JP3683988B2 - 光スキャナ - Google Patents
光スキャナ Download PDFInfo
- Publication number
- JP3683988B2 JP3683988B2 JP16983296A JP16983296A JP3683988B2 JP 3683988 B2 JP3683988 B2 JP 3683988B2 JP 16983296 A JP16983296 A JP 16983296A JP 16983296 A JP16983296 A JP 16983296A JP 3683988 B2 JP3683988 B2 JP 3683988B2
- Authority
- JP
- Japan
- Prior art keywords
- optical scanner
- movable plate
- coil
- planar coil
- leaf spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 136
- 239000011810 insulating material Substances 0.000 claims description 5
- 230000010355 oscillation Effects 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 description 108
- 239000004642 Polyimide Substances 0.000 description 103
- 239000010408 film Substances 0.000 description 56
- 239000000758 substrate Substances 0.000 description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- 238000004519 manufacturing process Methods 0.000 description 29
- 229910052581 Si3N4 Inorganic materials 0.000 description 26
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 26
- 238000000034 method Methods 0.000 description 25
- 238000005530 etching Methods 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 17
- 229910052782 aluminium Inorganic materials 0.000 description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 16
- 230000000694 effects Effects 0.000 description 13
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 230000035882 stress Effects 0.000 description 9
- 238000001312 dry etching Methods 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000003993 interaction Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000007639 printing Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000004528 spin coating Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 2
- 239000012876 carrier material Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 210000003041 ligament Anatomy 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Facsimile Scanning Arrangements (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16983296A JP3683988B2 (ja) | 1996-06-28 | 1996-06-28 | 光スキャナ |
| US09/213,062 US6188504B1 (en) | 1996-06-28 | 1998-12-16 | Optical scanner |
| US09/704,284 US6392776B1 (en) | 1996-06-28 | 2000-11-01 | Optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16983296A JP3683988B2 (ja) | 1996-06-28 | 1996-06-28 | 光スキャナ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1020226A JPH1020226A (ja) | 1998-01-23 |
| JPH1020226A5 JPH1020226A5 (enExample) | 2004-07-15 |
| JP3683988B2 true JP3683988B2 (ja) | 2005-08-17 |
Family
ID=15893752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16983296A Expired - Fee Related JP3683988B2 (ja) | 1996-06-28 | 1996-06-28 | 光スキャナ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3683988B2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3740593B2 (ja) | 1998-01-20 | 2006-02-01 | 清水建設株式会社 | 室内空気保全装置 |
| JP2004252337A (ja) * | 2003-02-21 | 2004-09-09 | Denso Corp | 光走査装置及びその製造方法 |
| WO2005011322A2 (en) | 2003-07-28 | 2005-02-03 | Olympus Corporation | Optical switch and method of controlling optical switch |
| JP4329831B2 (ja) | 2007-03-12 | 2009-09-09 | セイコーエプソン株式会社 | アクチュエータ、光スキャナおよび画像形成装置 |
| JP5235341B2 (ja) * | 2007-06-14 | 2013-07-10 | 日本信号株式会社 | プレーナ型電磁アクチュエータ |
| JP2011180450A (ja) * | 2010-03-02 | 2011-09-15 | Brother Industries Ltd | 光走査装置及びそれを備えた画像表示装置 |
| JP5915994B2 (ja) * | 2012-04-23 | 2016-05-11 | 国立研究開発法人産業技術総合研究所 | 配光制御用微小機械システム |
| WO2015092907A1 (ja) * | 2013-12-19 | 2015-06-25 | パイオニア株式会社 | 駆動装置 |
| JP2018128700A (ja) * | 2018-05-09 | 2018-08-16 | パイオニア株式会社 | 駆動装置 |
| JP2020092594A (ja) * | 2020-01-17 | 2020-06-11 | パイオニア株式会社 | 駆動装置 |
| JP2022033852A (ja) * | 2020-01-17 | 2022-03-02 | パイオニア株式会社 | 駆動装置 |
| JP2023095943A (ja) * | 2021-11-30 | 2023-07-06 | パイオニア株式会社 | 駆動装置 |
-
1996
- 1996-06-28 JP JP16983296A patent/JP3683988B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1020226A (ja) | 1998-01-23 |
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