JP3232751B2 - 蒸着製品の製造方法 - Google Patents
蒸着製品の製造方法Info
- Publication number
- JP3232751B2 JP3232751B2 JP05972393A JP5972393A JP3232751B2 JP 3232751 B2 JP3232751 B2 JP 3232751B2 JP 05972393 A JP05972393 A JP 05972393A JP 5972393 A JP5972393 A JP 5972393A JP 3232751 B2 JP3232751 B2 JP 3232751B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- vapor deposition
- light
- silicone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000010408 film Substances 0.000 claims description 71
- 238000009832 plasma treatment Methods 0.000 claims description 28
- 229920002050 silicone resin Polymers 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 19
- 229920001296 polysiloxane Polymers 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 7
- 150000007530 organic bases Chemical class 0.000 claims description 5
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011147 inorganic material Substances 0.000 claims 1
- 239000013212 metal-organic material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 62
- 239000000835 fiber Substances 0.000 description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 239000004744 fabric Substances 0.000 description 18
- 229920005989 resin Polymers 0.000 description 12
- 239000011347 resin Substances 0.000 description 12
- 238000005406 washing Methods 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 235000012239 silicon dioxide Nutrition 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 9
- 238000005299 abrasion Methods 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 5
- 238000007598 dipping method Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229920000728 polyester Polymers 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000839 emulsion Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000012356 Product development Methods 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002186 photoelectron spectrum Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229920006268 silicone film Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06N—WALL, FLOOR, OR LIKE COVERING MATERIALS, e.g. LINOLEUM, OILCLOTH, ARTIFICIAL LEATHER, ROOFING FELT, CONSISTING OF A FIBROUS WEB COATED WITH A LAYER OF MACROMOLECULAR MATERIAL; FLEXIBLE SHEET MATERIAL NOT OTHERWISE PROVIDED FOR
- D06N3/00—Artificial leather, oilcloth or other material obtained by covering fibrous webs with macromolecular material, e.g. resins, rubber or derivatives thereof
- D06N3/12—Artificial leather, oilcloth or other material obtained by covering fibrous webs with macromolecular material, e.g. resins, rubber or derivatives thereof with macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds, e.g. gelatine proteins
- D06N3/128—Artificial leather, oilcloth or other material obtained by covering fibrous webs with macromolecular material, e.g. resins, rubber or derivatives thereof with macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds, e.g. gelatine proteins with silicon polymers
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Decoration Of Textiles (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05972393A JP3232751B2 (ja) | 1993-02-23 | 1993-02-23 | 蒸着製品の製造方法 |
| TW83107548A TW252171B (enExample) | 1993-02-23 | 1994-08-17 | |
| PCT/JP1994/001379 WO1996006216A1 (en) | 1993-02-23 | 1994-08-22 | Product of vapor deposition and method of manufacturing same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05972393A JP3232751B2 (ja) | 1993-02-23 | 1993-02-23 | 蒸着製品の製造方法 |
| PCT/JP1994/001379 WO1996006216A1 (en) | 1993-02-23 | 1994-08-22 | Product of vapor deposition and method of manufacturing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06248573A JPH06248573A (ja) | 1994-09-06 |
| JP3232751B2 true JP3232751B2 (ja) | 2001-11-26 |
Family
ID=13121413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05972393A Expired - Fee Related JP3232751B2 (ja) | 1993-02-23 | 1993-02-23 | 蒸着製品の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3232751B2 (enExample) |
| TW (1) | TW252171B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4924113B2 (ja) * | 2007-03-08 | 2012-04-25 | 豊田合成株式会社 | 発光装置及び発光装置の製造方法 |
| JP2020062882A (ja) * | 2018-10-17 | 2020-04-23 | 積水化学工業株式会社 | 繊維シート |
-
1993
- 1993-02-23 JP JP05972393A patent/JP3232751B2/ja not_active Expired - Fee Related
-
1994
- 1994-08-17 TW TW83107548A patent/TW252171B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| TW252171B (enExample) | 1995-07-21 |
| JPH06248573A (ja) | 1994-09-06 |
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| LAPS | Cancellation because of no payment of annual fees |