winding side via a guide roller, and the conveying direction includes a horizontal direction. The interleaf paper cleaning device according to claim 16, wherein: 18. The slip sheet is transported so as to include a horizontal direction, and has a suction section for sucking an attached substance from above and below the slip sheet conveyed in the horizontal direction. The interleaf paper cleaning device according to claim 15, wherein the adhering substances adhered to both surfaces of the interleaving paper are removed by suction. 19. The slip sheet is transported so as to include a vertical direction, and has a suction portion for sucking an adhering substance from both sides of the vertically transported slip sheet. The interleaf paper cleaning apparatus according to claim 15, wherein the adhering substances adhering to both sides are removed by suction. 20. An interleaf paper cleaning apparatus according to claim 15, further comprising an adhering substance removing sheet between said interleaf paper and said suction unit. 21. The apparatus for cleaning a slip sheet according to claim 20, wherein said adhering substance removing sheet is transported in a direction opposite to a direction in which the slip sheet is transported. 22. The adhering substance removing sheet has a surface roughness of:
22. The slip sheet cleaning device according to claim 20, wherein the thickness is 1 μm to 1 mm. 23. An interleaf paper cleaning apparatus according to claim 20, wherein said adhering substance removing sheet is a non-woven fabric. 24. An interleaf paper cleaning apparatus according to claim 15, further comprising an auxiliary means for facilitating removal of the adhering matter adhered to said interleaf paper. . 25. The interleaf paper cleaning apparatus according to claim 24, wherein said auxiliary means is means for blowing high-pressure air from a direction opposite to the suction direction across said interleaf paper. 26. A cleaning device for removing extraneous matter adhering to interleaving paper, comprising a cleaning tank for cleaning the interleaving paper, wherein the interleaving paper is washed in a liquid in the cleaning tank. Cleaning device for slip sheets. 27. The interleaf paper cleaning apparatus according to claim 26, further comprising means for applying vibration to the interleaf paper in the cleaning tank. 28. The interleaving paper according to claim 15, wherein the interleaving paper is used when forming a deposited film on a belt-shaped substrate which is continuously conveyed. Cleaning device for slip sheets.