JP3169054B2 - Electrolysis device for alkaline permanganate solution - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrolysis apparatus for an alkaline permanganate solution, and more particularly to an electrode structure capable of higher current.

[0002]

2. Description of the Related Art Electrolyzers of this kind are generally used in many processing steps for manufacturing printed wiring boards. In the case of multilayer wiring printed boards, etc., after forming an inner layer circuit pattern on the base material, an insulating layer mainly composed of epoxy resin etc. is formed on it, and the surface of this insulating layer is roughened to form an outer layer circuit pattern It is common to do. In the surface roughening step, the insulating layer is roughened by an electrolytic device using an alkaline permanganate as an oxidizing agent, or resin (smear) adhered to the inner surface of the through-hole by frictional heat generated when the through-hole is formed by drilling. This is to prevent the connection failure with the inner layer circuit pattern.

[0003] By treating a printed wiring board, permanganate ions are reduced to manganate ions, whereby permanganate is changed to manganate,
If the reaction proceeds further, it becomes manganese dioxide sludge. Therefore, there is an electrolytic regenerating apparatus for reducing the concentration of permanganate and regenerating permanganate at the stage of manganate so as not to generate sludge of manganese dioxide.

As shown in FIG. 3, the electrode structure of this electrolytic regenerating apparatus is a rod-shaped cathode 2 inserted through a cylindrical insulator 20.
1 and a configuration in which the porous tube 22 is held by directly fastening a porous tube (net) 22 serving as an anode disposed on the lower body portion 20a of the insulator 20 with a metal band 23 for fixing.

[0005]

However, in the electrode portion having the above structure, the electrical connection of the metal band 23 to the insulator 20 of the porous cylinder 22 serving as an anode is insufficient.
Due to the heat generated by the connection resistance when the current flows, the insulator 2
However, there was a problem in that a high current for increasing the processing speed could not be supplied due to damage of the O.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and is an electrode used in an electrolysis apparatus for an alkaline permanganate solution, which is a rod-shaped electrode inserted into a cylindrical insulator. Alkaline permanganese, which is fastened to a cathode and an annular first metal band disposed on the insulator with a second metal band for fixing via a porous cylinder serving as an anode. The present invention provides an electrolytic device for an acid salt solution.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an electrode structure of an alkaline permanganate solution electrolyzer according to the present invention, and FIG. 2 shows a schematic diagram of an alkaline permanganate solution electrolyzer. Prior to the configuration of the present invention, an electrolysis apparatus for an alkaline permanganate solution will be described with reference to FIG. FIG.
FIG. 2A is a plan view, and FIG. 2B is a front view. This is an electrolysis apparatus in which six electrode portions 4 each composed of a rod-shaped cathode 2 and an anode 3 are arranged in a closed tank main body 1 under a solution immersion state. The closed tank body 1 is connected to a desmear device 8 through a circulation path including a liquid pump and a liquid inflow / outflow path 7 provided with a circulation pump 5 and an on-off valve 6, and a strainer (not shown) is provided in the inflow path.

[0008] A board rack 10 supporting a printed wiring board 9 to be processed is immersed in a desmear device 8 for arranging an object to be processed at a predetermined height.

The electrode portion 4 is formed of a rod-shaped cathode 12 inserted into a cylindrical insulator 11 made of PP or Teflon.
Then, the perforated cylinder 14 is held by tightening the fixing metal band 15 via the perforated cylinder (net) 14 serving as an anode on the annular metal band 13 disposed on the lower body 11 a of the insulator 11. There is a configuration to do. An SUS pipe or a copper pipe is used for the metal band 13, while SUS is used for the porous cylinder 14.

[0010]

[Table 1]

Thus, the metal band 15 placed on the annular metal band 13 disposed on the insulator 11 is interposed through the porous tube 14.
Since the metal band 15 plays an auxiliary role of electrical conduction by tightening, it is possible to avoid poor connection of the perforated cylinder 14 and to suppress heat generation of the insulator 10 as shown in Table 1. As shown in the figure, a high current can be passed, the breakage of the porous tube 14 can be prevented, the durability can be improved, and the efficiency of the oxidation reaction can be improved (about 50%). Further, the same amount of substrate processing can be performed with a smaller number of electrodes.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of an electrode part showing one embodiment of an electrolysis apparatus for an alkaline permanganate solution of the present invention.

FIG. 2 is a schematic diagram of an electrolysis apparatus for an alkaline permanganate solution.

FIG. 3 is a cross-sectional view of a conventional electrode unit.

[Explanation of symbols]

11 ... insulator, 12 ... rod-shaped cathode, 13 ... metal band, 1
4 ... perforated cylinder (anode) 15 ... metal band.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) C25B 1/00-15/08 C25F 7/00 H05K 3/26

Claims (1)

(57) [Claims] An electrode for use in an electrolysis apparatus for an alkaline permanganate solution, comprising: a rod-shaped cathode inserted into a cylindrical insulator; and an annular first metal disposed on the insulator. An electrolytic device for an alkaline permanganate solution, wherein the electrolytic device is fastened with a second metal band for fixing via a porous cylinder serving as an anode on the band.