JP3465829B2 - Insulating material composition and circuit board and module using the same - Google Patents

Insulating material composition and circuit board and module using the same

Info

Publication number
JP3465829B2
JP3465829B2 JP11304694A JP11304694A JP3465829B2 JP 3465829 B2 JP3465829 B2 JP 3465829B2 JP 11304694 A JP11304694 A JP 11304694A JP 11304694 A JP11304694 A JP 11304694A JP 3465829 B2 JP3465829 B2 JP 3465829B2
Authority
JP
Japan
Prior art keywords
insulating material
circuit board
material composition
thermal conductivity
boron nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11304694A
Other languages
Japanese (ja)
Other versions
JPH07320538A (en
Inventor
誠 福田
直己 米村
宏之 梅沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP11304694A priority Critical patent/JP3465829B2/en
Publication of JPH07320538A publication Critical patent/JPH07320538A/en
Application granted granted Critical
Publication of JP3465829B2 publication Critical patent/JP3465829B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は電気機器、通信機、自動
車用途などの電子部品に用いられる絶縁材料組成物とこ
れを用いた金属ベース回路基板、更にこれを用いたモジ
ュールに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an insulating material composition used for electronic parts such as electric appliances, communication devices and automobiles, a metal base circuit board using the same, and a module using the same.

【0002】[0002]

【従来の技術】金属ベース回路基板、半導体素子その他
の電子、電気部品の封止材、接着剤或いはポッティング
剤の用途に高熱伝導、高耐電圧の絶縁材料が要求されて
いる。例えば、金属ベース回路基板は、ハイパワー分野
に使用されるため、その基板の絶縁層には、高電気絶縁
性及び高熱伝導性といった性能が要求される。更に、回
路の小型化、高機能化を目的に回路の高周波化が進んで
おり、比誘電率の低い回路基板及びそのための絶縁材料
が望まれている。特に、近年IGBT素子等のパワー素
子が搭載されるようになり、低誘電率で、高電気絶縁性
を有し、しかも高熱伝導性を兼ね備えている金属ベース
回路基板が要求され、その絶縁層を形成するための絶縁
材料組成物が必要とされている。
2. Description of the Related Art Insulating materials having high thermal conductivity and high withstand voltage are required for applications such as metal base circuit boards, semiconductor devices and other electronic and electrical parts encapsulants, adhesives and potting agents. For example, since the metal base circuit board is used in the high power field, the insulating layer of the board is required to have high electrical insulation and high thermal conductivity. Furthermore, the frequency of circuits is increasing for the purpose of miniaturization and higher functionality of circuits, and circuit boards having a low relative dielectric constant and insulating materials therefor are desired. In particular, in recent years, power devices such as IGBT devices have been mounted, and a metal base circuit board having a low dielectric constant, a high electric insulation property, and a high thermal conductivity is required. There is a need for insulating material compositions for forming.

【0003】金属ベース回路基板においては、酸化アル
ミニウム等を充填した樹脂からなる電気絶縁性の接着剤
にて金属板と導電箔とを接着するが、この接着剤が硬化
した絶縁材料は金属板上に絶縁層を形成している。金属
ベース回路基板の諸特性は絶縁層、従って絶縁材料の特
性に大きく左右されるので、いろいろな組成物が開示さ
れてきた。
In a metal base circuit board, a metal plate and a conductive foil are bonded to each other with an electrically insulating adhesive made of a resin filled with aluminum oxide or the like. An insulating layer is formed on. Various compositions have been disclosed because the properties of metal-based circuit boards are highly dependent on the properties of the insulating layer and thus the insulating material.

【0004】例えば、特開平2ー286768号公報に
は、特定の粒子径の無機充填材を用いることにより、無
機充填材を高充填することができ、熱伝導率が高い回路
基板用絶縁接着剤組成物が得られ、その接着剤組成物を
介して金属基板と導電箔とを積層し回路基板を得ている
ことが開示されている。
For example, in JP-A-2-286768, by using an inorganic filler having a specific particle size, the inorganic filler can be highly filled, and the insulating adhesive for a circuit board has a high thermal conductivity. It is disclosed that a composition is obtained, and a metal substrate and a conductive foil are laminated via the adhesive composition to obtain a circuit board.

【0005】また、特開平6ー44824号公報には、
純度90%以上のビスフェノールA型エポキシ樹脂に酸化
アルミニウム、窒化アルミニウム、窒化硼素の無機充填
材を充填し、熱伝導率が5.0×10-3〜18.0×10-3cal/cm・
sec・℃であり、かつガラス転移温度が164〜240℃である
絶縁材料とそれを用いた回路基板が開示されている。
Further, in Japanese Patent Laid-Open No. 6-44824,
A bisphenol A type epoxy resin with a purity of 90% or more is filled with an inorganic filler such as aluminum oxide, aluminum nitride or boron nitride, and the thermal conductivity is 5.0 × 10 -3 to 18.0 × 10 -3 cal / cm ・
An insulating material having a sec · ° C. temperature and a glass transition temperature of 164-240 ° C. and a circuit board using the insulating material are disclosed.

【0006】[0006]

【発明が解決しようとする課題】しかし、酸化アルミニ
ウム(比誘電率9.0)のような高比誘電率の物質を高充填
した樹脂からなる絶縁材料に於いては、無機充填材の充
填量が多くなるにつれて、絶縁材料の比誘電率が高くな
る。またこれと同時に粘度が高くなりボイドの巻き込み
が多くなるため、電気絶縁性が低下し耐電圧特性が低下
するという問題があった。
However, in an insulating material made of a resin highly filled with a substance having a high dielectric constant such as aluminum oxide (dielectric constant 9.0), a large amount of inorganic filler is filled. The higher the relative dielectric constant of the insulating material, the higher. At the same time, since the viscosity is increased and the number of voids involved is increased, there is a problem that the electrical insulation property is deteriorated and the withstand voltage characteristic is deteriorated.

【0007】一般的に、層状の絶縁材料中に存在するボ
イドにかかる電圧は、絶縁材料の比誘電率が高いほどボ
イドに高電圧が印加されるので、ボイドで放電し易くな
る。このため、充填材の比誘電率が高いほど、絶縁層従
ってこれを用いた回路基板の電気絶縁性は低下しやす
い。
Generally, the voltage applied to the voids present in the layered insulating material is higher as the relative dielectric constant of the insulating material is higher, so that the voids are more likely to be discharged. For this reason, the higher the relative dielectric constant of the filler, the easier the electrical insulation of the insulating layer and thus the circuit board using the same tends to deteriorate.

【0008】また、回路基板は、その使用条件下で次第
に電気絶縁性が劣化して最終的には絶縁破壊現象を起こ
し寿命に至ることが知られている。電気絶縁性の劣化の
進み方は、その初期段階でボイド等の絶縁層内部で部分
的な放電現象を呈し、この部分的な放電が絶縁層の劣化
を促進し、ついには絶縁層を通過する放電現象を引き起
こし絶縁破壊に至る。従って、電気絶縁性の長期信頼性
を達成するには、放電開始電圧を高くすることが大切で
ある。
It is also known that the circuit board gradually deteriorates in its electrical insulation property under the conditions of its use and eventually causes a dielectric breakdown phenomenon to reach the end of its life. The progress of the deterioration of the electrical insulation exhibits a partial discharge phenomenon inside the insulating layer such as voids at the initial stage, and this partial discharge accelerates the deterioration of the insulating layer and finally passes through the insulating layer. It causes a discharge phenomenon and leads to dielectric breakdown. Therefore, in order to achieve long-term reliability of electrical insulation, it is important to increase the discharge starting voltage.

【0009】従来の金属ベース回路基板では、高熱伝導
性を重視して無機充填材として比誘電率の高い酸化アル
ミニウムを主に用いていた。もしくは電気絶縁性を重視
して無機充填材を添加しないか、もしくは添加しても少
量のみの充填にとどめていた。前者は高熱伝導性を有す
るが電気絶縁性が低くく長期信頼性が劣り、後者では電
気絶縁性に優れるが熱伝導性が劣るので高放熱性を要求
される用途には利用できなかった。このように、高熱伝
導性を維持しながら、高電気絶縁性とその長期信頼性を
兼備することは難しいという問題があった。
In the conventional metal-based circuit board, aluminum oxide having a high relative dielectric constant is mainly used as an inorganic filler with an emphasis on high thermal conductivity. Alternatively, the electrical insulating property is emphasized and the inorganic filler is not added, or even if added, only a small amount is filled. The former has high thermal conductivity but low electrical insulation and is inferior in long-term reliability, and the latter is excellent in electrical insulation but inferior in thermal conductivity, and therefore cannot be used for applications requiring high heat dissipation. As described above, there is a problem that it is difficult to combine high electrical insulation and long-term reliability thereof while maintaining high thermal conductivity.

【0010】本発明の目的は、高熱伝導性で、かつ、高
電気絶縁性を長期に渡り維持できる金属ベース回路基板
等に用いる絶縁材料組成物を提供することにある。
An object of the present invention is to provide an insulating material composition used for a metal-based circuit board or the like which has a high thermal conductivity and can maintain a high electric insulating property for a long period of time.

【0011】また、本発明は、高出力の素子を高密度で
搭載しても、熱放散性に優れ、電気絶縁性に優れ信頼性
の高い回路基板及びモジュールを提供することを目的と
する。
It is another object of the present invention to provide a circuit board and a module which are excellent in heat dissipation, electric insulation and reliability even when high-power devices are mounted at high density.

【0012】[0012]

【課題を解決するための手段】本発明は、無機充填材と
エポキシ樹脂からなる混合物を硬化させてなり、その熱
伝導率が3.0×10-3cal/cm・sec・℃以上
31.1×10 -3 cal/cm・sec・℃以下であ
り、しかも比誘電率が3.9以上4.5以下であること
を特徴とする回路基板用絶縁材料組成物である。
SUMMARY OF THE INVENTION The present invention comprises an inorganic filler and
It is made by curing a mixture of epoxy resins and has a thermal conductivity of 3.0 x 10 -3 cal / cm · sec · ° C or higher.
The insulating material composition for a circuit board is characterized in that it is 31.1 × 10 −3 cal / cm · sec · ° C. or less and has a relative dielectric constant of 3.9 or more and 4.5 or less.

【0013】又、本発明は、該無機充填材が窒化硼素、
ダイアモンド、酸化ベリリウムのうちの1種又は2種以
上を含むことを特徴とする絶縁材料組成物である。
In the present invention, the inorganic filler is boron nitride,
An insulating material composition comprising one or more of diamond and beryllium oxide.

【0014】又、本発明は、該無機充填材が黒鉛化度
(GI値)が2.0以下の表面処理された六方晶窒化硼
素を含むことを特徴とする絶縁材料組成物である。
The present invention is also an insulating material composition characterized in that the inorganic filler contains surface-treated hexagonal boron nitride having a degree of graphitization (GI value) of 2.0 or less.

【0015】更に、本発明は、熱伝導率が3.0×10-3cal
/cm・sec・℃以上であり、しかも比誘電率が4.5以下であ
る絶縁材料組成物を介して導電箔を積層してなる回路基
板であり、加えて、該回路基板を用いてなるモジュール
である。
Further, the present invention has a thermal conductivity of 3.0 × 10 -3 cal.
A circuit board in which conductive foils are laminated with an insulating material composition having a relative dielectric constant of 4.5 or less / cm · sec · ° C. or more, and a module using the circuit board. is there.

【0016】以下、図面により本発明を詳細に説明す
る。本発明の絶縁材料組成物で絶縁層を形成してなる金
属ベース回路基板を用いたモジュールの断面図を図1に
示す。金属板1上に、本発明の絶縁材料組成物よりなる
絶縁層2を介して導電箔3が積層された金属ベース回路
基板を得た後、エッチング等の処理を施し、セラミック
スチップ部品5、半導体素子6、端子7等をハンダ4を
介して積層した構成からできている。
The present invention will be described in detail below with reference to the drawings. FIG. 1 shows a cross-sectional view of a module using a metal base circuit board having an insulating layer formed of the insulating material composition of the present invention. After obtaining the metal base circuit board in which the conductive foil 3 is laminated on the metal plate 1 through the insulating layer 2 made of the insulating material composition of the present invention, the metal base circuit board is subjected to a treatment such as etching to obtain the ceramic chip component 5 and the semiconductor. The element 6, the terminal 7 and the like are laminated via the solder 4.

【0017】ここで金属板1には、板厚0.5〜3.0mm程
度のアルミニウム及びアルミニウム合金、銅、鉄、ステ
ンレス系合金及びインバー系多層金属等が用いられる。
Here, for the metal plate 1, aluminum and aluminum alloys having a plate thickness of about 0.5 to 3.0 mm, copper, iron, stainless steel-based alloys, Invar-based multi-layered metals and the like are used.

【0018】絶縁層2は、無機充填材と樹脂を混合し硬
化させた絶縁材料組成物であり、熱伝導率が3.0×10-3c
al/cm・sec・℃以上でしかも比誘電率が4.5以下である。
絶縁層2の比誘電率が4.5を越えると、放電開始電圧が
極端に低下して放電劣化が生じ易くなり、回路基板の電
気絶縁性の長期信頼性が著しく損なわれる。熱伝導率に
ついては、3.0×10-3cal/cm・sec・℃未満であるとパワー
素子から発生する熱を効率よく放出することができず、
素子の温度がジャンクション温度(約150℃)を越え、素
子が誤動作したり寿命が短くなる。
The insulating layer 2 is an insulating material composition in which an inorganic filler and a resin are mixed and cured, and has a thermal conductivity of 3.0 × 10 −3 c.
Al / cm · sec · ° C or higher and relative permittivity of 4.5 or lower.
When the relative dielectric constant of the insulating layer 2 exceeds 4.5, the discharge starting voltage is extremely lowered and the discharge deterioration is apt to occur, so that the long-term reliability of the electric insulation of the circuit board is significantly impaired. Regarding the thermal conductivity, if it is less than 3.0 × 10 -3 cal / cm · sec · ° C, the heat generated from the power element cannot be efficiently released,
If the temperature of the element exceeds the junction temperature (about 150 ℃), the element may malfunction or the life may be shortened.

【0019】絶縁層2を形成する絶縁材料組成物に使用
される樹脂としては、エポキシ樹が用いられる。エポ
キシ樹脂としては、ビスフェノールA型エポキシ樹脂、
ビスフェノールF型エポキシ樹脂が低粘度であり、無機
充填材の高充填に適しており、好ましい。絶縁層2の厚
みについては特に規定するものでないが、絶縁破壊電圧
と熱抵抗とのバランスを考慮すると20〜500μmが
好ましい。
[0019] As the resin used in the insulating material composition for forming the insulating layer 2, the epoxy resins are used. As the epoxy resin, bisphenol A type epoxy resin,
The bisphenol F type epoxy resin has a low viscosity and is suitable for high filling of the inorganic filler, which is preferable. Although the thickness of the insulating layer 2 is not particularly specified, it is preferably 20 to 500 μm in consideration of the balance between the dielectric breakdown voltage and the thermal resistance.

【0020】又、絶縁層2を形成する絶縁材料組成物に
使用される無機充填材は、比誘電率の低い物質であるこ
とが必須である。熱伝導率が3.0×10-3cal/cm・sec・℃以
上であり、しかも比誘電率が4.5以下である絶縁材料組
成物を得るためには、酸化ベリリウム、ダイアモンド、
窒化硼素が選択される。経済性または安全性を考慮する
と窒化硼素が工業的に最も好適な無機充填材である。
又、これらの1種又は2種以上を含み、目的とする所望
の熱伝導率と比誘電率が得られれば、他のアルミナ等の
無機充填材と併用しても良い。
It is essential that the inorganic filler used in the insulating material composition forming the insulating layer 2 is a substance having a low relative dielectric constant. In order to obtain an insulating material composition having a thermal conductivity of 3.0 × 10 −3 cal / cm · sec · ° C. or more and a relative dielectric constant of 4.5 or less, beryllium oxide, diamond,
Boron nitride is selected. Boron nitride is the most industrially suitable inorganic filler in consideration of economy or safety.
Further, as long as the desired desired thermal conductivity and relative permittivity are obtained by including one or more of these, other inorganic fillers such as alumina may be used in combination.

【0021】これらの無機充填材の粒子径については、
15μm以下が好ましい。15μmを越えると、樹脂との混
合においてブツが発生し易くなったり、硬化後の絶縁層
中にボイドが残留し易くなり、熱伝導率の低下や電気絶
縁性の低下が生じ所望の絶縁材料を得られない。15μm
以下であれば、焼結体の破砕物等も、通常の粉末と同様
に用いることができる。又、粒子形状については、熱伝
導率を向上させるために無機充填材を高充填することが
望ましく、球に近い形状のものが好ましい。
Regarding the particle size of these inorganic fillers,
It is preferably 15 μm or less. If it exceeds 15 μm, it is easy to generate lumps when mixed with the resin, or voids are likely to remain in the cured insulating layer, resulting in a decrease in thermal conductivity and a decrease in electrical insulation. I can't get it. 15 μm
If it is the following, a crushed product of a sintered body and the like can be used in the same manner as ordinary powder. Regarding the particle shape, it is desirable that the inorganic filler is highly filled in order to improve the thermal conductivity, and a shape close to a sphere is preferable.

【0022】前記窒化硼素としては、h-BN,P-BN,c-BN,t
-BN等いろいろなものが用いられるが、これらを混合し
て用いることも可能である。特にh-BNは六方晶系に属し
電気絶縁性が高く、安価に入手できる原料であり好まし
い。六方晶窒化硼素の結晶性は、その目安として黒鉛化
度(GI値)で示される。GI値は、X線回折による(1
00)(101)(102)面の回折強度(ピーク面積)
より、式(1)で算出したものである。
Examples of the boron nitride include h-BN, P-BN, c-BN, t
Various materials such as -BN are used, but it is also possible to use them in combination. In particular, h-BN is preferable because it belongs to the hexagonal system and has a high electric insulation property, and is a raw material that can be obtained at low cost. The crystallinity of hexagonal boron nitride is indicated by the degree of graphitization (GI value) as a measure. The GI value is (1
00) (101) (102) plane diffraction intensity (peak area)
Therefore, it is calculated by the equation (1).

【0023】[0023]

【数1】 GI値=((100)面積+(101)面積)/((102)面積)・・・・(1)[Equation 1]   GI value = ((100) area + (101) area) / ((102) area) ... (1)

【0024】GI値の小さいほど、結晶性が高い。完全
に結晶化が進んだ六方晶窒化硼素でGI値は1.4とな
る。本発明で用いる六方晶窒化硼素の結晶性は、2.0以
下が好ましいが、より好ましくは1.6以下である。黒鉛
化度が2.0を越える六方晶窒化硼素は、一般的に純度が
低く、樹脂との混合時にガスを発生してボイドを巻き込
み易く耐電気絶縁性が低い、もしくは熱伝導性が低いと
いう問題が発生する。
The smaller the GI value, the higher the crystallinity. Hexagonal boron nitride that has been completely crystallized has a GI value of 1.4. The crystallinity of the hexagonal boron nitride used in the present invention is preferably 2.0 or less, more preferably 1.6 or less. Hexagonal boron nitride having a degree of graphitization of more than 2.0 generally has low purity, and when mixed with a resin, gas is easily generated and voids are easily entrapped, so that the electric insulation resistance is low, or the thermal conductivity is low. Occur.

【0025】前記の窒化硼素は、樹脂と窒化硼素の界面
の接着性を高めるために、シリコーンカップリング剤、
チタネートカップリング剤、シリル化剤等にて表面処理
を施したものが良い。これらのうち有機シラン化合物で
表面処理を施したものがより好ましい。また、表面処理
剤による窒化硼素の表面処理は、樹脂と窒化硼素の混合
時に表面処理剤を添加することによっても可能である。
The above-mentioned boron nitride is a silicone coupling agent in order to enhance the adhesiveness at the interface between the resin and boron nitride.
It is preferable that the surface treatment is performed with a titanate coupling agent, a silylating agent, or the like. Of these, those subjected to surface treatment with an organic silane compound are more preferable. The surface treatment of boron nitride with a surface treatment agent can also be performed by adding the surface treatment agent when the resin and boron nitride are mixed.

【0026】窒化硼素の配合割合は、40vol%以上85vol%
以下が良いが、好ましくは50vol%以上70vol%以下であ
る。窒化硼素の配合割合が40vol%以下では、得られる絶
縁材料組成物の熱伝導率が3.0×10ー3cal/cm・sec・℃に達
しない。一方、85vol%を越えると、前記の表面処理を施
しても、弾力性のある樹脂混合物が得られず、その硬化
物もボロボロの状態なので、本発明の目的を達し得なく
なる。50vol%以上70vol%以下の場合に、高熱伝導率で、
しかも低比誘電率のバランスのとれた絶縁材料組成物を
安定して製造することができる。
The compounding ratio of boron nitride is 40 vol% or more and 85 vol%
The following is preferable, but it is preferably 50 vol% or more and 70 vol% or less. If the compounding ratio of boron nitride is 40 vol% or less, the thermal conductivity of the obtained insulating material composition will not reach 3.0 × 10 −3 cal / cm · sec · ° C. On the other hand, if it exceeds 85 vol%, an elastic resin mixture cannot be obtained even if the above-mentioned surface treatment is performed, and the cured product is in a tattered state, so that the object of the present invention cannot be achieved. With 50 vol% or more and 70 vol% or less, high thermal conductivity,
Moreover, it is possible to stably produce a well-balanced insulating material composition having a low relative dielectric constant.

【0027】導電箔3については、導体回路用銅箔、複
合箔又は銅、アルミニウム、ニッケル等の金属を2種類
以上含む合金又は前記金属を使用したクラッド箔等の汎
用のものが用いられる。その厚みは、5μmから1mmで
ある。又、ワイヤーボンディング特性を付与するために
ニッケルメッキ、ニッケル−金メッキを導電箔上に施し
てもかまわない。
As the conductive foil 3, a general-purpose foil such as a copper foil for a conductor circuit, a composite foil, an alloy containing two or more kinds of metals such as copper, aluminum and nickel, or a clad foil using the above metals is used. Its thickness is from 5 μm to 1 mm. Further, nickel plating or nickel-gold plating may be applied on the conductive foil in order to impart wire bonding characteristics.

【0028】[0028]

【作用および実施例】以下、実施例について具体的に説
明する。 (実施例1)窒化硼素粉(電気化学工業(株)製、GPS-
2)をヘキサメチルジシラザン(東芝シリコーン(株)
製)と混合してシリル化処理をした窒化硼素粉を作製し
た。このシリル化処理した窒化硼素粉を無機充填材とし
て、ビスフェノールF型エポキシ樹脂に61vol%充填した
混合物を作製した。この混合物にアミン系硬化剤を加
え、加熱硬化して得た硬化物について、以下に示す熱伝
導率測定と比誘電率測定を行った。次に、前記混合物を
1.5mm厚みのアルミニウム板に塗布して厚さ100μmの
層を形成し、更に、その上に厚さ35μmの銅箔を積層し
て加熱することで金属ベース回路基板を作製した。この
回路基板を用いて、以下に示した放電開始電圧測定及び
トランジスターの通電時の上昇温度測定を行った。又、
回路基板の絶縁破壊寿命を調べるためにV−t特性の測
定を繰り返し数20個にて実施した。得られた結果を表1
に示す。
[Operation and Examples] Examples will be specifically described below. (Example 1) Boron nitride powder (manufactured by Denki Kagaku Kogyo KK, GPS-
2) Hexamethyldisilazane (Toshiba Silicone Co., Ltd.)
(Manufactured by Mfg. Co., Ltd.) and silylated boron nitride powder was prepared. Using this silylated boron nitride powder as an inorganic filler, a mixture was prepared in which a bisphenol F type epoxy resin was filled at 61 vol%. An amine-based curing agent was added to this mixture, and the cured product obtained by heating and curing was subjected to the following thermal conductivity measurement and relative dielectric constant measurement. Then, the mixture
A metal base circuit board was produced by coating a 1.5 mm thick aluminum plate to form a layer having a thickness of 100 μm, and further laminating a copper foil having a thickness of 35 μm thereon and heating. Using this circuit board, the following discharge start voltage measurement and rise temperature measurement when the transistor was energized were performed. or,
In order to examine the dielectric breakdown life of the circuit board, the Vt characteristic was measured repeatedly at 20 times. The results obtained are shown in Table 1.
Shown in.

【0029】<熱伝導率の測定方法>厚さ2mm×直径1
0mmの円盤形の試験片を用い、レーザーフラッシュ法
熱伝導率測定装置(理学電機工業(株)製「LF/TCM-FA-
8510B」)により、ATTレンジ;20μV、サンプリン
グレート;1000μ秒、フィルター;100Hzで測定し
た。
<Measurement method of thermal conductivity> Thickness 2 mm x diameter 1
Laser flash method thermal conductivity measuring device (Rigaku Denki Kogyo Co., Ltd. “LF / TCM-FA-
8510B ”), ATT range: 20 μV, sampling rate: 1000 μsec, filter: 100 Hz.

【0030】<比誘電率の測定方法>JIS C6481に基づ
き、測定周波数100kHz、測定温度25℃で行った。
<Measurement method of relative permittivity> Based on JIS C6481, the measurement frequency was 100 kHz and the measurement temperature was 25 ° C.

【0031】<放電開始電圧の測定方法>作製した金属
ベース基板上に、エッチング法により直径が20mmの円
電極パターンを作製した。ベース金属部とパターン部と
の間の放電開始電圧を部分放電測定器(三菱電線工業
(株)、QM-20)で、測定周波数100kHzで測定した。
<Measurement Method of Discharge Inception Voltage> A circular electrode pattern having a diameter of 20 mm was formed on the prepared metal base substrate by an etching method. The discharge start voltage between the base metal part and the pattern part was measured at a measurement frequency of 100 kHz with a partial discharge measuring instrument (QM-20, Mitsubishi Cable Industries, Ltd.).

【0032】<トランジスター上昇温度の測定方法>金
属ベース基板の導電箔をエッチングして10×15mmのパ
ッド部を形成し、この上にトランジスター(TOー220、
(株)東芝製)をハンダ付けした。金属板面側を冷却し
ながら、トランジスターに100W通電してトランジスタ
ー上面での温度を測定した。
<Measurement Method of Transistor Temperature Rise> A conductive foil of a metal base substrate is etched to form a pad portion of 10 × 15 mm, and a transistor (TO-220, TO-220,
Sold by Toshiba Corporation. While the metal plate surface side was being cooled, 100 W of electricity was applied to the transistor and the temperature at the top surface of the transistor was measured.

【0033】<V−t特性の測定方法>金属ベース基板
上に、エッチング法によって直径が20mmの円電極パタ
ーンを作製し、ベース金属部とパターン部との間にAC
半波2kVの電圧を印加した。測定は試験を促進するた
めに125℃の環境下で行った。電圧印加開始から絶縁破
壊に至るまでの時間を測定しワイブルプロット法により
平均寿命を算出した。
<Method of measuring Vt characteristic> A circular electrode pattern having a diameter of 20 mm is formed on a metal base substrate by an etching method, and an AC pattern is formed between the base metal portion and the pattern portion.
A half-wave voltage of 2 kV was applied. The measurement was performed in an environment of 125 ° C. to accelerate the test. The time from the start of voltage application to dielectric breakdown was measured, and the average life was calculated by the Weibull plot method.

【0034】(実施例2〜9、比較例1〜4)無機充填
材として、市販のいろいろな粒度の窒化硼素、ダイアモ
ンド、酸化ベリリウム、酸化アルミニウム等を準備し、
表1に示す配合割合で、実施例1と同じ方法で、各種の
絶縁材料組成物の硬化物を作製し、熱伝導率及び比誘電
率を測定した。尚、一部のものでは、表面処理を施さな
いものも作製した。更に、前記絶縁材料組成物を用いて
回路基板を作製し、実施例1と同様に、放電開始電圧測
定、トランジスター上昇温度測定及びV−t特性測定を
行った。結果を実施例1の結果とともに表1に示す。
Examples 2 to 9 and Comparative Examples 1 to 4 Commercially available boron nitride, diamond, beryllium oxide, aluminum oxide and the like having various particle sizes were prepared as inorganic fillers.
With the compounding ratios shown in Table 1, cured products of various insulating material compositions were prepared in the same manner as in Example 1, and the thermal conductivity and the relative dielectric constant were measured. Some of them were not surface-treated. Further, a circuit board was prepared using the insulating material composition, and the discharge starting voltage, the transistor rising temperature and the Vt characteristic were measured in the same manner as in Example 1. The results are shown in Table 1 together with the results of Example 1.

【0035】[0035]

【表1】 [Table 1]

【0036】[0036]

【発明の効果】本発明によれば、熱伝導率が高く、しか
も比誘電率が低く電気絶縁性に優れた絶縁材料組成物が
得られ、又、放電開始電圧が高く長期信頼性に優れた回
路基板及びモジュールを得ることができた。本発明の絶
縁材料組成物は熱伝導率が高く、しかも比誘電率が低い
ので、半導体素子の封止材としても好適である。
According to the present invention, an insulating material composition having a high thermal conductivity, a low relative permittivity and an excellent electric insulating property can be obtained, and the discharge starting voltage is high and the long-term reliability is excellent. A circuit board and a module could be obtained. Since the insulating material composition of the present invention has a high thermal conductivity and a low relative dielectric constant, it is suitable as a sealing material for semiconductor elements.

【0037】[0037]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の金属ベース回路基板を用いたモジュー
ルの断面図である。 1. 金属板 2. 絶縁層 3. 導電箔 4. ハンダ 5. セラミックスチップ部品 6. 半導体素子 7. 端子
FIG. 1 is a cross-sectional view of a module using a metal base circuit board of the present invention. 1. Metal plate 2. Insulating layer 3. Conductive foil 4. Solder 5. Ceramic chip component 6. Semiconductor element 7. Terminal

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平5−198711(JP,A) 特開 昭55−166806(JP,A) 特開 平6−44824(JP,A) 米国特許5232970(US,A) (58)調査した分野(Int.Cl.7,DB名) H01B 3/00 H05K 1/05 B32B 15/08 ─────────────────────────────────────────────────── --Continued from the front page (56) References JP-A-5-198711 (JP, A) JP-A-55-166806 (JP, A) JP-A-6-44824 (JP, A) US Pat. No. 5,232,970 (US) , A) (58) Fields surveyed (Int.Cl. 7 , DB name) H01B 3/00 H05K 1/05 B32B 15/08

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 無機充填材とエポキシ樹脂からなる混合
物を硬化させてなり、その熱伝導率が3.0×10-3
al/cm・sec・℃以上31.1×10 -3 cal/
cm・sec・℃以下であり、しかも比誘電率が3.9
以上4.5以下であることを特徴とする回路基板用絶縁
材料組成物。
1. A cured product of a mixture of an inorganic filler and an epoxy resin, the thermal conductivity of which is 3.0 × 10 −3 c.
al / cm · sec · ° C or higher 31.1 × 10 -3 cal /
cm · sec · ° C. or less and a relative dielectric constant of 3.9
An insulating material composition for a circuit board, which is not less than 4.5 and not more than 4.5.
【請求項2】 無機充填材が、窒化硼素、ダイアモン
ド、酸化ベリリウムのうちの1種又は2種以上を含む請
求項1記載の絶縁材料組成物。
2. The insulating material composition according to claim 1, wherein the inorganic filler contains one or more of boron nitride, diamond and beryllium oxide.
【請求項3】 無機充填材が、黒鉛化度が2.0以下の
表面処理された六方晶窒化硼素を含むことを特徴とする
請求項1記載の絶縁材料組成物。
3. The inorganic filler has a degree of graphitization of 2.0 or less.
The insulating material composition according to claim 1, further comprising surface-treated hexagonal boron nitride.
【請求項4】 金属板に請求項1、2又は3記載の絶縁
材料組成物を介して導電箔を積層してなる回路基板。
4. A circuit board obtained by laminating a conductive foil on a metal plate with the insulating material composition according to claim 1, 2 or 3 interposed therebetween.
【請求項5】 請求項4記載の回路基板を用いてなるモ
ジュール。
5. A module using the circuit board according to claim 4.
JP11304694A 1994-05-26 1994-05-26 Insulating material composition and circuit board and module using the same Expired - Fee Related JP3465829B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11304694A JP3465829B2 (en) 1994-05-26 1994-05-26 Insulating material composition and circuit board and module using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11304694A JP3465829B2 (en) 1994-05-26 1994-05-26 Insulating material composition and circuit board and module using the same

Publications (2)

Publication Number Publication Date
JPH07320538A JPH07320538A (en) 1995-12-08
JP3465829B2 true JP3465829B2 (en) 2003-11-10

Family

ID=14602125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11304694A Expired - Fee Related JP3465829B2 (en) 1994-05-26 1994-05-26 Insulating material composition and circuit board and module using the same

Country Status (1)

Country Link
JP (1) JP3465829B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000022289A (en) * 1998-07-01 2000-01-21 Denki Kagaku Kogyo Kk Resin composition for circuit board and circuit board using the same
JP2000151050A (en) * 1998-11-12 2000-05-30 Nippon Rika Kogyosho:Kk Composite insulation metal board
TW521386B (en) * 2000-06-28 2003-02-21 Mitsubishi Heavy Ind Ltd Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus
JP2002012653A (en) * 2000-07-03 2002-01-15 Denki Kagaku Kogyo Kk Curable resin composition and metal-base circuit board using the same
JP4536240B2 (en) * 2000-10-10 2010-09-01 電気化学工業株式会社 Curable resin composition and metal base circuit board using the same
KR100830090B1 (en) * 2003-07-17 2008-05-19 로제 가부시키가이샤 Low-permittivity film, and production method therefor, and electronic component using it
US7875347B2 (en) * 2003-12-29 2011-01-25 General Electric Company Composite coatings for groundwall insulation, method of manufacture thereof and articles derived therefrom
JP2006216300A (en) * 2005-02-02 2006-08-17 Toray Ind Inc Insulating paste and method of manufacturing electronic circuit component using the same
JP5427884B2 (en) * 2009-04-09 2014-02-26 日本発條株式会社 Metal base circuit board and manufacturing method thereof
US8440292B2 (en) * 2009-05-13 2013-05-14 E I Du Pont De Nemours And Company Multi-layer article for flexible printed circuits

Also Published As

Publication number Publication date
JPH07320538A (en) 1995-12-08

Similar Documents

Publication Publication Date Title
US7059042B2 (en) Method of manufacturing a thermal conductive circuit board with grounding pattern connected to a heat sink
JP2756075B2 (en) Metal base substrate and electronic device using the same
JP3465829B2 (en) Insulating material composition and circuit board and module using the same
JP3351852B2 (en) Insulating material and circuit board using the same
JP2002012653A (en) Curable resin composition and metal-base circuit board using the same
US5576362A (en) Insulating material and a circuit substrate in use thereof
JP3921630B2 (en) Epoxy resin composite material and apparatus using the same
JP3751271B2 (en) Resin composition for circuit board and metal base circuit board using the same
JP2001223450A (en) Metal base circuit board
JP3418617B2 (en) Heat conductive substrate and semiconductor module using the same
JP4914284B2 (en) Circuit board composition and circuit board using the same
JP2000022289A (en) Resin composition for circuit board and circuit board using the same
JP3255814B2 (en) Metal-based circuit board and module using the same
JP2005281509A (en) Curable resin composition and metal-based circuit substrate by using the same
JP3255315B2 (en) Electrical insulating material and circuit board using the same
JP2007084704A (en) Resin composition and circuit board and package using the same
JPH08288605A (en) Metallic circuit board
JPH118450A (en) Metal base circuit board
JP2021114537A (en) Semiconductor device
JP3862632B2 (en) Metal-based multilayer circuit board and hybrid integrated circuit using the same
WO2021192480A1 (en) Insulating film, metal base substrate, and method for producing metal base substrate
JPH1187866A (en) Metal base circuit board
JP2904621B2 (en) Metal base circuit board
JP4037619B2 (en) Adhesives and electrical equipment
JP4187082B2 (en) Metal base circuit board and manufacturing method thereof

Legal Events

Date Code Title Description
S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090829

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100829

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110829

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110829

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120829

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130829

Year of fee payment: 10

LAPS Cancellation because of no payment of annual fees