JP3562261B2 - 超音波振動子およびこれを用いた超音波流量計 - Google Patents

超音波振動子およびこれを用いた超音波流量計 Download PDF

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Publication number
JP3562261B2
JP3562261B2 JP28170897A JP28170897A JP3562261B2 JP 3562261 B2 JP3562261 B2 JP 3562261B2 JP 28170897 A JP28170897 A JP 28170897A JP 28170897 A JP28170897 A JP 28170897A JP 3562261 B2 JP3562261 B2 JP 3562261B2
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Japan
Prior art keywords
side wall
ultrasonic
piezoelectric body
top portion
case
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Expired - Lifetime
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JP28170897A
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English (en)
Japanese (ja)
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JPH11118550A (ja
JPH11118550A5 (enrdf_load_stackoverflow
Inventor
明久 足立
茂 岩永
雅彦 橋本
利春 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP28170897A priority Critical patent/JP3562261B2/ja
Publication of JPH11118550A publication Critical patent/JPH11118550A/ja
Publication of JPH11118550A5 publication Critical patent/JPH11118550A5/ja
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Publication of JP3562261B2 publication Critical patent/JP3562261B2/ja
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Expired - Lifetime legal-status Critical Current

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JP28170897A 1997-10-15 1997-10-15 超音波振動子およびこれを用いた超音波流量計 Expired - Lifetime JP3562261B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28170897A JP3562261B2 (ja) 1997-10-15 1997-10-15 超音波振動子およびこれを用いた超音波流量計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28170897A JP3562261B2 (ja) 1997-10-15 1997-10-15 超音波振動子およびこれを用いた超音波流量計

Related Child Applications (1)

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JP2003372496A Division JP2004045439A (ja) 2003-10-31 2003-10-31 超音波振動子およびこれを用いた超音波流量計

Publications (3)

Publication Number Publication Date
JPH11118550A JPH11118550A (ja) 1999-04-30
JPH11118550A5 JPH11118550A5 (enrdf_load_stackoverflow) 2004-08-26
JP3562261B2 true JP3562261B2 (ja) 2004-09-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP28170897A Expired - Lifetime JP3562261B2 (ja) 1997-10-15 1997-10-15 超音波振動子およびこれを用いた超音波流量計

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JP (1) JP3562261B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4703701B2 (ja) * 2008-09-16 2011-06-15 パナソニック株式会社 超音波振動子および超音波流量計
JP4703700B2 (ja) * 2008-09-16 2011-06-15 パナソニック株式会社 超音波振動子および超音波流量計
JP5240121B2 (ja) * 2009-08-20 2013-07-17 パナソニック株式会社 流体の流れ計測装置
CN103776497B (zh) * 2014-01-26 2017-09-01 哈尔滨工业大学（威海） 一种流量计用超声波传感器
JP7200839B2 (ja) * 2019-06-18 2023-01-10 Tdk株式会社 圧電デバイス
JP7675326B2 (ja) * 2021-05-26 2025-05-13 日本精機株式会社 表面波検出装置及び液種特定装置

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JPH11118550A (ja) 1999-04-30

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