JP5628278B2 - Electrolytic regeneration treatment equipment - Google Patents

Description

  The present invention relates to an electrolytic regeneration processing apparatus for electrolyzing and regenerating a processing solution used for desmear processing in a manufacturing process for manufacturing a printed wiring board or the like.

  When a through hole or a via is formed in a resin substrate used for a printed wiring board, a smear that is a resin residue is generated by frictional heat between a drill, a laser, and the resin. In order to maintain the electrical connection reliability of the printed wiring board, it is necessary to remove (desmear treatment) the smear generated in the through hole or via by a chemical treatment method or the like.

  In general, in the chemical treatment method, a solution of permanganate such as sodium permanganate or potassium permanganate is used as the treatment liquid. This treatment liquid is stored in a desmear treatment tank. When the resin substrate is immersed in a treatment liquid in a desmear treatment tank and subjected to desmear treatment, smear is oxidized and smear is removed from through holes and vias, while permanganate in the treatment liquid is manganic acid. Become salt. And in order to reuse the process liquid after this process for smear removal, the electrolytic regeneration process which makes the manganate in a process liquid permanganate is performed.

  A conventional electrolytic regeneration treatment apparatus is configured to send an electrolytic regeneration tank for storing a treatment liquid, an electrode immersed in the treatment liquid in the electrolytic regeneration tank, and a treatment liquid discharged from the desmear treatment tank to the electrolytic regeneration tank. And a return side conduit for feeding the treatment liquid after the electrolytic regeneration treatment to the desmear treatment tank. The treatment liquid circulates between the desmear treatment tank and the electrolytic regeneration tank. In such an electrolytic regeneration processing apparatus, in order to improve the regeneration efficiency, usually, a plurality of electrodes are disposed in the electrolytic regeneration tank (see, for example, Patent Document 1).

Japanese Patent No. 3301341

  However, in the system in which a plurality of electrodes are arranged in the electrolytic regeneration tank as described above, the capacity of the electrolytic regeneration tank needs to be increased (capacity about 1 to 2 times that of the desmear treatment tank). It is necessary to secure an installation area for installing the bath, and the amount of bath increases.

  Therefore, the present invention has been made in view of such a point, and an object of the present invention is to provide an electrolytic regeneration processing apparatus that can be miniaturized and can reduce the amount of bath.

  (1) The electrolytic regeneration treatment apparatus of the present invention is for electrolyzing and regenerating a treatment solution used for desmear treatment in a desmear treatment tank. The electrolytic regeneration processing apparatus includes a regeneration processing unit, a feed side conduit, and a return side conduit. The regeneration processing unit is disposed in the cylindrical part having an inner peripheral surface functioning as an anode, and extends along the extending direction of the cylindrical part in a state of being separated from the inner peripheral surface. And a cathode. In this regeneration processing section, the processing liquid is fed through a gap between the inner peripheral surface of the cylindrical section and the cathode. The sending side conduit has a downstream end connected to the cylindrical portion, and guides the processing liquid discharged from the desmear processing tank to the regeneration processing unit. The return side conduit has an upstream end connected to the cylindrical portion, and guides the processing liquid discharged from the regeneration processing unit to the desmear processing tank.

  In this configuration, the downstream end of the feed side conduit is connected to the cylindrical portion of the regeneration processing unit. Therefore, the treatment liquid discharged from the desmear treatment tank flows directly into the cylindrical portion through the feed side conduit. The treatment liquid that has flowed into the cylindrical portion is electrolyzed and regenerated while being fed through the gap between the inner peripheral surface of the cylindrical portion and the cathode. The treatment liquid that has been regenerated and discharged from the recycle treatment unit is guided to a desmear treatment tank through a return-side conduit.

  In this configuration, unlike the conventional configuration in which the treatment liquid is stored in the electrolytic regeneration tank and the cathode and the anode are immersed in the treatment liquid, the treatment liquid discharged from the desmear treatment tank is formed in a cylindrical shape through the feed side conduit. Let it flow directly into the section. And the process liquid electrolyzed in the regeneration process part is directly flowed out to the return side conduit connected to the cylindrical part, and is sent to the desmear process tank side. That is, in this configuration, the cylindrical portion is interposed between the feed side conduit and the return side piping as a function of the anode, and a flow path for allowing the processing liquid to flow through the gap between the anode and the cathode. Combined with the function. Therefore, in this configuration, the conventional electrolytic regeneration tank is not required, so that the electrolytic regeneration processing apparatus can be miniaturized and the amount of bath can be reduced.

Prior Symbol electrolytic regeneration apparatus, the tubular portion may include a first pipe having an inner peripheral surface serving as an anode, and a second pipe having an inner peripheral surface serving as an anode, the cathode, the first A first cathode disposed in one pipe and extending along an extending direction of the first pipe in a state of being separated from an inner peripheral surface of the first pipe; and disposed in the second pipe; Preferably, it includes a second cathode extending along the extending direction of the second pipe in a state of being separated from the inner peripheral surface of the two pipes, and in this case, the downstream end of the feed side conduit is The upstream end of the first pipe is connected to the downstream end of the first pipe, and the upstream end of the second pipe is connected to the upstream end of the second pipe. Inclined with respect to the first pipe so as to form an acute angle with the extending direction of the first pipe. It is arranged in the state.

  In this configuration, the downstream end of the first pipe is connected to the upstream end of the second pipe, so that the first pipe and the second pipe form one flow path through which the processing liquid flows. doing. That is, the one flow path has the upstream end of the first pipe to which the downstream end of the feed side conduit is connected as the inlet of the processing liquid, the downstream end of the first pipe, and the upstream of the second pipe. It is a flow path through which the processing liquid flows in the order of the side end and the downstream end of the second pipe. And the 2nd piping is arrange | positioned in the state inclined with respect to the 1st piping so that the extending direction may make an acute angle with the extending direction of the 1st piping. Therefore, in this configuration, the electrolytic regeneration treatment is performed as compared with the case where the linear flow path having a length obtained by adding the flow path length of the first pipe and the second pipe is formed by one pipe. The length in the extending direction of the pipe can be reduced while maintaining the efficiency of the same.

Also, when the second pipe in a state of being inclined with respect to the first pipe is disposed, the second pipe, the is disposed above the first pipe, the first pipe, the The second pipe is inclined in the horizontal direction so that the downstream end is higher than the upstream end, and the second pipe is horizontally arranged so that the downstream end is higher than the upstream end. We are inclined for.

  In this configuration, since the second pipe on the downstream side is disposed above the first pipe on the upstream side, the gas generated when the treatment liquid is electrolyzed in the regeneration processing section flows in the direction in which the treatment liquid flows. The inside of the regeneration processing unit can be raised while moving along the flow of the processing liquid without countering to the above. As a result, the gas generated by electrolysis smoothly moves to the downstream side of the regeneration processing unit along the flow of the processing liquid, and therefore, the gas is prevented from staying in the regeneration processing unit. In addition, in this configuration, since each pipe is inclined with respect to the horizontal direction as described above, the gas can easily move more smoothly in each pipe toward the downstream side.

In the electrolytic regeneration processing apparatus, the cylindrical portion has an opening at one end in the extending direction, and the cathode has a base attached to the one end of the cylindrical portion, and the cylindrical shape from the opening. And an extension part that is inserted into the part and extends along the extending direction of the cylindrical part from the base part.

In this configuration, an opening is provided at one end of the cylindrical portion. Therefore, when the cathode is attached to the cylindrical portion, the extension portion of the cathode is inserted into the cylindrical portion from the opening of the cylindrical portion, and the base portion of the cathode is attached to one end of the cylindrical portion, thereby extending the extension portion. Can be positioned at a desired position in the cylindrical portion.

The electrolytic regeneration treatment device prevents contact between the extension part and the inner peripheral surface of the cylindrical part when the extension part of the cathode moves in a direction approaching the inner peripheral surface of the cylindrical part. For this purpose, in the flow path of the processing liquid constituted by a gap between the extension part and the inner peripheral surface of the cylindrical part, the tip part of the extension part is provided from the extension part to the cylindrical part. An insulating member having a rod-like shape or a radial shape toward the inner peripheral surface is provided.

In this configuration, since the insulating member is attached to the cathode, even if the cathode is bent and deformed, for example, the cathode moves in a direction approaching the inner peripheral surface of the cylindrical portion, the cathode is cylindrical. The insulating member contacts the inner peripheral surface of the tubular portion before contacting the inner peripheral surface of the portion. Thereby, contact with a cathode and the internal peripheral surface of a cylindrical part can be prevented.

(2) Another electrolytic regeneration processing apparatus of the present invention is an electrolytic regeneration processing apparatus for electrolyzing and regenerating a processing solution used for desmear processing in a desmear processing tank, and has an inner peripheral surface that functions as an anode. A cylindrical portion, and a cathode disposed in the cylindrical portion and extending along the extending direction of the cylindrical portion in a state of being separated from the inner peripheral surface, and the inner peripheral surface of the cylindrical portion And a regeneration processing section for feeding the processing liquid through a gap between the cathode and the cathode, and a downstream end is connected to the cylindrical section, and the processing liquid discharged from the desmear processing tank is supplied to the regeneration processing section. A feeding-side conduit for guiding, and an upstream-side end portion connected to the tubular portion, and a return-side conduit for guiding the processing liquid discharged from the regeneration processing portion to the desmear treatment tank, wherein the tubular portion is And a first pipe having an inner peripheral surface functioning as an anode A second pipe having an inner peripheral surface functioning as an anode, wherein the cathode is disposed in the first pipe, and is extended from the first pipe in a state of being separated from the inner peripheral surface of the first pipe. A first cathode extending along the installation direction, and a second cathode disposed in the second pipe and extending along the extension direction of the second pipe in a state of being separated from the inner peripheral surface of the second pipe. The downstream end of the feed pipe is connected to the upstream end of the first pipe, and the downstream end of the first pipe is connected to the upstream end of the second pipe. The second pipe is disposed in an inclined state with respect to the first pipe such that the extending direction forms an acute angle with the extending direction of the first pipe, and the second pipe is The first pipe is disposed at a lower end than the upstream end. The second pipe is inclined with respect to the horizontal direction so as to be higher, and the second end of the second pipe is inclined with respect to the horizontal direction so that its downstream end is higher than the upstream end. Further includes an auxiliary anode disposed in the cylindrical portion and electrically connected to the cylindrical portion, and the auxiliary anode is disposed opposite to the cathode in a state of being separated from the cathode.

In this configuration, since the regeneration processing unit further includes an auxiliary anode, the area of the anode is increased as compared with the case where the portion functioning as the anode is only the inner peripheral surface of the cylindrical portion. Thereby, since the energization amount to a regeneration process part can be increased, the capability of an electrolytic regeneration process can be improved.

( 3 ) In the electrolytic regeneration processing apparatus, a piping block in which the first piping in which the first cathode is disposed and the second piping in which the second cathode is disposed are connected in series. However, it is preferable that a plurality of pipe blocks are connected in parallel to the feed side conduit and the return side conduit.

  In this configuration, the first pipe and the second pipe (upstream side pipe and downstream side pipe) are connected in series, so that only a single pipe (only the upstream side pipe or only the downstream side pipe) is compared. Therefore, a pipe block having a longer flow path length and improved electrolytic regeneration treatment capacity is used. And a regeneration processing part is constructed | assembled using the said piping block of the number according to the required electrolytic regeneration processing capability. In that case, the process liquid which flows through a sending side conduit | pipe is each guide | induced to the upstream edge part of each of several piping blocks, for example, the upstream edge part of a 1st piping block, and the upstream edge part of a 2nd piping block, respectively. Thus, the 1st piping block and the 2nd piping block are connected in parallel. Therefore, the treatment liquid before the electrolytic regeneration treatment, that is, the treatment liquid having a high manganate concentration can be caused to flow into the first piping block and the second piping block, respectively. Therefore, the efficiency of the electrolytic regeneration process can be improved as compared with the configuration in which the first piping block and the second piping block are connected in series to form one flow path.

  Further, by preparing in advance a plurality of piping blocks in which upstream piping and downstream piping are connected in series, the first piping block and the second piping block are constructed as described above when constructing the regeneration processing unit. Can be connected in parallel, so that workability can be improved.

  Further, in this configuration, when a pump for liquid feeding is provided, the processing liquid can be caused to flow into the first piping block and the second piping block only by providing one pump on the feeding side conduit or the return side conduit. Moreover, when providing a filter, the process liquid which passed the 1st piping block and the 2nd piping block can be filtered only by providing one filter in a return side conduit | pipe. Therefore, the number of parts can be reduced.

( 4 ) Further, in the electrolytic regeneration processing apparatus, the cylindrical portion has openings at both ends in the extending direction, and the regeneration processing portion includes a seal member disposed in the vicinity of each opening. In this case, the seal member has a cylindrical shape having a through hole through which the cathode is inserted, and is interposed between the inner peripheral surface of the cylindrical portion and the cathode. It is preferably formed of an insulating material.

  In this configuration, the cathode is inserted into the through hole of the seal member disposed in the vicinity of each opening in the cylindrical portion, so that the cathode is insulated from the anode (inner peripheral surface of the cylindrical portion). It can be supported by the part.

( 5 ) In the electrolytic regeneration processing apparatus, it is preferable that the auxiliary anode has a cylindrical shape extending along the cathode so as to surround the cathode and has a plurality of through holes.

  In this configuration, since the auxiliary anode has a plurality of through holes, even if the auxiliary anode is disposed in the cylindrical portion so as to surround the cathode, the treatment liquid is passed through the plurality of through holes in the cylindrical portion. It also reaches the inner surface. Therefore, the inner peripheral surface of the cylindrical portion still functions as an anode. Since the auxiliary anode has a cylindrical shape extending along the cathode so as to surround the cathode, the surface area of the anode can be effectively increased around the cathode.

( 6 ) Preferably, the electrolytic regeneration processing apparatus further includes a temperature adjusting unit for adjusting the temperature of the cylindrical part.

  In this configuration, since the temperature adjusting unit is provided, it is possible to suppress an increase in the temperature of the processing liquid even when heat is generated during the electrolytic regeneration process in the regeneration processing unit. It is possible to suppress the occurrence of problems such as a decrease in the quality of the processing liquid due to the process, and it is possible to suppress the occurrence of problems in the apparatus due to the temperature rise of the processing liquid. Further, when the temperature adjusting unit includes not only a cooling unit that cools the cylindrical part but also a heating unit, the temperature of the processing liquid can be managed more precisely.

( 7 ) It is preferable that the electrolytic regeneration processing apparatus further includes a gas discharge valve for discharging gas generated in the regeneration processing unit.

  In this configuration, gas generated by electrolyzing the processing liquid in the regeneration processing unit can be discharged out of the apparatus through the gas discharge valve.

  As described above, according to the present invention, the electrolytic regeneration processing apparatus can be downsized, and the amount of bath in the electrolytic regeneration processing apparatus can be reduced.

And electrolytic regeneration apparatus according to a first form state is a schematic diagram showing a desmear treatment tank the electrolytic regeneration apparatus is connected. (A) is the schematic which expanded the regeneration processing part in the said electrolytic regeneration processing apparatus, (B) is the schematic which looked at the piping and cathode in the said regeneration processing part from the bottom face side. It is the schematic which shows the structure which connected the piping provided with the filter and the pump to the desmear processing tank of FIG. It is the schematic which shows embodiment of the regeneration process part in the said electrolytic regeneration processing apparatus. It is a schematic diagram illustrating a reproduction processing unit of the electrolytic regeneration apparatus according to a second shape state. The third form status is a schematic diagram showing the reproduction processing unit and its vicinity of the electrolytic regeneration apparatus according to (an embodiment of the present invention). (A) is a schematic diagram showing the reproduction processing unit and a temperature control unit of the fourth form state electrolytic regeneration apparatus according to (an embodiment of the present invention), (B), the reproduction processing unit and the temperature control unit It is sectional drawing which shows the modification 1 of (1), (C) is the schematic which shows the modification 2 of the said reproduction | regeneration processing part and the said temperature control part. The fourth form status is a schematic view showing a third modification of the reproduction processing unit and the temperature control unit in the (embodiment of the present invention). Fifth shape state is a sectional view showing a reproduction processing unit of the electrolytic regeneration apparatus according to (an embodiment of the present invention). (A) is a perspective view showing an example of an auxiliary anode in the fifth form state, (B) is a perspective view showing another example of the auxiliary anode in the embodiment of FIG. Sixth form status is a schematic diagram illustrating a reproduction processing section, and a gas discharge valve of electrolytic regeneration apparatus according to (an embodiment of the present invention). (A) is a plan view showing a reproduction processing unit of the electrolytic regeneration apparatus of the seventh form state (embodiment of the present invention), of (B) is a front view thereof, (C) is (B) It is XIIC-XIIC line sectional drawing. It is a sectional view showing a reproduction processing unit in the seventh form state.

Hereinafter, electrolytic regeneration processing apparatus will be described in detail with reference to the drawings.

<First form Thailand>
As shown in FIG. 1, electrolytic regeneration apparatus 11 according to the first shape state is in the process of producing a printed wiring board, in order to reuse the treatment liquid used in the desmear process to remove the smear, the processing solution It is for electrolyzing and regenerating. Hereinafter, the case where a solution of a permanganate such as sodium permanganate or potassium permanganate is used as the treatment liquid L will be described as an example. The processing liquid L is stored in the desmear processing tank 13.

  A resin substrate (not shown) constituting the substrate portion of the printed wiring board is immersed in a treatment liquid in the desmear treatment tank 13 and subjected to desmear treatment. As a result, smears present in the through holes and vias of the resin substrate are oxidized by the processing liquid L, and the smears are removed from the through holes and vias. On the other hand, in the treatment liquid L used for the desmear treatment, a part of the permanganate is reduced to become a manganate. Therefore, in order to reuse this treatment liquid for smear removal, the treatment liquid L is subjected to an electrolytic regeneration treatment that oxidizes manganate to permanganate in the electrolytic regeneration treatment apparatus 11.

  As shown in FIG. 1, the electrolytic regeneration processing apparatus 11 includes a feed side conduit 15, a return side conduit 17, a regeneration processing unit 19, a pump 41, and a filter 43.

  The upstream end 15 a of the feed side conduit 15 is connected to the side surface of the desmear treatment tank 13. The downstream end 15 b of the feed side conduit 15 is connected to the upstream end of the regeneration processing unit 19.

The upstream end 17 a of the return side conduit 17 is connected to the downstream end of the regeneration processing unit 19. The downstream side end 17 b of the return side conduit 17 is disposed at a position where the processing liquid L can flow into the desmear processing tank 13. In this form state, the downstream end 17b of the return-side conduit 17 is disposed above or the processing solution in L of the liquid surface of the treatment liquid L stored in the desmearing tank 13.

  As shown in FIG. 2, the regeneration processing unit 19 includes three pipes 23 as cylindrical parts, and a total of three cathodes 25 arranged one by one in each pipe 23. The three pipes 23 include a first pipe 231, a second pipe 232, and a third pipe 233.

  Each pipe 23 has a long cylindrical shape in the axial direction. Each pipe 23 has openings at both ends in the longitudinal direction (extending direction). These pipes 23 are arranged parallel to each other with their longitudinal directions oriented in the vertical direction. These pipes 23 are arranged side by side in the horizontal direction.

  The inner peripheral surface 31 of each pipe 23 functions as an anode. Each pipe 23 is formed of a conductive material. As a material which comprises each piping 23, metal materials, such as stainless steel, are mentioned, for example. Examples of stainless steel include SUS316.

As shown in FIGS. 2A and 2B, a cathode 25 is provided in each pipe 23. Each cathode 25 extends along the longitudinal direction of the pipe 23 while being separated from the inner peripheral surface 31 of the pipe 23. Both ends of each cathode 25 protrude from the openings at both ends of the pipe 23. The cathode 25 is made of a conductive material. Examples of the material constituting the cathode 25 include metal materials such as copper. The cathode 25 may be used by adjusting a surface area of the cathode 25 by covering a part of the surface with an insulator (non-conductor) such as polytetrafluoroethylene. In this form state, the cathode 25 is has a cylindrical shape, not limited thereto, but may be other shapes, such as for example, prismatic.

  In the vicinity of the openings at both ends of each pipe 23, seal members 39 interposed between the inner peripheral surface 31 and the cathode 25 are respectively disposed. Each seal member 39 has a cylindrical shape having a through hole, and the cathode 25 is inserted through the through hole. Each seal member 39 closes the openings at both ends of each pipe 23 so as to be in a liquid-tight state.

  Seal members 39 provided at both ends of each pipe 23 support the cathode 25 in a state of being separated from the inner peripheral surface (anode) 31. Each seal member 39 serves to prevent the processing liquid flowing in the regeneration processing unit 19 from leaking from the openings at both ends of each pipe 23 and to insulate the cathode 25 from the anode (inner peripheral surface 31). Plays. Examples of the material constituting each sealing member 39 include insulating synthetic resin and synthetic rubber. Examples of the synthetic resin include polytetrafluoroethylene.

  Each pipe 23 and each cathode 25 have a cross-sectional shape perpendicular to the longitudinal direction that is substantially constant over substantially the entire longitudinal direction. Therefore, the cross-sectional shape of the flow path, which is the gap between the inner peripheral surface 31 of each pipe 23 and the cathode 25 corresponding thereto, is also substantially constant over the entire length direction.

  Of the three pipes 23, the first pipe 231 is located on the most upstream side, and the third pipe 233 is located on the most downstream side. The first pipe 231 has a connection portion 27 to which the downstream end portion 15b of the feed side conduit 15 is connected. The connection portion 27 is provided at one end portion (upstream end portion) 231a of the first pipe 231. The connecting portion 27 has a cylindrical shape that protrudes outward in the radial direction (width direction) from the side surface of the first pipe 231. The connecting portion 27 is provided on the inner side in the longitudinal direction than the seal member 39.

  The other end portion (downstream side portion) 231 b of the first pipe 231 communicates with one end portion (upstream side portion) 232 a of the second pipe 232 via the connecting pipe 35. The other end (downstream end) 232 b of the second pipe 232 communicates with one end (upstream end) 233 a of the third pipe 233 via the connecting pipe 37.

  The third pipe 233 has a connection portion 29 to which the upstream end portion 17a of the return side conduit 17 is connected. The connection portion 29 is provided at the other end portion (downstream end portion) 233b of the third pipe 233. The connection portion 29 has a cylindrical shape that protrudes outward in the radial direction (width direction) from the side surface of the third pipe 233. The connecting portion 29 is provided on the inner side in the longitudinal direction than the seal member 39.

  A gap between the inner peripheral surface 31 of each pipe 23 and the cathode 25 serves as a flow path for the processing liquid L. In each pipe 23, a flow path for the processing liquid L is formed on the inner side in the longitudinal direction than the respective seal members 39. The inner space of each pipe 23 and the inner space of the connecting pipes 35 and 37 communicate with the outside only through the connection portion 27 and the connection portion 29. The first pipe 231, the second pipe 232, and the third pipe 233 form one continuous flow path from the connection portion 27 to the connection portion 29. The processing liquid L that has flowed into the first pipe 231 through the connection part 27 is entirely in the regeneration processing part 19 in the order of the first pipe 231, the connection pipe 35, the second pipe 232, the connection pipe 37, and the third pipe 233. It flows to the return side conduit 17 through the connection portion 29.

  In addition, the one end part and the other end part of each pipe 23 are not necessarily limited to the part located at the extreme end in the longitudinal direction of each pipe 23. That is, as shown in FIG. 2 (A), one end portion of each pipe 23 is a portion corresponding to the position of the almost upstream end of the flow path of the processing liquid L in each pipe 23. The other end portion of 23 is a portion corresponding to the position of the substantially downstream end of the flow path of the processing liquid L in each pipe 23.

  As shown in FIG. 1, a voltage is applied by a rectifier 21 between the anode and the cathode 25 of the regeneration processing unit 19. The rectifier 21 is connected to an external power supply (not shown). The negative electrode of the rectifier 21 is connected to the upper end of each cathode 25, and the positive electrode of the rectifier 21 is connected to the outer peripheral surface of the first pipe 231. Since each pipe 23 and the connecting pipes 35 and 37 are entirely made of a conductive material, the inner peripheral surface 31 of each pipe 23 is obtained by connecting the positive electrode of the rectifier 21 to the outer peripheral face of the first pipe 231. Can function as an anode.

The length of the length and the pipes 23 of each cathode 25, but are not particularly limited, so easily bending degree becomes longer deformed, by connecting a plurality of pipes 23 as in the present form state, the pipes It is preferable that the cathode 25 be disposed in the inside 23. Thereby, the length of each cathode 25 and each piping 23 can be restrained small, enlarging total length.

As the distance between the cathode 25 and the anode 31 (distance between the electrodes) becomes shorter, a short circuit due to deposition of manganate formed on the surface of the cathode 25 is more likely to occur. It tends to be higher. Thus, although the distance between the electrodes in consideration of these points are adjusted, in the present form state, the feed-side conduit 15 is connected directly to the first pipe 231, the inner peripheral surface 31 of the pipe 23 and the cathode 25 Therefore, the flow rate of the processing liquid flowing through the flow path in each pipe 23 is increased as compared with the conventional case where an electrolytic regeneration tank is used. be able to. Thus, in this form condition, the effect of removing permanganate to produce on the surface of the cathode 25 from the surface of the cathode 25 by the flow of the processing solution of a large flow rate is higher than the conventional. Thus, in this form state, it also becomes possible to reduce the distance between the electrodes as compared with the prior art.

  The inner diameter of each pipe 23 is preferably small from the viewpoint of reducing the liquid amount (bath amount) in the regeneration processing unit 19, but is appropriately designed in consideration of the distance between the cathode 25 and the like.

  It is preferable that the flow rate of the processing liquid L flowing through the flow path in each pipe 23 is adjusted to, for example, about 5 to 100 mm / second. When the flow rate is 5 mm / second or more, an excellent effect of removing (pushing) sludge generated on the surface of the cathode 25 from the surface of the cathode 25 can be obtained. On the other hand, when the flow rate is 100 mm / second or less, it is possible to prevent the contact time between the cathode 25 and the treatment liquid L from becoming too short. Thereby, it can suppress that the efficiency which reproduce | regenerates the process liquid L becomes low too much.

  Note that during the regeneration process (while the rectifier 21 is energized), the flow rate of the treatment liquid L flowing through the flow paths of the pipes 23 is reduced, and after the regeneration process is completed (energization is stopped), sludge starts from the surface of the cathode 25. The flow rate may be increased for the purpose of removing water. This control may be repeated every predetermined time, for example. Further, this control may be automatically executed by a control means (not shown) or may be executed manually by an operator.

  Further, the flow velocity may be varied for each pipe 23. In this way, in order to change the flow velocity for each pipe 23, for example, a method of varying the inner diameter of the pipe 23 can be employed.

  Moreover, the outer peripheral surface of each piping 23 may be coat | covered with the other member in order to improve heat insulation or to suppress a bending deformation.

In this form state is provided with the above configuration, the bath of electrolytic regeneration apparatus 11 can be made smaller than the bath of desmearing tank 13. Specifically, the ratio of the bath amount of the electrolytic regeneration treatment device 11 and the bath amount of the desmear treatment tank 13 is preferably about 1: 2 to 1:20, and is about 1: 3 to 1:10. Is more preferable. Note that the bath amount of the electrolytic regeneration processing apparatus 11 includes not only the bath amount of the regeneration processing unit 19 but also the bath amount of the feed side conduit 15 and the bath amount of the return side conduit 17. In the conventional apparatus using the electrolytic regeneration tank, the bath amount of the electrolytic regeneration processing apparatus (the bath amount of the electrolytic regeneration tank, the bath amount of the feed side conduit 15 and the bath amount of the return side conduit 17) and the bath of the desmear treatment tank. The ratio of amounts is about 2: 1 to 1: 1.

The anode current density is preferably about 1~30A / dm ^2. When the anode current density is 1 A / dm ² or more, the potential between the anode and the cathode 25 is sufficiently increased to a regeneration potential (MnO ₄ ²⁻ → MnO ₄ ⁻ + e) for electrolyzing manganate ions into permanganate ions. Can be reached. Thereby, it can suppress that reproduction efficiency falls. On the other hand, when the anode current density is 30 A / dm ² or less, the generation of hydrogen can be suppressed, so that the regeneration efficiency can be prevented from decreasing. The cathode current density is preferably about 0.3~30000A / dm ^2.

  The area ratio between the anode 31 and the cathode 25 is preferably about 3: 1 to 1000: 1. This ratio can be adjusted, for example, by covering a part of the surface of the cathode 25 with an insulator as described above. As the area of the cathode 25 increases, the amount of sludge generated on the surface of the cathode 25 increases. Therefore, the area of the cathode 25 is preferably smaller than the area of the anode 31.

  The electrolytic regeneration temperature (temperature of the treatment liquid L) in the regeneration treatment unit 19 is 30 ° C. to 90 ° C. when a permanganate solution such as sodium permanganate or potassium permanganate is used as the treatment liquid L. It is preferable that it is about. The temperature of the processing liquid L can be adjusted by, for example, heating each pipe 23 or heating the feed side conduit 15 and the return side conduit 17. Examples of the heating means include a method of covering each pipe 23, the feed side conduit 15, the return side conduit 17, and the like with a jacket having a heating source such as steam or heating wire.

  The pump 41 is disposed in the middle of the feed side conduit 15. When the pump 41 is driven, the processing liquid L is discharged from the desmear processing tank 13 and sent to the first pipe 231 of the regeneration processing unit 19 through the feeding side conduit 15. The processing liquid L flows into the first pipe 231 through the connection portion 27 of the first pipe 231. The treatment liquid L is electrolyzed in the process of flowing through the flow path of each pipe 23 in a state where a voltage is applied between the cathode 25 and the anode 31 by the rectifier 21. The processing liquid L that has been electrolytically processed and regenerated in the regeneration processing unit 19 is discharged from the third pipe 233 and sent to the desmear processing tank 13 through the return side conduit 17.

  The filter 43 is disposed in the middle of the return side conduit 17. In the regeneration processing unit 19, sludge (manganese dioxide) is generated on the surface of the cathode 25 by the electrolytic regeneration process. This sludge is removed from the surface of the cathode 25 by the flow of the processing liquid L, and is sent to the return side conduit 17 together with the processing liquid L. The filter 43 captures sludge contained in the processing liquid L. The filter 43 is periodically replaced or sludge adhering to the filter 43 is periodically removed.

  A plurality of filters 43 may be provided in the return side conduit 17. Further, instead of providing the filter 43 in the return side conduit 17, a small tank for sludge removal (not shown) may be provided in the return side conduit 17.

  FIG. 3 is a schematic view showing a configuration in which a sludge removing pipe 45 is further provided in the desmear treatment tank 13 of FIG. This pipe 45 is provided with a filter 47 and a pump 49. A base end portion 45 a of the pipe 45 is connected to a side surface of the desmear treatment tank 13. A tip 45b of the pipe 45 is disposed above the desmear treatment tank 13. By providing the pipe 45, the pump 49, and the filter 47, the sludge removal efficiency can be further increased.

  FIG. 4 is a schematic diagram illustrating a modification of the regeneration processing unit 19 in the electrolytic regeneration processing apparatus 11. The regeneration processing unit 19 in this modification forms one flow path in which the first pipe 231, the second pipe 232, and the third pipe 233 are connected from the upstream connection part 27 to the downstream connection part 29. 2 is the same as the regeneration processing unit 19 shown in FIG. 2, but the regeneration processing unit 19 of this modification is different from that in FIG. 2 in that the downstream pipe 23 is disposed above the upstream pipe 23. This is different from the reproduction processing unit 19 shown in FIG. That is, the second pipe 232 is disposed above the first pipe 231, and the third pipe 233 is disposed above the second pipe 232. Moreover, each piping 23 is arrange | positioned so that the longitudinal direction may incline slightly with respect to a horizontal direction.

  Specifically, in FIG. 4, the first pipe 231 is positioned above the downstream part to which the connecting pipe 35 is connected rather than the upstream part in which the connection part 27 is provided. (In FIG. 4, it is inclined obliquely upward to the left). In the second pipe 232, the downstream part to which the connecting pipe 37 is connected is located above the upstream part to which the connecting pipe 35 is connected (in FIG. 4, diagonally upward to the right). Slanted). In the third pipe 233, the downstream part where the connecting portion 29 is provided is located above the upstream part where the connecting pipe 37 is connected (in FIG. 4, diagonally upward to the left). Slanted).

  Therefore, in this modification, the gas generated by electrolysis moves to the downstream side of the regeneration processing unit 19 along the flow of the processing liquid L, is discharged from the third pipe 233 and together with the processing liquid L through the return side conduit 17. Sent downstream. And the said gas is discharged | emitted from the downstream edge part 17b of the return side conduit | pipe 17, and is collected as needed. Note that the regeneration processing unit 19 may perform gas venting. Specifically, for example, a vent for discharging gas may be separately provided in the pipe 23 and the connecting pipes 35 and 37 in the regeneration processing unit 19.

<Second form Thailand>
Next, a description will be given electrolytic regeneration apparatus 11 according to a second shape state. Figure 5 is a schematic diagram illustrating a reproduction processing unit 19 of the electrolytic regeneration apparatus 11 according to a second shape state. The electrolytic regeneration apparatus 11 of the second form state, the configuration other than the reproduction processing unit 19, the first form is on purpose similar, description thereof will be omitted.

In this second form state, the processing liquid L flowing through the feed side conduit 15, the upstream end of the first pipe 231 231a, the upstream end of the upstream end 232a and the third pipe 233 of the second pipe 232 233a Each led to Then, the processing liquid L flows from the upstream side to the downstream side in the flow path in each pipe 23, and the downstream end 231 b of the first pipe 231, the downstream end 232 b of the second pipe 232, and the third pipe 233. The gas is discharged from the downstream end 233b to the return side conduit 17.

As shown in FIG. 5, this second form state, the reproduction processing unit 19, the upstream end 231a of each pipe 23, 232a, the upstream-side branch pipe 234 which is connected to 233a, downstream of the pipe 23 A downstream branch pipe portion 235 connected to the side end portions 231b, 232b, and 233b.

  The upstream branch pipe portion 234 has a structure in which the upstream portion is a single pipe and branches into three pipes on the way to the downstream side. The downstream branch pipe portion 235 has a structure in which the downstream part is a single pipe and branches into three pipes on the way to the upstream side. The upstream end 234 a of the upstream branch pipe portion 234 is connected to the downstream end 15 b of the feed side conduit 15. The downstream end 235 b of the downstream branch pipe portion 235 is connected to the upstream end 17 a of the return side conduit 17. The three downstream end portions 234b of the upstream branch pipe portion 234 are connected to the upstream end portions 231a, 232a, 233a of the respective pipes 23. The three upstream end portions 235 a of the downstream branch pipe portion 235 are connected to the downstream end portions 231 b, 232 b, and 233 b of each pipe 23.

  A gap between the inner peripheral surface 31 of each pipe 23 and the cathode 25 serves as a flow path for the processing liquid L. In each pipe 23, a flow path for the processing liquid L is formed on the inner side in the longitudinal direction than the respective seal members 39. The inner space of each pipe 23, the internal space of the upstream branch pipe part 234, and the internal space of the downstream branch pipe part 235 are downstream of the upstream end 234 a of the upstream branch pipe part 234 and the downstream branch pipe part 235. It communicates with the outside only through the side end 235b. The entire amount of the processing liquid L that has flowed into each pipe 23 through the upstream end 234a of the upstream branch pipe portion 234 flows out to the return side conduit 17 through the downstream end 235b of the downstream branch pipe portion 235.

Pump 41 is on purpose likewise the first shape, it is disposed on the feed side conduit 15. That is, since the pump 41 is disposed at a site before branching (site upstream from the branching portion), the processing liquid L can be sent to each pipe 23 by one pump 41.

Further, in this second form state, the flow rate of the treatment liquid L flowing in the flow path in each pipe 23, when the same as the flow rate of the treatment liquid L flowing in the flow path in the pipe 23 in the first form state can increase the flow rate of the treatment liquid L flowing in the feeding side duct 15 and the return-side line 17 in about 3 times that of the first shape state. Thus, in the second form state can increase the circulation amount of the treatment liquid L that cycle between reproduction processing unit 19 and the desmearing tank 13 as compared with the first shape state.

  In the form shown in FIG. 5, the case where the regeneration processing unit 19 includes the upstream branch pipe part 234 and the downstream branch pipe part 235 has been described as an example. The pipe | tube 17 may be the structure branched into plurality. Specifically, in this case, the feed side conduit 15 has three downstream end portions (not shown) formed by branching, and these downstream end portions are connected to the upstream end portions of the respective pipes 23. Connected. The return side conduit 17 has three upstream end portions (not shown) formed by branching, and these upstream end portions are connected to the downstream end portions of the pipes 23.

<Third form Thailand>
Figure 6 is a schematic diagram illustrating a reproduction processing unit 19 of the electrolytic regeneration apparatus 11 according to the third form state of the present invention. As shown in FIG. 6, electrolytic regeneration apparatus 11 of the third form status includes a reproduction processing unit 19, the upstream-side branch pipe 234, and a downstream branch pipe 235, opening and closing valves 61 and 62. The regeneration processing unit 19 includes a first piping block 191, a second piping block 192, and a third piping block 193. Each piping block has the same structure as the regeneration processing unit 19 shown in FIG. Specifically, it is as follows.

  The first piping block 191 includes three pipes 231, 232, 233 as the cylindrical portion 23, and a total of three cathodes 25 arranged one by one in each pipe. Three pipes of the first pipe block are an upstream first pipe 231, a central first pipe 232, and a downstream first pipe 233. These pipes 231, 232 and 233 are connected in series. The three cathodes 25 of the first piping block include an upstream first cathode 251 disposed in the piping 231, a central first cathode 252 disposed in the piping 232, and a downstream side disposed in the piping 233. This is the first cathode 253.

  The same applies to the second piping block. The three pipes are an upstream second pipe 231, a central second pipe 232, and a downstream second pipe 233 connected in series, and the three cathodes are provided in the pipe 231. An upstream second cathode 251 disposed in the center, a central second cathode 252 disposed in the pipe 232, and a downstream second cathode 253 disposed in the pipe 233.

  The same applies to the third pipe block, and the three pipes are an upstream third pipe 231, a central third pipe 232, and a downstream third pipe 233 connected in series, and the three cathodes are provided in the pipe 231. An upstream third cathode 251 disposed in the pipe 232, a central third cathode 252 disposed in the pipe 232, and a downstream third cathode 253 disposed in the pipe 233.

  The first piping block 191, the second piping block 192, and the third piping block 193 are connected in parallel by the upstream branch pipe 234 and the downstream branch pipe 235. The upstream end 234 a of the upstream branch pipe portion 234 is connected to the downstream end 15 b of the feed side conduit 15. The downstream end 235 b of the downstream branch pipe portion 235 is connected to the upstream end 17 a of the return side conduit 17.

  The processing liquid L flowing through the feed side conduit 15 is branched by the upstream branch pipe 234, and the upstream end of the first piping block 191, the upstream end of the second piping block 192, and the upstream side of the third piping block 193. Each is led to the end. The processing liquid L that has passed through each piping block is discharged from the downstream end of the first piping block 191, the downstream end of the second piping block 192, and the downstream end of the third piping block 193, and is branched downstream. They merge at the pipe 235 and flow out to the return side conduit 17.

  An open / close valve 61 is provided between the upstream end of each piping block and the upstream branch pipe 234. An opening / closing valve 62 is provided between the downstream end of each piping block and the downstream branch pipe 235. Each piping block can be attached to and detached from the feed side conduit 15 and the return side conduit 17. Specifically, the upstream end of each piping block can be attached / detached at a portion connected to the opening / closing valve 61, and the downstream end of each piping block can be attached / detached at a portion connected to the opening / closing valve 62. It is.

  The upstream branch pipe 234 has a structure in which the upstream portion is a single pipe and branches into three pipes on the way to the downstream side. The downstream branch pipe 235 is a single pipe at the downstream side, and has a structure branched into three pipes on the way to the upstream side.

In the third shape state, for example in the case of performing maintenance of the first piping block 191, remove the first piping block 191 from the switching valve 61 in the closed state of the opening and closing valve 61, 62 of the first piping block 191. During the maintenance of the first piping block 191, the second piping block 192 and the third piping block 193 can be used for the electrolytic regeneration process.

In the third form states, in each piping block, the pipes may be arranged in parallel to each other. In the third form states, in each piping block, the pipes may be connected in a straight line.

<Fourth form Thailand>
Figure 7 (A) is a schematic diagram showing a temperature adjusting unit 71 of the reproduction processing unit 19 in the electrolytic regeneration apparatus according to a fourth form state of the present invention. As shown in FIG. 7 (A), the temperature adjusting unit 71 in the fourth form state includes a tube 71a wound on the pipe (third pipe 233 in FIG. 9) of the cylindrical portion 23, an unillustrated feed mechanism Including. The inside of the tube 71a is a flow path through which a temperature adjusting fluid (heat medium) fed by a feed mechanism (not shown) flows. Thereby, since each cylindrical part 23 can be cooled and / or heated, the temperature of the processing liquid L flowing in the cylindrical part 23 can be adjusted to a desired range. As the temperature adjusting fluid, a liquid such as water or a gas such as air can be used. The temperature adjusting unit 71 preferably further includes a path for circulating the temperature adjusting fluid.

  FIG. 7B is a cross-sectional view illustrating a first modification of the temperature adjustment unit 71. The temperature adjustment unit 71 in the first modification includes a jacket 71b provided in each pipe (third pipe 233 in FIG. 9) of the cylindrical part 23 and a feed mechanism (not shown). The jacket 71 b covers substantially the entire outer surface of the tubular portion 23 with a predetermined gap 71 c between the outer surfaces of the tubular portions 23. The gap 71c is a flow path through which a temperature adjusting fluid fed by a feed mechanism (not shown) flows. Thereby, each cylindrical part 23 can be cooled and / or heated. The temperature adjusting unit 71 preferably further includes a path for circulating the temperature adjusting fluid. The jacket 71b may be integrally formed with the tubular portion 23, or may be attached to the tubular portion 23 after being formed as a separate body.

  FIG. 7C is a schematic diagram illustrating a second modification of the temperature adjustment unit 71. The temperature adjustment unit 71 in the second modification includes fins 71d provided on the outer surface of each pipe (third pipe 233 in FIG. 9) of the tubular part 23. The fins 71d are constituted by a large number of standing pieces that stand radially outward from the outer surface of each cylindrical portion 23. Adjacent upright pieces are arranged with a gap therebetween. The fins 71d may be integrally formed with the tubular portion 23, or may be attached to the tubular portion 23 after being formed as a separate body.

  Since such a fin 71d has a large surface area, the efficiency of heat exchange with a fluid (such as air) around the cylindrical portion 23 can be increased. Thereby, each cylindrical part 23 can be cooled. Moreover, each cylindrical part 23 can also be heated by sending warm air etc. to the fin 71d. Moreover, it is preferable that the temperature control part 71 is further provided with the air blower of the illustration omission which sends air to the fin 71d. Thereby, the efficiency of temperature control can further be improved.

  FIG. 8 is a schematic diagram showing a third modification of the temperature adjusting unit. In the third modification, a cooling fan 71 e as the temperature adjustment unit 71 is disposed in the vicinity of the regeneration processing unit 19. The cooling fan 71 e can send air to the regeneration processing unit 19 to cool the cylindrical portion 23 of the regeneration processing unit 19.

<Fifth form Thailand>
Figure 9 is a schematic diagram illustrating a reproduction processing unit 19 of the electrolytic regeneration apparatus 11 according to the fifth form state of the present invention. Figure 10 (A) is a perspective view showing an example of the auxiliary anode 81 in the fifth form state, FIG. 10 (B) is a perspective view showing another example of the auxiliary anode 81 in the fifth form state.

Reproduction processing unit 19 of the fifth form state includes an auxiliary anode 81. FIG. 9 shows a state in which the auxiliary anode 81 is disposed in the third pipe 233 of the regeneration processing unit 19 shown in FIG. Although not shown, the auxiliary anode 81 is also disposed in the first pipe 231 and the second pipe 232.

  The auxiliary anode 81 is opposed to the cathode 25 while being separated from the cathode 25. The auxiliary anode 81 has a cylindrical shape extending along the cathode 25 so as to surround the cathode 25. The auxiliary anode 81 is inscribed in the inner peripheral surface 31 of the cylindrical portion 23. The auxiliary anode 81 is electrically connected to the inner peripheral surface 31 of the cylindrical portion 23 by being inscribed in the inner peripheral surface 31 of the cylindrical portion 23.

  The auxiliary anode 81 is provided in the longitudinal direction of the cathode 25 from a position corresponding to the upstream end 233a of the cylindrical portion 23 to a position corresponding to the downstream end 233b. The auxiliary anode 81 has a plurality of through holes 81a throughout. By providing such a plurality of through holes 81a, the processing liquid L that has reached the auxiliary anode 81 through the connecting pipe 37 can flow into the auxiliary anode 81 through the through hole 81a. The treatment liquid L can be discharged outside the auxiliary anode 81 through the through-hole 81a after being electrolytically regenerated in the cylindrical portion 23, and can flow out from the connecting portion 29 to the outside of the cylindrical portion 23.

  As the auxiliary anode 81 provided with a plurality of through-holes 51c, for example, a net-like conductive sheet as shown in FIG. 10A is rolled into a cylindrical shape, and a conductive sheet as shown in FIG. And a plurality of through-holes 51c (punching plate). The auxiliary anode 81 is made of a conductive material. Examples of the material constituting the conductive sheet include metals such as stainless steel and copper, but are not limited thereto, and may be other metals or conductive materials other than metals. Examples of stainless steel include SUS316.

  The auxiliary anode 81 is inserted into the cylindrical portion 23 from the opening of the cylindrical portion 23 before attaching the cathode 25 to the cylindrical portion 23. Thereafter, the cathode 25 is attached to the end of the cylindrical portion 23.

In the fifth form state, a case has been exemplified in which a plurality of through-holes 81a in the entire auxiliary anode 81 is formed is not limited to this. The plurality of through holes 81 a may be formed only in a part of the auxiliary anode 81.

<Sixth form Thailand>
Figure 11 is a schematic diagram illustrating a reproduction processing unit 19 of the electrolytic regeneration apparatus according to a sixth form state of the present invention. As shown in FIG. 11, in the sixth form state, it is further provided a gas discharge valve 88 to the reproduction processing unit 19 shown in FIG. The gas discharge valve 88 is provided at the connection portion 29.

In each pipe of the cylindrical portion 23, the treatment liquid L is subjected to electrolytic regeneration treatment, whereby the manganate in the treatment liquid L is regenerated to permanganate, while manganese dioxide (MnO ₂ ) is the main component. Sludge is generated on the surface of the cathode 25. In order to remove the sludge from the surface of the cathode 25, it is preferable to perform a process of periodically washing the cathode 25 by circulating a hydrogen peroxide solution through the regeneration processing unit 19. When this cleaning process is performed, a gas is generated by a chemical reaction.

In the sixth form state, since the gas discharge valve 88 is provided, you are possible to discharge the gas generated by the cleaning process to the outside of the reproduction processing unit 19. As the gas discharge valve 88, for example, a pressure valve that opens when the pressure in the connection portion 29 exceeds a predetermined value, an automatically controlled electromagnetic valve, or the like can be used.

In particular, the reproduction processing unit 19 of the sixth form state, since the connecting portion 29 and the gas discharge valve 88 as shown in FIG. 11 are arranged so as to be positioned at the top, has occurred in the pipes of the tubular portion 23 The gas is sent upward together with the processing liquid L along the flow direction of the processing liquid L and reaches the connection portion 29. Therefore, problems such as the generated gas staying in the cylindrical portion 23 are unlikely to occur.

  As a specific procedure of the cleaning process, for example, a hydrogen peroxide solution is placed in the desmear treatment tank 13 instead of the treatment liquid L, and the hydrogen peroxide solution is regenerated in the same manner as when the treatment liquid L is circulated. A method of distributing to the part 19 is mentioned.

<Seventh form Thailand>
Figure 12 (A) is a plan view showing a reproduction processing unit 19 of the electrolytic regeneration apparatus 11 according to the seventh form state of the present invention, a and FIG. 12 (B) is a front view thereof, FIG. 12 (C) is It is the XIIC-XIIC line sectional view of Drawing 12 (B). 13 is a sectional view showing a reproduction processing unit 19 in the seventh form state.

The reproduction processing unit 19 in the seventh form state, the pipes of the tubular portion 23 has an opening at one end of the extending direction, the other end of the extending direction is closed. In addition, the cathode 25 in the regeneration processing unit 19 is inserted into the pipe from the base 26 attached to the end of each pipe of the cylindrical part 23 and the opening of the pipe, and extends from the base 26 in the pipe extending direction. And a wiring connection portion 24 extending from the outer surface of the base portion 26 in a direction perpendicular to the outer surface.

  The cylindrical portion 23 of the regeneration processing unit 19 includes six pipes, and these pipes are connected in series. Each pipe of the cylindrical portion 23 has a cylindrical shape. Each pipe of the cylindrical part 23 includes a cylindrical pipe main body part 23a that occupies most of the pipe in the longitudinal direction (extending direction), a flange part 23c provided at one end in the longitudinal direction of the pipe, and the flange. A reduced diameter portion 23b that connects between the portion 23c and the tube main body portion 23a is included.

  The other end 23e in the longitudinal direction of each pipe of the tubular portion 23, that is, the end portion 23e of the tube main body portion 23a is not opened but is closed. The flange portion 23c is an annular portion that spreads outward in the radial direction so as to surround the opening of the pipe. The reduced diameter portion 23b plays a role of making the inner diameter and outer diameter of the pipe smaller than the pipe main body portion 23a in the vicinity of one end of the pipe. Thereby, since the outer diameter of the flange part 23c can be made small, piping can be formed compactly, and since the opening diameter of an opening part can be made small, the effect which prevents a liquid leak can be heightened. .

A connection portion 27 extending downward from the lower surface of the tube main body portion 23a is provided at a portion on the other end 23e side of the first pipe 231 located at the lowermost portion. The connecting portion 27, similarly on purpose form described above, the downstream end 15b of the feed-side conduit 15 is connected. A flange portion 27a is provided at the distal end of the connection portion 27, and is disposed opposite to a flange portion (not shown) provided at the downstream end portion 15b of the feed side conduit 15, and is connected to each other by bolts and nuts (not shown). Is done. The downstream part of the first pipe 231 is connected to the upstream part (the part on the other end 23 e side of the second pipe 232) of the second pipe 232 located in the upper part by the connecting pipe 35.

  The second pipe 232 and the third pipe 233 located above the second pipe 232 are connected to the downstream part of the second pipe 232 and the upstream part of the third pipe 233 (the third pipe 233 of the third pipe 233 by the same connecting pipe 35 as described above. The other end 23e side) is connected. Thereafter, adjacent pipes are similarly connected.

A connection portion 29 extending upward from the upper surface of the tube main body portion 23a is provided at a downstream portion of the uppermost sixth pipe 236. The connecting portion 29, similarly on purpose form described above, the upstream end 17a of the return-side line 17 is connected. Similarly to the connection portion 27, the connection portion 29 is provided with a flange portion 29 a.

  Each pipe of the cylindrical portion 23 is made of a conductive material, and the inner peripheral surface 31 functions as an anode. Examples of the material having conductivity include metals such as stainless steel and copper, but are not limited thereto, and may be other metals or conductive materials other than metals. Examples of the stainless steel include SUS316 having excellent chemical resistance such as alkali resistance.

  As shown in FIG. 13, the base portion 26 of the cathode 25 is attached to the flange portion 23c of the pipe and closes the opening of the pipe. The extending portion 28 extends from the base portion 26 along the direction in which the tube main body portion 23a extends. The wiring connection unit 24 is connected to the wiring of the rectifier 21. The base part 26, the extension part 28, and the wiring connection part 24 are integrally formed.

  The base portion 26 has a disk shape having an outer diameter comparable to that of the flange portion 23c of the pipe. The base portion 26 is disposed to face the flange portion 23 c via a disk-shaped insulating packing 99 having an outer diameter comparable to that of the base portion 26.

  A plurality of screw insertion holes 26a are formed in the base portion 26 along the circumferential direction. A plurality of screw insertion holes 23 d are formed in the flange portion 23 c at positions corresponding to the screw insertion holes 26 a of the base portion 26. A cylindrical insulating sleeve 95 is inserted into the screw insertion holes 26a and 23d in a state where the positions of the screw insertion holes 26a and 23d are aligned. Bolts 93 are inserted into the respective insulating sleeves 95, and nuts 97 are screwed onto the tip portions thereof.

  An annular insulating washer 90 and a washer 93a are interposed between the bolt 93 and the base portion 26. An annular insulating washer 96 and a washer 97a are interposed between the nut 97 and the flange portion 23c. Thus, the opening of the pipe is closed in a liquid-tight state by the base 26 and the insulating packing 99. As a material constituting each insulating member, for example, an insulating material can be used, and examples thereof include synthetic resin and synthetic rubber. Examples of the synthetic resin include polytetrafluoroethylene.

  The extending portion 28 extends from the inner surface of the base portion 26 in a direction orthogonal to the inner surface. The extending portion 28 is disposed so as to pass through substantially the center of the tube main body portion 23a, and is separated from the inner peripheral surface 31 of the pipe. The extending portion 28 extends to a position beyond the center in the longitudinal direction of the tube main body portion 23a. The extending part 28 extends to the vicinity of the other end 23e of the pipe. The extending portion 28 has a bar shape, a plate shape, or the like.

  An insulating member 94 is attached to the extending portion 28 in order to prevent contact between the extending portion 28 and the inner peripheral surface 31 of the pipe. The insulating member 94 extends in a direction from the extending portion 28 toward the inner peripheral surface 31 of the pipe. In the case where the extending portion 28 is long, the extending portion 28 is easily deformed due to gravity, pressure caused by the flow of the processing liquid L, and the like. An insulating member 94 is preferably provided.

  The insulating member 94 extends from the distal end portion 28a of the extending portion 28 to the radially outer side of the tube main body portion 23a. As the shape of the insulating member 94, a shape extending in a rod shape on both sides from the extending portion 28 toward the inner peripheral surface 31 of the tube main body portion 23a, and a radial shape from the extending portion 28 toward the inner peripheral surface 31 of the tube main body portion 23a. Examples thereof include a shape extending in a cross shape (for example, a cross shape), a disk shape, and the like, but a rod shape or a radial shape is preferable in terms of facilitating the flow of the treatment liquid L in the tube main body 23a.

In the seventh form state, it is provided with the insulating member 94 to the distal end portion of the extending portion 28, the insulating member 94 may not necessarily be provided at the distal end portion of the extending portion 28. Note that, when the long extension portion 28 is bent and deformed, the position of the tip portion of the extension portion 28 changes most greatly. Therefore, in this embodiment, the insulating member 53 is provided at the tip portion of the extension portion 28. ing.

Reproduction processing section 19 of the seventh form state, by a plurality of pipes are connected in series as described above, has a zigzag shape (meandering shape) as shown in FIG. 12 (B), as a whole One flow path is formed. The regeneration processing unit 19 is supported by the support member in the posture shown in FIG. The support member includes a plate-like base member 91 and a pair of upright portions 92 and 92 extending upward from both sides of the base member 91. One standing part 92 is formed with six insertion holes (not shown) through which each pipe is inserted and supported, and the other standing part 92 is provided with an illustration (not shown) through which each pipe is inserted and supported. Six insertion holes are formed. The base member 91 has through holes 98 for inserting bolts at the four corners, and is fixed to desired locations in the apparatus by bolts (not shown).

Further, in the seventh form state, the pipes of the tubular portion 23 has its longitudinal direction is arranged so as to slightly inclined with respect to the horizontal direction. Specifically, in FIG. 12B, the first pipe 231 is positioned above the downstream part to which the connecting pipe 35 is connected rather than the upstream part in which the connection part 27 is provided. (In FIG. 12B, it is inclined obliquely upward to the left). In the second pipe 232, the downstream portion is positioned higher than the upstream portion (inclined obliquely upward to the right in FIG. 12B). Similarly, in the third to sixth pipes 233 to 236, the downstream portion is positioned higher than the upstream portion.

  The inclination angle of each pipe of the tubular portion 23, that is, the angle θ formed by the longitudinal direction (extension direction) of the pipe with respect to the horizontal direction is 3 degrees in the embodiment shown in FIG. Is not to be done. As the angle θ is increased, there is an advantage that the gas in the pipe is easily moved to the downstream side. On the other hand, there is an advantage that the smaller the angle θ, the more compact the vertical size of the reproduction processing unit 19 can be.

  In the form shown in FIG. 12B, in the tubular portion 23, the angle formed between adjacent pipes, that is, the angle formed between the longitudinal directions of the pipes is 6 degrees, but is not limited thereto. . When priority is given to making the regeneration processing unit 19 compact, adjacent pipes are arranged in parallel to each other, or the angle formed by each other is about several degrees (for example, greater than 0 degrees and less than 10 degrees). As described above, it is preferable that the other pipe is inclined with respect to the one pipe. On the other hand, in the case where priority is given to the gas in the cylindrical portion 23 being easily moved to the downstream side, specifically, for example, 10 degrees or more 90 degrees so that the angle between the adjacent pipes becomes an acute angle. It is preferable that the other pipe is inclined with respect to one pipe so as to be less than the degree.

In the seventh form state, illustrating a case where placed at the bottom of the first pipe, as shown in FIG. 12 (B), it is uppermost in place a sixth pipe (installed reproduction processing unit 19 in the vertical direction) However, it is not limited to this. For example, the regeneration processing unit 19 may be disposed horizontally so that each pipe has the same height, or the regeneration processing unit 19 may be disposed so as to be inclined with respect to the horizontal direction.

Further, in the seventh form state, the pipes of the tubular portion 23 has an opening at one end, but the other end is closed, may have an opening at both ends.

<Outline of Embodiment>
As described above, in the embodiment, the downstream end 15 b of the feed side conduit 15 is connected to the pipe 23 as a cylindrical portion in the regeneration processing unit 19. Therefore, the treatment liquid L discharged from the desmear treatment tank 13 flows directly into the pipe 23 through the feed side conduit 15. Then, the processing liquid L that has flowed into the pipe 23 is electrolyzed and regenerated while being fed through the gap between the inner peripheral surface 31 of the pipe 23 and the cathode 25. The treatment liquid L that has been regenerated and discharged from the regeneration processing unit 19 is guided to the desmear treatment tank 13 through the return side conduit 17.

  Therefore, in the embodiment, since the electrolytic regeneration tank as in the prior art is not required, the electrolytic regeneration processing apparatus can be reduced in size, and the installation area of the apparatus can be reduced. In addition, the amount of bath can be reduced.

  Further, when an electrolytic regeneration tank is used as in the prior art, the amount of bath in the electrolytic regeneration tank is large, and the flow rate of the processing liquid L flowing around the cathode and the anode is small. Therefore, the treatment liquid around the cathode and the anode is not sufficiently replaced, and electrolysis is not efficiently performed. On the other hand, in the above embodiment, the treatment liquid L discharged from the desmear treatment tank 13 directly flows into the pipe 23 through the feed side conduit 15 and is fed through the gap between the inner peripheral surface 31 of the pipe 23 and the cathode 25. . That is, in the embodiment, since the processing liquid L flows along the cathode 25 and the anode 31, the processing liquid L around the cathode 25 and the anode 31 is efficiently replaced and electrolyzed efficiently.

  In the above embodiment, the processing liquid L directly flows into the pipe 23 from the feed side conduit 15 and the processing liquid L flows through the gap (flow path) between the pipe 23 and the cathode 25, and thus flows through the flow path. The flow rate of the processing liquid L can be increased. Further, the processing liquid L flows along the longitudinal direction of the cathode 25. Thereby, the sludge produced | generated on the surface of the cathode 25 becomes easy to be pushed away by the flow of the process liquid L compared with the past. This makes it difficult for sludge to accumulate on the cathode 25. The sludge swept away from the surface of the cathode 25 is captured by the filter 43 described above. Therefore, the apparatus can be stably operated over a long period only by periodically replacing the filter 43.

  In the embodiment, the maintenance of the electrode is easy. For example, by providing valves and the like on the upstream side and downstream side of the piping and closing these valves, the piping and the cathode can be removed from the apparatus. Then, it is possible to easily replace the removed pipe and cathode with another one or remove sludge adhering to the cathode.

Further, in the first form state, the first pipe 231, the second pipe 232 and the third pipe 233, the treatment liquid L forms one flow path flows. The pipes 23 are arranged in parallel. Therefore, this first form state, as compared with the case of forming the first pipe 231, the second pipe 232 and the length of the flow path which is the sum of each flow path length of the third pipe 233 by one pipe, The length in the extending direction of the pipe can be reduced while maintaining the efficiency of the electrolytic regeneration treatment at the same level.

Further, in the modified example of the first form state, the first pipe 231, the second pipe 232 and the third pipe 233 forms a single flow path, and also downstream of the pipe 23 from the upstream side of the pipe 23 It is arranged above. Therefore, the gas generated by the electrolysis of the processing liquid L in the regeneration processing unit 19 rises in the regeneration processing unit 19 while moving along the flow of the processing liquid L without countering the flow direction of the processing liquid L. Can do. As a result, the gas generated by electrolysis smoothly moves to the downstream side of the regeneration processing unit 19 along the flow of the processing liquid L, so that it is suppressed from staying in the regeneration processing unit 19.

In the second form state, the processing liquid L before concentration is high electrolytic regeneration of permanganate, the first pipe 231, it is possible to flow respectively to the second pipe 232 and the third pipe 233, the first pipe 231, the second pipe 232 and the third pipe 233 as compared with the first shape state which forms one channel, it is possible to improve the efficiency of electrolytic regeneration.

Further, a modification of the first form state, in the sixth form state and seventh form condition, the cylindrical portion includes a first pipe having an inner peripheral surface serving as an anode, an inner peripheral surface serving as an anode A first cathode that extends along an extending direction of the first pipe in a state of being separated from an inner peripheral surface of the first pipe, the cathode being disposed in the first pipe. A second cathode disposed in the second pipe and extending along the extending direction of the second pipe in a state of being separated from the inner peripheral surface of the second pipe, and downstream of the feed-side conduit The side end is connected to the upstream end of the first pipe, the downstream end of the first pipe is connected to the upstream end of the second pipe, and the second pipe The extending direction is disposed in an inclined state with respect to the first pipe so that the extending direction forms an acute angle with the extending direction of the first pipe. That.

  In these configurations, since the downstream end of the first pipe is connected to the upstream end of the second pipe, the first pipe and the second pipe have a single flow path through which the processing liquid flows. Forming. That is, the one flow path has the upstream end of the first pipe to which the downstream end of the feed side conduit is connected as the inlet of the processing liquid, the downstream end of the first pipe, and the upstream of the second pipe. It is a flow path through which the processing liquid flows in the order of the side end and the downstream end of the second pipe. And the 2nd piping is arrange | positioned in the state inclined with respect to the 1st piping so that the extending direction may make an acute angle with the extending direction of the 1st piping. Therefore, in this configuration, the electrolytic regeneration treatment is performed as compared with the case where the linear flow path having a length obtained by adding the flow path length of the first pipe and the second pipe is formed by one pipe. The length in the extending direction of the pipe can be reduced while maintaining the efficiency of the same.

Further, a modification of the first form state, in the sixth form state and seventh form state, the second pipe, the is disposed above the first pipe, the first pipe, the downstream end The second pipe is inclined with respect to the horizontal direction so that the downstream end is higher than the upstream end. doing.

  In these configurations, since the second pipe on the downstream side is disposed above the first pipe on the upstream side, the gas generated when the processing liquid is electrolyzed in the regeneration processing section flows through the processing liquid. It is possible to ascend the regeneration processing unit while moving along the flow of the processing liquid without countering the direction. As a result, the gas generated by electrolysis smoothly moves to the downstream side of the regeneration processing unit along the flow of the processing liquid, and therefore, the gas is prevented from staying in the regeneration processing unit. In addition, in this configuration, since each pipe is inclined with respect to the horizontal direction as described above, the gas can easily move more smoothly in each pipe toward the downstream side.

In the third form condition, the cylindrical portion includes a first downstream pipe having an inner peripheral surface serving as a first upstream pipe and the anode having an inner peripheral surface serving as an anode are connected in series A first piping block; and a second piping block in which an upstream second piping having an inner peripheral surface functioning as an anode and a downstream second piping having an inner peripheral surface functioning as an anode are connected in series. The cathode is disposed in the upstream first piping and extends upstream along the extending direction of the upstream first piping in a state of being separated from the inner peripheral surface of the upstream first piping. A cathode, and a downstream first cathode disposed in the downstream first pipe and extending along an extending direction of the downstream first pipe in a state of being separated from an inner peripheral surface of the downstream first pipe. , Arranged in the upstream second piping, and the upstream second wiring An upstream second cathode that extends along the extending direction of the upstream second pipe in a state of being separated from the inner peripheral surface of the upstream second pipe, and the downstream second pipe, A downstream second cathode extending along the extending direction of the downstream second pipe in a state of being separated from the peripheral surface, and the processing liquid flowing through the feed side conduit is at an upstream end of the first piping block And the upstream end of the second piping block, and the treatment liquid is discharged from the downstream end of the first piping block and the downstream end of the second piping block to the return side conduit. As described above, the first piping block and the second piping block are connected in parallel.

  In these configurations, the upstream pipe and the downstream pipe are connected in series, so that the flow path length is increased compared to the case of a single pipe only (upstream pipe only or downstream pipe only). A piping block with enhanced regeneration capacity is used. And a regeneration processing part is constructed | assembled using the said piping block of the number according to the required electrolytic regeneration processing capability. At that time, the first piping block and the second piping block are such that the processing liquid flowing through the feed side conduit is led to the upstream end of the first piping block and the upstream end of the second piping block, respectively. Connected in parallel. Therefore, the treatment liquid before the electrolytic regeneration treatment, that is, the treatment liquid having a high manganate concentration can be caused to flow into the first piping block and the second piping block, respectively. Therefore, the efficiency of the electrolytic regeneration process can be improved as compared with the configuration in which the first piping block and the second piping block are connected in series to form one flow path.

  Further, by preparing in advance a plurality of piping blocks in which upstream piping and downstream piping are connected in series, the first piping block and the second piping block are constructed as described above when constructing the regeneration processing unit. Can be connected in parallel, so that workability can be improved.

  Further, in this configuration, when a pump for liquid feeding is provided, the processing liquid can be caused to flow into the first piping block and the second piping block only by providing one pump on the feeding side conduit or the return side conduit. Moreover, when providing a filter, the process liquid which passed the 1st piping block and the 2nd piping block can be filtered only by providing one filter in a return side conduit | pipe. Therefore, the number of parts can be reduced.

In the third form state, the downstream first piping, with its extending direction is tilted with respect to the upstream-side first pipe so as to form an extension direction an acute angle of the first upstream pipe The downstream second piping is disposed in an inclined state with respect to the upstream second piping so that the extending direction forms an acute angle with the extending direction of the upstream second piping. Has been.

  In this configuration, the downstream first pipe is inclined with respect to the upstream first pipe in the first block as described above, and the downstream second pipe is connected to the upstream second pipe in the second block. As described above, they are inclined. That is, since two pipes are arranged in a V shape in the first block and two pipes are arranged in a V shape in the second block, a linear flow channel having a length obtained by adding the two pipes together Compared with the case of forming a single pipe, the length in the extending direction of the pipe can be reduced and made compact while maintaining the efficiency of the electrolytic regeneration treatment at the same level.

In the third form status, and the first first valve capable regulating the flow of the treatment liquid to the pipe block, and the second second valve capable regulating the flow of the treatment liquid to the pipe block, Is further provided.

  In this configuration, for example, when the maintenance of the first piping block is performed, the first valve is closed to restrict the inflow of the processing liquid into the first piping block, so that each pipe and each cathode of the first piping block are controlled. Maintenance can be performed. In addition, during the maintenance of the first piping block, the flow of the processing liquid into the first piping block is restricted, so that the second piping block can be used for the electrolytic regeneration process.

Further, in the seventh form condition, the tubular portion has an opening at one end of the extending direction, wherein are extending direction of the other end is closed, said cathode, said of the tubular portion It is the structure including the base part attached to one end, and the extension part inserted in the said cylindrical part from the said opening part, and extending along the extending direction of the said cylindrical part from the said base part.

  In this configuration, an opening is provided at one end of the cylindrical portion, and the other end is closed. Therefore, when the cathode is attached to the cylindrical portion, the extension portion of the cathode is inserted into the cylindrical portion from the opening of the cylindrical portion, and the base portion of the cathode is attached to one end of the cylindrical portion, thereby extending the extension portion. Can be positioned at a desired position in the cylindrical portion. In other words, since the cathode needs to be attached only at one end of the cylindrical portion, the cathode can be easily attached to or exchanged with the cylindrical portion as compared with the case where openings are provided at both ends of the cylindrical portion. become. Moreover, since the attachment site | part of the cathode with respect to a cylindrical part is only one end of a cylindrical part, compared with the case where an opening part is provided in the both ends of a cylindrical part and the attachment site | part with respect to a cylindrical part exists in both ends, The possibility of leakage from the liquid can be further reduced.

In the fifth form state, the reproduction processing section further includes a electrically connected to auxiliary anode and the tubular portion while being disposed in the cylindrical portion, the auxiliary anode, while spaced apart from the cathode Opposing to the cathode.

  In this configuration, since the regeneration processing unit further includes an auxiliary anode, the area of the anode is increased as compared with the case where the portion functioning as the anode is only the inner peripheral surface of the cylindrical portion. Thereby, since the energization amount to a regeneration process part can be increased, the capability of an electrolytic regeneration process can be improved.

In the fifth form state, the auxiliary anode has a cylindrical shape extending along the cathode so as to surround the periphery of the cathode, and has a plurality of through-holes.

  In this configuration, since the auxiliary anode has a plurality of through holes, even if the auxiliary anode is disposed in the cylindrical portion so as to surround the cathode, the treatment liquid is passed through the plurality of through holes in the cylindrical portion. It also reaches the inner surface. Therefore, the inner peripheral surface of the cylindrical portion still functions as an anode. Since the auxiliary anode has a cylindrical shape extending along the cathode so as to surround the cathode, the surface area of the anode can be effectively increased around the cathode.

And in the seventh form state, the attached to the cathode in order to prevent contact between the cathode and the inner circumferential surface of the cylindrical portion, further comprising an insulating member towards the inner peripheral surface of the tubular portion from said cathode ing.

  In this configuration, since the insulating member is attached to the cathode, even if the cathode is bent and deformed, for example, the cathode moves in a direction approaching the inner peripheral surface of the cylindrical portion, the cathode is cylindrical. The insulating member contacts the inner peripheral surface of the tubular portion before contacting the inner peripheral surface of the portion. Thereby, contact with a cathode and the internal peripheral surface of a cylindrical part can be prevented.

In the fourth form state, further comprising a temperature adjusting unit for adjusting the temperature of the tubular portion.

  In this configuration, even when heat is generated during the electrolytic regeneration process in the regeneration processing unit, it is possible to suppress an increase in the temperature of the processing liquid, so that the quality of the processing liquid is reduced due to an increase in the temperature of the processing liquid. It is possible to suppress the occurrence of defects, and it is possible to suppress the occurrence of defects in the apparatus due to the temperature rise of the processing liquid. Further, when the temperature adjusting unit includes not only a cooling unit that cools the cylindrical part but also a heating unit, the temperature of the processing liquid can be managed more precisely.

In the sixth form state, further comprising a gas discharge valve for discharging the gas generated in the reproduction processing unit.

  In this configuration, gas generated by electrolyzing the processing liquid in the regeneration processing unit can be discharged out of the apparatus through the gas discharge valve.

<Other forms of state>
As mentioned above, although the electrolytic regeneration processing apparatus was demonstrated, this invention is not limited to the said embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the meaning. For example, in the embodiment, the case where a permanganate solution is used as the treatment liquid has been described as an example, but the present invention is not limited to this.

  Moreover, although the said embodiment gave and demonstrated as an example the case where cylindrical piping was used as a cylindrical part in a reproduction | regeneration processing part, it is not limited to this. The cylindrical portion may be, for example, a prismatic shape, a truncated cone shape, a truncated pyramid shape, a barrel shape, a U-shaped tube shape, or the like.

  Moreover, although the said embodiment demonstrated and demonstrated the case where the reproduction | regeneration processing part had three piping, 1st piping, 2nd piping, and 3rd piping, the number of piping is 1 or 2 Or four or more.

Further, in the second shape condition it has been described an example in which one feed-side conduit connected to the desmear treatment tank is connected by branches to the pipes on the way, but not limited thereto. For example, a plurality of feed side conduits may be connected to the desmear treatment tank, and each feed side conduit may be connected to a corresponding pipe. Specifically, for example, three feed-side conduits 15 are connected to the side surface of the desmear treatment tank 13, and the downstream end 15b of one of the feed-side conduits 15 is the upstream side of the first pipe 231. The downstream end 15b of the other feed side conduit 15 is connected to the upstream end of the second pipe 232, and the downstream end 15b of the remaining one feed pipe 15 is the third pipe 233. The structure connected to the upstream edge part may be sufficient. In this case, three return side conduits 17 may be provided similarly.

Wherein in the fifth form state, the auxiliary anode 51 is a case has been exemplified a cylindrical shape to cover the entire circumference of the extending portion 28 of the cathode 25 is not limited to this. The auxiliary anode 51 may be configured to face only a part of the extended portion 28 instead of the entire circumference of the extended portion 28 of the cathode 25. Moreover, although the case where the auxiliary anode 51 is inscribed in the inner peripheral surface 31 of piping was illustrated, it is not limited to this. The auxiliary anode 51 is not necessarily inscribed as long as other means for electrically connecting the auxiliary anode 51 to the inner peripheral surface 31 of the pipe are provided. For example, the auxiliary anode 51 is close to the inner peripheral surface 31 of the pipe. Or may be disposed near the center between the inner peripheral surface 31 of the pipe and the cathode 25.

Further, in the fifth form state, a case has been exemplified an auxiliary anode in order to increase the surface area of the anode, it is also possible to increase the anode surface area by providing a plurality of irregularities on the inner peripheral surface of, for example, the anode pipe. An auxiliary anode having a plurality of irregularities on the surface may be used.

Further, in the seventh form state, although the base portion 26 and the extending portion 28 and the wiring connection part 27 has been illustrated cathode 25 are integrally molded, but is not limited thereto. For example, the base part 26 and the extension part 28 may be formed separately. Further, when the base portion 26 is formed of an insulating material, the above-described insulating packing 59 can be omitted.

Below, we described reference example.

[ Reference example]
Electrolytic regeneration treatment was performed under the conditions shown in Reference Examples 1 to 15 and Comparative Examples 1 and 2 in Tables 1 to 3. As the aqueous solution used for this electrolytic regeneration treatment, the following was used. In each test, the temperature of the aqueous solution was 75 ° C.

(Components in aqueous solution)
Sodium permanganate: 25 g / liter Sodium manganate: 15 g / liter Sodium hydroxide: 80 g / liter In the electrolytic regeneration treatment of Reference Examples 1 to 15, the electrolytic regeneration treatment apparatus 11 shown in FIGS. 1 and 2 was used. .

  In the electrolytic regeneration treatment of Comparative Examples 1 and 2, the aqueous solution was stored in an electrolytic regeneration tank as shown in FIG. 1 of Patent Document 1 (Patent No. 3301341), and the anode and cathode were immersed in the aqueous solution. Was used. In Comparative Examples 1 and 2, a feed-side conduit for supplying the aqueous solution to the electrolytic regeneration tank is connected to one side surface of the electrolytic regeneration tank, and a return-side conduit for returning the aqueous solution discharged from the electrolytic regeneration tank to the desmear treatment tank. , And connected to the side facing the one side.

The amount of liquid in the electrolytic regeneration treatment apparatus in each table means the amount of aqueous solution present in the regeneration treatment section 19, the feed side conduit 15 and the return side conduit 17 in Reference Examples 1 to 15, and is a comparative example. 1 and 2 mean the amount of the aqueous solution present in the electrolytic regeneration tank, the feed side conduit and the return side conduit.

  The electrode pair a in each table means the inner peripheral surface (anode) 31 of the first pipe 231 and the cathode 25 arranged in the first pipe 231 shown in FIG. Means the inner peripheral surface (anode) 31 of the second pipe 232 and the cathode 25 disposed in the second pipe 232, and the electrode pair c is the inner peripheral surface (anode) 31 of the third pipe 233. And the cathode 25 disposed in the third pipe 233.

The electrode passage flow rate in each table is the distance (mm / second) that the aqueous solution travels in one second in the vicinity of the cathode and the anode, and is a value calculated as follows. When the cross-sectional area of the flow path through which the aqueous solution passes is Amm ² and the pump flow rate is BmL / second in the regeneration processing unit, the electrode passage flow rate is expressed by the following equation.

Electrode passage flow velocity (mm / sec) = B × 1000 ÷ A
In Reference Examples 1 to 15, the cross-sectional area A of the flow path is the area of the gap between the pipe 23 and the cathode 25 in the cross section perpendicular to the longitudinal direction of the pipe 23. In Comparative Examples 1 and 2, the area of the aqueous solution in the cross section parallel to the one side surface of the electrolytic regeneration tank to which the feed side conduit was connected was defined as the cross sectional area A of the flow path.

  The regeneration rate (g / AH) of sodium permanganate in each table is a value obtained by dividing the regeneration amount per one hour of treatment time by the amount of current used (A). The sodium permanganate regeneration amount (g) represents the regeneration amount per 1 hour of the treatment time. The sodium permanganate regeneration amount (g / liter) is a value obtained by further dividing the regeneration amount per 1 hour of the treatment time by the total liquid amount.

  The sludge amount in the table indicates the amount of sludge accumulated in the regeneration processing unit 19 after the processing time of 5 hours has elapsed.

各試験の結果を表１〜３に示す。

The results of each test are shown in Tables 1-3.

In Reference Examples 1 to 15 in which the regeneration processing unit 19 directly flows the aqueous solution into the pipe 231, the flow rate of the pump 41 is changed because the cross-sectional area A of the flow path through which the aqueous solution flows in the regeneration processing unit 19 is small. Thus, as shown in Tables 1 to 3, the electrode flow velocity can be adjusted in a wide range of, for example, 1 mm / second to 300 mm / second.

On the other hand, in the case of the configuration in which the cathode and the anode are immersed in the electrolytic regeneration tank as in Comparative Examples 1 and 2, since the cross-sectional area A of the flow path becomes large, the electrode passage flow rate is in a wide range as in the reference example. It is difficult to adjust. Therefore, in the case of the configurations as in Comparative Examples 1 and 2, it is difficult to increase the electrode passage flow rate to 5 mm / second or more or 25 mm / second or more.

As shown in Table 3, in Comparative Examples 1 and 2, the regeneration processing unit is configured by the electrolytic regeneration tank in which the aqueous solution is stored, and the cathode and the anode immersed in the aqueous solution. The amount of liquid is 1.5 times the amount of liquid in the desmear treatment tank. On the other hand, in Reference Examples 1 to 15, since the aqueous solution is directly flowed into the pipe 231 of the regeneration processing unit 19, the amount of liquid in the regeneration processing unit 19 is 1/10 of the amount of liquid in the desmear treatment tank.

In Reference Example 1, the sludge amount is 1.0 g, while in Comparative Examples 1 and 2, the sludge amount is a large value of 3.2 g. The reason for this is that in Reference Example 1, the electrode passage flow rate is 5 mm / second, while in Comparative Examples 1 and 2, the electrode passage flow rate is as small as 2 mm / second, so that sludge easily accumulates on the cathode. It is believed that there is.

In Reference Examples 2 to 14, since the electrode passage flow velocity is set to a large value of 25 mm / second or more, the sludge amount is reduced to a smaller value. In particular, when the electrode passage flow rate is 100 mm / second or more, sludge is hardly accumulated on the cathode.

Further, in Reference Example 13, the sodium permanganate regeneration rate is slightly lowered due to the fact that the electrode passage flow rate is set to a large value of 300 mm / sec.

Further, in Reference Example 15, the electrode passage flow rate is set to 1 mm / second and is set to a value smaller than the electrode passage flow rate of Comparative Examples 1 and 2, but even in this case, the sludge amount is 2.6 g. It is smaller than 3.2 g of Comparative Examples 1 and 2. The reason is that in Reference Example 15, the aqueous solution flows along the longitudinal direction of the cathode 25 in the regeneration processing unit 19, whereas in Comparative Examples 1 and 2, the aqueous solution flows in the longitudinal direction of the cathode in the regeneration processing unit. On the other hand, it is presumed that it is related to flowing in a substantially vertical direction.

In Comparative Example 2, the anode current density is set to a large value of 30 A / dm ² . When the anode current density is increased in this way, the regeneration rate of sodium permanganate tends to decrease. On the other hand, in Reference Example 7, the anode current density is set to the same value (30 A / dm ² ) as in Comparative Example 2. In this Reference Example 7, the sodium permanganate regeneration rate was smaller than the other Reference Examples (1.21 g / A · hour), but compared with Comparative Example 2, sodium permanganate regeneration The rate of decline is kept small. From this, it can be said that in Reference Example 7, the efficiency of regenerating sodium permanganate is superior to Comparative Example 2.

  Further, in Comparative Examples 1 and 2, since the electrolytic regeneration tank is used, the total liquid amount becomes large. Therefore, the amount of sodium permanganate regenerated (g / liter) is reduced, resulting in poor efficiency.

DESCRIPTION OF SYMBOLS 11 Electrolytic regeneration processing device 13 Desmear processing tank 15 Feeding side conduit 17 Return side conduit 19 Regeneration processing part 21 Rectifier 23 Piping 231 1st piping 232 2nd piping 233 3rd piping 25 Cathode 27, 29 Connection part 31 Inner peripheral surface (anode) )
35, 37 Connecting pipe 39 Seal member

Claims (7)

An electrolytic regeneration treatment device for electrolyzing and regenerating a treatment solution used for desmear treatment in a desmear treatment tank,
A cylindrical portion having an inner peripheral surface functioning as an anode, and a cathode disposed in the cylindrical portion and extending along the extending direction of the cylindrical portion in a state of being separated from the inner peripheral surface, A regeneration processing section to which the processing liquid is fed through a gap between the inner peripheral surface of the cylindrical section and the cathode;
A downstream side end connected to the cylindrical portion, and a feed side conduit for guiding the treatment liquid discharged from the desmear treatment tank to the regeneration treatment portion;
An upstream end connected to the cylindrical portion, and a return side conduit for guiding the processing liquid discharged from the regeneration processing section to the desmear processing tank,
The cylindrical portion includes a first pipe having an inner peripheral surface that functions as an anode, and a second pipe having an inner peripheral surface that functions as an anode,
The cathode is disposed in the first pipe, and extends in the extending direction of the first pipe in a state separated from the inner peripheral surface of the first pipe, and in the second pipe And a second cathode extending along the extending direction of the second pipe in a state of being separated from the inner peripheral surface of the second pipe,
The downstream end of the feed conduit is connected to the upstream end of the first pipe,
The downstream end of the first pipe is connected to the upstream end of the second pipe,
The second pipe is disposed in an inclined state with respect to the first pipe such that the extending direction forms an acute angle with the extending direction of the first pipe ,
The second pipe is disposed above the first pipe,
The first pipe is inclined with respect to the horizontal direction so that the downstream end thereof is higher than the upstream end,
The second pipe is inclined with respect to the horizontal direction so that the downstream end thereof is higher than the upstream end,
The cylindrical portion has an opening at one end in the extending direction;
The cathode includes a base attached to the one end of the cylindrical part, and an extending part that is inserted into the cylindrical part from the opening and extends along the extending direction of the cylindrical part from the base. Including
In order to prevent contact between the extension part and the inner peripheral surface of the cylindrical part when the extension part of the cathode moves in a direction approaching the inner peripheral surface of the cylindrical part, the extension part And a rod-like shape that is provided at the distal end portion of the extension portion in the flow path of the processing liquid that is formed by a gap between the extension portion and the inner peripheral surface of the cylindrical portion, and that extends from the extension portion toward the inner peripheral surface of the cylindrical portion. Or the electrolytic regeneration processing apparatus provided with the insulating member which has a radial shape . An electrolytic regeneration treatment device for electrolyzing and regenerating a treatment solution used for desmear treatment in a desmear treatment tank,
A cylindrical portion having an inner peripheral surface functioning as an anode, and a cathode disposed in the cylindrical portion and extending along the extending direction of the cylindrical portion in a state of being separated from the inner peripheral surface, A regeneration processing section to which the processing liquid is fed through a gap between the inner peripheral surface of the cylindrical section and the cathode;
A downstream side end connected to the cylindrical portion, and a feed side conduit for guiding the treatment liquid discharged from the desmear treatment tank to the regeneration treatment portion;
An upstream end connected to the cylindrical portion, and a return side conduit for guiding the processing liquid discharged from the regeneration processing section to the desmear processing tank,
The cylindrical portion includes a first pipe having an inner peripheral surface that functions as an anode, and a second pipe having an inner peripheral surface that functions as an anode,
The cathode is disposed in the first pipe, and extends in the extending direction of the first pipe in a state separated from the inner peripheral surface of the first pipe, and in the second pipe And a second cathode extending along the extending direction of the second pipe in a state of being separated from the inner peripheral surface of the second pipe,
The downstream end of the feed conduit is connected to the upstream end of the first pipe,
The downstream end of the first pipe is connected to the upstream end of the second pipe,
The second pipe is disposed in an inclined state with respect to the first pipe such that the extending direction forms an acute angle with the extending direction of the first pipe,
The second pipe is disposed above the first pipe,
The first pipe is inclined with respect to the horizontal direction so that the downstream end thereof is higher than the upstream end,
The second pipe is inclined with respect to the horizontal direction so that the downstream end thereof is higher than the upstream end,
The regeneration processing unit further includes an auxiliary anode disposed in the cylindrical part and electrically connected to the cylindrical part,
The auxiliary anode is opposed to the cathode in a state of being spaced apart from the cathode, electrolytic regeneration apparatus. A plurality of piping blocks are provided in which the first piping in which the first cathode is disposed and the second piping in which the second cathode is disposed are connected in series.
The electrolytic regeneration processing apparatus according to claim 1 or 2, wherein a plurality of the piping blocks are connected in parallel to the feed side conduit and the return side conduit. The cylindrical portion has openings at both ends in the extending direction,
The reproduction processing unit
It is arranged in the vicinity of each opening, has a cylindrical shape having a through hole through which the cathode is inserted, and is interposed between the inner peripheral surface of the cylindrical portion and the cathode, and is formed of an insulating material. The electrolytic regeneration processing apparatus according to any one of claims 1 to 3, further comprising a seal member. The electrolytic regeneration processing apparatus according to claim 2 , wherein the auxiliary anode has a cylindrical shape extending along the cathode so as to surround the cathode, and has a plurality of through holes. Further comprising a temperature adjusting unit for adjusting the temperature of the tubular portion, electrolytic regeneration apparatus according to any one of claims 1-5. Wherein and further comprising a gas discharge valve for discharging the gas generated in the reproduction processing unit, electrolytic regeneration apparatus according to any one of claims 1-6.

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