JP3633086B2 - 空調装置及びそれを備えた露光装置 - Google Patents

空調装置及びそれを備えた露光装置 Download PDF

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Publication number
JP3633086B2
JP3633086B2 JP07377696A JP7377696A JP3633086B2 JP 3633086 B2 JP3633086 B2 JP 3633086B2 JP 07377696 A JP07377696 A JP 07377696A JP 7377696 A JP7377696 A JP 7377696A JP 3633086 B2 JP3633086 B2 JP 3633086B2
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JP
Japan
Prior art keywords
air conditioner
removal filter
impurity removal
filter
duct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP07377696A
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English (en)
Japanese (ja)
Other versions
JPH09266147A5 (enExample
JPH09266147A (ja
Inventor
正幸 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP07377696A priority Critical patent/JP3633086B2/ja
Priority to KR1019970012127A priority patent/KR100542414B1/ko
Publication of JPH09266147A publication Critical patent/JPH09266147A/ja
Priority to US09/266,873 priority patent/US6535270B1/en
Priority to US10/237,133 priority patent/US20030035087A1/en
Publication of JPH09266147A5 publication Critical patent/JPH09266147A5/ja
Priority to US11/071,106 priority patent/US20050185156A1/en
Application granted granted Critical
Publication of JP3633086B2 publication Critical patent/JP3633086B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Prevention Of Fouling (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP07377696A 1996-03-27 1996-03-28 空調装置及びそれを備えた露光装置 Expired - Lifetime JP3633086B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP07377696A JP3633086B2 (ja) 1996-03-28 1996-03-28 空調装置及びそれを備えた露光装置
KR1019970012127A KR100542414B1 (ko) 1996-03-27 1997-03-27 노광장치및공조장치
US09/266,873 US6535270B1 (en) 1996-03-27 1999-03-12 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US10/237,133 US20030035087A1 (en) 1996-03-27 2002-09-09 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US11/071,106 US20050185156A1 (en) 1996-03-27 2005-03-04 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07377696A JP3633086B2 (ja) 1996-03-28 1996-03-28 空調装置及びそれを備えた露光装置

Publications (3)

Publication Number Publication Date
JPH09266147A JPH09266147A (ja) 1997-10-07
JPH09266147A5 JPH09266147A5 (enExample) 2004-07-29
JP3633086B2 true JP3633086B2 (ja) 2005-03-30

Family

ID=13527954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07377696A Expired - Lifetime JP3633086B2 (ja) 1996-03-27 1996-03-28 空調装置及びそれを備えた露光装置

Country Status (1)

Country Link
JP (1) JP3633086B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6313953B1 (en) * 1999-01-15 2001-11-06 Donaldson Company, Inc. Gas chemical filtering for optimal light transmittance; and methods
KR100462672B1 (ko) * 2002-01-23 2004-12-20 주식회사 케이피씨 반도체 제조용 공정가스의 정제장치
KR100710227B1 (ko) * 2005-05-20 2007-04-20 엘지전자 주식회사 조명겸용 환기 시스템 및 그 제어방법과 조명겸용 환기덕트

Also Published As

Publication number Publication date
JPH09266147A (ja) 1997-10-07

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