JP3447503B2 - Automatic relative movement return device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is suitable for use as a seismic isolation device for preventing the vibration of an earthquake from being transmitted to a seismic isolation target such as a structure. The present invention relates to a relative movement automatic return device that allows a horizontal movement to be allowed and at the same time automatically attenuates the lateral movement to return the upper base and the lower base to an initial stable position.

[0002]

2. Description of the Related Art Conventionally, as a seismic isolation device, there is a so-called laminated rubber isolator as shown in FIG. The laminated rubber isolator is formed by alternately laminating a thin rubber sheet 201 and an intermediate steel plate 202, the periphery of the laminated body is covered with a covering rubber 206, and has upper and lower flanges 203 and 205. In this laminated rubber isolator, for example, the flange 205 is fixed to the ground, and the flange 203 is fixed to a building. This laminated rubber isolator has high rigidity in the vertical direction and low rigidity in the horizontal direction.

[0003] The laminated rubber isolator supports the building against the ground with great rigidity in the vertical direction when there is no earthquake, and displaces quickly in the horizontal direction to prevent the shaking from being transmitted to the building during the earthquake.

However, the above-mentioned laminated rubber isolator is suitable for large-scale buildings and structures, but the horizontal rigidity is not sufficiently small for medium- and small-scale buildings and structures, and the vibration of the earthquake is transmitted to the buildings. There is a problem that can not be sufficiently prevented.

[0005] Further, another one of the above-mentioned relative movement automatic return devices is provided.
As one application example, there is a swingable machining device that can be used for a semiconductor wrapping device or the like. 2. Description of the Related Art Conventionally, as a machining device constituting a semiconductor lapping device, there is one shown in FIG. This machining apparatus has a plurality of balls 303 between a lower table 301 and an upper table 302. And
The lower surface 302A of the upper base 302 is substantially spherical, and the upper surface 301A of the lower base 301 is substantially spherical. Thus, the upper base 302 can swing and rotate in an arbitrary lateral direction about the center 305 of the spherical surface. A semiconductor wafer is mounted on the upper surface 302B of the upper base 302, and the wafer surface is polished while rotating the wafer and the lapping tool relatively.

However, this wrapping device is not
Since the lower surface 302A and the upper surface 301A of the lower base 301 need to be spherically finished, there is a problem that the manufacturing cost is high.

[0007]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for quickly and horizontally displacing the shaking of an earthquake to a building, even when applied to small and medium-sized buildings and structures. An object of the present invention is to provide a relative movement automatic return device that can constitute a seismic isolation device that can surely prevent a relative movement. Also,
Another object of the present invention is to provide a relative movement automatic return device that can constitute a swingable machining device as a wrapping device with a low manufacturing cost.

[0008]

According to a first aspect of the present invention, there is provided a relative movement automatic return device comprising an upper table, a lower table, and an intermediate table. A first rolling element is disposed, a second rolling element is disposed between the intermediate table and the lower table, and is formed on at least one of the lower surface of the upper table or the upper surface of the intermediate table. A first raceway surface gradually rising from a stable point in both directions in which the first rolling element travels, and at least one of a lower surface of the intermediate platform or an upper surface of the lower platform, and the first raceway surface; And a second track surface extending from the stable point in both directions in which the second rolling element travels, the first track surface and the second track. and the surface extends in a direction perpendicular to each other The first raceway surface and the second raceway surface
A curved surface which is curved in the running direction of the rolling elements, the stable
The part of the track surface on one side of the point is
A curved surface with a radius of curvature having a center of curvature offset to the side,
The part of the track surface on the other side of the above stable point is
Surface with a radius of curvature having a center of curvature offset to one side
And a portion of the one raceway surface and the other raceway surface
Is the radius of gyration of the rolling element near the stable point.
Ri is also characterized that you have been linked with a large radius of curvature of the curved surface.

According to the first aspect of the present invention, for example,
When used in a seismic isolation device, the lower platform is fixed to the ground, and the upper platform is fixed to a structure. When there is no earthquake, the first rolling elements are stationary at the stable points on the first raceway surface, and the second rolling elements are stationary at the stable points on the second raceway surface. In this state, the weight of the structure is transmitted vertically downward in the order of the upper table, the first rolling element, the intermediate table, the second rolling element, and the lower table, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the second rolling element travels along the second raceway surface, and the first rolling element travels along the first raceway surface, whereby horizontal vibration of the ground is not transmitted to the structure. .

According to the first aspect of the present invention, the first rolling element runs on the first raceway surface and the second rolling element moves on the second track surface.
By traveling on the track surface, the upper platform can move relative to the lower platform in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base and the upper base are relatively slid during the running of the rolling elements on the raceway surface, the horizontal rigidity of the isolator can be sufficiently softened, and the seismic isolation can be approached. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, the first rolling element returns to the stable point while reciprocating on both sides of the stable point on the first raceway surface. Return to position and the structure can return to its resting position relative to the ground.

Further, if a swingable machining device as a semiconductor wrapping device is constituted by the relative movement automatic return device of the present invention, each track surface only needs to be curved one-dimensionally. Such spherical finishing of the raceway surface becomes unnecessary, and the manufacturing cost is reduced.

According to the first aspect of the present invention, the relative positions of the upper table and the lower table in all horizontal directions are different from those in the case where the first track surface and the second track surface are not orthogonal. The slide can be smooth.

Further, the invention of claim 1, said first raceway surface and the second track surface is a curved surface which is curved in the running direction of the rolling element.

According to the first aspect of the present invention, the horizontal rigidity can be set to a desired value by setting the curvature of the curved surface.

Further, according to the first aspect of the present invention, the portion of the raceway surface on one side of the stable point is a curved surface having a radius of curvature having a center of curvature deviated to the other side from the stable point. Is a curved surface having a radius of curvature having a center of curvature deviated to one side from the stable point, and the one orbital surface portion and the other orbital surface portion are In the vicinity of the stable point, the rolling elements are connected by a curved surface having a radius of curvature larger than the turning radius of the rolling elements.

According to the first aspect of the present invention, the inclination of the raceway surface can be made steeper than when the raceway surface is constituted by a curved surface having a radius of curvature having a center of curvature on the vertical line of the stable point. Therefore, the rolling element can be quickly returned to the stable point. In addition, the portion of one raceway surface and the portion of the other raceway surface are connected by a curved surface having a radius of curvature larger than the radius of rotation of the rolling element in the vicinity of the stable point. Can pass smoothly.

Further, in the relative movement automatic return device of one reference example ,
Is a plane where the portion of the track surface on one side of the stable point rises linearly at a predetermined angle from the stable point, and the portion of the track surface on the other side of the stable point is A plane that rises linearly at a predetermined angle, and the portion of the one raceway surface and the portion of the other raceway surface are curved surfaces having a radius of curvature larger than the rotation radius of the rolling element in the vicinity of the stable point. Are connected.

According to this one embodiment , the restoring force can be set to a desired value only by setting the angle of the above-mentioned track surface portion. Further, since the portions of the raceway surfaces on both sides of the stable point are connected by the curved surface, the rolling element can smoothly pass through the stable point.

Further, an automatic relative movement return device according to one embodiment
At least one of the first orbital surface and the second orbital surface is arranged in a plurality in the horizontal direction and is parallel to each other.

According to this embodiment , as compared with the case where the raceway surface is a single row, the support stability in the vertical direction can be improved with less raceway surface space, and the relative slide of the upper base and the lower base can be stably and smoothly performed. it can. In addition, the rolling element can be downsized by reducing the width per track surface.

Further, an automatic relative movement return device according to one embodiment
In the above, the first or second raceway surface is a deep groove, and the first or second rolling element is guided by a side wall of the deep groove.

According to this embodiment , the rolling element can be guided along the side wall of the first or second raceway surface of the deep groove so as not to deviate from the raceway.

An automatic relative movement returning device according to one embodiment
Then, the upper table and the lower table are made of parts having the same shape, and the intermediate table is made up of two parts whose non-track-side back surfaces are joined to each other.

According to this embodiment , each of the upper base, the lower base, and the intermediate base can be composed of only one kind of component, so that the cost can be reduced.

Further, an automatic relative movement return device according to one embodiment
Then, a cage for holding the rolling element is provided.

According to this embodiment , the running can be stabilized by holding the rolling elements by the cage.

According to a second aspect of the present invention, in the relative movement automatic return device according to the first aspect, the track surface is formed by an upper surface of a rail track, and the rolling elements are formed on both side surfaces of the rail track. It is characterized by having a flange portion for sandwiching.

According to the second aspect of the present invention, the vertical dimension can be set by increasing the height of the rail track. Further, the rolling element can be prevented from coming off the rail track by the flange of the rolling element.

According to a third aspect of the present invention, in the relative movement automatic return device according to the first aspect, the rolling element has a soloban ball shape in which two cones are connected at a bottom surface, and the raceway surface is It is characterized by comprising a groove having a substantially V-shaped cross section.

According to the third aspect of the present invention, the rolling element is less likely to be displaced from the raceway surface, and the vertical dimension can be reduced.

According to a fourth aspect of the present invention, in the relative movement automatic return device according to the first aspect, the track surface is formed on one of a lower surface of the upper table and an upper surface of the intermediate table. A rack is formed on the other of the lower surface and the upper surface of the intermediate table, and the first rolling element has a gear that meshes with the rack. According to the fourth aspect of the present invention, the first rolling element does not slip with respect to the upper table or the intermediate table due to the engagement between the gear and the rack. Deviation of the relative position can be prevented.

According to a fifth aspect of the present invention, there is provided the relative movement automatic return device according to the first aspect, wherein the first or second relative movement automatic return device is provided.
At least one of the track surfaces is characterized in that it has a stopper surface extending vertically at the track end.

According to the fifth aspect of the present invention, when the rolling element travels to the end of the track, it comes into contact with the stopper surface and stops, so that it is possible to prevent the rolling element from running over the end of the track and deviating from the track.

According to a sixth aspect of the present invention, in the relative movement automatic return device according to the first aspect, the first rolling element comprises:
The second rolling element is rotatably supported on one of the upper table and the intermediate table, and is coupled to the other of the upper table and the intermediate table so as to be able to travel and to restrict vertical movement. And is coupled to the other of the intermediate table and the lower table so as to be able to travel and to restrict vertical movement.

According to the sixth aspect of the present invention, the vertical movement of the upper table and the intermediate table is restricted via the first rolling element.
The vertical movement of the intermediate table and the lower table is regulated via the second rolling elements. Therefore, for example, when the present invention is applied to a vibration isolator of a high-rise building, when a tensile force generated by wind pressure is applied to the upper platform, the upper platform, the lower platform, the intermediate platform, and the first and second rolling elements are disassembled. Can be prevented.

According to a seventh aspect of the present invention, in the relative movement automatic return device according to the first aspect, the first rolling element is fixed to the upper base so that the first rolling element rotates freely with respect to the upper base. And at least one of second bearing means fixed to the intermediate table and supporting the second rolling element so that the second rolling element idles with respect to the intermediate table. It is characterized by:

According to the seventh aspect of the present invention, in the case where the first bearing is provided, the first rolling element contacts both the upper table and the intermediate table and travels in comparison with the case where the first rolling element contacts both the upper table and the intermediate table. The relative movement of the intermediate table and the upper table to the horizontal movement of the
Can be reduced to In addition, when the second bearing is provided, compared with the case where the second rolling element travels in contact with both the intermediate base and the lower base, the lower base and the intermediate base with respect to the lateral movement amount of the lower base are different. The relative movement amount can be reduced by half. Therefore, the seismic isolation capacity can be improved.

Further, in one reference example, an upper table, a lower table, and an intermediate table are provided, and the upper table gradually falls in both directions of the track from a stable point substantially at the center of the track. A first or a second orbital groove which is standing or raised, and which is depressed in the horizontal direction on both side surfaces in the horizontal direction, wherein the lower base extends in a direction intersecting with the first and the second orbital grooves; And the third and fourth track grooves which are gradually rising in both directions of the track from the stable point at the substantially center of the track and which are depressed in the horizontal direction on both side surfaces in the horizontal direction. On both sides in the horizontal direction, a stable point substantially at the center of the track and the fifth and sixth parts which gradually rise from this stable point in both directions of the track and face the first and second track grooves in the horizontal direction. The track groove, the stable point at the approximate center of the track, and from this stable point in both directions of the track And has a seventh and eighth track groove horizontally facing the third and fourth track grooves, the first, third, sixth, and eighth track grooves. The raceway groove includes a first support surface that faces obliquely with respect to the vertical direction, and a second support surface that faces obliquely opposite to the oblique direction with respect to the vertical direction. The fourth, fifth, and seventh track grooves include a third support surface obliquely facing the first support surface and a fourth support surface opposing the second support surface in an oblique direction. A first rolling element is disposed between the first and fifth track grooves, and a second rolling element is disposed between the second and sixth track grooves. A third rolling element is arranged between the seventh raceway groove, and a fourth rolling element is arranged between the fourth raceway groove and the eighth raceway groove.

According to this embodiment , for example, when used in a seismic isolation device, the lower base is fixed to the ground, and the upper base is fixed to a structure. When there is no earthquake, the first rolling element is sandwiched from both sides between the stable point of the first track groove of the upper table and the stable point of the fifth track groove of the intermediate table, and stops at the stable point. are doing. Similarly, the second rolling element is
It is sandwiched from both sides by the stable point of the second track groove of the upper table and the stable point of the sixth track groove of the intermediate table, and is stationary at the stable point. Further, the third rolling element is sandwiched from both sides by a stable point of the seventh track groove of the intermediate platform and a stable point of the third track groove of the lower platform, and is stationary at the stable point. In addition, the fourth
The rolling element is sandwiched from both sides by a stable point of the eighth track groove of the intermediate platform and a stable point of the fourth track groove of the lower platform, and is stationary at the stable point.

In this state, the weight of the above-mentioned structure is determined by the first and fourth support surfaces of the first and second track grooves of the upper stand, the first and second rolling elements, and the fifth and sixth track grooves of the intermediate stand. The third and second support surfaces are transmitted from the upper platform to the intermediate platform in this order, and the fourth and first support surfaces of the seventh and eighth track grooves of the intermediate platform, and the second and second of the third and fourth track grooves of the lower platform. It can be transmitted from the intermediate table to the lower table in the order of the three support surfaces, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the third rolling element travels in a substantially horizontal direction along the seventh track groove and the third track groove, and the fourth rolling element moves in a substantially horizontal direction along the eighth track groove and the fourth track groove. The first rolling element travels in a substantially horizontal direction along the first track groove and the fifth track groove, and the second rolling element travels substantially along the sixth track groove and the second track groove. Drive horizontally. Thereby, the horizontal shaking of the ground is not transmitted to the building.

According to this embodiment , the running of the first rolling elements in the first and fifth track grooves and the running of the second rolling elements in the second and sixth track grooves, and the third rolling element in the third , 7th
Running on the raceway groove and the fourth and eighth rolling elements of the fourth rolling element
By traveling with respect to the raceway groove, the upper table can move relative to the lower table in an arbitrary horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower table and the upper table are relatively slid during the running of each rolling element in each track groove, the horizontal rigidity as an isolator can be sufficiently softened and can be made closer to the absolute seismic isolation. Therefore,
Even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the rolling elements return to the stable points while reciprocating on both sides of the stable points of the track grooves, so that the upper table is at a stationary position with respect to the lower table. And the structure can be returned to a stationary position relative to the ground.

Further, when the wind hits the high-rise building,
When a tensile force acts on the upper table from this structure, the tensile force is applied to the second and third support surfaces of the first and second track grooves, the first and second rolling elements, and the intermediate table of the upper table. 5, the fourth and first support surfaces of the sixth track groove are transmitted from the upper table to the intermediate table in this order, and the third and second support surfaces of the seventh and eighth track grooves of the intermediate table, and the third and fourth rolling elements. , And the first and fourth support surfaces of the third and fourth raceway grooves of the lower platform, in this order, from the intermediate platform to the lower platform. In this way, the pulling force from the upper table can be transmitted to the lower table via the intermediate table, and it is possible to have a resistance to the pull.

Further, in one reference example, an upper table, a lower table, and an intermediate table are provided, the intermediate table has an upper slide section and a lower slide section, and the upper table is mounted on the upper slide section from above. An upper facing portion facing the upper sliding portion and a lower facing portion facing the upper sliding portion from below, wherein the lower base is configured to face the lower sliding portion from below and an upper facing portion facing the lower sliding portion from above; A first rolling element is disposed between the upper slide portion of the intermediate platform and the upper facing portion of the upper platform, and a first rolling element is provided between the upper slide portion of the intermediate platform and the lower facing portion of the upper platform. , A third rolling element is disposed between the lower slide portion of the intermediate table and the upper facing portion of the lower platform, and a lower sliding portion of the intermediate platform and a lower facing portion of the lower platform. A fourth rolling element is disposed between the lower surface of the upper facing portion of the upper base and A first track surface formed on at least one of the upper surfaces of the upper slide portion of the table, and a stable point and a first track surface gradually rising from the stable point in both directions in which the first rolling element travels; It is formed on at least one of the upper surface of the facing portion or the lower surface of the upper slide portion of the intermediate table.
A second raceway surface that gradually rises in both directions in which the rolling elements travel, and a lower surface of the upper facing portion of the lower platform or at least one of an upper surface of a lower sliding portion of the intermediate platform. From this stable point, the third rolling element gradually rises in both directions in which the third rolling element travels.
A track surface and at least one of the upper surface of the lower opposing portion of the lower platform or the lower surface of the lower slide portion of the intermediate portion, and are formed at a stable point and in both directions in which the fourth rolling element travels from the stable point. A fourth orbital surface gradually rising, and the first and second orbital surfaces extend in a direction intersecting the third and fourth orbital surfaces.

According to this embodiment , for example, when used in a seismic isolation device, the lower base is fixed to the ground, and the upper base is fixed to a structure. When there is no earthquake, the first, second, third, and fourth rolling elements are stationary at the stable points on the first, second, third, and fourth raceway surfaces. In this state, the weight of the structure is transmitted vertically downward in the order of the upper table, the upper slide section of the intermediate table, the lower slide section of the intermediate table, and the lower table, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the third and fourth rolling elements travel along the third and fourth raceway surfaces, and the first and second rolling elements travel along the first and second raceway surfaces. Thereby, the horizontal shaking of the ground is not transmitted to the building.

According to this embodiment , the first and second rolling elements run on the first and second raceways and the third and fourth rolling elements run on the third and fourth raceways. The upper table can move relative to the lower table in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base and the upper base are relatively slid by the rolling element running on the raceway surface, the horizontal rigidity of the isolator can be sufficiently softened, and the seismic isolation can be made closer to the absolute seismic isolation. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, the first,
The second, third, and fourth rolling elements return to the stable point while reciprocating on both sides of the stable point on the first, second, third, and fourth raceway surfaces. And the structure can be returned to a stationary position relative to the ground.

Further, when the wind hits the high-rise building,
When a tensile force acts on the upper table from this structure, the tensile force is transmitted from the lower facing portion of the upper table to the upper slide section of the intermediate table, transmitted from the upper slide section to the lower slide section, and is transmitted to the lower slide section. Transmitted to Shimodai. In this way, the pulling force from the upper table can be transmitted to the lower table via the intermediate table, and it is possible to have a resistance to the pull.

[0056]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

[0057] [First Reference Example] FIG. 1, the first reference of the relative movement automatic return device of the present invention
The seismic isolation device as an example is shown. As shown in FIG. 1A, this seismic isolation device includes an upper table 1, an intermediate table 2, and a lower table 3. As shown in FIGS. 1B and 1C, four cylindrical rollers 5 as first rolling elements are arranged between the upper base 1 and the intermediate base 2. Also, as shown in FIGS. 1 (C) and (D),
Four cylindrical rollers 6 as second rolling elements are arranged between the intermediate table 2 and the lower table 3.

As shown in FIG. 1B, the upper base 1 has four screw holes 8 for mounting on a flat upper surface 7. On the lower surface 10 of the upper base 1, four parallel X-direction orbital surfaces 11, 12, 13, 1 serving as first orbital surfaces are provided.
4 are formed. The track surfaces 11 and 12 are track ends 1
1a and the track end 12a are in contact. The track surfaces 11 and 12 are arranged straight along one side of the lower surface 10. When the length of one side of the lower surface 10 is long, the track end 11a and the track end 12a may be separated from each other and arranged at both ends of one side. In addition, the raceway surfaces 13 and 14 are bordered by the raceway end 13a and the raceway end 14a. And
The track surfaces 13 and 14 are arranged straight along one side of the lower surface 10 opposite to the one side. The above 4
The two X-direction orbital surfaces 11 to 14 have the same shape.

The X-direction orbital surface 11 is located at the central stable point 1
5 and a surface 1 where the roller 5 as the first rolling element gradually rises in both directions from the stable point 15 in the traveling direction.
6,16. As shown in FIG. 7A, the surface 16 is curved with a predetermined radius of curvature having a center vertically above the central stable point 15. FIG. 2 is a plan view showing the lower surface 10 of the upper base 1, and FIG. 3 is a sectional view taken along line AA of FIG.

On the other hand, as shown in FIG. 1C, the intermediate table 2 has four X-direction orbital surfaces 23, 24, 25 and 26 as first orbital surfaces formed on the upper surface 21 thereof. The track surfaces 23, 24, 25, 26 are respectively associated with the track surfaces 11, 1
2,13,14. One roller 5 is arranged between the raceway surfaces 23 and 11, one roller 5 is arranged between the raceway surfaces 24 and 12, and one roller 5 is arranged between the raceway surfaces 25 and 13. Then, one roller 5 is disposed between the raceway surfaces 26 and 14. This X
The direction track surfaces 23, 24, 25, 26 have the same shape. The track surface 23 has the same shape as the track surface 13 of the upper base 1.

On the lower surface 27 of the intermediate table 2, four Y-direction raceways 31, 32, 33, and 34 are formed as second raceways in a direction orthogonal to the X-direction raceways 23 to 26. ing. The track surfaces 31 and 32 are arranged straight along one side of the lower surface 27. Also, the track surface 33
And 34 are arranged straight along one side opposite to the one side. Also, the track end 31a of the track surface 31
And the raceway end 32a of the raceway surface 32 are in contact with each other, and the raceway end 33a of the raceway surface 33 and the raceway end 34a of the raceway surface 34
And are bordering. The Y-direction raceway surfaces 31 to 34 have the same shape, and the curved shape of the Y-direction raceway surface 31 is the same as the X-direction raceway surface 23 of the upper surface 21.

Further, as shown in FIG.
On the upper surface 37, four Y-direction orbital surfaces 38, 39, 40 and 41 are formed as second orbital surfaces. Track surface 3
8, 39, 40, 41 are the lower surface 2 of the intermediate table 2 respectively.
7, the Y-direction raceway surfaces 31, 32, 33, 34. 1 between the raceway surfaces 38 and 32
Roller 6 is arranged, one roller 6 is arranged between raceway surfaces 39 and 32, one roller 6 is arranged between raceway surfaces 40 and 33, and between raceway surfaces 41 and 34. One roller 6 is arranged. The Y-direction orbital surfaces 38, 39, 40,
41 has the same shape. The raceway surface 38 has the same shape as the raceway surface 32 of the lower surface 27 of the intermediate table 2. in this way,
The seismic isolation device of this reference example has a total of eight X-direction orbital surfaces, eight Y-directional orbital surfaces, and eight rollers.

In the seismic isolation device having the above configuration, for example, the lower base 3 is fixed to the ground, and the upper base 1 is provided with mounting screw holes 8.
It is fixed to the construct using. Depending on the scale of the building, only a plurality of seismic isolation devices having the above configuration are installed. However, in the case of a small building or the like, only one relatively large seismic isolation device having the above structure may be used.

When there is no earthquake, the four rollers 5 as the first rolling elements respectively have the stable points of the X-direction orbital surfaces 11, 12, 13, 14 constituting the first orbital surface and the X-direction orbital surfaces 23,
It is stationary at four rest points between 24, 25 and 26 stable points. Further, the four rollers 6 as the second rolling elements respectively have Y-direction raceway surfaces 31, 32, 3 forming a second raceway surface.
It is stationary at four stationary points between the stable points of 3,34 and the stable points of the Y-direction orbital surfaces 38,39,40,41. In this state, the weight of the structure is transmitted vertically downward in the order of the upper base 1, the rollers 5, the intermediate base 2, the rollers 6, and the lower base 3, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base 3 moves in the horizontal direction together with the ground. Then, the four rollers 6 are aligned with the Y-direction track surface 3.
It travels along the rising surfaces of 8, 39, 40, 41 and the rising surfaces of the Y-direction orbital surfaces 31, 32, 33, 34,
The four rollers 5 travel along the rising surfaces of the X-direction track surfaces 23, 24, 25, and 26 and the rising surfaces of the X-direction track surfaces 11, 12, 13, and 14. Thereby, the horizontal shaking of the ground is not transmitted to the building. That is, the upper base 1 can move relative to the lower base 3 in an arbitrary horizontal direction by the traveling of the rollers 6 on the Y-directional track surface and the traveling of the rollers 5 on the X-directional track surface.
Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

The track surfaces 23 to 26, 38 in the X and Y directions
Since the lower base 3 and the upper base 1 are relatively smoothly slid in the traveling of the rollers 5 and 6 above ４１41, the horizontal rigidity as an isolator can be sufficiently softened, and it can be made closer to the absolute seismic isolation. Therefore, even when applied to not only large-scale buildings but also medium- and small-scale buildings and structures, it is possible to reliably prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the four rollers 5 return to the stable points while reciprocating on the rising surfaces on both sides of the stable points of the X-direction orbital surfaces 11 to 14, 23 to 26. At the same time, the four rollers 6 are aligned with the Y-direction orbital surfaces 31 to 3.
It returns to the stable point while reciprocating on the rising surfaces on both sides of the stable points of 4, 38 to 41. Therefore, the upper base 1 returns to the position at the time of rest with respect to the lower base 3, and the structure can be reliably returned to the position at the time of rest with respect to the ground.

Further, the seismic isolation device has an X-direction orbital surface 11.
~ 14,23 ~ 26 and Y-direction orbital surfaces 31 ~ 34,38 ~ 4
1 extend in directions orthogonal to each other. Therefore,
Compared to the case where the X-direction orbital surfaces 11 to 14, 23 to 26 and the Y-direction orbital surfaces 31 to 34, 38 to 41 are not orthogonal, the upper table 1 and the lower table 3 The relative slide can be made smooth.

Further, the seismic isolation device is provided with the X-direction raceway surfaces 11 to 14, 23 to 26 and the Y-direction raceway surfaces 31 to 34,
38 to 41 are curved surfaces curved in the running direction of the rollers 5 and 6. Therefore, the horizontal rigidity can be set to a desired value by setting the curvature of the curved surface.

Also, in the seismic isolation device, the X-direction raceway surfaces 11 and 12 and the X-direction raceway surfaces 13 and 14 are formed in two rows separated by a predetermined dimension in the horizontal direction, and The raceway surfaces 31, 32 and the Y-direction raceway surfaces 33, 34 are formed in two rows separated by a predetermined dimension in the horizontal direction. Therefore, as compared with the case where the X-direction raceway surface and the Y-direction raceway surface are single-row, the support stability in the vertical direction can be improved with less raceway surface space, and the relative slide of the upper base 1 and the lower base 3 can be stably and smoothly performed. it can. In addition, the rollers 5 and 6 can be downsized by reducing the width dimension per track surface.

Further, the seismic isolation device has an X-direction orbital surface 11.
14, 23 to 26 are deep grooves, and the four rollers 5 are guided on the side walls of the deep grooves. Also, the Y-direction raceway surface 31
34, 38 to 41 are deep grooves, and the four rollers 6 are guided on the side walls of the deep grooves. Therefore, the rollers 5 and 6 as rolling elements can be guided along the side wall of the deep groove so as not to come off the raceway surface.

(Embodiment) In the above reference example , as shown in FIG. 7A, the rising surfaces 16, 16 are curved with a constant radius of curvature R having a center vertically above the stable point 15. As shown in FIG. 7 (B), the rising surface 56 on one side of the stable point 15 is a curved surface having a radius of curvature AR having a center of curvature deviated to the other side from the stable point 15, and The rising surface 56 on the other side is a curved surface having a radius of curvature BR having a center of curvature deviated to one side from the stable point 15, and
The one rising surface 56 and the other rising surface 56
May be connected near the stable point 15 by a curved surface 57 having a radius of curvature CR larger than the rotation radius r of the roller 5. In this case, the inclination of the rising surface 56 can be made steeper than when the rising surface is formed by a curved surface having a radius of curvature having a center of curvature on the vertical line of the stable point 15, so that the rollers 5 can be stabilized. You can quickly return to the point. Also, since one rising surface 56 and the other rising surface 56 are connected by a curved surface 57 having a radius of curvature CR larger than the rotation radius r of the roller 5 near the stable point 15,
The rollers 5 can pass through the stable points 15 smoothly.

Further, instead of the curved rising surfaces 16 and 16 shown in FIG. 7A, the rising surfaces 66 and 16 shown in FIG.
66 may be used. The rising surfaces 66, 66 are formed on one side of the stable point 15.
5 is a plane that rises linearly at a predetermined angle α from the stable point 15, and a rising surface 66 on the other side of the stable point 15 is a plane that rises linearly at a predetermined angle α from the stable point 15. And the one rising surface 6
6 and the other rising surface 66 are connected near the stable point 15 by a curved surface 67 having a radius of curvature ER larger than the rotation radius r of the roller 5. In this case, the restoring force can be set to a desired value only by setting the angle α of the rising surface 66. Since the rising surfaces 66 on both sides of the stable point 15 are connected by the curved surface 67, the rollers 5 can pass through the stable point 15 smoothly.

In the above-described embodiment, the upper base 1 and the lower base 3 are made of components having the same shape. Therefore, if the intermediate table 2 is further composed of the two components whose non-track-side back surfaces are coupled to each other, each of the upper table 1, the lower table 3, and the intermediate table 2 can be composed of only one type of component. From
Cost can be reduced.

In the above embodiment, when a cage for holding the rollers 5, 6 is provided, the rollers 5, 6 can be held by the cage to stabilize traveling.

Further, in the above embodiment, FIG.
Although the rollers 5 and 6 as rolling elements are cylindrical as shown in FIG. 4D, the rolling elements may be hourglass-shaped rollers 75 having a constricted center as shown in FIG. 4A. In this case, as shown in FIG.
6,77. Further, the rolling element may be a barrel roller 85 as shown in FIG. In this case, the raceway surface 86,
The cross section 87 has an arc shape as shown in FIG.
Further, as shown in FIG. 4 (C), the above-mentioned track surfaces are connected to the track surfaces 92, 9 by the upper surfaces 90A, 91A of the rail tracks 90, 91.
And flange portions 93, 9 sandwiching both side surfaces 90B, 90C, 91B, 91C of the rail tracks 90, 91 as rolling elements.
A flanged roller 96 having 5 may be used. In this case, the vertical dimension can be set by increasing the height of the rail tracks 90, 91. In addition, the rollers 96 are provided on the rail tracks 9 by the flange portions 93 and 95 of the flanged rollers 96.
Deviation from 0,91 can be prevented. FIG.
As shown in (D), rollers 101 having rounded corners of a cylinder may be used as rolling elements.

Further, as shown in FIG. 5 (A), a rolling element 11 in the form of a soloban ball in which two cones are connected at the bottom.
1 may be used. Then, grooves 112 and 11 having a substantially V-shaped cross section and having a rectangular cut 114 formed in the center in the width direction.
3 constitutes a raceway surface. In this case, the rolling elements 111 are hardly displaced from the raceway surface, and the vertical dimension can be reduced. Further, as shown in FIG. 5B, a spherical rolling element 121 may be used, and grooves 122 and 123 having a semicircular cross section may be used as raceway surfaces.

Further, as shown in FIG. 6, a rolling element 135 composed of two cylindrical portions 131 and 132 and a connecting rod 133 connecting the two cylindrical portions 131 and 132 may be used. Good. In this case, two rows of rolling surfaces 136 and 13 on which the cylindrical portions 131 and 132 run are used as rolling surfaces.
7 between the two rows of rolling surfaces 136 and 137.
38 are formed. The convex portion 138 is opposed to the end surfaces 131a and 132a of the cylindrical portions 131 and 132 with a predetermined small gap therebetween, so that the rolling element 135 is laterally shifted and deviates from the rolling surfaces 136 and 137. prevent.

Further, in the above-described embodiment, the X-direction orbit surface having the rising surface is formed on both the lower surface 10 of the upper table 1 and the upper surface 21 of the intermediate table 2. The directional track surface may be formed, and the other may be a flat track surface having no rising surface. Similarly,
Regarding the Y-direction orbital surface, the Y-direction orbital surface having the rising surface is also attached to the lower surface 27 of the intermediate table 2 or the upper surface 37 of the lower table.
May be formed only on one side, and the other may be formed with a flat Y-direction orbit surface having no rising surface.

As shown in FIG. 9C, a rolling element 154 having a roller 151 and gears 152 and 153 connected to both ends of the roller 151 may be used as the rolling element. In this case, for example, as shown in FIG.
Two racks 156, 15 are provided on the lower surface 155a of the upper base 155.
The gears 152 and 153 of the rolling element 154 are meshed with the two racks 156 and 157. And
As shown in FIG. 9B, a curved raceway surface 160 is formed on the upper surface 158a of the intermediate base 158. This track surface 16
0 has a width such that the roller 151 of the rolling element 154 can travel, and the protrusion 159 of the upper base 155 and the roller 1
Supports building weight from 51. Walls 161 and 162 for preventing rolling are formed at the rolling ends. The stopping wall surfaces 161 and 162 abut against the rolling elements 154 when the amplitude is excessive, and prevent the rolling elements 154 from deviating from the raceway surface 160. Further, as shown in FIGS. 9B and 9C, the outer diameter of the roller 151 and the pitch circle of the gears 152 and 153 are set to the same diameter. In this case, the gear 15
Since the rolling elements 154 do not slip with respect to the upper table 155 due to the engagement between the second table 153 and the racks 156 and 157, the upper table 155 and the intermediate table 158 are prevented from slipping.
Deviation of the relative position when the camera is stationary can be prevented. Note that FIG.
A rolling element 165 shown in FIG. 9D may be used instead of the rolling element 154 shown in FIG. In this rolling element 165, rollers 172 and 173 are connected to both sides of a central gear 171. In this case, one rack may be fixed to the lower surface 155a of the upper base 155, but the curved raceway surface formed on the upper surface 158a of the intermediate base 158 may be the two roller portions 172.
And 173 are required to run. In addition, in the seismic isolation device of the above embodiment, the damping force can be set without impairing the seismic isolation performance by using a weak damper as an attenuator in an auxiliary manner.

The above embodiment can also be applied to vibration isolation of a washroom or a toilet of a transportation system such as a train. in this case,
The upper stand 1 is fixed to the floor of the room to be subjected to vibration isolation, and the lower stand 3 is fixed to a train frame. Thereby, it is possible to prevent the vibration from being transmitted to the chamber from the wheel supported by the frame. In addition, the upper stand 1 automatically returns to a stable point when the train stops.

Further, in the above embodiment, the case where the automatic relative movement return device of the present invention is applied to the seismic isolation device has been described. It can also be applied to a swingable machining table. For example, a semiconductor wrapping device can be configured with the same configuration as the above embodiment. In this case, the conventional spherical finishing of the raceway surface is not required, and the manufacturing cost can be reduced.

As shown in FIGS. 13 (A) to 13 (C), two cylindrical roller portions 501 and 502 are connected by a core portion 503 as rolling elements, and both sides of the roller portions 501 and 502 are provided. Roller 507 formed with shaft projections 505 and 506
May be used. In this case, a central guide portion 510 having a central elongated hole 508 through which the center portion 503 of the rolling element 507 is inserted is formed on the upper surface 21 of the intermediate base 2, and shaft projections on both sides of the rolling element 507 are formed. Axial support portions 512 and 513 having recesses 511 into which 505 and 506 are fitted are formed in the lower portion of the upper base 1. Thus, the upper table 1 and the intermediate table 2 are vertically connected by the rolling elements 507. And then,
Although not shown, the same rolling element as the rolling element 507 is disposed between the intermediate table 2 and the upper surface 37 of the lower table 3, and the central guide portion 510 is formed on the lower surface 27 of the intermediate table 2, and the shaft support 512,
513 is formed on the upper surface 37 of the lower base 3. Thus, the intermediate table 2 and the lower table 3 can be vertically connected by the rolling elements 507. With such a configuration, for example, when applied to a vibration isolator of a high-rise building, when a tensile force generated by wind pressure is applied to the upper table 1, the upper table 1, the lower table 3, the intermediate table 2, the rolling elements 507 Can be prevented from being decomposed.

As shown in FIGS. 13D to 13E, a rolling element 521 having a central through-hole 520 is provided as a rolling element, and a shaft 522 passing through the through-hole 520 and a shaft 522
The arms 523 and 525 may be formed on the upper base 1 so that the rolling elements 521 idle with respect to the upper base 1 with the ends 22 fixed at both ends. Note that a bearing 524 is mounted between the rolling element 521 and the shaft 522. In this case, another rolling element 5 is placed between the lower surface 27 of the intermediate table 2 and the upper surface 37 of the lower table 3.
21 and the arms 523,5
The shaft 522 for fixing both ends with the arms 523 and 525 is made to pass through the through hole 520. According to this configuration, the rolling element 521 between the upper table 1 and the intermediate table 2 idles with respect to the upper table 1, and the rolling element 52 between the intermediate table 2 and the lower table 3.
1 rotates idle with respect to the intermediate table 2. Therefore, compared to the case where the rolling element 521 travels in contact with both the upper table 1 and the intermediate table 2, the intermediate table 2
And the relative movement amount between the upper base 1 and the upper base 1 can be reduced to half. Further, the relative movement amount of the lower base 3 and the intermediate base 2 with respect to the lateral movement amount of the lower base 3 is reduced to one half of the case where the rolling element 521 travels while contacting both the intermediate base 2 and the lower base 3. Can be reduced to Therefore, the seismic isolation capacity can be improved.

[0085] Second Example] Next, a second reference example of the present invention, in FIG. 10 (A) ~ (C) . In this second embodiment, an upper table 601 and a lower table 6
02 and an intermediate table 603. The upper stand 601
Has first and second track grooves 606 and 607 that are recessed in the horizontal direction on both side surfaces 608 and 610 in the horizontal direction. This first,
The second track grooves 606 and 607 have a stable point 605A substantially at the center of the track 605.
5, gradually falling in both directions. Also,
The lower base 602 is provided with the first and second track grooves 606 and 607.
Third, extending in a direction intersecting with
The fourth raceway grooves 612, 613 are aligned with both side portions 616, 6 in the horizontal direction.
17 The third and fourth raceway grooves 612 and 613 are
The trajectory 611 has a stable point 611A substantially at the center, and gradually rises from the stable point 611A in both directions of the trajectory 611. Further, the intermediate table 603 is provided with the first and second track grooves 60 on both sides 621 and 622 in the horizontal direction.
Fifth and sixth track grooves 62 horizontally opposed to 6,607
6,627. The fifth and sixth track grooves 626 and 62
7 has a stable point 625 substantially at the center of the track 677, and gradually rises from the stable point 625 in both directions of the track. Further, the intermediate table 603 has the third and fourth track grooves 612, 612 on both side surfaces 630, 631 in the horizontal direction.
7th and 8th track grooves 635 and 6 horizontally facing 613
36. The seventh and eighth track grooves 635 and 636 are
It has a stable point 633 substantially at the center of the orbit.
And gradually descends in both directions of the orbit.

The first, third, sixth, and eighth track grooves 606, 6
12,627,636 are the first support surfaces 606-1,612-1,627- which are oblique to the vertical direction.
1,636-1 and a second support surface 606-2,612 facing the oblique direction opposite to the oblique direction with respect to the vertical direction.
-2,627-2,636-2. Further, the second, fourth, fifth, and seventh track grooves 607, 613, 6
26,635 are the first support surfaces 606-1,612-
Third support surface 607-3, 613-3, 626-3, 635-3 opposed to 1,627-1,636-1 obliquely
And the second support surface 606-2,612-2,627-
Fourth support surface 62 facing diagonally opposite to 2,636-2
6-4, 635-4, 607-4, and 613-4.

A first rolling element 651 is disposed between the first raceway groove 606 and the fifth raceway groove 626.
Further, a second rolling element 652 is arranged between the second raceway groove 607 and the sixth raceway groove 627. In addition, the third
The third rolling element 6 is provided between the raceway groove 612 and the seventh raceway groove 635.
53 are arranged. Further, a fourth rolling element 654 is arranged between the fourth raceway groove 613 and the eighth raceway groove 636.

According to the second reference example having the above configuration, for example, when used in a seismic isolation device, the lower base 602 is fixed to the ground, and the upper base 601 is fixed to a building. Then, when there is no earthquake, the first rolling element 651 is sandwiched between the stable points of the first track groove 606 of the upper table 601 and the stable point of the fifth track groove 626 of the intermediate table 603 from both sides, It is stationary at the above stable point. Similarly, the second rolling element 652 is sandwiched between the stable point of the second raceway groove 607 of the upper base 601 and the stable point of the sixth raceway groove 627 of the intermediate base 603 from both sides. It is stationary. Also,
The third rolling element 653 is sandwiched from both sides by a stable point of the seventh track groove 635 of the intermediate table 603 and a stable point of the third track groove 612 of the lower table 602, and is stationary at the stable point. . Further, the fourth rolling element 654 is connected to the intermediate table 603.
Are stationary from the both sides between the stable point of the eighth track groove 636 and the stable point of the fourth track groove 613 of the lower base 602.

In this state, the weight of the above construction is
01, the first and fourth support surfaces 606-1, 607-4 of the first and second track grooves 606, 607, and the first and second rolling elements 651, 6
52, the third and second support surfaces 626-3 and 627-2 of the fifth and sixth track grooves 626 and 627 of the intermediate table 603, and the upper table 6 in this order.
01 to the intermediate platform 603. Further, the fourth and first support surfaces 635-4 and 638-1 of the seventh and eighth track grooves 635 and 638 of the intermediate table 603, and the second and fourth of the third and fourth track grooves 612 and 613 of the lower table 602. Third support surface 612-2,61
It is transmitted from the intermediate platform 603 to the lower platform 602 in the order of 3-3,
Can support large vertical loads.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base 602 moves in the horizontal direction together with the ground. Then, the third rolling element 653 travels in a substantially horizontal direction along the seventh track groove 635 and the third track groove 612, and the fourth rolling element 654 moves in the eighth track groove 636 and the fourth track groove 613. Travels in a substantially horizontal direction along the
The rolling element 651 is provided between the first raceway groove 606 and the fifth raceway groove 62.
6 in a substantially horizontal direction, and the second rolling element 652
Travels in a substantially horizontal direction along the sixth track groove 627 and the second track groove 607. Thereby, the horizontal shaking of the ground is not transmitted to the building.

According to the second reference example , the first rolling element 651 travels with respect to the first and fifth track grooves 606 and 626, and the second rolling element 652 has the second and sixth track grooves 607 and 627.
, The traveling of the third rolling element 653 in the third and seventh track grooves 612 and 635 and the traveling of the fourth rolling element 654 in the fourth and eighth track grooves 613 and 636, The upper base 601 can relatively move in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, each track groove 606,626 and 607,6
Since the lower base 602 and the upper base 601 are relatively slid by running the rolling elements 651, 652, 653, and 654 at 27, 612, 635, 613, and 636, the horizontal rigidity as an isolator can be sufficiently softened. , You can approach the absolute seismic isolation. Therefore,
Even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, each of the rolling elements 651 to 654 is connected to each of the track grooves 606, 626, 60.
7, 627, 612, 635, 613, 636 return to the above-mentioned stable point while reciprocating on both sides of the stable point, so that the upper base 601 returns to the stationary position with respect to the lower base 602, and moves the structure to the stationary ground. It can be returned to the hour position.

Further, when the high-rise building is exposed to the wind,
When a tensile force acts on the upper base 601 from this structure,
This tensile force is applied to the first and second track grooves 60 of the upper base 601.
6,607 second and third support surfaces 606-2,607-3,
The first and second rolling elements 651, 652, the fifth
The fourth and first support surfaces 626-of the sixth raceway grooves 626 and 627-
4,627-1, etc. in this order from the upper table 601 to the intermediate table 603. Further, the third and second support surfaces 635-3 and 636 of the seventh and eighth track grooves 635 and 636 of the intermediate table 603 are further provided.
-2, third and fourth rolling elements 653, 654, first and fourth support surfaces 612 of third and fourth track grooves 612, 613 of lower base 602
-1, 613-4, in the order from the intermediate platform 603 to the lower platform 602
Transmitted to. In this manner, the pulling force from the upper table 601 can be transmitted to the lower table 602 via the intermediate table 603, and it is possible to have a resistance to the pull.

In the second reference example , as shown in FIG. 10C, the first support surface 606-1 and the second support surface 606
−2 form a substantially V-shaped track groove 606, and the third support surface 626-3 and the fourth support surface 626-4 form a substantially V-shaped track groove 626. ),
Curved first support surface 606-1A and second support surface 606-
2A form a track groove 606A having a substantially semicircular cross section, and are curved third support surface 626-3A and fourth support surface 626-4.
A may form a raceway groove 626A having a substantially semicircular cross section. As shown in FIG. 10E, the rolling element is a cylindrical roller 661, and the circumferential surface 661A of the roller 661 has a fourth support surface 626-4 and a second support surface 606-.
2, while rolling while contacting the end surface 66 of the roller 661.
1B and 661C are the first and third support surfaces 606-1 and 606-
3 may be non-contact. In this case, FIG.
As shown in (F), the first and third support surfaces 606-1, 66-1
It suffices to provide another roller 662 that rolls while being in contact with 26-3, but does not contact the fourth and second support surfaces 626-4, 606-2.

In the second reference example , the upper base 601
Of the first and second raceway grooves 606 and 607 are convexly curved, and the fifth and sixth raceway grooves 626 and 6 of the intermediate base 603 are curved.
27, the track 677 of the intermediate platform 603 is curved upward and the track 678 of the seventh and eighth track grooves 635, 636 is curved upward, and the third and fourth track grooves 612, 613 of the lower platform 602.
Orbit 611 was curved convexly downward. In contrast, FIG.
As shown in FIG. 1, each track groove 680, 681, 682, 68
The third track 698 is curved convexly downward, and each track groove 684,
The tracks 699 of 685, 686, and 687 may be curved convexly upward. In this case, a plurality of rolling elements 688 can be arranged between the first raceway groove 680 and the fifth raceway groove 682 and between the second raceway groove 681 and the sixth raceway groove 683. Between the third raceway groove 684 and the fourth raceway groove 685 and the eighth raceway groove 687, respectively.
9, the rigidity can be increased. Also, as shown in FIGS. 11A and 11B,
When a support arm 691 that is supported by the side portions 690A and 690B of the upper base 690 and straddles the upper base 690 is provided,
Since the support arm 691 can be inclined and fixed to the inclined surface of the structure, the upper base 690 can be connected to the inclined surface of the structure.

[0097] Third Example Next, a third reference example of the present invention in FIG. This third reference example includes an upper table 701, a lower table 702, and an intermediate table 703.
And The intermediate table 703 includes an upper slide portion 7
04 and a lower slide portion 705. The upper slide portion 704 and the lower slide portion 705 are substantially 90 degrees around a vertical axis.
The phases are shifted by an angle of ° and are connected at an intermediate portion 710.

The upper base 701 has an upper facing portion 706 facing the upper sliding portion 704 from above and a lower facing portion 707 facing the upper sliding portion 704 from below. The upper facing portion 706 and the lower facing portion 707 are connected by side portions 711 and 712 on both sides. Support shafts 713 and 714 projecting in the horizontal direction are fixed to the side portions 711 and 712.

The lower base 702 has a lower facing portion 717 facing the lower sliding portion 705 from below and an upper facing portion 718 facing the lower sliding portion 705 from above. The lower facing portion 717 and the upper facing portion 718 are connected by side portions 721 and 722 on both sides. And
Support shafts 715 and 716 protruding in the horizontal direction are fixed to the side portions 721 and 722.

The first slide between the upper slide portion 704 of the intermediate table 710 and the upper facing portion 706 of the upper table 701
The rolling elements 723 and 724 are arranged. In addition, second rolling elements 725 and 726 are arranged between the upper slide portion 704 of the intermediate table 710 and the lower facing portion 707 of the upper table 701. In addition, the lower slide portion 7 of the intermediate table 710
The third rolling elements 727 and 728 are disposed between the lower part 05 and the upper facing part 718 of the lower base 702. In addition, fourth rolling elements 729 and 730 are arranged between the lower slide portion 705 of the intermediate base 710 and the lower facing part 717 of the lower base 702.

Then, the upper facing portion 706 of the upper base 701
The lower surface 706A has two rows of substantially funnel-shaped grooves 731,
732 are formed. These two rows of grooves 731 and 7
32 is an inclined surface 731A, 731B and an inclined surface 732
A, 732B. The inclined surfaces 731A and 731
B and the inclined surfaces 732A and 732B have a substantially central stable point 733 as shown in FIG.
From 33, the first rolling elements 723, 724 gradually rise in both directions in which they travel.

Further, the upper surface 7 of the upper slide portion 704
04A is provided with two grooves 731 and 732 facing the two rows.
Row grooves 735 and 736 are formed. The two rows of grooves 735, 736 are formed with inclined surfaces 735A, 735B, 736A,
736B. The inclined surfaces 735A, 735B, 73
12A and 736B have a substantially central stable point 737 as shown in FIG.
23,724 are gradually rising in both directions of travel.

On the upper surface of the lower opposing portion 707 of the upper base 701, two rows of grooves 741, 742 having a substantially funnel-shaped cross section are formed. These two rows of grooves 741, 742 have inclined surfaces 741A, 741B, 742A, 742B.
The inclined surfaces 741A, 741B, 742A, 742B are
As shown in FIG. 12 (B), it has a substantially central stable point 744, and from this stable point 744, the second rolling elements 725, 726
Is gradually rising in both directions.

Further, the upper slide portion 7 of the intermediate table 710
On the lower surface of 04, two rows of grooves 745 and 746 are formed opposite to the two rows of grooves 741 and 742. These two rows of grooves 745, 746 are inclined surfaces 745A, 745B, 746.
A, 746B. These inclined surfaces 745A, 745B,
As shown in FIG. 12B, 746A and 746B have a substantially central stable point 747, and gradually rise from this stable point 747 in both directions in which the second rolling elements 725 and 726 travel.

Further, the upper facing portion 718 of the lower base 702
Are formed with two rows of substantially funnel-shaped grooves 751 and 752 in the lower surface of. The two rows of grooves 751 and 752
Inclined surfaces 751A and 751B and inclined surfaces 752A and 752
B. As shown in FIG. 12B, the inclined surfaces 751A, 751B and the inclined surfaces 752A, 752B have a substantially central stable point 753, from which the third rolling elements 727, 728 run in both directions. It is gradually rising toward.

Further, two rows of grooves 7 opposed to the two rows of grooves 751 and 752 are provided on the upper surface of the lower slide portion 705.
55,756 are formed. These two rows of grooves 755,7
56 is an inclined surface 755A, 755B, 756A, 756B
Having. This inclined surface 755A, 755B, 766A, 7
66B is a substantially central stable point 76 as shown in FIG.
3 and the third rolling elements 727, 7
28 gradually rises in both directions of travel.

On the upper surface of the lower facing portion 717 of the lower base 702, two rows of grooves 771, 772 having a substantially funnel-shaped cross section are formed. The two rows of grooves 771, 772 have inclined surfaces 771A, 771B, 772A, 772B.
This inclined surface 771A, 771B, 772A, 772B is
As shown in FIG. 12 (B), it has a substantially central stable point 774, and from this stable point 774, the fourth rolling elements 729, 730
Is gradually rising in both directions.

Further, the lower slide portion 7 of the intermediate table 710
On the lower surface of 05, two rows of grooves 781 and 782 are formed opposite to the two rows of grooves 771 and 772. These two rows of grooves 781 and 782 are inclined surfaces 781A, 781B and 782.
A, 782B. The inclined surfaces 781A, 781B,
As shown in FIG. 12B, 782A and 782B have a substantially central stable point 785, and gradually rise from this stable point 785 in both directions in which the fourth rolling elements 729 and 730 travel.

The grooves 731 and 732 and the grooves 735 and 736 constitute a first raceway surface, and the grooves 745 and 746 and the grooves 741 and 741,
742 constitutes a second raceway surface, and the grooves 751 and 752 and the grooves 755 and 756 form a third raceway surface.
The groove 782 and the grooves 771, 772 constitute a fourth raceway surface. The first and second track surfaces extend in a direction substantially orthogonal to the third and fourth track surfaces.

According to the third embodiment , for example, when used in a seismic isolation device, the lower base 702 is fixed to the ground, and the upper base 701 is fixed to a building. Here, the support shafts 713 and 714 of the upper base 701 can be used to connect the support shafts 713 and 714 to the building. Further, the support shafts 715 and 716 of the lower base 702 are provided.
, The support shafts 715 and 716 can be connected to the ground. When there is no earthquake, the first, second, third, and fourth rolling elements 723, 724, 725, 72
6,727,728,729,730 is the stable point 733,
737,747,744,753,763,785,784. In this state, the weight of the above-mentioned structure is changed to the upper slide 704, the upper slide 704, the intermediate slide 7 and the upper slide 701, the intermediate slide 703.
The lower slide portion 705 and the lower base 702 are transmitted vertically downward in this order, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base 702 moves in the horizontal direction together with the ground. Then, the third and fourth rolling elements 727, 728, 7
Grooves 751, 752, in which 29, 730 form third and fourth raceway surfaces,
755,756,781,782,771,772, and the first and second rolling elements 723,724,725,726.
Are the grooves 731, 732, 735 forming the first and second raceway surfaces,
The vehicle travels along 736,745,746,741,742. Thereby, the horizontal shaking of the ground is not transmitted to the building.

According to the third reference example , the first and second rolling elements 723, 724, 725, and 726 travel on the first and second track surfaces and the third and fourth rolling elements 72.
The upper platform 701 can move relative to the lower platform 702 in any horizontal direction relative to the lower platform 702 by traveling of the 7,728,729,730 with respect to the third and fourth track surfaces. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure. The rolling elements 723, 724, 72 on the raceway surface
Since the lower table 702 and the upper table 701 are relatively slid during the travel of 5,726 and 727,728,729,730, the horizontal rigidity as an isolator can be sufficiently softened and can be made closer to the absolute seismic isolation. . Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the first,
Second, third and fourth rolling elements 723, 724, 725, 726, 7
27,728,729,730 are grooves 731,732,735,736,745,74 forming the first, second, third, and fourth raceway surfaces.
6,741,742,751,752,755,756,78
Stability point of 1,782,771,772 733,737,74
Since it returns to the stable point while reciprocating on both sides of 7,744,753,763,785,774, the upper table 701
Can return to the stationary position with respect to the lower base 702, and can return the building to the stationary position with respect to the ground. Further, when wind is applied to the high-rise building and a tensile force acts on the upper table 701 from this structure, the tensile force is transmitted from the lower facing portion 707 of the upper table 701 to the intermediate table 70.
3 is transmitted to the upper slide portion 704, and the upper slide portion 7
04 to the lower slide portion 705, and from the lower slide portion 705 to the lower base 702. In this manner, the pulling force from the upper table 701 can be transmitted to the lower table 702 via the intermediate table 703, and it is possible to have a resistance to the pull.

[0114]

As apparent from the above description, the seismic isolation device according to the first aspect of the present invention includes an upper table, a lower table, and an intermediate table, and a first rolling element is disposed between the upper table and the intermediate table. A second rolling element is disposed between the intermediate table and the lower table, and is formed on at least one of the lower surface of the upper table or the upper surface of the intermediate table. A first raceway surface gradually rising in both directions in which the rolling elements travel, and at least one of a lower surface of the intermediate platform or an upper surface of the lower platform, and extends in a direction intersecting the first raceway surface. And a second raceway surface gradually rising from the stable point in both directions in which the second rolling element travels.

According to the first aspect of the present invention, for example,
When used in a seismic isolation device, the lower platform is fixed to the ground, and the upper platform is fixed to a structure. When there is no earthquake, the first rolling elements are stationary at the stable points on the first raceway surface, and the second rolling elements are stationary at the stable points on the second raceway surface. In this state, the weight of the structure is transmitted vertically downward in the order of the upper table, the first rolling element, the intermediate table, the second rolling element, and the lower table, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the second rolling element travels along the second raceway surface, and the first rolling element travels along the first raceway surface, whereby horizontal vibration of the ground is not transmitted to the structure. .

According to the first aspect of the present invention, the first rolling element runs on the first track surface and the second rolling element moves on the second track.
By traveling on the track surface, the upper platform can move relative to the lower platform in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base and the upper base are relatively slid during the running of the rolling elements on the raceway surface, the horizontal rigidity of the isolator can be sufficiently softened, and it can be made closer to the absolute seismic isolation. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, the first rolling element returns to the stable point while reciprocating on the track surfaces on both sides of the stable point on the first track surface. It can return to a resting position and return the structure to a resting position relative to the ground.

Further, if a swingable machining device used as a semiconductor wrapping device is constituted by the relative movement automatic return device of the present invention, it is sufficient that each track surface is one-dimensionally curved. Such spherical finishing is not required, and the manufacturing cost is reduced.

According to the first aspect of the present invention, the first track surface and the second track surface extend in directions orthogonal to each other.

According to the first aspect of the present invention, relative sliding between the upper base and the lower base in all the horizontal directions is smaller than that in the case where the first track surface and the second track surface are not orthogonal. It can be smooth.

[0123] Further, the invention of claim 1, said first raceway surface and the second track surface is a curved surface which is curved in the running direction of the rolling element.

According to the first aspect of the present invention, the horizontal rigidity can be set to a desired value by setting the curvature of the curved surface.

Further, the invention of claim 1 is that the portion of the raceway surface on one side of the stable point is a curved surface having a radius of curvature having a center of curvature deviated to the other side from the stable point. Is a curved surface having a radius of curvature having a center of curvature deviated to one side from the stable point, and the one orbital surface portion and the other orbital surface portion are In the vicinity of the stable point, the rolling elements are connected by a curved surface having a radius of curvature larger than the turning radius of the rolling elements.

According to the first aspect of the present invention, the inclination of the raceway surface is made steeper than when the raceway surface portion is formed by a curved surface having a radius of curvature having a center of curvature on the vertical line of the stable point. Therefore, the rolling element can be quickly returned to the stable point. In addition, the portion of one raceway surface and the portion of the other raceway surface are connected by a curved surface having a radius of curvature larger than the radius of rotation of the rolling element in the vicinity of the stable point. Can pass smoothly.

Further, in one reference example, the portion of the orbital surface on one side of the stable point is a plane rising linearly at a predetermined angle from the stable point, and the orbital surface on the other side of the stable point is formed. The surface portion is a plane that rises linearly at a predetermined angle from the stable point, and the one track surface portion and the other track surface portion have a turning radius of the rolling element near the stable point. It is connected by a curved surface with a larger radius of curvature.

According to this reference example , the restoring force can be set to a desired value only by setting the angle of the above-mentioned track surface portion. Further, since the portions of the raceway surfaces on both sides of the stable point are connected by the curved surface, the rolling element can smoothly pass through the stable point.

Further, in one embodiment , at least one of the first orbital surface and the second orbital surface is arranged in a plurality in the horizontal direction and is parallel to each other.

According to this embodiment , as compared with the case where the raceway surface is a single row, the support stability in the vertical direction can be improved with less raceway surface space, and the relative sliding of the upper base and the lower base can be performed stably and smoothly. it can. In addition, the rolling element can be downsized by reducing the width per track surface.

In one embodiment , the first or second raceway surface is a deep groove, and the first or second rolling element is guided by a side wall of the deep groove.

According to this embodiment , the rolling element can be guided along the side wall of the first or second raceway surface of the deep groove so as not to deviate from the raceway.

In one embodiment , the upper base and the lower base are made of parts having the same shape, and the intermediate base is made up of two parts whose backs on the non-track side are joined together.

According to this embodiment , each of the upper, lower and intermediate stands can be composed of only one kind of component, so that the cost can be reduced.

In one embodiment, a holder for holding the rolling element is provided.

According to this embodiment , the running can be stabilized by holding the rolling elements by the cage.

According to a second aspect of the present invention, in the first aspect, the raceway surface is constituted by an upper surface of a rail raceway, and the rolling element has a flange portion sandwiching both side surfaces of the rail raceway.

According to the second aspect of the present invention, the vertical dimension can be set by increasing the height of the rail track. Further, the rolling element can be prevented from coming off the rail track by the flange of the rolling element.

According to a third aspect of the present invention, in the first aspect, the rolling element has a solo-bang ball shape in which two cones are connected at a bottom surface, and the raceway surface is formed by a groove having a substantially V-shaped cross section. Become.

According to the third aspect of the present invention, the rolling elements are less likely to be displaced from the raceway surface, and the vertical dimension can be reduced.

According to a fourth aspect of the present invention, in the first aspect, the track surface is formed on one of the lower surface of the upper table and the upper surface of the intermediate table, and the track surface is formed on the lower surface of the upper table or the upper surface of the intermediate table. A rack is formed on the other side, and the first rolling element has a gear that meshes with the rack.

According to the fourth aspect of the present invention, the first rolling element does not slip with respect to the upper table or the intermediate table due to the engagement between the gear and the rack. Deviation of the relative position at rest can be prevented.

According to a fifth aspect of the present invention, there is provided the relative movement automatic return device according to the first aspect, wherein
At least one of the track surfaces has a stopper surface extending substantially vertically at the track end.

According to the fifth aspect of the present invention, when the rolling element travels to the end of the track, it comes into contact with the stopper surface and stops, so that it is possible to prevent the rolling element from climbing over the end of the track and deviating from the track.

According to a sixth aspect of the present invention, in the first aspect, the first rolling element is rotatably supported by one of the upper table and the intermediate table, and is capable of traveling on the other of the upper table and the intermediate table while being vertically movable. The second rolling element is rotatably supported by one of the intermediate table and the lower table, and is capable of traveling on the other of the intermediate table and the lower table, and the vertical movement is restricted. And so on.

According to the sixth aspect of the present invention, the vertical movement of the upper table and the intermediate table is restricted via the first rolling element.
The vertical movement of the intermediate table and the lower table is regulated via the second rolling elements. Therefore, for example, when the present invention is applied to a vibration isolator of a high-rise building, when a tensile force generated by wind pressure is applied to the upper platform, the upper platform, the lower platform, the intermediate platform, and the first and second rolling elements are disassembled. Can be prevented.

According to a seventh aspect of the present invention, in the relative movement automatic return device according to the first aspect, the first rolling element is fixed to the upper base, and is pivotally supported so that the first rolling element idles with respect to the upper base. And at least one of second bearing means fixed to the intermediate table and supporting the second rolling element so that the second rolling element idles with respect to the intermediate table. .

According to the seventh aspect of the present invention, when the first bearing is provided, the first rolling element contacts both the upper table and the intermediate table and travels when compared with the case where the first rolling element contacts both the upper table and the intermediate table. The relative movement of the intermediate table and the upper table to the horizontal movement of the
Can be reduced to In addition, when the second bearing is provided, compared with the case where the second rolling element travels in contact with both the intermediate base and the lower base, the lower base and the intermediate base with respect to the lateral movement amount of the lower base are different. The relative movement amount can be reduced by half. Therefore, the seismic isolation capacity can be improved.

Further, in one reference example , an upper table, a lower table, and an intermediate table are provided, and the upper table gradually falls in both directions of the track from the stable point at the approximate center of the track. Alternatively, the first and second track grooves which are standing up and are recessed in the horizontal direction are provided on both side surfaces in the horizontal direction, and the lower base extends in a direction intersecting with the first and second track grooves. A substantially central stable point and gradually rising in both directions of the track from the stable point, and having third and fourth track grooves which are recessed in the horizontal direction on both side surfaces in the horizontal direction. On both sides of the track, a stable point substantially at the center of the track and fifth and sixth tracks that gradually rise from both the stable point in both directions of the track and that face the first and second track grooves in the horizontal direction. Grooves and a stable point at the approximate center of the track and from this stable point in both directions of the track And has a seventh and eighth track groove horizontally facing the third and fourth track grooves, the first, third, sixth, and eighth track grooves. The raceway groove includes a first support surface that faces obliquely with respect to the vertical direction, and a second support surface that faces obliquely opposite to the oblique direction with respect to the vertical direction. The fourth, fifth, and seventh track grooves include a third support surface obliquely facing the first support surface and a fourth support surface opposing the second support surface in an oblique direction. A first rolling element is disposed between the first and fifth track grooves, and a second rolling element is disposed between the second and sixth track grooves. A third rolling element is arranged between the seventh raceway groove, and a fourth rolling element is arranged between the fourth raceway groove and the eighth raceway groove.

According to this reference example , for example, when used in a seismic isolation device, the lower platform is fixed to the ground, and the upper platform is fixed to a structure. When there is no earthquake, the first rolling element is sandwiched from both sides between the stable point of the first track groove of the upper table and the stable point of the fifth track groove of the intermediate table, and stops at the stable point. are doing. Similarly, the second rolling element is
It is sandwiched from both sides by the stable point of the second track groove of the upper table and the stable point of the sixth track groove of the intermediate table, and is stationary at the stable point. Further, the third rolling element is sandwiched from both sides by a stable point of the seventh track groove of the intermediate platform and a stable point of the third track groove of the lower platform, and is stationary at the stable point. In addition, the fourth
The rolling element is sandwiched from both sides by a stable point of the eighth track groove of the intermediate platform and a stable point of the fourth track groove of the lower platform, and is stationary at the stable point.

In this state, the weight of the above-mentioned structure is determined by the first and fourth support surfaces of the first and second track grooves of the upper stand, the first and second rolling elements, and the fifth and sixth track grooves of the intermediate stand. The third and second support surfaces are transmitted from the upper platform to the intermediate platform in this order, and the fourth and first support surfaces of the seventh and eighth track grooves of the intermediate platform, and the second and second of the third and fourth track grooves of the lower platform. It can be transmitted from the intermediate table to the lower table in the order of the three support surfaces, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the third rolling element travels in a substantially horizontal direction along the seventh track groove and the third track groove, and the fourth rolling element moves in a substantially horizontal direction along the eighth track groove and the fourth track groove. The first rolling element travels in a substantially horizontal direction along the first track groove and the fifth track groove, and the second rolling element travels substantially along the sixth track groove and the second track groove. Drive horizontally. Thereby, the horizontal shaking of the ground is not transmitted to the building.

According to this embodiment , the running of the first rolling element in the first and fifth track grooves, the running of the second rolling element in the second and sixth track grooves, and the third rolling element in the third , 7th
Running on the raceway groove and the fourth and eighth rolling elements of the fourth rolling element
By traveling with respect to the raceway groove, the upper table can move relative to the lower table in an arbitrary horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

In addition, since the lower base and the upper base are relatively slid during the running of each rolling element in each raceway groove, the horizontal rigidity of the isolator can be sufficiently softened and can be made closer to the absolute seismic isolation. Therefore,
Even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the rolling elements return to the stable points while reciprocating on both sides of the stable points of the track grooves. And the structure can be returned to a stationary position relative to the ground.

Further, the wind hits the high-rise building,
When a tensile force acts on the upper table from this structure, the tensile force is applied to the second and third support surfaces of the first and second track grooves, the first and second rolling elements, and the intermediate table of the upper table. 5, the fourth and first support surfaces of the sixth track groove are transmitted from the upper table to the intermediate table in this order, and the third and second support surfaces of the seventh and eighth track grooves of the intermediate table, and the third and fourth rolling elements. , And the first and fourth support surfaces of the third and fourth raceway grooves of the lower platform, in this order, from the intermediate platform to the lower platform. In this way, the pulling force from the upper table can be transmitted to the lower table via the intermediate table, and it is possible to have a resistance to the pull.

Further, in one reference example , an upper table, a lower table, and an intermediate table are provided, the intermediate table has an upper slide section and a lower slide section, and the upper table is opposed to the upper slide section from above. A lower facing portion facing the upper sliding portion from below, and the lower base is configured to face a lower facing portion facing the lower sliding portion from below and an upper facing portion facing the lower sliding portion from above. A first rolling element is disposed between the upper slide portion of the intermediate platform and the upper facing portion of the upper platform, and between the upper slide portion of the intermediate platform and the lower facing portion of the upper platform. A second rolling element is disposed, and a third rolling element is disposed between the lower slide portion of the intermediate platform and the upper facing portion of the lower platform. The third rolling body is disposed between the lower slide portion of the intermediate platform and the lower facing portion of the lower platform. A fourth rolling element is interposed between the lower surface and the lower surface of the upper facing portion of the upper base or the inner surface of the upper rolling base. A first track surface formed on at least one of the upper surfaces of the upper slide portion of the table, and a stable point and a first track surface gradually rising from the stable point in both directions in which the first rolling element travels; It is formed on at least one of the upper surface of the facing portion or the lower surface of the upper slide portion of the intermediate table.
A second raceway surface that gradually rises in both directions in which the rolling elements travel, and a lower surface of the upper facing portion of the lower platform or at least one of an upper surface of a lower sliding portion of the intermediate platform. From this stable point, the third rolling element gradually rises in both directions in which the third rolling element travels.
A track surface and at least one of the upper surface of the lower opposing portion of the lower platform or the lower surface of the lower slide portion of the intermediate portion, and are formed at a stable point and in both directions in which the fourth rolling element travels from the stable point. A fourth orbital surface gradually rising, and the first and second orbital surfaces extend in a direction intersecting the third and fourth orbital surfaces.

According to this reference example , for example, when used in a seismic isolation device, the lower stand is fixed to the ground, and the upper stand is fixed to a structure. When there is no earthquake, the first, second, third, and fourth rolling elements are stationary at the stable points on the first, second, third, and fourth raceway surfaces. In this state, the weight of the structure is transmitted vertically downward in the order of the upper table, the upper slide section of the intermediate table, the lower slide section of the intermediate table, and the lower table, and can support a large load in the vertical direction.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the third and fourth rolling elements travel along the third and fourth raceway surfaces, and the first and second rolling elements travel along the first and second raceway surfaces. Thereby, the horizontal shaking of the ground is not transmitted to the building.

According to this embodiment , the first and second rolling elements travel on the first and second raceways and the third and fourth rolling elements travel on the third and fourth raceways. The upper table can move relative to the lower table in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower table and the upper table are relatively slid by the rolling elements running on the raceway surface, the horizontal rigidity of the isolator can be sufficiently softened, and it can be made closer to the absolute seismic isolation. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the first,
The second, third, and fourth rolling elements return to the stable point while reciprocating on both sides of the stable point on the first, second, third, and fourth raceway surfaces. And the structure can be returned to a stationary position relative to the ground.

Further, when the high-rise building was hit by wind,
When a tensile force acts on the upper table from this structure, the tensile force is transmitted from the lower facing portion of the upper table to the upper slide section of the intermediate table, transmitted from the upper slide section to the lower slide section, and is transmitted to the lower slide section. Transmitted to Shimodai. In this way, the pulling force from the upper table can be transmitted to the lower table via the intermediate table, and it is possible to have a resistance to the pull.

[Brief description of the drawings]

FIG. 1A is a perspective view of a seismic isolation device as a reference example of a relative movement automatic return device according to the present invention, and FIG.
Is a perspective view of an upper base of the seismic isolation device, FIG. 1 (C) is a perspective view of an intermediate base of the seismic isolation device, and FIG. 1 (D) is a perspective view of a lower base of the seismic isolation device. is there.

FIG. 2 is a plan view showing a lower surface of an upper base of the seismic isolation device.

FIG. 3 is a sectional view taken along line AA of FIG. 2;

[4] FIG. 4 (A) ~ (D) is a fragmentary cross-sectional view of a modification of the lower Symbol embodiment.

[5] FIG. 5 (A), (B) is a fragmentary cross-sectional view of a modification of the lower Symbol embodiment.

6 is a fragmentary cross-sectional view of a modification of the lower Symbol embodiment.

7A is a cross-sectional view of a main part showing a shape of a raceway surface of the reference example , and FIG. 7B is a cross-sectional view of a main part showing a shape of a raceway surface of the embodiment .

FIG. 8 is a sectional view showing a shape of a modified example of the raceway surface of the embodiment.

9A is a perspective view showing a lower surface of an upper base of a modification of the embodiment, FIG. 9B is a cross-sectional view of the modification, and FIG. It is a figure which shows an example of the rolling element of an example, and FIG.9 (D) is a figure which shows another example of the rolling element of this modification.

[10] FIG. 10 (A) is a sectional view of a second reference example of the relative movement automatic return device of the present invention, FIG. 10 (B) shows a picture obtained by viewing the second reference example from the side It is a side view, FIG.10 (C) is an expanded sectional view of the track groove of the said 2nd reference example , FIG.10 (D) is sectional drawing of the modification of the said track groove,
FIG. 10E is a diagram showing a modified example of the rolling element of the second reference example , and FIG. 10F is a diagram showing an example of an arrangement state of the rolling element of the modified example.

FIG. 11A is a sectional view showing a modification of the second reference example , and FIG. 11B is a side view of the modification.

[12] FIG. 12 (A) is a cross-sectional view of a third reference example relative movement automatic return device of the present invention, FIG. 12 (B) is a partial side view of the third embodiment.

13A is a top side view of a modification of the above embodiment, FIG. 13B is a cross-sectional view of the above modification, and FIG. 13 (D) is a schematic view illustrating a supporting state of the rolling element of this modification, and FIG. 13 (E) is a cross-sectional view of a main part illustrating the supporting state of the rolling element. It is.

FIG. 14 is a sectional view of a laminated rubber isolator as a conventional seismic isolation device.

FIG. 15 is a sectional view of a main part of a conventional semiconductor lapping apparatus.

[Explanation of symbols]

1 ... Upper stand, 2 ... Intermediate stand, 3 ... Lower stand, 5,6 ... Roller, 7 ...
Lower surface, 8: screw hole, 10: lower surface, 11 to 14: track surface in X direction, 11a, 12a, 13a, 14a: track end, 15 ...
Stable point, 16: rising surface, 23 to 26: X-direction orbital surface, 27: lower surface, 31 to 34, 38 to 41: Y-direction orbital surface, R, AR, BR, CR, ER: radius of curvature, α: angle , 5
6, 66 ... rising surface, 57, 67 ... curved surface, 75, 85
… Roller, 76,77… Rising surface, 86,87,92,9
4: Track surface, 90, 91: Rail track, 96: Roller with flange,
151, 172, 173: roller section, 152, 153: gear, 155: upper base, 156, 157: rack, 158 ...
Intermediate table, 501: roller part, 502: roller part, 503: core part, 505, 506: shaft projection, 507: rolling element, 51
2,513: shaft support, 520: central through hole, 521: rolling element, 522: shaft, 524: bearing, 601: upper base, 602: lower base, 603: intermediate base, 605: track, 6
05A: stable point, 606: first track groove, 607: second track groove, 611: track, 611A: stable point, 612: third
Track groove, 613: fourth track groove, 625: stable point, 626
... Fifth track groove, 627 ... Sixth track groove, 635 ... Seventh track groove, 636 ... Eighth track groove, 651 ... First rolling element, 652
.. 2nd rolling element, 653 3rd rolling element, 654 4th rolling element, 701 ... upper table, 702 ... lower table, 703 ... intermediate table, 7
04 ... upper slide part, 705 ... lower slide part, 706 ...
Upper facing part, 707 ... Lower facing part, 713, 714, 715,
716: support shaft, 717: lower facing portion, 718: upper facing portion, 723, 724: first rolling element, 725, 726 ... second
Rolling element, 727, 728 ... Third rolling element, 729, 730 ...
4th rolling element, 731,732 ... groove, 733 ... stable point, 7
35,736 ... groove, 741,742 ... groove, 744 ... stable point, 745,746 ... groove, 747 ... stable point, 751, 75
2 ... groove, 753 ... stable point, 755, 756 ... groove, 763
... Stable point, 771,772 ... Groove, 774 ... Stable point, 78
1,782: groove, 785: stable point.

Claims (7)

(57) [Claims] An upper table, a lower table, and an intermediate table, wherein a first rolling element is disposed between the upper table and the intermediate table, and a second rolling element is disposed between the intermediate table and the lower table. And is formed on at least one of the lower surface of the upper table and the upper surface of the intermediate table.
A first track surface gradually rising in both directions in which the rolling elements travel, and formed on at least one of the lower surface of the intermediate platform or the upper surface of the lower platform, and extends in a direction intersecting with the first track surface. And the second rolling element gradually rising from the stable point in both directions in which the second rolling element travels.
And a raceway surface, and the first raceway surface and the second raceway surface extend in directions perpendicular to each other, said first raceway surface and the second raceway surface in the running direction of the rolling element
It is a curved surface, and the portion of the track surface on one side of the stable point is
Surface with a radius of curvature having a center of curvature offset to the other side
And the part of the raceway surface on the other side of the stable point
Curvature half with curvature center offset to one side from fixed point
Diameter curved surface, and the above-mentioned one track surface portion and the other
Of the raceway surface is the rotation of the rolling element near the stable point.
An automatic relative movement return device characterized by being connected by a curved surface having a radius of curvature larger than the turning radius . 2. The relative movement automatic return device according to claim 1, wherein the track surface is formed by an upper surface of a rail track, and the rolling element has a flange portion sandwiching both side surfaces of the rail track. A relative movement automatic return device. 3. The relative movement automatic return device according to claim 1, wherein the rolling element has a shape of a solo ban ball in which two cones are connected at a bottom surface, and the raceway surface has a groove having a substantially V-shaped cross section. An automatic relative movement return device comprising: 4. The relative movement automatic return device according to claim 1, wherein the track surface is formed on one of a lower surface of the upper table and an upper surface of the intermediate table, and a lower surface of the upper table or an upper surface of the intermediate table. A relative movement automatic return device, characterized in that a rack is formed on the other side, and the first rolling element has a gear that meshes with the rack. 5. The relative movement automatic return device according to claim 1, wherein at least one of the first and second track surfaces has a stopper surface extending substantially vertically at a track end. A relative movement automatic return device characterized by the above-mentioned. 6. The relative movement automatic return device according to claim 1, wherein the first rolling element is pivotally supported by one of the upper table and the intermediate table, and is capable of traveling to the other of the upper table and the intermediate table. The second rolling element is rotatably supported by one of the intermediate table and the lower table, and is capable of traveling on the other of the intermediate table and the lower table, and the vertical movement is restricted. Automatic return device for relative movement, characterized in that it is connected in such a manner as to be able to move. 7. The relative movement automatic return device according to claim 1, wherein the first rolling means is fixed to the upper base, and supports the first rolling element so as to idle around the upper base. A relative movement characterized by being provided with at least one of second bearing means fixed to the intermediate table and supporting the second rolling element so that the second rolling element idles with respect to the intermediate table. Automatic return device.