JP3526480B2 - 水平解像度を改善するｄｍｄ構造 - Google Patents

水平解像度を改善するｄｍｄ構造

Info

Publication number
JP3526480B2
JP3526480B2 JP33322394A JP33322394A JP3526480B2 JP 3526480 B2 JP3526480 B2 JP 3526480B2 JP 33322394 A JP33322394 A JP 33322394A JP 33322394 A JP33322394 A JP 33322394A JP 3526480 B2 JP3526480 B2 JP 3526480B2
Authority
JP
Japan
Prior art keywords
array
elements
sub
pixels
modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP33322394A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0836141A (ja
Inventor
ジョン ゴウブ ロバート
ビー．サンプセル ジェフリー
Original Assignee
テキサス インスツルメンツ インコーポレイテツド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by テキサス インスツルメンツ インコーポレイテツド filed Critical テキサス インスツルメンツ インコーポレイテツド
Publication of JPH0836141A publication Critical patent/JPH0836141A/ja
Application granted granted Critical
Publication of JP3526480B2 publication Critical patent/JP3526480B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
JP33322394A 1993-12-03 1994-12-05 水平解像度を改善するｄｍｄ構造 Expired - Fee Related JP3526480B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16183293A 1993-12-03 1993-12-03
US161832 1993-12-03

Publications (2)

Publication Number Publication Date
JPH0836141A JPH0836141A (ja) 1996-02-06
JP3526480B2 true JP3526480B2 (ja) 2004-05-17

Family

ID=22582939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33322394A Expired - Fee Related JP3526480B2 (ja) 1993-12-03 1994-12-05 水平解像度を改善するｄｍｄ構造

Country Status (8)

Country Link
US (1) US6232936B1 (cg-RX-API-DMAC7.html)
EP (1) EP0665458B1 (cg-RX-API-DMAC7.html)
JP (1) JP3526480B2 (cg-RX-API-DMAC7.html)
KR (1) KR950022934A (cg-RX-API-DMAC7.html)
CN (1) CN1058123C (cg-RX-API-DMAC7.html)
CA (1) CA2137059C (cg-RX-API-DMAC7.html)
DE (1) DE69429071T2 (cg-RX-API-DMAC7.html)
TW (1) TW283290B (cg-RX-API-DMAC7.html)

Families Citing this family (196)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
KR960016527A (ko) * 1994-10-31 1996-05-22 윌리엄 이. 힐러 디지탈 마이크로미러 장치
GB2307814A (en) * 1995-11-28 1997-06-04 Rank Brimar Ltd Dmd display system
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US20030020809A1 (en) * 2000-03-15 2003-01-30 Gibbon Michael A Methods and apparatuses for superimposition of images
JP2004503809A (ja) * 2000-03-31 2004-02-05 アイマックス　コーポレイション ディジタル投影装置およびその方法
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6504641B2 (en) * 2000-12-01 2003-01-07 Agere Systems Inc. Driver and method of operating a micro-electromechanical system device
EP1244304B1 (en) * 2001-03-19 2009-01-21 Texas Instruments Incorporated Control timing for spatial light modulator
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
KR100451737B1 (ko) * 2002-05-17 2004-10-08 엘지전자 주식회사 Ｄｍｄ 패널
US20030218590A1 (en) * 2002-05-23 2003-11-27 Kiser David K. Optics engine having multi-array spatial light modulating device and method of operation
US6947020B2 (en) 2002-05-23 2005-09-20 Oregonlabs, Llc Multi-array spatial light modulating devices and methods of fabrication
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
DE10245104B4 (de) * 2002-09-27 2008-08-07 Carl Zeiss Jena Gmbh Projektionsanordnung und Projektionsverfahren
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US6870659B2 (en) * 2002-10-11 2005-03-22 Exajoule, Llc Micromirror systems with side-supported mirrors and concealed flexure members
US6825968B2 (en) * 2002-10-11 2004-11-30 Exajoule, Llc Micromirror systems with electrodes configured for sequential mirror attraction
US20040108973A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for generating a number of color light components
US20040109140A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for combining a number of images into a single image
US20040109139A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for combining a number of images into a single image
US20040109138A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for generating a number of color light components
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
JP2004294756A (ja) * 2003-03-27 2004-10-21 Tdk Corp 空間光変調器及びホログラム記録再生装置
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
CN100378496C (zh) * 2003-06-02 2008-04-02 明锐有限公司 具有隐藏铰链的高填充率反射式空间光调制器
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
GB2403864A (en) * 2003-07-10 2005-01-12 Ocuity Ltd Pixel arrangement for an autostereoscopic display
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US7385750B2 (en) 2003-08-29 2008-06-10 Asml Holding N.V. Spatial light modulator using an integrated circuit actuator
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US6888521B1 (en) * 2003-10-30 2005-05-03 Reflectivity, Inc Integrated driver for use in display systems having micromirrors
US20080088651A1 (en) * 2003-11-01 2008-04-17 Yoshihiro Maeda Divided mirror pixels for deformable mirror device
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7474454B2 (en) * 2004-06-18 2009-01-06 Angstrom, Inc. Programmable micromirror motion control system
US7333260B2 (en) * 2004-08-09 2008-02-19 Stereo Display, Inc. Two-dimensional image projection system
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7060895B2 (en) 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
EP1855142A3 (en) 2004-07-29 2008-07-30 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
US7304718B2 (en) * 2004-08-17 2007-12-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
CN101010714B (zh) * 2004-08-27 2010-08-18 高通Mems科技公司 激活微机电系统显示元件的系统和方法
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7259449B2 (en) 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7420728B2 (en) 2004-09-27 2008-09-02 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7368803B2 (en) 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7535466B2 (en) 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7586484B2 (en) 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
BRPI0509575A (pt) * 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7460246B2 (en) 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7330239B2 (en) * 2005-04-08 2008-02-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device
EP1878001A1 (en) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamic driver ic and display panel configuration
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7390869B2 (en) 2005-06-13 2008-06-24 Eastman Chemical Company Process for removing metal species in the presence of hydrogen and a porous material and polyester polymer containing reduced amounts of metal species
WO2007013939A1 (en) 2005-07-22 2007-02-01 Qualcomm Incorporated Support structure for mems device and methods therefor
US20070041077A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Pocket-sized two-dimensional image projection system
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7582952B2 (en) 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7385744B2 (en) 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7566664B2 (en) 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
WO2008033441A2 (en) * 2006-09-12 2008-03-20 Olympus Corporation Divided mirror pixels for deformable mirror device
US7403180B1 (en) * 2007-01-29 2008-07-22 Qualcomm Mems Technologies, Inc. Hybrid color synthesis for multistate reflective modulator displays
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7847795B2 (en) * 2007-05-25 2010-12-07 Texas Instruments Incorporated Method and system for controlling spatial light modulator interface buses
US8451298B2 (en) * 2008-02-13 2013-05-28 Qualcomm Mems Technologies, Inc. Multi-level stochastic dithering with noise mitigation via sequential template averaging
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
WO2010141766A1 (en) 2009-06-05 2010-12-09 Qualcomm Mems Technologies, Inc. System and method for improving the quality of halftone video using a fixed threshold
US8371702B2 (en) * 2009-09-22 2013-02-12 Christie Digital Systems Usa, Inc. Method and system for digital light processing projection using pulsed lamps
CN102834761A (zh) 2010-04-09 2012-12-19 高通Mems科技公司 机电装置的机械层及其形成方法
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
CN102608875A (zh) * 2012-03-27 2012-07-25 深圳市华星光电技术有限公司 基于修补机台的玻璃基板补刻号方法及玻璃基板补刻号装置
JP6690400B2 (ja) 2016-05-23 2020-04-28 セイコーエプソン株式会社 電気光学装置および電子機器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
JPS6234460A (ja) * 1985-08-08 1987-02-14 Canon Inc 感光フイルムの露光装置
JPS6235323A (ja) * 1985-08-09 1987-02-16 Canon Inc 光走査光学系
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
DE69113150T2 (de) * 1990-06-29 1996-04-04 Texas Instruments Inc Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
US5151718A (en) * 1990-12-31 1992-09-29 Texas Instruments Incorporated System and method for solid state illumination for dmd devices
US5146356A (en) 1991-02-04 1992-09-08 North American Philips Corporation Active matrix electro-optic display device with close-packed arrangement of diamond-like shaped
CA2063744C (en) * 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5168406A (en) * 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5240818A (en) * 1991-07-31 1993-08-31 Texas Instruments Incorporated Method for manufacturing a color filter for deformable mirror device
US5233385A (en) * 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
GB2265064B (en) * 1992-02-26 1995-08-23 Rank Cintel Ltd Projection systems

Also Published As

Publication number Publication date
CA2137059C (en) 2004-11-23
EP0665458B1 (en) 2001-11-14
CA2137059A1 (en) 1995-06-04
CN1126923A (zh) 1996-07-17
JPH0836141A (ja) 1996-02-06
DE69429071D1 (de) 2001-12-20
DE69429071T2 (de) 2002-06-20
US6232936B1 (en) 2001-05-15
KR950022934A (ko) 1995-07-28
EP0665458A3 (en) 1996-04-17
TW283290B (cg-RX-API-DMAC7.html) 1996-08-11
CN1058123C (zh) 2000-11-01
EP0665458A2 (en) 1995-08-02

Similar Documents

Publication Publication Date Title
JP3526480B2 (ja) 水平解像度を改善するｄｍｄ構造
EP0712243B1 (en) Method of enhancing the resolution of a display system
JP3957012B2 (ja) アドレスジェネレータ、表示装置、空間光モジュレータおよびバーチャルリアリティヘッドセット
KR100346878B1 (ko) 블럭리셋및보조메모리로다중화된메모리타이밍
JP3177008B2 (ja) 標準ディジタルビデオ信号からデータを表示する方法及びそのためのシステム
JP4002675B2 (ja) ディスプレイシステム
US6963319B2 (en) Image display system and method
KR100362335B1 (ko) 디지탈마이크로미러디바이스디스플레이시스템
JP4346124B2 (ja) ディスプレイシステム
KR100459053B1 (ko) 영상디스플레이시스템에서아티팩트의제거방법
US5673060A (en) Deformable mirror device driving circuit and method
US5471584A (en) Spatial light modulator with sub-divided modulation elements
US5953153A (en) Spatial light modulator with improved light shield
US7916381B2 (en) Spatial light modulator including drive lines
KR100413310B1 (ko) 픽셀데이타디스플레이방법
EP0520481B1 (en) Modulation method for the deformable mirror device (DMD)
US6243057B1 (en) Deformable mirror device driving circuit and method
JP3515699B2 (ja) ディジタルディスプレイ装置およびその駆動方法
KR100246018B1 (ko) 디지탈 변조된 dmd 시스템 및 이의 디지탈 변조 방법
US20040164980A1 (en) Nonlinearity and reset conflicts in pulse width modulated displays
JP3222205B2 (ja) Ｄｍｄのアナログ走査変換器
JP4346125B2 (ja) ディスプレイシステム
KR0145919B1 (ko) 투사형 화상표시 장치의 화상보정데이터 메모리회로
WO2007081220A1 (en) Dynamic pixel structure

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20040114

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040120

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040216

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090227

Year of fee payment: 5

LAPS Cancellation because of no payment of annual fees