JP2000291728A - Automatic relative moving reset device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely prevent shaking of an earthquake from being transmitted to a building, by quickly generating displacement in the horizontal direction. SOLUTION: This automatic relative moving reset device comprises an upper base 1, intermediate base 3, and a lower base 2. Four arc-shaped through holes 8 gradually lowered down from a stable point P1 are formed in the upper base 1. Four arc-shaped through holes 15 gradually rising up from a stable point P2 are formed in the lower base 2. Four pairs of arc-shaped through holes 25, 26 gradually rising up from a stable point P3 are formed in an upper part of the intermediate base 3, and four pairs of arc-shaped through holes 35, 36 gradually lowered down from a stable point P4 are formed in a lower part of the intermediate base 3. A cylinder rolling unit 51 is fitted to the arc-shaped through holes 8 and 25, 26, and a cylinder rolling unit 60 is fitted to the arc- shaped through holes 35, 36 and 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is suitable for use as a seismic isolation device for preventing the vibration of an earthquake from being transmitted to a seismic isolation target such as a structure. The present invention relates to a relative movement automatic return device that allows a horizontal movement to be allowed and at the same time automatically attenuates the lateral movement to return the upper base and the lower base to an initial stable position.

[0002]

2. Description of the Related Art Conventionally, as a seismic isolation device, there is a device called a laminated rubber isolator as shown in FIG. This laminated rubber isolator has thin rubber sheets 201 and intermediate steel plates 202 alternately laminated, the periphery of the laminated body is covered with a covering rubber 206, and has upper and lower flanges 203 and 205. In this laminated rubber isolator, for example, the flange 205 is fixed to the ground, and the flange 203 is fixed to a building. This laminated rubber isolator has high rigidity in the vertical direction and low rigidity in the horizontal direction.

[0003] The laminated rubber isolator supports the building against the ground with great rigidity in the vertical direction when there is no earthquake, and displaces quickly in the horizontal direction to prevent the shaking from being transmitted to the building during the earthquake.

However, the above-mentioned laminated rubber isolator is suitable for large-scale buildings and structures, but the horizontal rigidity is not sufficiently small for medium- and small-scale buildings and structures, and the vibration of the earthquake is transmitted to the buildings. There is a problem that can not be sufficiently prevented. In addition, it is weak against the pulling force transmitted from the building due to the wind.

[0005] In addition, another one of the above-mentioned relative movement automatic return devices.
As one application example, there is a swingable machining device that can be used for a semiconductor wrapping device or the like. Conventionally, there is a machine shown in FIG. 4 as a machining device constituting a semiconductor lapping device. This machining apparatus has a plurality of balls 303 between a lower table 301 and an upper table 302. The lower surface 302A of the upper base 302 is substantially spherical, and the upper surface 301A of the lower base 301 is substantially spherical. Thereby, the upper base 302 can swing and rotate in any lateral direction about the center of the spherical surface. Upper table 3
A semiconductor wafer is mounted on the upper surface 302B of the wafer 02, and the wafer surface is polished while the wafer and the lapping tool are relatively rotated.

However, this wrapping device is not
Since the lower surface 302A and the upper surface 301A of the lower base 301 need to be spherically finished, there is a problem that the manufacturing cost is high.

[0007]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for quickly and horizontally displacing the shaking of an earthquake to a building, even when applied to small and medium-sized buildings and structures. An object of the present invention is to provide a relative movement automatic return device that can reliably prevent a vibration and can form a seismic isolation device that is strong against a pulling force. Another object of the present invention is to provide a relative movement automatic return device that can constitute a swingable machining device as a wrapping device with a low manufacturing cost.

[0008]

According to a first aspect of the present invention, there is provided a relative movement automatic return device including an upper table, an intermediate table, and a lower table, and formed on the upper table. A first fall trajectory gradually falling from the first platform, a first rise trajectory formed on the intermediate platform and gradually rising from a stable point, the first fall trajectory and the first rise trajectory And a first rolling member which is rotatable along the first rolling member and is vertically locked with respect to the first falling orbit and the first rising orbit, and is formed on the intermediate table, from a stable point. Gradually falling, the first
A second falling track extending in a direction substantially orthogonal to the falling track, and a second falling track formed in the lower base, gradually rising from a stable point, and extending in a direction substantially perpendicular to the first falling track. A second rising orbit, rolling along the second falling orbit and the second rising orbit, and
It is characterized in that it is provided with the second falling track and a second rolling member vertically locked to the second rising track.

According to the first aspect of the present invention, for example, when used in a seismic isolation device, the lower stand is fixed to the ground, and the upper stand is fixed to the building. And when there is no earthquake, the first rolling member is stationary at the stable point of the first falling and rising orbit, and the second rolling member is stationary at the stable point of the second falling and rising orbit. ing. In this state, the weight of the structure is transmitted vertically downward in the order of the upper base, the first rolling member, the intermediate base, the second rolling member, and the lower base, and can support a large vertical load.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the second rolling member travels along the second rising / falling track, and the first rolling member travels along the first rising / falling track. The shaking is not transmitted to the structure.

According to the first aspect of the present invention, the lower platform is provided by running the first rolling member on the first rising / falling track and running the second rolling member on the second rising / falling track. In contrast, the upper base can relatively move in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base and the upper base are relatively slid during the running of the rolling members on the track, the horizontal rigidity of the isolator can be sufficiently softened, and the seismic isolation can be approached. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the first rolling member returns to the stable point while reciprocating on both sides of the stable point of the first rising and falling tracks. And the structure can be returned to a stationary position relative to the ground.

In the present invention, the first rolling member is the first rolling member.
The second rolling member is vertically locked with respect to the second rising and falling track with respect to the rising and falling track. Therefore, when a wind hits a high-rise building and a tensile force acts on the upper platform from this building, the tensile force from the upper platform is applied to the intermediate portion via the first rising and falling tracks and the first rolling member. It can be transmitted to the table, and further transmitted to the lower table via the second rising and falling tracks and the second rolling members. Therefore,
According to the present invention, it is possible to configure a seismic isolation device that has a resistance to a tensile force, does not decompose even when a tensile force acts, and has a strong tensile force.

Further, if a swingable machining device as a semiconductor wrapping device is constituted by the relative movement automatic return device of the present invention, each track surface only needs to be one-dimensionally curved, so that the conventional device can be used. Such spherical finishing of the raceway surface becomes unnecessary, and the manufacturing cost is reduced.

Further, in the relative movement automatic return device of the present invention, the first rolling member is free to roll with respect to both the first falling track and the first rising track. The relative movement distance between the upper platform and the intermediate platform in the direction of the lowering and starting trajectory can be maximized. Further, the second rolling member is
Rolls freely on both the second falling track and the second rising track, ensuring the maximum relative movement distance between the intermediate and lower platforms in the direction of the second falling and rising tracks. it can. Therefore, according to the present invention, the sliding dimension of the upper table with respect to the lower table in the horizontal direction can be maximized.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

FIG. 1 shows a seismic isolation device as an embodiment of a relative movement automatic return device according to the present invention. This seismic isolation device includes an upper table 1, a lower table 2, and an intermediate table 3. The upper base 1 has a substantially rectangular flat plate 4 and side walls 5 fixed to the lower surface of two edges 4A and 4B of the flat plate 4 which are opposed in the horizontal direction (X direction).
Consists of six. The side walls 5 and 6 respectively extend in the horizontal direction (Y
(Direction), two wall members 7, 7 adjacent to each other.
The wall member 7 has an arc-shaped through hole 8 that is upwardly convex and gradually falls from the pole P1 as a stable point at the substantially center.

The two arc-shaped through holes 8, 8 of the two wall members 7, 7 forming the side wall 5 of the upper base 1 and the two forming the side wall 6
The two arc-shaped through holes 8, 8 of the two wall members 7, 7 constitute a first falling track.

On the other hand, the lower base 2 is a substantially rectangular flat plate 1.
0 and two side walls 11 and 12 fixed to the upper surface of two edges 10A and 10B of the flat plate 10 facing in the horizontal direction (Y direction). Each of the side walls 11 and 12 is composed of two wall members 13 and 13 that are adjacent in the horizontal direction (X direction). The wall member 13 has an arc-shaped through hole 1 that is upwardly convex and gradually rises from a pole P2 serving as a substantially central stable point.
Five.

The two arc-shaped through holes 15, 15 of the two wall members 13, 13 constituting the side wall 11 of the lower base 2, and the side wall 1
The two arc-shaped through holes 15, 15 of the two wall members 13, 13 constituting the second 2 constitute a second rising orbit.

The intermediate table 3 has a substantially rectangular flat plate 16 and a flat plate 16 facing the horizontal direction (X direction) of the flat plate 16.
Side walls 17, 18 fixed to the upper surface of the two edges 16A, 16B
Having. The side walls 17, 18 are respectively
It is composed of two wall members 20, 20 adjacent in the (Y direction). The wall member 20 has two plate portions 22 and 23 opposed to each other with a groove 21 opened upward, and the two plate portions 22 and 23 are respectively projected downward from a substantially central pole P3. Arc-shaped through holes 25 and 26 are formed as first rising orbits gradually rising. And
The wall member 7 constituting the side walls 5 and 6 of the upper base 1 is slidably fitted in the groove 21 of the wall member 20 in the horizontal direction (Y direction).

Further, the intermediate table 3 has side walls 27, 28 fixed to the lower surfaces of two edges 16C, 16D of the flat plate 16 facing in the horizontal direction (Y direction). This side wall 2
7, 28 are 2 adjacent to each other in the horizontal direction (X direction).
It is composed of three wall members 30, 30. This wall member 3
0 has two plate portions 32 and 33 opposed to each other with a groove 31 opened downward, and the two plate portions 32 and 33 gradually rise from the substantially central pole P4 which is upwardly convex. Arc-shaped through holes 35, 3 as the second falling orbits that are falling
6 are formed. The groove 31 of the wall member 30
In addition, wall members 13, 13 forming side walls 11, 12 of lower base 2
Are slidably fitted in the horizontal direction (X direction).

The side walls 5, 6 of the upper base 1 are slidable by fitting into the grooves 21, 21, 21, 21 of the side walls 17, 18 of the intermediate base 3. The arc-shaped through holes 8, 8, 8, 8 of the wall members 7, 7, 7, 7 constituting the side walls 5, 6, and the side walls 17,
Four cylindrical rolling elements 51, 51, 51, 51 can freely roll into arc-shaped through holes 25, 26, 25, 26, 25, 26, 25, 26 of wall members 20, 20, 20, 20 constituting 18. Is fitted.

FIG. 2 shows the arc-shaped through holes 8 of the wall member 7 of the side wall 5 and the arc-shaped through holes 25 and 2 of the wall member 20 of the side wall 17.
6 shows a state in which one cylindrical rolling element 51 penetrates.
The cylindrical rolling element 51 is rotatably supported by a shaft 52 that penetrates the shaft hole 51 </ b> A, and the shaft 52 is fixed to a support frame 53. The cylindrical rolling element 51
Has a root flange 51B, and two washers 55, 55 having substantially the same diameter as the root flange 51B are rotatably fitted. The plate portion 22 of the wall member 20 of the side wall 17 is sandwiched between the root flange 51B and one washer 55, and the wall member 7 of the side wall 5 is sandwiched between the two washers 55, 55.
The cylindrical rolling element 51 locks the upper table 1 and the intermediate table 3 in the vertical direction, and rolls along the arc-shaped through holes 8 and 25 and 26 to smoothly move the upper table 1 and the intermediate table 3 in the Y direction. Play the role of sliding.

As shown in FIG. 1, the four cylindrical rolling elements 51 are pivotally supported at substantially four corners of the support frame 53,
Each has the same structure as that described in FIG. Furthermore, four cylindrical rolling elements 60, 60, 60, 60 as second rolling members are formed in arc-shaped through portions 32, 33, 32, 33 of the side walls 27, 28 fixed to the lower surface of the intermediate base 3. Holes 35, 36, 35, 36 and side walls 11, 12 of lower base 2
Arc-shaped through hole 1 of the wall members 13, 13, 13, 13 constituting
5, 15, 15, and 15 are rotatably fitted.

The four cylindrical rolling elements 60 are supported by the support frame 6
1 and has the same structure as the cylindrical rolling element 51 shown in FIG. 2, and two washers 55 each constitute a side wall 11, 12 of the lower base 2. 13, 13, 13, 13 are sandwiched.

The seismic isolation device having the above structure is, for example,
Is fixed to the ground, and the upper base 1 is fixed to the structure. Then, depending on the scale of the building, only a plurality of the seismic isolation devices are installed, but in the case of a small building or the like, only one relatively large seismic isolation device having the above structure may be used.

When there is no earthquake, the four cylindrical rolling elements 51 as the first rolling members are the poles P1 of the four falling arc-shaped through holes 8 of the upper base 1 and the four pairs of rising arc-shaped through holes 8 of the intermediate base 3. It is stationary at the pole P3 of 25,26. In addition, the four cylindrical rolling elements 60 as the second rolling members are poles (stable points) P of the four rising arc-shaped through holes 15 of the lower base 2.
4 and 4 pairs of falling arc-shaped through holes 35, 3 of the intermediate stand 3
6 is stationary at the pole (stable point) P4.

In this state, the weight of the structure is transmitted vertically downward in the order of the upper base 1, the four cylindrical rolling bodies 51, the intermediate base 3, the four cylindrical rolling bodies 60, and the lower base 2 to support a large load in the vertical direction. it can.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base 2 moves in the horizontal direction together with the ground. Then, the four cylindrical rolling elements 60 travel along the four arc-shaped through holes 15 of the lower base 2 and the four pairs of arc-shaped through holes 35 and 36 of the intermediate base 3, and the four cylindrical rolling elements 51 are connected to the four of the intermediate base 3. The vehicle travels along the pair of arcuate through holes 25 and 26 and the four arcuate through holes 8 of the upper base 1. Thereby, the horizontal shaking of the ground is not transmitted to the structure.

According to this embodiment, four cylindrical rolling elements 51 are formed into four arcuate through holes 8, and four pairs of arcuate through holes 25, 2 are provided.
6, the four cylindrical rolling elements 60 travel in the X direction through the four arcuate through holes 15, and the four pairs of arcuate through holes 35, 36. Relative movement is possible in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, according to this embodiment, the cylindrical rolling elements 51 are formed in the arc-shaped through holes 8 and 25, 26 constituting the track.
And the arc-shaped through holes 15 and 3 forming the track
By running the cylindrical rolling element 60 in 5,36, the lower base 2 and the upper base 1 are relatively slid, so that the horizontal rigidity as an isolator can be sufficiently softened, and it is possible to approach the absolute seismic isolation. it can. Therefore,
Even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, the cylindrical rolling elements 51
Returns to the positions of the stable points P1 and P3 while reciprocating on both sides of the stable points P1 and P3 in the arc-shaped through holes 8 and 25 and 26, so that the upper table 1 automatically returns to the stationary position with respect to the lower table 2. The structure can be automatically returned to a stationary position with respect to the ground.

In this embodiment, the cylindrical rolling elements 51
Are fitted into the arc-shaped through holes 8 and 25 and 26 to lock the upper base 1 and the intermediate base 3 in the vertical direction, and the cylindrical rolling element 60 is
5 and 35, 36, the lower table 2 and the intermediate table 3 are vertically locked. Therefore, when wind is applied to the high-rise building and a tensile force acts on the upper base 1 from this structure, the pulling force from the upper base 1 causes the arc-shaped through hole 8, the cylindrical rolling element 51, the arc-shaped through holes 25 and 26. Through the arc-shaped through holes 35 and 36, the cylindrical rolling element 60, and the arc-shaped through hole 15 to the lower table 2. Therefore,
In this embodiment, a seismic isolation device which has resistance to tensile force, does not decompose even when tensile force acts, and is strong in tensile force can be configured.

In this embodiment, the cylindrical rolling elements 51
Is rotatable with respect to both the arc-shaped through-hole 8 and the arc-shaped through-holes 25 and 26, so that the upper base 1 and the middle in the direction of the arc-shaped through-hole 8 and the arc-shaped through-holes 25 and 26 (Y direction) The relative movement distance of the platform 3 can be maximized. The cylindrical rolling element 6
0 is rotatable with respect to both the arc-shaped through-holes 35 and 36 and the arc-shaped through-hole 15.
The relative movement distance in the direction can be maximized. Therefore, according to this embodiment, the sliding dimension of the upper base 1 with respect to the lower base 2 in the horizontal direction can be maximized.

In this embodiment, since the arc-shaped through holes 8, 25, 26 and 15, 35, 36 forming the track are curved in the running direction of the cylindrical rolling elements 51 and 60, the curvature setting of this curvature is performed. Thus, the horizontal rigidity can be set to a desired value.

Further, in the seismic isolation device of the above embodiment, the damping force can be set without impairing the seismic isolation performance by using a weak damper as a damper as an auxiliary.

The above embodiment can also be applied to the seismic isolation of a washroom or a toilet of a transportation system such as a train. in this case,
The upper stand 1 is fixed to the floor of the room to be seismically isolated, and the lower stand 2 is fixed to the train frame. Thereby, it is possible to prevent the vibration from being transmitted to the chamber from the wheel supported by the frame. When the train stops, the upper platform 1 automatically returns to the stable point gradually and gently.

Further, in the above embodiment, the relative movement automatic return device of the present invention is applied to the seismic isolation device.
The present invention can also be applied to a swingable machining table that constitutes a semiconductor wrapping device or the like. For example, a semiconductor wrapping device can be configured with the same configuration as the above embodiment. In this case, the conventional spherical finishing of the raceway surface is not required, and the manufacturing cost can be reduced.

In the above embodiment, the arc-shaped through holes 8,
The trajectory formed by 25, 26 and 15, 35, 36 is curved with a predetermined radius of curvature. A predetermined dimension from both ends to the stable point is defined as a linear trajectory portion, and this linear trajectory portion is a curved trajectory portion near the stable point. The connection may be made smoothly. In this case, it has been confirmed that the rolling elements 51 and 60 can roll smoothly.

[0042]

As is apparent from the above description, the automatic relative movement return device according to the first aspect of the present invention comprises an upper table, an intermediate table, a lower table, a first falling track of the upper table, and a first standing track of the intermediate table. A first rolling member that rolls in the horizontal direction while being locked up and down with respect to the raising track; and a horizontal rolling while being locked up and down with respect to the second falling track of the intermediate table and the second rising track of the lower table. A second rolling member that rolls in the direction.

According to the first aspect of the present invention, for example, when used in a seismic isolation device, the lower stand is fixed to the ground, and the upper stand is fixed to the building. And when there is no earthquake, the first rolling member is stationary at the stable point of the first falling and rising orbit, and the second rolling member is stationary at the stable point of the second falling and rising orbit. ing. In this state, the weight of the structure is transmitted vertically downward in the order of the upper base, the first rolling member, the intermediate base, the second rolling member, and the lower base, and can support a large vertical load.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the second rolling member travels along the second rising / falling track, and the first rolling member travels along the first rising / falling track. The shaking is not transmitted to the structure.

According to the first aspect of the present invention, the lower platform is driven by the traveling of the first rolling member on the first rising / falling track and the traveling of the second rolling member on the second rising / falling track. In contrast, the upper base can relatively move in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base and the upper base are relatively slid during the running of the rolling member on the track, the horizontal rigidity of the isolator can be sufficiently softened, and the seismic isolation can be approached. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake has stopped, the first rolling member returns to the stable point while reciprocating on both sides of the stable point of the first rising and falling tracks. And the structure can be returned to a stationary position relative to the ground.

In the present invention, the first rolling member is the first rolling member.
The second rolling member is vertically locked with respect to the second rising and falling track with respect to the rising and falling track. Therefore, when a wind hits a high-rise building and a tensile force acts on the upper platform from this building, the tensile force from the upper platform is applied to the intermediate portion via the first rising and falling tracks and the first rolling member. It can be transmitted to the table, and further transmitted to the lower table via the second rising and falling tracks and the second rolling members. Therefore,
According to the present invention, it is possible to configure a seismic isolation device that has a resistance to a tensile force, does not decompose even when a tensile force acts, and has a strong tensile force.

Further, if a swingable machining device as a semiconductor wrapping device is constituted by the relative movement automatic return device of the present invention, it is sufficient that each track surface is one-dimensionally curved. Such spherical finishing of the raceway surface becomes unnecessary, and the manufacturing cost is reduced.

Further, in the relative movement automatic return device of the present invention, the first rolling member is free to roll with respect to both the first falling orbit and the first rising orbit. The relative movement distance between the upper platform and the intermediate platform in the direction of the lowering and starting trajectory can be maximized. Further, the second rolling member is
Rolls freely on both the second falling track and the second rising track, ensuring the maximum relative movement distance between the intermediate and lower platforms in the direction of the second falling and rising tracks. it can. Therefore, according to the present invention, the sliding dimension of the upper table with respect to the lower table in the horizontal direction can be maximized.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view of a seismic isolation device as an embodiment of a relative movement automatic return device according to the present invention.

FIG. 2 is a Y-direction side view showing an engagement structure between the cylindrical rolling element 51 of the embodiment, the side wall 5 of the upper base 1, and the side wall 17 of the intermediate base 3.

FIG. 3 is a cross-sectional view of a laminated rubber isolator as a conventional seismic isolation device.

FIG. 4 is a sectional view of a main part of a conventional semiconductor wrapping device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Upper stand, 2 ... Lower stand, 3 ... Intermediate stand, 4 ... Flat plate, 4A, 4
B: Edge, 5, 6: Side wall, 7: Wall member, P1: Extreme point, 8 ...
Arc-shaped through hole, 10: flat plate, 11, 12: side wall, 13: wall member, P2: pole point, 15: arc-shaped through hole, 16: flat plate, 1
7, 18 ... side wall, 20 ... wall member, 21 ... groove, 22, 23 ...
Plate, P3 ... pole, 25, 26 ... arc-shaped through hole, 27, 28 ...
Side walls, 30, 30, wall members, 31, grooves, 32, 33, plate portions, P4, poles, 35, 36, arc-shaped through holes, 51, cylindrical rolling elements, 51A, shaft holes, 51B, root flanges, 52 ...
Shaft, 53: support frame, 55: washer, 60: cylindrical rolling element, 61: support frame.

Claims (1)

[Claims] 1. A first falling orbit, comprising an upper base, an intermediate base, and a lower base, formed on the upper base, and gradually falling from a stable point, and formed on the intermediate base, A first rising trajectory gradually rising from a point, the first falling trajectory and the first rising trajectory, and freely rolling along the first falling trajectory and the first rising trajectory and the first rising trajectory. A first rolling member locked in a vertical direction; and a second rolling member formed on the intermediate table, gradually falling from a stable point, and extending in a direction substantially orthogonal to the first falling track. A fall trajectory, a second rise trajectory formed on the lower platform, gradually rising from a stable point, and extending in a direction substantially orthogonal to the first fall trajectory, and the second fall trajectory And roll freely along the second starting track, and A relative movement automatic return device comprising: the second falling track and a second rolling member vertically locked to the second rising track.