JPH11247924A - Automatic reset device with relative movement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a base isolation device which makes quick displacement in the horizontal direction and can certainly prevent seismic tremors from being transmitted to a building. SOLUTION: An automatic reset device with relative movement is equipped with an upper table 1, middle table 3, and lower table 2. The upper table 1 is furnished with groove tracks 11, 12, 13, 14 falling gradually from the stabilization point P0. A roller 40 arranged as capable of rolling relative to the groove tracks and engaged about the vertical direction is borne in the upper part of the middle table 3. The lower table 2 is furnished with groove tracks 15, 16, 20, 21 which are extending in the direction perpendicular to the tracks 11-14 and rising gradually from the stabilization point P1. A roller 40 arranged as capable of rolling relative to the groove tracks 15, 16, 20, 21 and engaged about the vertical direction is borne in the lower part of the middle table 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is suitable for use as a seismic isolation device for preventing the vibration of an earthquake from being transmitted to a seismic isolation target such as a structure. The present invention relates to a relative movement automatic return device that allows a horizontal movement to be allowed and at the same time automatically attenuates the lateral movement to return the upper base and the lower base to an initial stable position.

[0002]

2. Description of the Related Art Conventionally, as a seismic isolation device, there is a device called a laminated rubber isolator as shown in FIG. This laminated rubber isolator has thin rubber sheets 201 and intermediate steel plates 202 alternately laminated, the periphery of the laminated body is covered with a covering rubber 206, and has upper and lower flanges 203 and 205. In this laminated rubber isolator, for example, the flange 205 is fixed to the ground, and the flange 203 is fixed to a building. This laminated rubber isolator has high rigidity in the vertical direction and low rigidity in the horizontal direction.

[0003] The laminated rubber isolator supports the building against the ground with great rigidity in the vertical direction when there is no earthquake, and displaces quickly in the horizontal direction to prevent the shaking from being transmitted to the building during the earthquake.

However, the above-mentioned laminated rubber isolator is suitable for large-scale buildings and structures, but the horizontal rigidity is not sufficiently small for medium- and small-scale buildings and structures, and the vibration of the earthquake is transmitted to the buildings. There is a problem that can not be sufficiently prevented. In addition, it is weak against the pulling force transmitted from the building due to the wind.

[0005] Further, another one of the above-mentioned relative movement automatic return devices is provided.
As one application example, there is a swingable machining device that can be used for a semiconductor wrapping device or the like. Conventionally, there is a machine shown in FIG. 7 as a machining device constituting a semiconductor lapping device. This machining apparatus has a plurality of balls 303 between a lower table 301 and an upper table 302. The lower surface 302A of the upper base 302 is substantially spherical, and the upper surface 301A of the lower base 301 is substantially spherical. Thereby, the upper base 302 can swing and rotate in any lateral direction about the center of the spherical surface. Upper table 3
A semiconductor wafer is mounted on the upper surface 302B of the wafer 02, and the wafer surface is polished while the wafer and the lapping tool are relatively rotated.

However, this wrapping device is not
Since the lower surface 302A and the upper surface 301A of the lower base 301 need to be spherically finished, there is a problem that the manufacturing cost is high.

[0007]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for quickly and horizontally displacing the shaking of an earthquake to a building, even when applied to small and medium-sized buildings and structures. An object of the present invention is to provide a relative movement automatic return device that can reliably prevent a vibration and can form a seismic isolation device that is strong against a pulling force.

Another object of the present invention is to provide a relative movement automatic return device which can constitute a swingable machining device as a wrapping device with low manufacturing cost.

[0009]

According to a first aspect of the present invention, there is provided a relative movement automatic return device comprising an upper table, an intermediate table, and a lower table, and formed on one of the upper table and the intermediate table. A stable point, a first track gradually falling from the stable point, and fixed to the other of the upper table and the intermediate table, and are free to roll along the first track and the first track. A first rolling member formed by a first rolling member locked in a vertical direction with respect to the first base and one of the intermediate base and the lower base, and extending in a direction orthogonal to the first track. A fixed point, a second track gradually rising from the stable point, and the other of the intermediate table and the lower table, which are fixed along the second track and freely rollable along the second track. And a second rolling member locked in the vertical direction. It is characterized in that it comprises a dynamic track section.

According to the first aspect of the present invention, for example, when used in a seismic isolation device, the lower base is fixed to the ground, and the upper base is fixed to the building. When there is no earthquake, the first rolling member is stationary at the stable point of the first track, and the second rolling member is stationary at the stable point of the second track. In this state, the weight of the structure is transmitted vertically downward in the order of the upper base, the first rolling member, the intermediate base, the second rolling member, and the lower base, and can support a large vertical load.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base moves in the horizontal direction together with the ground.
Then, the second rolling member travels along the second track, and the first rolling member travels along the first track.
The rolling members travel along the first track, so that the horizontal shaking of the ground is not transmitted to the structure.

[0012] According to the first aspect of the present invention, the upper table can be moved horizontally relative to the lower table with the first rolling member traveling on the first track and the second rolling member traveling on the second track. Relative movement in the direction of. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base and the upper base are relatively slid by the running of the rolling members on the track, the horizontal rigidity as an isolator can be sufficiently softened, and the seismic isolation can be approached. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

Further, after the earthquake stops, the first rolling member returns to the stable point while reciprocating on both sides of the stable point of the first track, so that the upper base returns to the stationary position with respect to the lower base. The structure can be returned to a stationary position with respect to the ground.

According to the present invention, the first rolling member is the first rolling member.
The second rolling member is vertically locked with respect to the second track with respect to the track. Therefore, when a wind hits a high-rise building and a tensile force acts on the upper platform from this building, the tensile force from the upper platform can be transmitted to the intermediate platform via the first track and the first rolling member. It can be transmitted to the lower stand via the second track and the second rolling member. Therefore, according to the present invention, it is possible to configure a seismic isolation device that has a resistance to a tensile force, does not decompose even when a tensile force acts, and has a strong tensile force.

Further, if a swingable machining device as a semiconductor wrapping device is constituted by the relative movement automatic return device of the present invention, each track surface only needs to be curved one-dimensionally. Such spherical finishing of the raceway surface becomes unnecessary, and the manufacturing cost is reduced.

According to a second aspect of the present invention, in the relative movement automatic return device according to the first aspect, the upper table and the lower table are made of parts having the same shape, and the intermediate table has a non-track side back surface joined to each other. It is characterized by being composed of two parts having the same shape.

According to the second aspect of the present invention, the upper base and the lower base are made of the same part, and the cost can be reduced. In addition, since the back of two parts of the same shape is combined to form an intermediate table, the intermediate table is composed of one part and tracks are provided on the upper and lower surfaces.
(Or a rolling member) is easier to manufacture.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

FIG. 1 shows a seismic isolation device as an embodiment of a relative movement automatic return device according to the present invention. This seismic isolation device includes an upper table 1, a lower table 2, and an intermediate table 3. The upper base 1 has a substantially rectangular flat plate 4 and two opposite edges 4 of the flat plate 4.
A, 4B. In addition, lower stand 2
Is composed of a substantially rectangular flat plate 7 and side walls 8, 10 fixed to two opposing edges 7A, 7B of the flat plate 7. The flat plates 4 and 7 have the same shape, and the side walls 5 and 6 and 8 and 1
0 is the same shape. Therefore, the upper table 1 and the lower table 2 have the same shape. FIG. 3 shows the flat plate 4 viewed from the back side. Screw holes 45 are formed at both ends of the edge 4A and both ends of the edge 4B of the flat plate 4, respectively. FIG. 4A shows the side wall 5. The side wall 5 is formed with screw holes 46, 46 that match with the screw holes 45, penetrating vertically. In FIG. 4A, the side walls 5 are rotated by 180 ° about the vertical axis, and the screw holes 46, 46 are formed.
To the screw hole 4 formed in the edge 4A of the flat plate 4 in FIG.
Screw with 5,45. As shown in FIG. 4B, the groove depth of the groove tracks 11 and 12 is approximately one half of the side wall thickness. Further, as shown in FIG. 4C, the groove tracks 11, 12 are curved in an arc with the stable point P0 as a pole.

As shown in FIG. 1, the side wall 5 of the upper base 1 has two groove tracks 11 and 12 which are curved upward in an arc shape. The groove tracks 11 and 12 face inward, and
Are arranged at predetermined intervals along the edge 4A of the.
Further, two groove tracks 13 having the same shape as the groove tracks 11 and 12 are also provided at positions facing the groove tracks 11 and 12 respectively.
And 14.

The side wall 8 of the lower base 2 has a raceway groove 15 curved downward in a bow shape and a raceway groove 16 adjacent thereto. The raceway grooves 15 and the raceway grooves 16 face inward, and are arranged at predetermined intervals along the edge 7A of the flat plate 7. Further, the side wall 10 also has the groove track 15 and the track groove 1.
6, two groove tracks 20 and 21 having the same shape as the groove tracks 15 and 16 are provided.

On the other hand, the intermediate base 3 is provided with two substantially rectangular flat plates 25 shown in FIG. 2A, and is screwed so that the back surfaces 25A of the two flat plates are in close contact with each other. The flat plate 25 has two ears 30 and 31 formed along one side 27, and two ears 30 and 31 formed along one side 28 facing the side 27.
One ear 32, 33 is formed. Intermediate stand 3 is 2
The rear faces 25A of the two flat plates 25 are screwed together so that the phases of the ear portions 30, 31, 32, and 33 are shifted by 90 ° in the two flat plates 25. That is,
The screw holes 35 and 36 of one flat plate 25 are aligned with the screw holes 37 and 38 of the other flat plate 25, and the screw holes 3 and
Screw holes 35 and 36 of the other flat plate 25 are aligned with 7, 38, and both are screwed. FIG. 2B is a side view of the flat plate 25.

As shown in FIG. 1, rollers 40, 40 are rotatably supported by ears 30, 31 of one flat plate 25 of the intermediate table 3 so as to protrude outward. The rollers 40, 40 are provided with groove tracks 13, 1 formed on the side wall 6 of the upper base 1.
4 so that the vehicle can travel along the groove tracks 13 and 14. Then, although not shown in FIG. 1, the ear 3 shown in FIG.
Similar rollers 40, 40 are also supported by the rollers 2, 33, and the rollers 40, 40 are fitted in the groove tracks 11, 12 of the side wall 5, and can run along the groove tracks 11, 12. It has become. Although not shown in FIG. 1, four ears 30, 31 and 3 of the other flat plate 25 of the intermediate table 3 are provided.
As described above, the rollers 40 are also rotatably supported on the reference numerals 2 and 33, respectively, so that the rollers 40 are fitted to the groove tracks 15, 16 and 20, 21 of the lower base 2, respectively, so that they can travel along the groove tracks. It has become.

As described above, in the present embodiment, the groove track 1
The groove tracks 1 and 12 and the groove tracks 13 and 14 and the four rollers 40 fitted thereto constitute an X-direction rolling track portion.
5, the groove track 16, the groove tracks 20, 21 and the four rollers 40 fitted thereto constitute a Y-direction rolling track portion.

The seismic isolation device having the above-described structure is, for example,
Is fixed to the ground, and the upper base 1 is fixed to the structure. Then, depending on the scale of the building, only a plurality of the seismic isolation devices are installed, but in the case of a small building or the like, only one relatively large seismic isolation device having the above structure may be used.

When there is no earthquake, the four rollers 40 fitted to the upper base 1 are provided with four groove tracks 11, 12, 13,
14 at a stable point P0 at the center. In addition, lower stand 2
The four rollers 40 fitted in the four groove tracks 1
5, 16 and the center of the groove orbits 20, 21 at a stable point P1. In this state, the weight of the building is transmitted downward in the order of the upper table 1, the roller 40, the intermediate table 3, the roller 40, and the lower table 2, and can support a large vertical load.

On the other hand, during an earthquake, the ground shakes in the horizontal direction due to the earthquake, and the lower base 2 moves in the horizontal direction together with the ground. Then, the four rollers 40 fitted to the upper base 1 run to the part falling from the stable point P0 of the groove tracks 11, 12, 13, 14 in the X direction, and the four rollers 40 fitted to the lower base 2 Travels from the stable point P1 of the groove trajectories 15, 16, 20, 21 in the Y direction to the portion rising from the stable point P1. Thereby, the horizontal shaking of the ground is not transmitted to the building. In other words, the roller 40 travels along the rolling path in the X direction and the rolling path in the Y direction, so that the upper table 1 can move relative to the lower table 2 in any horizontal direction. Therefore, the ground shaking is almost completely absorbed, and the shaking is not transmitted to the structure.

Further, since the lower base 2 and the upper base 1 are relatively smoothly slid by running the rollers 40 fitted in the groove tracks in the X and Y directions, the horizontal rigidity as an isolator can be sufficiently softened. , You can approach the absolute seismic isolation. Therefore, even if this embodiment is applied to not only large-scale buildings but also medium- and small-scale buildings and structures, it is possible to reliably prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, the roller 40 returns to the stable point while reciprocating on both sides of the stable point of the groove track. Therefore, the upper base 1 returns to the stationary position with respect to the lower base 2, and the structure can be reliably returned to the stationary position with respect to the ground. Further, in this seismic isolation device, since the X-direction groove track and the Y-direction groove track extend in directions orthogonal to each other, the upper base 1 extends in all directions in the horizontal direction.
And the lower base 2 can be smoothly slid.

In this seismic isolation device, the groove track is curved in the running direction of the roller 40, and the horizontal rigidity can be set to a desired value by setting the curvature of the curve.

This seismic isolation device is provided with four intermediate X-direction groove tracks 11 to 14 formed on the upper base 1.
The four rollers 40 are slidably fitted in the X direction and locked in the vertical direction. In addition, lower stand 2
Groove tracks 15, 16, 20, 2 formed in the Y direction
The four rollers 40 of the intermediate table 3 are slidably fitted in the Y direction with respect to 1 and are locked in the vertical direction. Therefore, when a wind hits a high-rise building and a tensile force acts on the upper table 1 from this structure, the pulling force from the upper table 1 is increased by the upper four rollers 40 of the intermediate table 3 and the lower four rollers 40. It is transmitted to the lower stand 2 via 40. Therefore, this seismic isolation device has resistance to tensile force,
It does not disassemble even when tensile force is applied, making it a seismic isolation device that is strong in tensile force.

Further, in this embodiment, since the upper base 1 has the same structure as the lower base 2, the cost can be reduced as compared with the case where the structures of the upper base and the lower base are different. Further, since the intermediate base 2 is formed by bonding the back surfaces 25A of two flat plates 25 having the same shape to each other, compared with a case where the intermediate base is formed of one part and the ear portions 30 to 33 are formed on both surfaces thereof. And can be easily manufactured.

In the above embodiment, the groove tracks 11 to 14 are provided on the upper base 1 and the rollers 40 fitted in the groove tracks are supported on the intermediate base 3 as shown in FIG. 5B. , Upper 1
A lug 51 projecting downward is formed on the lug 51, and a roller 52 is pivotally supported on the lug 51, while a rail 55 having a groove track 53 formed thereon is fixed to the intermediate base 3, and a roller is formed in the groove track 53. 5
2 may be able to run. In addition, when the structure supported by the seismic isolation device has a relatively light load, FIG.
As shown in FIG. 7, a groove track 59 penetrating the groove track 53 may be used. Further, as shown in FIG. 5 (C), two ears 56 and 57 which are horizontally opposed to each other are formed on the upper base 1, and two rollers 58 and 60 are coaxially arranged between the ears 56 and 57. Then, the rollers 58, 60 may be pivotally supported on the ears 56, 57. Then, a double groove rail 63 in which groove tracks 61, 62 on which the two rollers 58, 60 can run are formed back to back in the horizontal direction is fixed to the intermediate table 3. In this case, a load approximately twice as large as that of the structure shown in FIG. 5B can be supported. As shown in FIG. 5 (D), rollers 66, 67 are supported on both sides in the horizontal direction of the ear 65 protruding from the intermediate base 3, and a pair of groove tracks 68, facing the inside in the horizontal direction.
A rail 71 having an upper rail 70 is fixed to the lower surface of the upper base 1, and rollers 66, 67 are fitted into the groove tracks 68, 70 of the rail 71 so that the rail 71 can run horizontally along the groove tracks 68, 70. Good. In this case, similar to the structure shown in FIG. 5C, a load approximately twice that of the structure shown in FIG. 5B can be supported.

Further, in the seismic isolation device of the above embodiment, the damping force can be set without impairing the seismic isolation performance by using a weak damper as a damper as an auxiliary.

The above-described embodiment can also be applied to seismic isolation of washrooms and toilets of transportation means such as trains. in this case,
The upper stand 1 is fixed to the floor of the room to be seismically isolated, and the lower stand 2 is fixed to the train frame. Thereby, it is possible to prevent the vibration from being transmitted to the chamber from the wheel supported by the frame. When the train stops, the upper platform 1 automatically returns to the stable point gradually and gently.

Further, in the above embodiment, the relative movement automatic return device of the present invention is applied to a seismic isolation device.
The present invention can also be applied to a swingable machining table that constitutes a semiconductor wrapping device or the like. For example, a semiconductor wrapping device can be configured with the same configuration as the above embodiment. In this case, the conventional spherical finishing of the raceway surface is not required, and the manufacturing cost can be reduced.

[0038]

As is apparent from the above description, the relative movement automatic return device according to the first aspect of the present invention includes an upper table, an intermediate table, and a lower table, and is formed on one of the upper table and the intermediate table. A stable point, a first track gradually falling from the stable point, and fixed to the other of the upper table and the intermediate table. The first track is free to roll along the first track and is vertically engaged with the first track. A first rolling orbital portion formed by a first rolling member to be stopped, and one of an intermediate table and a lower table;
It extends in the direction orthogonal to the first track, and is fixed to the stable point, the second track gradually rising from the stable point, and the other of the intermediate table and the lower table, and is free to roll along the second track. And the second is vertically locked with respect to the second track.
And a second rolling orbit portion formed by the rolling member.

According to the first aspect of the present invention, when the first rolling member travels on the first track and the second rolling member travels on the second track, the upper table can be moved horizontally relative to the lower table. Relative movement in the direction of. Therefore, if the lower base is fixed to the ground and the upper base is fixed to the building, the horizontal shaking of the ground is almost completely absorbed, and the shaking is not transmitted to the building.

Further, since the lower base and the upper base are relatively slid by the running of the rolling member on the track, the horizontal rigidity as an isolator can be sufficiently softened, and the seismic isolation can be made closer to the absolute seismic isolation. Therefore, even when applied to medium and small-scale buildings and structures, it is possible to sufficiently prevent the shaking of the earthquake from being transmitted to the buildings.

After the earthquake stops, the first rolling member returns to the stable point while reciprocating on both sides of the stable point of the first track, so that the upper base returns to the stationary position with respect to the lower base. The structure can be returned to a stationary position with respect to the ground.

In the present invention, the first rolling member is the first rolling member.
The second rolling member is vertically locked with respect to the second track with respect to the track. Therefore, when a wind hits the high-rise building and a tensile force acts on the upper platform from the construct, the tensile force from the upper platform is transmitted to the intermediate platform via the first track and the first rolling member, and further, ,
It can be transmitted to the lower stand via the second track and the second rolling member. Therefore, according to the present invention, it is possible to configure a seismic isolation device that has a resistance to a tensile force, does not decompose even when a tensile force acts, and has a strong tensile force.

If a swingable machining device as a semiconductor wrapping device is constituted by the relative movement automatic return device of the present invention, each track surface only needs to be curved one-dimensionally. Such spherical finishing of the raceway surface becomes unnecessary, and the manufacturing cost is reduced.

According to a second aspect of the present invention, there is provided the relative movement automatic return device according to the first aspect, wherein the upper table and the lower table are made of parts having the same shape, and the intermediate table has a non-track-side back surface joined to each other. It consists of two parts of the same shape.

According to the second aspect of the present invention, the upper base and the lower base are made of the same part, and the cost can be reduced. In addition, since the back of two parts of the same shape is combined to form an intermediate table, the intermediate table is composed of one part and tracks are provided on the upper and lower surfaces.
(Or rolling members) can be easily manufactured.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view of a seismic isolation device as an embodiment of a relative movement automatic return device according to the present invention.

FIG. 2A is a perspective view of a flat part constituting the intermediate base of the embodiment, and FIG. 2B is a side view of the flat part.

FIG. 3 is a perspective view of a flat plate constituting an upper base of the embodiment.

FIG. 4A is a perspective view of a side wall constituting the upper base, and FIG. 4B is a cross-sectional view of the side wall.
(C) is a front view of the groove track formed on the side wall.

FIG. 5A is a schematic diagram showing a modified example of the rolling track portion of the embodiment, and FIG. 5B is a schematic diagram showing another modified example of the rolling track portion; FIG. 5C is a schematic diagram showing still another modified example of the rolling track portion, and FIG. 5D is a schematic diagram of still another modified example.

FIG. 6 is a cross-sectional view of a laminated rubber isolator as a conventional seismic isolation device.

FIG. 7 is a sectional view of a main part of a conventional semiconductor wrapping device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Upper stand, 2 ... Lower stand, 3 ... Intermediate stand, 4 ... Flat plate, 4A, 4
B: Edge, 5, 6: Side wall, 7: Flat plate, 8, 10: Side wall, 1
1,12,13,14,15,16,20,21 ... groove orbit, 2
5 ... flat plate, 25A ... back surface, 27 ... side, 30, 31, 32,
33 ... ears, 35, 36, 37, 38 ... screw holes, 40 ... rollers, P1, P2 ... stable points.

Claims (2)

[Claims] A first track formed on one of the upper table and the intermediate table, the first track gradually falling from a stable point, and an upper table, an intermediate table, and a lower table. A first rolling track portion fixed to the other side and configured by a first rolling member rotatable along the first track and vertically locked to the first track; A second track extending in a direction orthogonal to the first track and gradually rising from a stable point; and being fixed to the other of the middle table and the lower table. A second rolling member formed of a second rolling member that is free to roll along the second track and is vertically locked to the second track. Relative movement automatic return device. 2. The relative movement automatic return device according to claim 1, wherein the upper base and the lower base are made of parts having the same shape, and the intermediate base is made of two parts having the same shape with their non-track-side back surfaces joined to each other. A relative movement automatic return device characterized by comprising: