JP3427594B2 - センサ装置 - Google Patents

センサ装置

Info

Publication number
JP3427594B2
JP3427594B2 JP26534295A JP26534295A JP3427594B2 JP 3427594 B2 JP3427594 B2 JP 3427594B2 JP 26534295 A JP26534295 A JP 26534295A JP 26534295 A JP26534295 A JP 26534295A JP 3427594 B2 JP3427594 B2 JP 3427594B2
Authority
JP
Japan
Prior art keywords
power supply
supply line
circuit
resistor
filter circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26534295A
Other languages
English (en)
Japanese (ja)
Other versions
JPH08184462A (ja
Inventor
浩 野村
和久 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP26534295A priority Critical patent/JP3427594B2/ja
Priority to DE69517488T priority patent/DE69517488T2/de
Priority to EP95117338A priority patent/EP0710825B1/en
Priority to US08/552,789 priority patent/US5684428A/en
Publication of JPH08184462A publication Critical patent/JPH08184462A/ja
Application granted granted Critical
Publication of JP3427594B2 publication Critical patent/JP3427594B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/032—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure affecting incoming signal, e.g. by averaging; gating undesired signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
JP26534295A 1994-11-04 1995-10-13 センサ装置 Expired - Fee Related JP3427594B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP26534295A JP3427594B2 (ja) 1994-11-04 1995-10-13 センサ装置
DE69517488T DE69517488T2 (de) 1994-11-04 1995-11-03 Eine Schaltung für einen Sensor, fähig, Hochfrequenzrauschen zu verhindern
EP95117338A EP0710825B1 (en) 1994-11-04 1995-11-03 A sensor circuit capable of preventing high frequency noise
US08/552,789 US5684428A (en) 1994-11-04 1995-11-03 Sensor apparatus capable of preventing high frequency noise

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6-270836 1994-11-04
JP27083694 1994-11-04
JP26534295A JP3427594B2 (ja) 1994-11-04 1995-10-13 センサ装置

Publications (2)

Publication Number Publication Date
JPH08184462A JPH08184462A (ja) 1996-07-16
JP3427594B2 true JP3427594B2 (ja) 2003-07-22

Family

ID=26546938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26534295A Expired - Fee Related JP3427594B2 (ja) 1994-11-04 1995-10-13 センサ装置

Country Status (4)

Country Link
US (1) US5684428A (enExample)
EP (1) EP0710825B1 (enExample)
JP (1) JP3427594B2 (enExample)
DE (1) DE69517488T2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017037024A (ja) * 2015-08-11 2017-02-16 富士電機株式会社 半導体物理量センサ装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3278363B2 (ja) * 1996-11-18 2002-04-30 三菱電機株式会社 半導体加速度センサ
JPH10281897A (ja) * 1997-04-08 1998-10-23 Mitsubishi Electric Corp 半導体圧力検出装置
DE502006007335D1 (de) * 2006-11-11 2010-08-12 Mettler Toledo Ag Verfahren zur Überwachung und/oder Bestimmung des Zustandes einer Kraftmessvorrichtung und Kraftmessvorrichtung
FR2910958B1 (fr) 2006-12-28 2009-02-20 Siemens Vdo Automotive Sas Capteur integre a rejection de couplage capacitif a la masse mecanique
WO2011086617A1 (ja) * 2010-01-13 2011-07-21 パナソニック株式会社 高周波ノイズ除去機能付き増幅器、マイクロフォンモジュール及びセンサモジュール
US8878598B2 (en) * 2010-12-28 2014-11-04 British Virgin Islands Central Digital Inc. Sensing module
JP5867688B2 (ja) * 2011-09-22 2016-02-24 国立大学法人 東京大学 触覚センサ及び多軸触覚センサ
JP5935333B2 (ja) * 2012-01-13 2016-06-15 株式会社デンソー 半導体センサ
JP5923742B2 (ja) * 2012-04-20 2016-05-25 パナソニックＩｐマネジメント株式会社 Ｉｃ周辺回路
JP6365158B2 (ja) * 2014-09-12 2018-08-01 株式会社デンソー 筒内圧検出装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155253A (en) 1979-05-22 1980-12-03 Nippon Denso Co Ltd Output compensation circuit for bridge type measuring apparatus
JPS57169644A (en) 1981-04-14 1982-10-19 Nippon Denso Co Ltd Semiconductor type pressure sensor
JPS6043507B2 (ja) 1981-07-14 1985-09-28 大成建設株式会社 鋼構造筋違架構
JPS58112424A (ja) * 1981-12-25 1983-07-04 日本電気株式会社 電源雑音抑圧方式
JPS6063685A (ja) * 1983-09-16 1985-04-12 Nec Corp 座標入力装置用雑音除去回路
JP2609137B2 (ja) * 1988-09-02 1997-05-14 藤森工業株式会社 液晶表示パネル用電極基板製造用の反応性耐透気性ポリマーおよびそれを用いた液晶表示パネル用電極基板
JP2730152B2 (ja) 1989-03-15 1998-03-25 株式会社デンソー 圧力・温度複合検出装置
GB2257787B (en) * 1991-07-03 1994-08-03 Motorola Inc Sensor signal conditioning circuit
JPH05153782A (ja) * 1991-11-26 1993-06-18 Fuji Electric Co Ltd ノイズ防止装置
JP3568546B2 (ja) 1992-05-25 2004-09-22 株式会社デンソー 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017037024A (ja) * 2015-08-11 2017-02-16 富士電機株式会社 半導体物理量センサ装置

Also Published As

Publication number Publication date
DE69517488D1 (de) 2000-07-20
JPH08184462A (ja) 1996-07-16
US5684428A (en) 1997-11-04
EP0710825A3 (enExample) 1996-06-12
DE69517488T2 (de) 2001-02-08
EP0710825B1 (en) 2000-06-14
EP0710825A2 (en) 1996-05-08

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